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    GE Fanuc AutomationComputer Numerical Control ProductsC Series LaserMaintenance ManualGFZ-70115EN/03April 2000

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    GFL-001Warnings, Cautions, and Notesas Used in this PublicationWarningWarning notices are used in this publication to emphasize that hazardous voltages, currents,temperatures, or other conditions that could cause personal injury exist in this equipment or maybe associated with its use.In situatio...

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    Table of ContentsB–70115EN/03c–11. OVERVIEW1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.1ORGANIZATION OF THE MANUAL2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ....

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    TABLE OF CONTENTSB–70115EN/03c–25. MAINTENANCE110. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.1DAILY INSPECTION111. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...

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    TABLE OF CONTENTSB–70115EN/03c–39. SETTING AND ADJUSTMENT232. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.1LASER POWER SUPPLY UNIT233. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.1.1Check...

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    TABLE OF CONTENTSB–70115EN/03c–410.11.1Replacing a Fan Unit300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10.11.2Replacing a Fan–assisted Radiator300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...

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    TABLE OF CONTENTSB–70115EN/03c–5D.3PARAMETERS FOR CONTOURING CONDITIONS393. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D.4PARAMETERS FOR EDGE MACHINING CONDITIONS394. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D.5PARAMETERS FOR PIERCING CONDITIONS396. ....

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    B–70115EN/031. OVERVIEW61 OVERVIEWThis manual describes the maintenance of the FANUC LASER C series,as well as the structure, configuration, and operation of the laser oscillator.This manual is aimed at those personnel responsible for laser oscillatormaintenance.

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    B–70115EN/031. OVERVIEW7This manual is organized as described below.1. OverviewThis chapter describes the organization of this manual, applicablemodels, related manuals, and notes on reading this manual.2. SafetyThis chapter describes the handling of lasers, and provides warnings,cautions and n...

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    B–70115EN/031. OVERVIEW8This manual covers the following models :ModelsAbbreviationFANUC LASER–MODEL C1500BC1500BFANUC LASER–MODEL C2000BC2000BFANUC LASER–MODEL C2000CC2000CFANUC LASER–MODEL C3000CC3000CFANUC LASER–MODEL C3000DC3000DFANUC LASER–MODEL C4000AC4000AFANUC LASER–MODEL ...

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    B–70115EN/031. OVERVIEW9The following manuals are available for the FANUC LASER C series :FANUC Series 0–LDESCRIPTIONSB–61572ECONNECTION MANUALB–61573EOPERATOR’S MANUALB–61574EMAINTENANCE MANUAL B–61575EFANUC Series 16–LADESCRIPTIONSB–61852ECONNECTION MANUALB–61853EOPERATOR’...

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    B–70115EN/031. OVERVIEW10In this manual, the words Warning and Caution, corresponding todifferent levels of safety requirements, are provided to ensure the user’ssafety and protect against damage to the laser oscillator.Moreover, sections entitled Note are used to provide supplementaryinforma...

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    B–70115EN/032. SAFETY112 SAFETYC1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000Bproduce the rated output laser power of 1500W, 2000W, 3000W, 4000W,6000W. The CO2 laser beam is the wavelength of 10.6 mm, far infrared,and is invisible to human eyes. The adequate care must be taken whenCO2 ...

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    B–70115EN/032. SAFETY121) Potential hazardsLaser oscillator emits CO2 laser beam(10.6 mm), which is high powerand invisible.D Being directly exposed to the CO2 laser beam could severely burnyou.D The CO2 laser beam could be scattered by your workpiece and burnyour eyes or skin.FANUC LASER C ser...

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    B–70115EN/032. SAFETY13Fig. 2.1 (c) is the position of panel that laser beam exposure isoccurred without panel in C6000B, when you maintainthe oscillator.Fig. 2.1 (d) is the beam path in the cabinet of C1500B, C2000B,C2000C.Fig. 2.1 (e) is the beam path in the cabinet of C3000C, C3000D.Fig. 2.1...

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    B–70115EN/032. SAFETY14Fig. 2.1 (c) The position of panel that laser beam exposure is occurred without panel in C6000B.Fig. 2.1 (d) The beam path in the cabinet of C1500B, C2000B, C2000C.

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    B–70115EN/032. SAFETY15Fig. 2.1 (e) The beam path in the cabinet of C3000C, C3000D.Fig. 2.1 (f) The beam path in the cabinet of C4000A.

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    B–70115EN/032. SAFETY16Fig. 2.1 (g) The beam path in the cabinet of C6000B.

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    B–70115EN/032. SAFETY171) Potential hazardsThere is RF voltage of 3 to 4kVo–p in the cabinet of the laser oscillator.There is 200 VAC power in the relay panel, be careful not to touch thehigh voltage.2) Safety recommendationsWhen it checks the oscillator and exchange the unit, intercept a mai...

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    B–70115EN/032. SAFETY18Front sideBack sideFig. 2.2. (a) The position of high voltage in C1500B (Front side, Back side)

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    B–70115EN/032. SAFETY19Front sideBack sideFig. 2.2. (b) The position of high voltage in C2000B (Front side, Back side)

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    B–70115EN/032. SAFETY20Back sideFront sideFig. 2.2.(c) The position of high voltage in C2000C (Front side, Back side)

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    B–70115EN/032. SAFETY21Front sideBack sideAuxiliary unitFig. 2.2.(d) The position of high voltage in C3000C(Front , Back , AUX )

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    B–70115EN/032. SAFETY22Front sideBack sideFig. 2.2.(e) The position of high voltage in C3000D(Front side, Back side)

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    B–70115EN/032. SAFETY23Front sideBack sideFig. 2.2.(f) The position of high voltage in C4000A (Front side, Back side)

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    B–70115EN/032. SAFETY24Front sideBack sideFig. 2.2.(g) The position of high voltage in C6000B (Front side, Back side)

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    B–70115EN/032. SAFETY251) Potential hazardsCO2 laser beam is delivery from oscillator. Direct or scattered beamis exposed.2) Safety recommendationsMount the safety enclosure made of acrylic resin which can absorb thelaser beam around the working environment.Mount the interlock switch on the saf...

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    B–70115EN/032. SAFETY261) Potential hazardsWhen you touch a part of high temperature, your skin burn.2) Safety recommendationsThe pipes of the gas circular system are very a high temperature. Donot touch pipes, heat exchanger and turbo blower because it does notdo the burn. It is hot immediatel...

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    B–70115EN/032. SAFETY27Front sideBack sideFig. 2.6 (a) The position of high temperature in C1500B (Front side, Back side)

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    B–70115EN/032. SAFETY28Front sideBack sideFig. 2.6 (b) The position of high temperature in C2000B (Front side, Back side)

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    B–70115EN/032. SAFETY29Front sideBack sideFig. 2.6 (c) The position of high temperature in C2000C (Front side, Back side)

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    B–70115EN/032. SAFETY30Front sideBack sideAuxiliary unitFig. 2.6 (d) The position of high temperature in C3000C (Front , Back, Aux)

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    B–70115EN/032. SAFETY31Front sideBack sideFig. 2.6 (e) The position of high temperature in C3000D (Front side, Back side)

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    B–70115EN/032. SAFETY32Front sideBack sideFig. 2.6 (f) The position of high temperature in C4000A (Front side, Back side)

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    B–70115EN/032. SAFETY33Front sideBack sideFig. 2.6 (g) The position of high temperature in C6000B (Front side, Back side)

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    B–70115EN/032. SAFETY34Fig. 2.7 (a)–(g) show the location of the warning labels indicating the highvoltage and laser beam path.Fig. 2.7 (a) is the location of the warning sticker at front side. (C1500B,C2000B, C2000C, C3000C, C3000D)Fig. 2.7 (b) is the location of the warning sticker at back ...

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    B–70115EN/032. SAFETY35Fig. 2.7 (b) The location of warning sticker at back side (C1500B, C2000B, C2000C, C3000C, C3000D)Fig. 2.7 (c) The location of the warning sticker (Auxiliary unit of C3000C)

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    B–70115EN/032. SAFETY36Fig. 2.7 (d) The location of warning sticker at front side. (C4000A)Fig. 2.7 (e) The location of warning sticker at back side. (C4000A)

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    B–70115EN/032. SAFETY37Fig. 2.7 (f) The location of warning sticker at front side. (C6000B)Fig. 2.7 (g) The location of the warning sticker at back side. (C6000B)

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    B–70115EN/032. SAFETY381) Warning logotype (C1500B)7000WD Detail of warning sticker

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    B–70115EN/032. SAFETY392) Warning logotype3) Label for defeasible non–interlocked protective housing4) Label for defeasible non–interlocked protective housing

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    B–70115EN/032. SAFETY405) Caution label for lifting6) Aperture label7) Label of non–interlocked protective panel

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    B–70115EN/032. SAFETY418) Identification label9) Address label10) High voltage warning label

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    B–70115EN/032. SAFETY4211) Supply voltage label12) Label of over–current protective

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    B–70115EN/032. SAFETY4313) Label of motor and transformer (C1500B,C2000B,C2000C)13) Label of motor and transformer (C3000C)

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    B–70115EN/032. SAFETY4413) Label of motor and transformer (C3000D)13) Label of motor and transformer (C4000A)

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    B–70115EN/032. SAFETY4513) Label of motor and transformer (C6000B)14) Label of warning light15) Maintenance label

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    B–70115EN/032. SAFETY4616) Certification label17) Short–circuit interrupting capacity of main breaker18) Caution label for lifting

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    B–70115EN/032. SAFETY47All the laser products have to comply with the various kinds of laser safetyregulations, which include the use of key control. For instance, FDAPART 1040 PERFORMANCE STANDARDS FORLIGHT–EMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: “Eachlaser system classified as a ...

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    B–70115EN/032. SAFETY48Press the emergency stop button when it is dangerous and breaks down.The oscillator is stopped discharging, gas pressure control and stand bypurge state.Use the one with the compulsion dissociation mechanism for the relayused for the emergency stop circuit and the switch ...

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    B–70115EN/033. INTERNAL STRUCTURE493 INTERNAL STRUCTURE

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    B–70115EN/033. INTERNAL STRUCTURE50Fig. 3.1 (a) to (g) show the block diagram of the laser oscillator.The FANUC LASER C series consists of a laser resonator, laser excitationpower supply, forced gas circulating system, pressure controller, exhaustcontroller, CNC interface, and a protective hous...

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    B–70115EN/033. INTERNAL STRUCTURE51Fig. 3.1 (a) Block diagram (C1500B)

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    B–70115EN/033. INTERNAL STRUCTURE52Fig. 3.1 (b) Block diagram (C2000B)

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    B–70115EN/033. INTERNAL STRUCTURE53SIGNALCABLE(TO CNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRRORFOLDINGMIRROREXHAUSTCONTROLLERHOURMETEREXHAUSTPUMPPRESSURECONTROLLERLASERPSU UNITMATCHINGBOXLASERPSU UNITMATCHINGBOXDISCHARGETUBEDISCHARGETUBEDISCHARGETUBEDISCHARGETUBEEXHAUSTGASLASERGASTURBOBLOWERINLETH/EO...

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    B–70115EN/033. INTERNAL STRUCTURE54Fig. 3.1 (d) Block diagram (C3000C)

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    B–70115EN/033. INTERNAL STRUCTURE55SIGNALCABLE(TO CNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRRORFOLDINGMIRROREXHAUSTCONTROLLERHOURMETEREXHAUSTPUMPPRESSURECONTROLLERLASERPSU UNITLASERPSU UNITMATCHINGBOXDISCHARGETUBEDISCHARGETUBEDISCHARGETUBEEXHAUSTGASLASERGASTURBOBLOWERINLETH/EOUTLETH/ETURBO PCBHFINVER...

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    B–70115EN/033. INTERNAL STRUCTURE56SIGNALCABLE(TO CNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRROREXHAUSTCONTROLLERHOURMETERPRESSURECONTROLLERLASERPSU UNITLASERPSU UNITMATCHINGBOXEXHAUSTGASLASERGASTURBOBLOWERTURBO PCBHFINVERTERDEWSENSORWATERDISTRIBUTORWATERFLOWSENSORTOPARTSFROMPARTSBEAMABSORBEROUTPUTCOU...

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    B–70115EN/033. INTERNAL STRUCTURE57SIGNALCABLE(TO CNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRRORFOLDINGMIRRORPOWERSENSORINLETH/EINLETH/ETURBO PCBINLETH/EINLETH/EGUIDELASERTO PARTSFROMPARTSFig. 3.1 (g) Block diagram (C6000B)

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    B–70115EN/033. INTERNAL STRUCTURE58The following describes the details of each component of the FANUCLASER C series. Fig. 3.2 (a) to (p) show the internal structure.(1) ResonatorThe resonator consists of an output mirror, rear mirror, foldingmirrors, discharge tubes, power sensor unit, etc. I...

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    B–70115EN/033. INTERNAL STRUCTURE59(11) Pressure control unitThis unit constantly monitors the gas pressure in the discharge tubesand supplies fresh laser gas to the gas circulating system, thusmaintaining a constant pressure in the discharge tubes. This unit alsomonitors the laser gas supply ...

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    FS16–L/ :FS16i–LB–70115EN/033. INTERNAL STRUCTURE60(19) Water distribution unitThis unit distributes cooling water, supplied from either a chiller unitor a temperature–regulated external water supply, to each unit in thelaser oscillator. For safety, the water distribution unit is equippe...

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    B–70115EN/033. INTERNAL STRUCTURE61(29) Control PCBThis PCB sends the contractor open/close signal to the powermagnetics cabinet, as directed by commands received from the CNC.It also notifies the CNC of the open/close status of the circuit breakerin the power magnetics cabinet.(30) Dew sensor ...

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    B–70115EN/033. INTERNAL STRUCTURE62Fig. 3.2 (a) C1500B internal structure (Front, Maintenance side)Fig. 3.2 (b) C1500B internal structure (Back side)

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    B–70115EN/033. INTERNAL STRUCTURE63Fig. 3.2 (c) C2000B internal structure (Front, Maintenance side)Fig. 3.2 (d) C2000B internal structure (Back side)

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    B–70115EN/033. INTERNAL STRUCTURE64Fig. 3.2 (e) C2000C internal structure (Front side)Fig. 3.2 (f) C2000C internal structure (Back side)

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    B–70115EN/033. INTERNAL STRUCTURE65Fig. 3.2 (g) C3000C internal structure (Front side)Fig. 3.2 (h) C3000C internal structure (Back side)

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    B–70115EN/033. INTERNAL STRUCTURE66Fig. 3.2 (i) C3000C internal structure (Auxiliary machine section)

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    B–70115EN/033. INTERNAL STRUCTURE67Fig. 3.2 (j) C3000D internal structure (Front side)Fig. 3.2 (k) C3000D internal structure (Back side)

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    B–70115EN/033. INTERNAL STRUCTURE68Fig. 3.2 (l) C4000A internal structure (Front side)Fig. 3.2 (m) C4000A internal structure (Back side)

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    B–70115EN/033. INTERNAL STRUCTURE69Fig. 3.2 (n) C6000B internal structure (Front side)Fig. 3.2 (o) C6000B internal structure (Back side)

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    B–70115EN/033. INTERNAL STRUCTURE70Fig. 3.2 (p) Discharge tube and trigger electrode

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    B–70115EN/034. INSTALLATION714 INSTALLATION

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    B–70115EN/034. INSTALLATION72Use the following procedure to make adjustments and checks duringinstallation.(1) Check the environment at the installation location.D Environmental conditions1) Ambient temperature: +5°C to +30°C2) Temperature variation : 1.1°C/minute maximum3) Humidity: 75% or ...

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    B–70115EN/034. INSTALLATION73Fig. 4.1 (a) Clamp layout (C1500B, C2000B, C2000C, C3000C, C3000D)

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    B–70115EN/034. INSTALLATION74Fig. 4.1 (b) Clamp layout (C4000A)

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    B–70115EN/034. INSTALLATION75Fig. 4.1 (c) Clamp layout (C6000B)

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    B–70115EN/034. INSTALLATION76Fig. 4.1 (d) Clamp layout (C6000B)

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    B–70115EN/034. INSTALLATION77(3) Check the units installed in the main unit cabinet.D Check items1) Check whether any printed circuit boards are loose or removed.2) Check whether any cables are damaged (such as damagedsheathing).3) Check whether any connectors are loose or detached.4) Check tha...

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    B–70115EN/034. INSTALLATION783) Laser gas composition and purity (See Section 4.4.4.2.)4) Quality of cooling water (See Section 4.4.4.1.)5) Flow of cooling water (IN, OUT)(9) Check the input power supply voltage, frequency and phasesequence.D Check items1) 200/220 VAC +10%, –15%, 50/60 Hz &qu...

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    B–70115EN/034. INSTALLATION794) Provided no water leakage is observed in step 3) above, allowcooling water to flow through the oscillator at the specified flowrate. Set the output pressure of the cooling water circulatingunit to 0.5 MPa. Then, check that there is no water leakage atthe follow...

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    B–70115EN/034. INSTALLATION802) If the laser gas flow rate is abnormal, perform adjustment asdescribed in Section 9.5.3) Reset the values of the bits of parameter No. 15025 [201]through parameter No. 15028 [203] to their original values.This completes the check.(15) Perform laser oscillation to...

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    B–70115EN/034. INSTALLATION81Prior to shipment and transportation, the packing and checking operationsdescribed below must be performed.(1) Disconnect all NC connecting cables.(2) Disconnect the power cable and ground cable of the input unit in themain unit cabinet.(3) Remove the laser gas pipe...

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    B–70115EN/034. INSTALLATION82Remove cooling water according to the procedure below.(1) Open the cooling water inlet (IN) and outlet (OUT), and leave bothopen. Cooling water will stop draining from the unit after about 10minutes.(2) Once the cooling water has stopped draining, connect a compres...

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    B–70115EN/034. INSTALLATION83Fig 4.2.2 Detail of Distributor (C4000A)(5) Next, connect the compressed air hose to the cooling water outlet(OUT). At this time, ensure that cooling water inlet is open. Removewater in the same procedure as (2), (3), and (4).(6) Once all cooling water has been re...

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    B–70115EN/034. INSTALLATION84(1) Oscillation characteristics1) Check that bit 4 of parameter No. 15000 (16–L or 16i–L) or bit 4of parameter No. 200 (0–L) is set to 1.2) Start the oscillator. When a discharge start switch is provided, donot set the switch to ON until after LRDY has been s...

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    B–70115EN/034. INSTALLATION853) Remove the maintenance panel from the oscillator so that thedischarge tubes can be checked. Set the door interlock to OFF.4) Start the oscillator. When a discharge start switch is provided, donot set this switch to ON until after LRDY has been set.5) Check that...

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    B–70115EN/034. INSTALLATION866) Upon the completion of the check, restore the parameters modifiedin step 1) to their original values.An alarm, if issued in step 5), indicates an error. Check the externallaser gas piping and laser gas composition, or perform aging.(4) Beam mode check1) Remove t...

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    B–70115EN/034. INSTALLATION87(5) External gas piping leakage check (clamp test)1) Using an approved gas pipe, connect the gas inlet of the oscillatorto the cluster piping, or to the secondary side of the regulatormounted on the gas cylinder.CAUTIONRubber hoses were once commonly used for laser ...

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    B–70115EN/034. INSTALLATION88(6) Check for leakage within the oscillatorD Negative pressure method1) On the setting screen, enable parameter rewriting.2) On the parameter screen, change the setting of parameter No.15240 (16–L, 16i–L) or parameter No. 235 (0–L) to 0.3) Set the oscillator s...

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    B–70115EN/034. INSTALLATION89D PressurizationCAUTIONThe turbo blower is not designed to withstandpressurization. So, whenever possible, do not perform aleakage check by pressurizing the turbo blower. Even wheninternal pressurization is inevitable, never apply a pressurein excess of 0.08 MPa. ...

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    B–70115EN/034. INSTALLATION90CAUTION1 If the oscillator is started with an incorrect parameter valuespecified, there is a risk of the oscillator being damaged ordestroyed. Be particularly careful when entering andchecking parameter values.2 Some parameters may require modification to, for exam...

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    B–70115EN/034. INSTALLATION912) Set the RUN key to ON to start the oscillator.3) Perform discharge by setting the HV ON switch to ON. Check thatdischarge is performed continuously.4) Then, perform internal discharge using the settings indicatedbelow. Two methods of internal discharge are supp...

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    B–70115EN/034. INSTALLATION92The oscillator has connections for cooling water piping, laser gas piping,and power and signal cables. For details of the electrical connections forthe NC and machine, refer to the corresponding connection manuals.FANUC Series 0–LCONNECTION MANUAL B–61573EFANUC...

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    B–70115EN/034. INSTALLATION93Fig. 4.4.1 (b) Water and laser gas connection (C2000C)

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    B–70115EN/034. INSTALLATION94Fig. 4.4.1 (c) Water and laser gas connection (C3000C)

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    B–70115EN/034. INSTALLATION95Fig. 4.4.1 (d) Water and laser gas connection (C3000D)Fig. 4.4.1 (e) Water and laser gas connection (C4000A)

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    B–70115EN/034. INSTALLATION96Fig. 4.4.1 (f) Water and laser gas connection (C6000B)The quality of cooling water is specified in the table below. If tap wateris used, it should be treated in an ion exchanger.Refrigerator/air–conditioner cooling water quality standard(JRA–9001–1980)pH(25°...

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    B–70115EN/034. INSTALLATION97To avoid cooling water trouble and minimize the frequency of coolingwater exchange, the following anticorrosive should be added to thecooling water. Consult the chiller manufacturer for use of theanticorrosive.Product name: CONTLIME K–6000Manufacturer: MITSUBISHI...

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    B–70115EN/034. INSTALLATION98If the chiller is used in a cold district, it should be provided with anantifreezing function. When it is extremely cold, the chiller should bekept running. If it is necessary to use an antifreezing solution for lack ofan alternative, the following antifreezing so...

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    B–70115EN/034. INSTALLATION99Supply the laser oscillator with a mixture of gases that satisfy theconditions listed below.(1) Composition ratio and accuracyCO2 : 5 "0.25%He: 40 "2.00%N2: 55 "2.75% (N2 balance)(2) Water (H2O): 5 ppm or less(3) Hydrocarbon (CnHm): 1 ppm or less(4...

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    B–70115EN/034. INSTALLATION100The laser oscillator incorporates a safety circuit. The safety circuit isenabled by using a terminal board (XT20).Figs. 4.4.3.1 (a) to (g) show the cable inlet and the point of connection.Attach the following cable to the laser oscillator. Also refer to theapplica...

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    B–70115EN/034. INSTALLATION101Fig. 4.4.3.1 (a) Cable connection of C1500BFig. 4.4.3.1 (b) Cable connection of C2000B

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    B–70115EN/034. INSTALLATION102Fig. 4.4.3.1 (c) Cable connection of C2000CFig. 4.4.3.1 (d) Cable connection of C3000C

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    B–70115EN/034. INSTALLATION103Fig. 4.4.3.1 (e) Cable connection of C3000DFig. 4.4.3.1 (f) Cable connection of C4000A

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    B–70115EN/034. INSTALLATION104Fig. 4.4.3.1 (g) Cable connection of C6000Bc) OFF interlock signals (OFI1 and OFI2)Making the power supply for the oscillator ready to be switched offturns off these signals. Connect them in parallel with an NC OFFswitch.Contact current–carrying capacity: 3 A o...

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    B–70115EN/034. INSTALLATION105b) SHL1 and SHL2These terminals are for shutter interlocking. Strapping theseterminals enables the shutter to be opened and closed.Contact current–carrying capacity: At least 1.2 A on 24 VDCWire: 1.25 mm2, 25 m or shorterc) IB1 and IB2These terminals are for s...

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    B–70115EN/034. INSTALLATION106The figure shows the safety circuit for each oscillator.Fig. 4.4.3.2 (a) Safety circuit of C1500B4.4.3.2Details of safety circuit

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    B–70115EN/034. INSTALLATION107Fig. 4.4.3.2 (b) Safety circuit of C2000B

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    B–70115EN/034. INSTALLATION108Fig. 4.4.3.2 (c) Safety circuit of C2000C

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    B–70115EN/034. INSTALLATION109Fig. 4.4.3.2 (d) Safety circuit of C3000C

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    B–70115EN/034. INSTALLATION110Fig. 4.4.3.2 (e) Safety circuit of C3000D

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    B–70115EN/034. INSTALLATION111Fig. 4.4.3.2 (f) Safety circuit of C4000A

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    B–70115EN/034. INSTALLATION112Fig. 4.4.3.2 (g) Safety circuit of C6000B

  • Page 115

    B–70115EN/034. INSTALLATION113The C3000C has an oscillator section and auxiliary machine section.Interconnection is made according to the procedure described below.(1) Power cable (CP200)This cable feeds 200 VAC to the high–frequency inverter and exhaustpump.(2) Turbo blower No. 1 power cable...

  • Page 116

    B–70115EN/034. INSTALLATION114(1) Connect gas OUT of the oscillator section to gas IN of the auxiliarymachine section, using the gas pipe provided with the oscillator.(2) Supply laser gas through gas IN of the oscillator section. Exhaust gasfrom the exhaust pump is output through gas OUT of th...

  • Page 117

    B–70115EN/035. MAINTENANCE1155 MAINTENANCEIn FANUC LASER C series, periodic inspection items have beenreduced, and adjustments have been made easy. To keep the oscillator ina satisfactory operating condition over a long period, however, it isnecessary to carry out periodic maintenance (includi...

  • Page 118

    B–70115EN/035. MAINTENANCE116Table 5.1 lists daily inspection items. Inspect the FANUC LASER Cseries according to this table. When parts (including oil) have been usedfor a prescribed period, replace them quickly.Table 5.1 Daily inspection items for FANUC LASER C seriesItemPeriodContent and ...

  • Page 119

    B–70115EN/035. MAINTENANCE117The FANUC LASER C series contains consumables that must bereplaced periodically. Table 5.2 (a), (b) lists such consumables and therelated periodic maintenance work. Perform periodic maintenance aswell as daily inspection described in Section 5.1 by using the liste...

  • Page 120

    B–70115EN/035. MAINTENANCE118Table 5.2 (b) Periodic maintenance items and periodsInterval of maintenance (Operation hour)ItemC4000AC6000B1Output mirror cleaning2Rear mirror cleaning800 to 1200h800 to 1200h3Folding mirror cleaning3000 to 4000h40–shift mirror cleaning1000h or processing qualit...

  • Page 121

    B–70115EN/035. MAINTENANCE119When opening the panels and doors during maintenance, keep the powerturned off.Before replacing oil, be sure to check that purging is completed.Fig. 5.3 (a) Oil gauge of Turbo Blower and Exhaust pump of C1500BFig. 5.3 (b) Oil gauge of Turbo Blower and Exhaust pump o...

  • Page 122

    B–70115EN/035. MAINTENANCE120Fig. 5.3 (c) Oil gauge of Turbo Blower and Exhaust pump of C2000CFig. 5.3 (d) Oil gauge of Turbo Blower and Exhaust pump of C3000C

  • Page 123

    B–70115EN/035. MAINTENANCE121Fig. 5.3 (e) Oil gauge of Turbo Blower and Exhaust pump of C3000DFig. 5.3 (f) Oil gauge of Turbo Blower and Exhaust pump of C4000A

  • Page 124

    B–70115EN/035. MAINTENANCE122Fig. 5.3 (g) Oil gauge of Turbo Blower and Exhaust pump of C6000B(1) Check methodCheck the amount of oil in the turbo blower while referring to thefigure below. The oil level should be between graduations H and L.This check should be made when the oscillator is at ...

  • Page 125

    B–70115EN/035. MAINTENANCE1233) Clean the oil inlet, hexagonal–head screw of the oil inlet, andO–ring by wiping with a clean cloth or paper. Ensure that theseparts are completely free of dust. If the oil is contaminated withdust, the turbo blower may fail. Set the O–ring in the groovea...

  • Page 126

    B–70115EN/035. MAINTENANCE124(1) Check methodWatch the oil gauge, and check that the oil level is between graduationsL and H. Also check whether the oil is dark.If the oil level is below L, add oil to the turbo blower or replace the oilin it. If the oil level is above H, drain until the oil l...

  • Page 127

    B–70115EN/035. MAINTENANCE1258) Put the maintenance panel back in place, and turn on the power.SCREW KNOB FILTER COVERO–RINGSPRING WASHEREXHAUST FILTER ELEMENTOIL INLET PLUGFig. 5.3.3 Exchange of exhaust pump filter

  • Page 128

    B–70115EN/035. MAINTENANCE126Replace the filter every 1500 hours, or when oil mist occurs. Fig. 5.3.4shows the exhaust system filter. None of the C1500B, C2000B, C2000C,C3000C, C3000D, and C4000A is equipped with this filter.(1) Replacement methodClampHousing headHousingO–ring (G90 or G85,...

  • Page 129

    B–70115EN/035. MAINTENANCE12710) Take out a new cartridge filter (A97L–0201–0211, AdvanTechToyo TCG–045–SIFS) from its bag, and put a plate gasket(supplied together with the cartridge filter) on both ends of thefilter.11) Insert the cartridge filter into the housing head, and fasten it ...

  • Page 130

    B–70115EN/035. MAINTENANCE128The maintenance parts are listed below. Refer to the following tables formaintenance unit and part specification information.NONREPAIRABLE PARTSMODEL QUANTITYNAMESPECIFICATIONC1500BC2000B C2000C C3000CC3000D C4000AC6000BNOTEOUTPUT COUPLERA98L–0001–09811000000PO...

  • Page 131

    B–70115EN/035. MAINTENANCE129NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONO RING FORA98L–0003–0004/P22.4S8000000DISCHARGE TUBEA98L–0003–0004/P26S0881212160A98L–0003–0004/P30.6S00000024O–RING FOR GASPIPE#3A98L–0003–0004/P5888...

  • Page 132

    B–70115EN/035. MAINTENANCE130NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONEXHAUST PUMP OILA98L–0040–0093/1.0L63.6L3.6L3.6L3.6L3.6L3.6L3.6LTURBO BLOWER OILA04B–0800–K3261/31/31/32/31/31/34/3O–RING FOR TURBOBLOWER OIL INLETJB–OR4D...

  • Page 133

    B–70115EN/035. MAINTENANCE131NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONAUTO BREAKERRELEASE AC100V#4A60L–0001–0312/BESCN1QF1000000AUTO BREAKERRELEASE DC24V#4A60L–0001–0312/BESDN1QF1000000AUTO BREAKERA60L–0001–0312/BGSDN01QF11QF1...

  • Page 134

    B–70115EN/035. MAINTENANCE132NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONMG CONTACTORA58L–0001–0243003KM1–304KM1–45KM1–58KM1–4,7–10A58L–0001–0313/A2A3P13001KM501KM51MS61KM6A58L–0001–0330/A2A001KM401KM61KM71KM5A58L–000...

  • Page 135

    B–70115EN/035. MAINTENANCE133NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONGAS FILTERA97L–0200–0649/2–2–S1111111A97L–0200–0649/2–0.5–S1111111CARTRIDGE FILTERA97L–0201–02110000001NYLON FERRULE 1/4″ A98L–0004–0348/2–N...

  • Page 136

    B–70115EN/035. MAINTENANCE134NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONFET MODULE PCBA20B–1006–00508STEPUP TRANSFORMER PCBA20B–1006–00701RF INVERTER PCBA20B–1006–00601DIODEA50L–2001–0257/F6A50L–2001–0257/R6DIODE HEAT SI...

  • Page 137

    B–70115EN/035. MAINTENANCE135NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONFET MODULE PCBA20B–1007–01401A20B–1007–01501STEPUP TRANSFORMER PCBA20B–1006–00721This column is quantity of PSU parts per one LPSU.(B210)DIODEA50L–2001–...

  • Page 138

    B–70115EN/035. MAINTENANCE136REPAIRABLE PARTSMODEL QUANTITYNAMESPECIFICATIONC1500BC2000B C2000C C3000CC3000D C4000AC6000BNOTELASER PSU UNITA14B–0082–B204(2)00(2)000A14B–0082–B2050(4)0(2)00(4)A14B–0082–B206000000(4)A14B–0082–B207(2)0(2)(2)(3)0(4)A14B–0082–B2080(4)0(2)000A14B...

  • Page 139

    B–70115EN/035. MAINTENANCE137NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONCONNECTION PCBA16B–1700–04600000010TERMINAL PCBA16B–1700–04700000010STABILIZED PSUA20B–1005–01241111111POWER SENSORA04B–0803–D0011000000UNITA04B–0807...

  • Page 140

    B–70115EN/035. MAINTENANCE138NAMENOTEMODEL QUANTITYSPECIFICATIONNAMENOTEC6000BC4000AC3000DC3000CC2000CC2000BC1500BSPECIFICATIONWATER DISTRIBUTORA04B–0810–C4201000000A04B–0807–C4200100100A04B–0813–C4200010000A04B–0811–C4200001000A04B–0814–C4200000100A04B–0815–C4200000010W...

  • Page 141

    B–70115EN/035. MAINTENANCE139#14 Use the service stock for the model specified in this list. Specify A20B–1005–0124 when newly ordering.#15 Use the service stock for the model specified in this list. Specify A91L–0001–0201 when newly ordering.When A91L–0001–0102 is installed, the fo...

  • Page 142

    B–70115EN/036. TROUBLESHOOTING1406 TROUBLESHOOTING

  • Page 143

    B–70115EN/036. TROUBLESHOOTING141The troubleshooting procedure to be applied depends on the failureoccurrence status as indicated below. Perform checking according to theitems listed below.(1) Action in response to alarm screen display (See Sections 6.2 and 6.3.)(2) Major faults1)Laser power s...

  • Page 144

    B–70115EN/036. TROUBLESHOOTING142The alarm number, DGN, and parameter number (PRM NO.) vary withthe CNC model. So, the FS16–L or FS16i–L number comes first, and theFS0–L number is enclosed in parentheses.Anomaly of AD converter 1 (Refer to DGN = 981 [844, 845/bit 7])FS0–L: AD converter...

  • Page 145

    B–70115EN/036. TROUBLESHOOTING143Anomaly of laser power supply unit (Refer to DGN 966, 967, 974, 975 [842, 854].)This alarm is issued, if a fault occurs in the laser power supply unit.The cause of the fault and the required action are described below.The laser power supply unit issues this alar...

  • Page 146

    B–70115EN/036. TROUBLESHOOTING144No.Presumption causePhenomenon5The RF voltage of all the units is high dur-ing discharge and the laser power is low.The base discharge is narrow and tends todisappear. When the purge is repeatedlyperformed, the RF voltage gradually de-creases and the laser powe...

  • Page 147

    B–70115EN/036. TROUBLESHOOTING145Shutter anomaly (Related DGNs are shown below.)The table below lists the valid combinations of shutter open and closecommands and open and close position detection signals. The shutterposition is detected three seconds after opening or closing of theshutter is ...

  • Page 148

    B–70115EN/036. TROUBLESHOOTING146Discharge anomaly (Refer to DGN = 909 to 914 [861 to 868]Pressing the HVON (start discharge) button causes the unit to startdischarging. This alarm is issued, if at least one discharge tube failsto operate.No.Cause of troubleSolution1Anomaly of parametersetting...

  • Page 149

    B–70115EN/036. TROUBLESHOOTING147Overheat of laser cabinet (Refer to DGN = 961/bit 1 [841/bit7])The temperature of the input side of the electrode cooling fan ismonitored and sends alarm when it exceeds 60°C. When thetemperature decreases, the alarm state is solved automatically. Beforethat i...

  • Page 150

    B–70115EN/036. TROUBLESHOOTING148Too much incident laser beam back to the resonator. (Refer to DGN = 906 [878])This alarm is issued, if a workpiece reflects laser beam more than therating to the laser oscillator. This can happen when the laser beam isused to drill, cut, or weld materials (suc...

  • Page 151

    B–70115EN/036. TROUBLESHOOTING149Anomaly of assist gas (Refer to DGN = G221/bit 7 [145/bit7]When starting machining, the NC monitors for a ready signal from theassist gas supply unit in the machine. If this signal is not sent normally,the NC issues this alarm.Check the DGN data and the signal ...

  • Page 152

    B–70115EN/036. TROUBLESHOOTING150Decrease of laser gas pressure (Refer to DGN = 960/bit 5 [840/bit 4])The pressure of the laser gas supplied to the laser oscillator ismonitored. This alarm is issued, if this pressure becomes lower thanthe permissible level (0.1 MPa).No.Cause of troubleSolution...

  • Page 153

    B–70115EN/036. TROUBLESHOOTING151Condensation (Refer to DGN = 961/bit 2 [840/bit 6])There is a condensation sensor at the inlet of the water branch unit inthe oscillator. This alarm is issued, when condensation is detected.No.Cause of troubleSolution1Tool low cooling watertemperatureSet the wa...

  • Page 154

    B–70115EN/036. TROUBLESHOOTING152Overheat of beam absorber (Refer to DGN = 961/bit 7 [841/bit 3])Laser beam is introduced into the beam absorber, when the oscillationtakes place with shutter closed. This absorber is water–cooled andsends alarm when the temperature exceeds a critical one. In...

  • Page 155

    B–70115EN/036. TROUBLESHOOTING153Gas pressure anomaly in discharge tube (Refer to DGN = 905 [860])The gas pressure is monitored after the discharge start ready condition(LRDY) is established. This alarm is issued, if the monitored gaspressure deviates by "100 (="1330 Pa) from the set...

  • Page 156

    B–70115EN/036. TROUBLESHOOTING154Leakage of gas tube/anomaly of exhaust pump (Refer to DGN = 905 [860])When the RUN (pressure control start) button is pressed, the exhaustpump starts operating and expels gas from the gas circulating systemto cause a low–pressure condition. This alarm is disp...

  • Page 157

    B–70115EN/036. TROUBLESHOOTING155Anomaly of gas pressure control (Refer to DGN = 905 [860] Pressing the RUN (pressure control start) button starts expelling airfrom the laser gas tube. When a specified degree of vacuum is attained,laser gas is supplied into the laser gas tube, and gas pressure...

  • Page 158

    B–70115EN/036. TROUBLESHOOTING156Anomaly of pressure sensor (Refer to DGN = 905 [860] This alarm appears when the signal of the pressure sensor used forpressure control detector vanishes.No.Cause of troubleSolution1Disconnected cable be-tween pressure sensorand IF PCBCheck the cable connection....

  • Page 159

    B–70115EN/036. TROUBLESHOOTING157Anomalous selection of the number of discharge tubes. Anomalous selection of the number of discharge tubes. (Only FS0–L)No.Cause of troubleSolution1The case of FS0–L. The number of dischargetubes is selected tubeother than 2 or4.The number of discharge ...

  • Page 160

    B–70115EN/036. TROUBLESHOOTING158Shutter temperature abnormal (Refer to bit 6 of DGN 961 [bit 2 of 841].)This alarm is issued when the temperature of the shutter mirrorexceeds a preset maximum. The table below lists the causes of faultsand the corresponding countermeasures.No.Cause of troubleS...

  • Page 161

    B–70115EN/036. TROUBLESHOOTING159Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].)This alarm is issued, if an attempt is made to radiate a laser beam, whenthe laser oscillator is not in the LSTR state (discharging state).Exhaust pump operation abnormal (Refer to bit 3 of DGN...

  • Page 162

    B–70115EN/036. TROUBLESHOOTING160Inverter abnormalIf the inverter used to power the turbo blower is abnormal, this alarmis issued. When this alarm is issued, check that the alarm LED on theLED indicator section of the inverter is lit. At this time, do not turnoff the power to the inverter bec...

  • Page 163

    B–70115EN/036. TROUBLESHOOTING161Turbo blower not stoppedThis alarm is issued if a turbo blower is not stopped within 120 secondsafter RUN OFF. The power can be turned off even if the purgecomplete signal is not turned on.No.Cause of troubleSolution1Cable connection abnormal Check the cable co...

  • Page 164

    B–70115EN/036. TROUBLESHOOTING162External reflecting mirror not installedThis alarm is issued, if the beam reflecting unit is not attached with amirror or mirror holder.No.Cause of troubleSolution1Mirror not mountedMount a 0–degree shift mirror.2Sensor abnormalReplace the switch.3Cable abnorm...

  • Page 165

    B–70115EN/036. TROUBLESHOOTING163(1) If an alarm is issued to indicate the occurrence of a power supply fault,check the diagnosis screen to determine which power supply unitissued that alarm signal. The bit corresponding to the power supplyunit that issued the alarm signal is set to 1.Unlike c...

  • Page 166

    B–70115EN/036. TROUBLESHOOTING164(4) Table 6.4.1 explains each type of alarm.Table 6.4.1 Causes of power supply alarmsType of alarmSourceMajor causesDCI 1DCI 2DCI 3This alarm is issued if the DCcurrent of the power supply unitis high when the oscillator is op-erating in CW/pulse mode.Load shor...

  • Page 167

    B–70115EN/036. TROUBLESHOOTING165(5) If an alarm is issued at restart or at the start of discharge (HV ON), thepower supply unit has been damaged.1) When only the DCI alarm is issuedThe high–speed diode or FET module may be damaged. Locate theproblem and replace any faulty component or modul...

  • Page 168

    B–70115EN/036. TROUBLESHOOTING166First check if PRM No. 15216 [262] is taking the value of 60, which isa standard. In case the fluctuation continues with this value used, read thelaser output monitor value indicated in DGN=906 [878]. Its range offluctuation is smaller than 50. If it exceeds t...

  • Page 169

    B–70115EN/036. TROUBLESHOOTING167No.Cause of troubleSolution1Anomalous settingof thermal relayAscertain if the setting of the contacter is done at5.5 A. If not so, correct it.2Too high viscosityof oil(1) Check if the room temperature is lower than 5degree. If so, raise it.(2) Check the deterior...

  • Page 170

    B–70115EN/036. TROUBLESHOOTING168No.Cause of troubleSolution1Gas leakage be-tween gas cylinderand oscillatorAscertain the following.(1) Anomalous mounting of regulator.(2) Anomalous connection between tube and reg-ulator.(3) Anomalous connection of gas inlet fitting ofoscillator.2Anomalous adju...

  • Page 171

    B–70115EN/036. TROUBLESHOOTING169OC : Momentary overcurrentNo.Cause of troubleSolution1Turbo blower or cable short–cir-cuitedReplace the short–circuited unit orcable.2Turbo blower or cable short–cir-cuited with groundReplace the short–circuited unit orcable.3Invalid setting of inverter ...

  • Page 172

    B–70115EN/036. TROUBLESHOOTING170(2) Inverter (A90L–0001–0464/CE, 0465/CE: Model JH300)When an alarm is issued, the digital panel displays a messageindicating the type of alarm. The table below lists the messages,descriptions, and causes.MessageDescriptionCauseE01Overcurrent during turbo...

  • Page 173

    B–70115EN/036. TROUBLESHOOTING171Ascertain the followings,1) line voltage: 200/220 VAC, +10%, –15%2) frequency: 50/60 Hz – 1 Hz3) 3 phasesHere the combination of 220 V and 50 Hz is prohibited.Using a phase rotation sensor, L1, L2 and L3 phases of which areconnected to U, V and W phases of t...

  • Page 174

    B–70115EN/036. TROUBLESHOOTING172Ascertain if the voltage of each DC power unit is within rated range. Hererefer to Fig. 6.5.3 (a), (b), (c) for the external view of the IF PCB in theoscillator. Refer to Fig. 6.5.3 (d) for the external view of the stabilizedpower supply unit.IF PCBFS0–LA16...

  • Page 175

    B–70115EN/036. TROUBLESHOOTING173(4) Stabilized power supply unitFig. 6.5.3 (d) shows the external appearance of +24V stabilized powerunit.Fuse of the stabilized power supply unitDesignation of power supply unitA20B–1005–0120Designation of fuseFU : A60L–0001–0175#5.0 (5.0A)FU : A60L–0...

  • Page 176

    B–70115EN/036. TROUBLESHOOTING174FU4ÏÏÏÏÏÏÏÏÏÏÏÏÏÏÏ* LB6 SHUTTER RELAY (A58L–0001–0265#24P)* This printed circuit board is below A16B–1110–0260.CN23CNCNCNCNCNCNCNCNCNCN11121314151617182425LPWLB6CORMOUTGPCMAIMPICN34SPIPTMLTP+240–15515A16B–1110–0260SP2SP3SP4MBISP5SP6...

  • Page 177

    B–70115EN/036. TROUBLESHOOTING175ÏÏÏÏÏÏÏÏÏÏÏÏÏÏÏÏÏÏÏCN23CNCNCNCN11121314CNXPATLITERELAY(A58L–0001–0265#24P)CNCN2425CN2CN1F1F2F3A100LF16SHUTTERRELAY(A58L–0001–0265#24P)CORGPCMOUTLPWLTP0+5–15+15+240LA4A16B–1110–022Fig. 6.5.3 (c) External appearance of IF PCB (FS...

  • Page 178

    B–70115EN/036. TROUBLESHOOTING176By using the IF PCB pins, check that each signal of the IF PCB is normal.Fig. 6.5.3 (a) and Fig. 6.5.3 (b) show the pin locations.FS0–LFS16–LFS16i–LSignal functionCORCORVoltage to operate the laser power supply 0 V to 5VGPCGPCSpecification of pressure ...

  • Page 179

    B–70115EN/036. TROUBLESHOOTING177When the machine breaks down, it is necessary to know if the trouble isin the CNC, PMC, machine or laser.Even when there does not exist machine failure, the machine mighthang–up for waiting of external signals. Then the check of inside stateof CNC, interface ...

  • Page 180

    B–70115EN/036. TROUBLESHOOTING178#7POV7G223[G147]#6POV6#5POV5#4POV4#3POV3#2POV2#1POV1#0POV0POV7 – POV6 Power override signal (input)[CNC→PMC status display]#7F220[F171]#6MWRM#5#4SHTONL#3SHTOFL#2#1#0MWRM Laser power alarm signal (output)SHTONL Shutter on state signal (output)SHTOFL Shutter o...

  • Page 181

    B–70115EN/036. TROUBLESHOOTING179900DOIML0ALASER POWER COMMANDDisplays a value specified in a laser output power command and sent tothe DA converter.901DOIML08LASER BIAS COMMANDDisplays a value specified in a preparatory discharge command and sent tothe DA converter.902R@LSPONPULSE ON TIMEDispl...

  • Page 182

    B–70115EN/036. TROUBLESHOOTING180909RF VOLTAGE 1910RF CURRENT 1911RF VOLTAGE 2912RF CURRENT 2913RF VOLTAGE 3914RF CURRENT 3915RF VOLTAGE 4916RF CURRENT 4917RF VOLTAGE 1918RF CURRENT 1919RF VOLTAGE 2920RF CURRENT 2921RF VOLTAGE 3922RF CURRENT 3923RF VOLTAGE 4924RF CURRENT 4Unit of voltage applie...

  • Page 183

    B–70115EN/036. TROUBLESHOOTING181FRQ Power frequency detection0 : 50 Hz1 : 60 Hz*AP Air pressure sensor0 : Lower than air pressure1 : Same as air pressure*MGP Laser gas pressure0 : Low1 : Normal*RBT Blower temperature0 : Abnormal1 : Normal*SFI Safety interlock0 : Interlocked1 : Normal#7*ABT961D...

  • Page 184

    B–70115EN/036. TROUBLESHOOTING182#7962DIIML02#6#5*OH1#4*TCA1#3*M–R#2*L–V#1*AR1#0*IAL1*IAL1 Inverter alarm 10 : Abnormal1 : Normal*AR1 Frequency signal 10 : Mismatch1 : Match*L–V Turbo blower oil0 : Oil level too low1 : Normal*M–R External folding mirror0 : Mirror not mounted1 : Normal*T...

  • Page 185

    B–70115EN/036. TROUBLESHOOTING183#7964DIIML04#6#5*OH3#4*TCA3#3*REV3#2*VIB3#1*AR3#0*IAL3*IAL3 Inverter alarm 30 : Abnormal1 : Normal*AR3 Frequency signal 30 : Mismatch1 : Match*VIB3 Vibration sensor 30 : Abnormal1 : Normal*REV3 Rotation sensor 30 : Less than 8000 rpm1 : 8000 rpm or more*TCA3 Tur...

  • Page 186

    B–70115EN/036. TROUBLESHOOTING184#7PS08970DOIML02#6PS07#5PS06#4PS05#3PS04#2PS03#1PS02#0PS01PS01 – PS08 Power select signals 1 to 80 : Not selected1 : Selected#7TWV972DOIML04#6BPV#5PTL#4GRDY#3VEN#2RPA#1RBA#0PUGPUG Purge valve0: Closed1: OpenRBA Turbo blower activation0: Stopped1: ActivatedRPA ...

  • Page 187

    B–70115EN/036. TROUBLESHOOTING185IB Semiconductor laser–on command0: OFF1: ONFW Inverter start signal0: Stopped1: StartedPCS Gas pressure PWM commandLSCST Low speed A/D conversion start0: OFF1: ON#7PSAR8974R@LSDIC2#6PSAR7#5PSAR6#4PSAR5#3PSAR4#2PSAR3#1PSAR2#0PSAR1Power unit alarms 1 to 80: Nor...

  • Page 188

    B–70115EN/036. TROUBLESHOOTING186#7#6#5#4#3#2#1#0DGN No88Output command value + Bias command89(CNC internal DO)Displays a value specified in a laser output power command and sent tothe DA converter.#7#6#5#4#3#2#1#0DGN No90Bias command91(CNC internal DO)Value written in the DA converter at pre d...

  • Page 189

    B–70115EN/036. TROUBLESHOOTING187MVW Quantity of cooling water0 : Abnormal1 : NormalAP Atmospheric pressure sensor0 : Less than standard value1 : Greater than standard value#7#6#5#4#3#2#1#0DGN NoCAT841SHOFSHONDL1ABTSHTIALENB(CNC internal DI)CAT Cabinet temperature0 : Abnormal1 : NormalSHOF Shut...

  • Page 190

    B–70115EN/036. TROUBLESHOOTING188#7#6#5#4#3#2#1#0DGN No846ADDT2EOC2847(CNC internal DI)ADDT2 Data read from the AD converter 2EOC2 Conversion completion signal of the AD converter 20:Under conversion1:Completion#7#6#5#4#3#2#1#0DGN No848PCBID(CNC internal DI)PCBID PCB A16B–1212–0270 is mount...

  • Page 191

    B–70115EN/036. TROUBLESHOOTING189SEL4 – SEL0 AD converter 2 switching signalSEL4SEL3SEL2SEL1SEL0Pressure in side tube00000Output voltage of RF power supply unit (1)00001Output current of RF power supply unit (1)00010Output voltage of RF power supply unit (2)00011Output current of RF power sup...

  • Page 192

    B–70115EN/036. TROUBLESHOOTING190GRDY Laser gas supply valve open/close signal0 : Laser gas supply valve close1 : Laser gas supply valve openVEN Exhaust valve open/close signal0 : Exhaust valve close1 : Exhaust valve open#7#6#5#4#3#2#1#0DGN NoPSS8857PSS7PSS6PSS5PSS4PSS3PSS2PSS1(CNC internal DO)...

  • Page 193

    B–70115EN/036. TROUBLESHOOTING191DGN No877EIN(CNC internal DI)EIN Input from tracing sensor. (Value which is not multiplied by the correction factor)+10V2047. . . . . . 0V0. . . . . . –10V–2047. . . . . . DGN No878LSADC(CNC internal DI)LSADC Power sensor output. (Unit W)(Value which is not ...

  • Page 194

    B–70115EN/037. OSCILLATOR CONNECTIONS1927 OSCILLATOR CONNECTIONS

  • Page 195

    B–70115EN/037. OSCILLATOR CONNECTIONS193Fig. 7.1 (a) Electrical connection diagram (C1500B)7.1ELECTRICALCONNECTIONS

  • Page 196

    B–70115EN/037. OSCILLATOR CONNECTIONS194Fig. 7.1 (b) Electrical connection diagram (C2000B)

  • Page 197

    B–70115EN/037. OSCILLATOR CONNECTIONS195Fig. 7.1 (c) Electrical connection diagram (C2000C)

  • Page 198

    B–70115EN/037. OSCILLATOR CONNECTIONS196Fig. 7.1 (d) Electrical connection diagram (C3000C)

  • Page 199

    B–70115EN/037. OSCILLATOR CONNECTIONS197Fig. 7.1 (e) Electrical connection diagram (C3000D)

  • Page 200

    B–70115EN/037. OSCILLATOR CONNECTIONS198Fig. 7.1 (f) Electrical connection diagram (C4000A)

  • Page 201

    B–70115EN/037. OSCILLATOR CONNECTIONS199Fig. 7.1 (g) Electrical connection diagram (C6000B)

  • Page 202

    B–70115EN/037. OSCILLATOR CONNECTIONS2007.2COOLING WATERPIPING

  • Page 203

    B–70115EN/037. OSCILLATOR CONNECTIONS201Fig. 7.2 (a) Water flow diagram (C1500B)

  • Page 204

    B–70115EN/037. OSCILLATOR CONNECTIONS202Fig. 7.2 (b) Water flow diagram (C2000B)

  • Page 205

    B–70115EN/037. OSCILLATOR CONNECTIONS203Fig. 7.2 (c) Water flow diagram (C2000C)

  • Page 206

    B–70115EN/037. OSCILLATOR CONNECTIONS204Fig. 7.2 (d) Water flow diagram (C3000C)

  • Page 207

    B–70115EN/037. OSCILLATOR CONNECTIONS205Fig. 7.2 (e) Water flow diagram (C3000D)

  • Page 208

    B–70115EN/037. OSCILLATOR CONNECTIONS206Fig. 7.2 (f) Water flow diagram (C4000A)

  • Page 209

    B–70115EN/037. OSCILLATOR CONNECTIONS207Fig. 7.2 (g) Water flow diagram (C6000B)

  • Page 210

    B–70115EN/037. OSCILLATOR CONNECTIONS208Fig. 7.3 (a) shows the flow of supply gas and exhaust gas in the laseroscillator. Figs. 7.3 (b) to (h) are system diagrams showing the piping inthe laser oscillator.Pressure value100 (=1330Pa)or morePressure value300 to 700(=4000 to9300Pa)Pressure value7...

  • Page 211

    B–70115EN/037. OSCILLATOR CONNECTIONS209Fig. 7.3 (b) Laser gas flow diagram (C1500B)

  • Page 212

    B–70115EN/037. OSCILLATOR CONNECTIONS210Fig. 7.3 (c) Laser gas flow diagram (C2000B)

  • Page 213

    B–70115EN/037. OSCILLATOR CONNECTIONS211Fig. 7.3 (d) Laser gas flow diagram (C2000C)

  • Page 214

    B–70115EN/037. OSCILLATOR CONNECTIONS212Fig. 7.3 (e) Laser gas flow diagram (C3000C)

  • Page 215

    B–70115EN/037. OSCILLATOR CONNECTIONS213Fig. 7.3 (f) Laser gas flow diagram (C3000D)

  • Page 216

    B–70115EN/037. OSCILLATOR CONNECTIONS214Fig. 7.3 (g) Laser gas flow diagram (C4000A)

  • Page 217

    B–70115EN/037. OSCILLATOR CONNECTIONS215Fig. 7.3 (h) Laser gas flow diagram (C6000B)

  • Page 218

    B–70115EN/038. UNIT CONFIGURATION2168 UNIT CONFIGURATION

  • Page 219

    B–70115EN/038. UNIT CONFIGURATION217The input unit consists of a power magnetics cabinet, interface PCB, andstabilized power supply. The power magnetics cabinet is configured asdescribed below:(1) C1500BQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3ThermalRelayQF4ThermalRelayQF5ThermalRelayQF6QF2Therma...

  • Page 220

    B–70115EN/038. UNIT CONFIGURATION218Fig. 8.1 (a) Input unit (C1500B)

  • Page 221

    B–70115EN/038. UNIT CONFIGURATION219(2) C2000BQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3ThermalRelayQF4ThermalRelayQF5ThermalRelayQF8QF2ThermalRelayQF9TransformerQF10KM2KM3KM4PSUNo. 3PSUNo. 4AC FANMagnetic valveStabilized PSUIF PCBCNC INPUT UNITAS ALARM SHORTPOWER OFFWhen an alarm is occured,it is s...

  • Page 222

    B–70115EN/038. UNIT CONFIGURATION220Fig. 8.1 (b) Input unit (C2000B)

  • Page 223

    B–70115EN/038. UNIT CONFIGURATION221(3) C2000CQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3QF4QF5QF6ThermalRelayQF2QF7TransformerunitQF8KM2KM3KM4InverterAC FANMagnetic valveStabilized PSUIF PCBTurboblowerCNC INPUT UNITAS ALARM SHORTPOWER OFFWhen an alarm is occured,it is shorted.Input unit (C2000C)KM5H...

  • Page 224

    B–70115EN/038. UNIT CONFIGURATION222Fig. 8.1 (c) Input unit (C2000C)

  • Page 225

    B–70115EN/038. UNIT CONFIGURATION223(4) C3000CQF1ThermalrelayKM1PSUNo. 2PSUNo. 1QF3ThermalRelayQF4ThermalRelayQF5ThermalRelayQF7QF2ThermalRelayQF8TransformerQF9KM2KM3KM4PSUNo. 3PSUNo. 4AC FANMagnetic valveStabilized PSUIF PCBCNC INPUT UNITAS ALARM SHORTPOWER OFFWhen an alarm is occured,it is sh...

  • Page 226

    B–70115EN/038. UNIT CONFIGURATION224Fig. 8.1 (d) Input unit (C3000C) 1/2

  • Page 227

    B–70115EN/038. UNIT CONFIGURATION225Fig. 8.1 (d) Input unit (C3000C AUX) 2/2

  • Page 228

    B–70115EN/038. UNIT CONFIGURATION226(5) C3000DQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3QF4QF5QF6ThermalRelayQF2KM2KM3KM4PSUNo. 3InverterTurboblowerCNC INPUT UNITAS ALARM SHORTPOWER OFFWhen an alarm is occured,it is shorted.Input unit (C3000D)KM5HourmeterQF8IntermediateunitMagnetic valveStabilized P...

  • Page 229

    B–70115EN/038. UNIT CONFIGURATION227Fig. 8.1 (e) Input unit (C3000D)

  • Page 230

    B–70115EN/038. UNIT CONFIGURATION228(6) C4000AQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3QF4QF5QF7ThermalRelayQF2KM2KM3KM4PSUNo. 3InverterCNC INPUT UNITAS ALARM SHORTPOWER OFFWhen an alarm is occured,it is shorted.Input unit (C4000A)KM6HourmeterQF9IntermediateunitMagnetic valveStabilized PSUIF PCBTra...

  • Page 231

    B–70115EN/038. UNIT CONFIGURATION229Fig. 8.1 (f) Input unit (C4000A)

  • Page 232

    B–70115EN/038. UNIT CONFIGURATION230(7) C6000BQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3QF4QF5QF13QF2QF14TransformerQF15KM2KM3KM4PSUNo. 3PSUNo. 4InverterNo. 2Magnetic valveStabilized PSUIF PCBIntermediateunitWhen an alarm is occured,it is shorted.Input unit (C6000B)QF6KM5AC FANQF7ThermalRelayKM6Exha...

  • Page 233

    B–70115EN/038. UNIT CONFIGURATION231Fig. 8.1 (g) Input unit (C6000B) 1/3

  • Page 234

    B–70115EN/038. UNIT CONFIGURATION232Fig. 8.1 (g) Input unit (C6000B) 2/3

  • Page 235

    B–70115EN/038. UNIT CONFIGURATION233Fig. 8.1 (g) Input unit (C6000B) 3/3

  • Page 236

    B–70115EN/038. UNIT CONFIGURATION234Intermediate PCB B is used to group signals sent from the shutter sectionand to output the grouped signals to the interface PCB. CN59 is an outputterminal for connecting a measuring instrument used in alignment.Fig. 8.2 shows the layout of intermediate PCB B...

  • Page 237

    B–70115EN/038. UNIT CONFIGURATION235Fig. 8.3 (a) shows installation, and Fig. 8.3 (b) shows piping of thepressure controller respectively. The functions of each of the componentsshown in the figures are outlined below:(1) Pressure control valveThis valve is provided to maintain a specified las...

  • Page 238

    B–70115EN/038. UNIT CONFIGURATION236Fig. 8.3 (a) Pressure control unit layout

  • Page 239

    B–70115EN/038. UNIT CONFIGURATION237Fig. 8.3 (b) Block diagram of gas pressure control unit

  • Page 240

    B–70115EN/039. SETTING AND ADJUSTMENT2389 SETTING AND ADJUSTMENT

  • Page 241

    B–70115EN/039. SETTING AND ADJUSTMENT239This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the power supply unit, matching box, or dischargetube is replaced, however, the unit should be set and adjusted as describedbelow.When an FET module or diode ...

  • Page 242

    B–70115EN/039. SETTING AND ADJUSTMENT240Enhanced pulse setting disable Parameter No. 15213: 320004) C2000COutput compensation disable Bit 4 of parameter No. 15000, parameter No. 15201 (bit 4 ofparameter No. 200, parameter No. 231, No. 232): 0Laser power feedback disable Parameter ...

  • Page 243

    B–70115EN/039. SETTING AND ADJUSTMENT2417) C6000BOutput compensation disable Bit 4 of parameter No. 15000, parameter No. 15201 (bit 4 ofparameter No. 200, parameter No. 231, No. 232): 0Laser power feedback disable Parameter No. 15208 (parameter No. 233): 0Maximum output command settin...

  • Page 244

    B–70115EN/039. SETTING AND ADJUSTMENT242(1) Start the oscillator, and wait 10 minutes in the LRDY state. Then setHV ON and wait until the gas pressure is stabilized in the basedischarge state. (Wait about 3 minutes. See DGN 905 [16–L, 16i–L]or DGN 860 [0–L].) Check that all discharge ...

  • Page 245

    B–70115EN/039. SETTING AND ADJUSTMENT243Power supplies 1, 2, 3,7, 8, and 9ÎÎÎÎÎÎÎÎÏÏÏÏÏÏÎÎÎÎÎÎÎÎÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÑÑÑÏÏÏÏÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÌÓÓÓÓÓÓPower supplies 4, 5, 6,10, 11, and 12Fig. 9.1.2.5 Base discharge adjustm...

  • Page 246

    B–70115EN/039. SETTING AND ADJUSTMENT244(1) Start the oscillator, and wait until the gas pressure is stabilized in thebase discharge state. (Wait about 3 minutes. See DGN 905 [16–L,16i–L] or DGN 860 [0–L].) Then, check that all discharge tubes arecontinuously discharging. If a dischar...

  • Page 247

    B–70115EN/039. SETTING AND ADJUSTMENT245Fig. 9.1.2.7 (a) Laser power supply unit layout (6 kW PSU)Fig. 9.1.2.7 (b) Adjust trimmer position (6 kW PSU)

  • Page 248

    B–70115EN/039. SETTING AND ADJUSTMENT246Fig. 9.1.2.7 (c) Adjust trimmer position (9 kW PSU)(1) Specify the output of a half of the rated output value, and turn on thebeam. While checking that the power supply output (Note 4) does notexceed the maximum power supply output (Note 4) and that the...

  • Page 249

    B–70115EN/039. SETTING AND ADJUSTMENT247(1) With the C2000B and C2000C, specify a pulse test command in thetable of parameter No. 15207 and No. 15210.(2) Output the pulse test command specified in the table by 5 Hz and 5%for a pulse test time, and check that no alarm is issued. If a problemis ...

  • Page 250

    B–70115EN/039. SETTING AND ADJUSTMENT248NOTE4 Settings for each oscillator5 Setting pinsC1500BC2000BC3000CC3000CC6000BC6000Bwithout a trigger(No.1, 4 PSU)(No.2, 3 PSU)(No. 1, 4, 5, 8No. 2, 3, 6, 7 electrodePSU)PSU)S2 settingB201B202B201B202B202B201S5 settingSHORTSHORTSHORTSHORTUSUALSHORTIplus)1...

  • Page 251

    B–70115EN/039. SETTING AND ADJUSTMENT249Alarm level setting value of laser PSU is shown the following table.Table 9.1.7 (a) Alarm level setting valueSpecification of laser PSUB204B205B206B207B208B209B210DCI1DC peak overcurrent100A100A(100A)120A120A120A120A120ADCI2(P)DC over power7375W7kW(9.9kW...

  • Page 252

    B–70115EN/039. SETTING AND ADJUSTMENT250Table 9.1.7 (b) Specification of PSUNumber of laser PSUNo. 1No. 2No. 3No. 4No. 5No. 6No. 7No. 8C1500BB209(B207)(B204)B209(B207)(B204)——————C2000BB208(B205)B208(B205)B208(B205)B208(B205)————C2000CB209(B207)B209(B207)C3000CB207B208B208B...

  • Page 253

    B–70115EN/039. SETTING AND ADJUSTMENT251These PCBs are precisely adjusted at the factory and should not requireany further adjustment. If the turbo blower or turbo PCB is replaced,however, VR1 to VR4 should be adjusted and set oil level sensor asdescribed below.Turbo PCB: A16B–1600–0670:C1...

  • Page 254

    B–70115EN/039. SETTING AND ADJUSTMENT252Adjustment position C1500B : VR1 onlyC2000B : VR1 onlyC2000C : VR1 onlyC3000C : VR1 VR2 onlyC3000D : VR1 onlyC4000A : VR1 onlyC6000B : VR1 to VR4Fig. 9.2 (a) Detail of turbo PCB (A16B–1600–0670)

  • Page 255

    B–70115EN/039. SETTING AND ADJUSTMENT253VL4 TerminalVL3 TerminalVL2 TerminalVL1 TerminalVA4 TerminalVA3 TerminalUpperBase mountingfaceVA1 TerminalVA2 TerminalVR1VR2VR3VR40V (GND)Fig. 9.2 (b) Turbo PCB (A16B–1600–0770) details

  • Page 256

    B–70115EN/039. SETTING AND ADJUSTMENT254The inverter is precisely adjusted at the factory and should not require anyfurther adjustment. If it is replaced, however, the high–frequency invertershould be set and adjusted as described below.The type of the high–frequency inverter varies with t...

  • Page 257

    B–70115EN/039. SETTING AND ADJUSTMENT255(7) Adjust the acceleration/deceleration period.Adjust the period from when the turbo blower starts rotating until therotation stabilizes, and the period from when deceleration starts untilthe turbo blower stops.1) While the inverter output frequency is 0...

  • Page 258

    B–70115EN/039. SETTING AND ADJUSTMENT256Selection of T1 or T10 of the DS1 switch determines the factor ofthe acceleration or deceleration time. When T10 is selected, thetime is multiplied by 10. TX1: 3 to 15 sec TX10: 15 to 150 sec.Set the regulators correctlywith reference to the rele-va...

  • Page 259

    B–70115EN/039. SETTING AND ADJUSTMENT257(1) ConnectionThe following cables are connected to the inverter:R. S. T: Three–phase power supplyU. V. W:Turbo blower power supplyH, O, L:Frequency command1: Reset signal2: Parameter soft lock signal8: Inversion signal11: Frequency reach signalAL0...

  • Page 260

    B–70115EN/039. SETTING AND ADJUSTMENT258D Frequency setting, multi–speed setting or other frequencydisplays, motor rotational speed display, frequency conversiondisplay, or output current display.NOTEWhen conflicting data is set, a warning WARN.... will bedisplayed. For 6 seconds thereaft...

  • Page 261

    B–70115EN/039. SETTING AND ADJUSTMENT259The operator has two modes; MONITOR mode and FUNCTION mode.In the MONITOR mode, the monitor screen to display operation statusappears. In the function mode, the function screen appears. The functionscreen has a hierarchical structure used to change oper...

  • Page 262

    B–70115EN/039. SETTING AND ADJUSTMENT260 Frequency commandDisplays the current frequency command status.Operation modeDisplayMonitor/function modeRemote operatorFRTerminalFTOptional PCB 1F1Optional PCB 2F2" FS0.00 Hz0.00HzAC130.00sOC130.00sMonitor29OR FRST“MONITOR” keyScreen scrolling ...

  • Page 263

    B–70115EN/039. SETTING AND ADJUSTMENT261" 1 Command"2 Initial"3 Function"4 Option"Monitor29OR FRST“FUNCTION” keyFunction mode menuscreen (Function mode 1st layer) Next layer markThis mark indicates that there is one more layer to display. To go tothe next layer, mo...

  • Page 264

    B–70115EN/039. SETTING AND ADJUSTMENT262(3) Parameter settingsThe following table lists the parameters for which the values have beenchanged from the initial values. If the inverter has been shipped alonefrom FANUC, the user must change the parameters as listed below.To change the parameters, ...

  • Page 265

    B–70115EN/039. SETTING AND ADJUSTMENT263220 "12504151"440Monitor (LED display)This display shows frequen-cy, motor current, motor revo-lution speed, and trip historyPOWER LampPower lamp ofcontrol circuitUp key, Down key These keys are usedto change data andincrease or decreasethe freq...

  • Page 266

    B–70115EN/039. SETTING AND ADJUSTMENT264This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the pressure controller is replaced or requiresre–adjustment, however, it should be set and adjusted as described below:(1) Turn the CNC on. Never turn on ...

  • Page 267

    B–70115EN/039. SETTING AND ADJUSTMENT265PRESSURESENSORATMOSPHERICPRESSURE SWITCHLASER GAS PRESSURESWITCHFig. 9.4.2 Pressure control unit sensor layout

  • Page 268

    B–70115EN/039. SETTING AND ADJUSTMENT266This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the exhaust adjustment valve is accidentallytouched or if the exhaust controller is replaced, however, the gas flowshould be checked and the exhaust flow adju...

  • Page 269

    B–70115EN/039. SETTING AND ADJUSTMENT267This coefficient is precisely adjusted at the factory and should not requireany further adjustment. If the rear mirror of the laser oscillator or thepower sensor unit is replaced, however, the power input compensationcoefficient should be checked and set...

  • Page 270

    B–70115EN/039. SETTING AND ADJUSTMENT268This sensor is precisely adjusted at the factory and should not require anyfurther adjustment. If the water distribution unit or water flow sensor isreplaced, however, this sensor should be set and adjusted as describedbelow:(1) Loosen the four bolts sec...

  • Page 271

    B–70115EN/039. SETTING AND ADJUSTMENT269(10) Gradually reduce the flow rate of the water supply. Check the rateat which the switch trips off. Then, gradually increase the flow rate.If the alarm flow rate is within the following range, the sensor isnormal.If the alarm range is exceeded, repeat...

  • Page 272

    B–70115EN/039. SETTING AND ADJUSTMENT270(1) Adjust the flow rate of cooling water flowing into the oscillator to analarm setting flow rate. Use a flowmeter with a proper and accuraterated flow rate.ModelAlarm setting flow rateRated flow rateC2000C50 /min75 /minC3000D79 /min120 /minC4000A120 /m...

  • Page 273

    B–70115EN/039. SETTING AND ADJUSTMENT271If the laser oscillator is not used for a long time (one week or more) or ifthe laser gas circulation system is opened to the atmosphere (when amirror is cleaned or when a component of the gas system is replaced, forexample), aging must be performed befor...

  • Page 274

    B–70115EN/039. SETTING AND ADJUSTMENT272D Manual operationThis method can be used if the machine operator’s panel has aswitch for starting internal discharge manually.1) Enter the desired output and duty cycle on the setting screen.2) Press the internal discharge switch to start internal disc...

  • Page 275

    B–70115EN/039. SETTING AND ADJUSTMENT273Fig. 9.8 (a) Detail of the Cleaner Flange2) Mount the cleaner flange on the oscillator.Be sure to keep the flange in the correct orientation.Figs. 9.8 (b) to 9.8 (h) show the locations where the cleaner flange isto be fastened.Fig. 9.8 (b) Inlet of cleane...

  • Page 276

    B–70115EN/039. SETTING AND ADJUSTMENT274Fig. 9.8 (c) Inlet of cleaner flange in C2000BFig. 9.8 (d) Inlet of cleaner flange in C2000C

  • Page 277

    B–70115EN/039. SETTING AND ADJUSTMENT275Fig. 9.8 (e) Inlet of cleaner flange in C3000CFig. 9.8 (f) Inlet of cleaner flange in C3000D

  • Page 278

    B–70115EN/039. SETTING AND ADJUSTMENT276Fig. 9.8 (g) Inlet of cleaner flange in C4000AFig. 9.8 (h) Inlet of cleaner flange in C6000B3) Start the oscillator, and check it for leakage.Vacuum it twice.

  • Page 279

    B–70115EN/039. SETTING AND ADJUSTMENT2774) Start the oscillator, and keep the turbo blower rotating (LRDY).Leave the oscillator in this state overnight.5) More impurities can be captured by using also discharge aging to raisethe gas temperature.6) When gas flow system aging is completed, stop a...

  • Page 280

    B–70115EN/0310. REPLACEMENT PROCEDURES27810 REPLACEMENT PROCEDURES

  • Page 281

    B–70115EN/0310. REPLACEMENT PROCEDURES279Replace the stabilized power supply as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) Disconnect all cables from the stabilized power supp...

  • Page 282

    B–70115EN/0310. REPLACEMENT PROCEDURES280Replace the FS16–L interface PCBs on the oscillator side as follows:When IF PCB (A02B–0128–C202)(1) Replacing the upper PCB (A16B–1110–0260)1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the...

  • Page 283

    B–70115EN/0310. REPLACEMENT PROCEDURES281A20B–1005–0124Fig. 10.1.4 (a) Removing the IF PCB unit (FS16–L: A02B–0128–C202)Fig. 10.1.4 (b) Removing the PCB from the PCB holder

  • Page 284

    B–70115EN/0310. REPLACEMENT PROCEDURES282Figs. 10.2 (a) to (l) show the laser power supply. Replace the laser powersupply as described below.(1) Replacing the power supply1) Turn off the power to the laser oscillator, then drain the coolingwater.2) Remove the following water joints, power cabl...

  • Page 285

    B–70115EN/0310. REPLACEMENT PROCEDURES2832. Remove the damaged diode by removing the screws and nutsat the both ends. In case of 9 kW power supply at first replace the cooling heatsink and diode plate 1 and 2, then replace the diode block A andB to remove diode.CAUTIONWhen removing a diode, if...

  • Page 286

    B–70115EN/0310. REPLACEMENT PROCEDURES2843. Mount a new FET module PCB, fix it using the six screws, thenconnect the cables.When the 9–kW power supply is being used, connect the CN51or CN52 cable to the new FET PCB securely, then temporarilytighten all the screws so that the FET PCB is free t...

  • Page 287

    B–70115EN/0310. REPLACEMENT PROCEDURES285Fig. 10.2 (a) Laser power supply unit layout (front side): B204, B205Fig. 10.2 (b) Laser power supply unit layout (upside): B204, B205

  • Page 288

    B–70115EN/0310. REPLACEMENT PROCEDURES286Fig. 10.2 (c) Laser power unit layout (inner side): B204, B205Fig. 10.2 (d) Laser power unit layout (inner part details): B204, B205

  • Page 289

    B–70115EN/0310. REPLACEMENT PROCEDURES287Fig. 10.2 (e) Diode unit layout (Fig. 10.2 (d) B part details): B204, B205Fig. 10.2 (f) Diode unit layout (Fig. 10.2 (d) C part details): B204, B205

  • Page 290

    B–70115EN/0310. REPLACEMENT PROCEDURES288Fig. 10.2 (g) FET module PCB layout (Fig. 10.2 (d) A part details): B204, B205Cover mountingscrewCover for XT22Fig. 10.2 (h) Layser PSU layout: B206 to B210

  • Page 291

    B–70115EN/0310. REPLACEMENT PROCEDURES289Diod unit 2Diod unit 1Step up transformer PCBFig. 10.2 (i) Laser PSU internal details: B206 to B208

  • Page 292

    B–70115EN/0310. REPLACEMENT PROCEDURES290F typeR typeCathodCathodAnodeAnodeFig. 10.2 (j) Mounting position of diode: B206 to B208

  • Page 293

    B–70115EN/0310. REPLACEMENT PROCEDURES291Diode plate 1Cooling heat sinkDiode plate 2Diode block ADiode block BDiode block face of ADiode block face of BFiber reinforced plasticFiber reinforced plasticFig. 10.2 (k) Replacing diode: B206 to B208Fig. 10.2 (l) FET PCB heat sink fixing: B206 to B208

  • Page 294

    B–70115EN/0310. REPLACEMENT PROCEDURES292Fig. 10.2 (m) Laser PSU internal details: B209 to B210

  • Page 295

    B–70115EN/0310. REPLACEMENT PROCEDURES293Fig. 10.2 (n) Mounting position of diode: B209 to B210

  • Page 296

    B–70115EN/0310. REPLACEMENT PROCEDURES294Replace the matching box as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) Disconnect the power and signal cables from the matching box.(3...

  • Page 297

    B–70115EN/0310. REPLACEMENT PROCEDURES295When the turbo blower is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.Clean the fla...

  • Page 298

    B–70115EN/0310. REPLACEMENT PROCEDURES2967) Tighten the nut of the damping rubber. Carefully follow theprocedure below to prevent the damping rubber from being twistedand damaged.Tightening procedure (C1500B, C2000B, C2000C, C3000C,C6000B)1. Position the antivibration rubber such that its part...

  • Page 299

    B–70115EN/0310. REPLACEMENT PROCEDURES297Fig. 10.4 Turbo blower layout

  • Page 300

    B–70115EN/0310. REPLACEMENT PROCEDURES298Replace the turbo PCB as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) Disconnect all cables from the turbo PCB.(3) Remove the four screw...

  • Page 301

    B–70115EN/0310. REPLACEMENT PROCEDURES299When the exhaust pump is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.Replace the e...

  • Page 302

    B–70115EN/0310. REPLACEMENT PROCEDURES300Fig. 10.7 Exhaust pump unit layout

  • Page 303

    B–70115EN/0310. REPLACEMENT PROCEDURES301When the pressure control unit is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention to theimmediate surroundings to ensure that dust and other contaminants do notenter the gas circulating system. Re...

  • Page 304

    B–70115EN/0310. REPLACEMENT PROCEDURES302When the exhaust control unit is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention to theimmediate surroundings to ensure that dust and other contaminants do notenter the gas circulating system. Rep...

  • Page 305

    B–70115EN/0310. REPLACEMENT PROCEDURES303Fig. 10.9 (b) Exhaust control unit C2000B, C2000C, C3000D, C4000AFig. 10.9 (c) Exhaust control unit C3000C

  • Page 306

    B–70115EN/0310. REPLACEMENT PROCEDURES304Fig. 10.9 (d) Exhaust control unit C6000B

  • Page 307

    B–70115EN/0310. REPLACEMENT PROCEDURES305When a discharge tube is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.(1) Turn off ...

  • Page 308

    B–70115EN/0310. REPLACEMENT PROCEDURES306The laser oscillator contains many fan units, which are classified into thefollowing two types:(1) Fan unitConsists of several fans and a terminal block.(2) Fan–assisted radiatorConsists of a water–cooled radiator, several fans, and a terminal block....

  • Page 309

    B–70115EN/0310. REPLACEMENT PROCEDURES307The power sensor is a very delicate component. Be careful not to touchor apply force to the black, light–sensitive surface. Also, ensure that nodust enters the sensor.When removing the power sensor unit from the rear mirror or mountingthe unit on the...

  • Page 310

    B–70115EN/0310. REPLACEMENT PROCEDURES308Replace the shutter section as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) The C1500B, C2000B, C2000C, C3000C, C3000D, and C4000A alsor...

  • Page 311

    B–70115EN/0310. REPLACEMENT PROCEDURES309Fig. 10.13.3 (a) C1500B, C2000B, C2000C, C3000C, C3000D, and C4000Ashutter unit layout

  • Page 312

    B–70115EN/0310. REPLACEMENT PROCEDURES310Fig. 10.13.3 (b) Shutter unit layout

  • Page 313

    B–70115EN/0310. REPLACEMENT PROCEDURES311Replace the beam absorber as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) The beam absorber is water–cooled. Drain the water from the...

  • Page 314

    B–70115EN/0310. REPLACEMENT PROCEDURES312Fig. 10.14 (a) Beam absorber layout (C1500B, C2000B, C2000C)3Fig. 10.14 (b) Beam absorber layout (C3000C, C3000D)

  • Page 315

    B–70115EN/0310. REPLACEMENT PROCEDURES313POSITION ADJUSTMENT SCREWTHERMAL SWFig. 10.14 (c) Beam absorber layout (C4000A)

  • Page 316

    B–70115EN/0310. REPLACEMENT PROCEDURES314Fig. 10.14 (d) Beam absorber layout (C6000B)

  • Page 317

    B–70115EN/0310. REPLACEMENT PROCEDURES315Replace the high–frequency inverter as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) Disconnect the cables from the high–frequency in...

  • Page 318

    B–70115EN/0310. REPLACEMENT PROCEDURES316Replace the water distribution unit as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) Drain all cooling water from the oscillator, using c...

  • Page 319

    B–70115EN/0310. REPLACEMENT PROCEDURES317Fig. 10.16 (a) Detail of water destributer unit (C1500B)Refer to water flow diagram (Fig. 7.2 (a)).

  • Page 320

    B–70115EN/0310. REPLACEMENT PROCEDURES318Fig. 10.16 (b) Detail of water destributer unit (C2000B)Refer to water flow diagram (Fig. 7.2 (b)).

  • Page 321

    B–70115EN/0310. REPLACEMENT PROCEDURES319Fig. 10.16 (c) Detail of water destributer unit (C2000C)Refer to water flow diagram (Fig. 7.2 (c)).

  • Page 322

    B–70115EN/0310. REPLACEMENT PROCEDURES320Fig. 10.16 (d) Detail of water destributer unit (C3000C)Refer to water flow diagram (Fig. 7.2 (d)).

  • Page 323

    B–70115EN/0310. REPLACEMENT PROCEDURES321Valve (closed)Position when water is removedValve (open)Normal positionFig. 10.16 (e) Detail of water destributer unit (C3000D)Refer to water flow diagram (Fig. 7.2 (e)).

  • Page 324

    B–70115EN/0310. REPLACEMENT PROCEDURES322Valve (closed)Position when water is removedValve (open)Normal positionFig. 10.16 (f) Detail of water destributer unit (C4000A)Refer to water flow diagram (Fig. 7.2 (f)).

  • Page 325

    B–70115EN/0310. REPLACEMENT PROCEDURES323Fig. 10.16 (g) Detail of distribution unit A (C6000B)Refer to water flow diagram.

  • Page 326

    B–70115EN/0310. REPLACEMENT PROCEDURES324Fig. 10.16 (h) Detail of distribution unit B (C6000B)Refer to water flow diagram.

  • Page 327

    B–70115EN/0310. REPLACEMENT PROCEDURES325Replace the flow sensor as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) Drain all cooling water from the oscillator, using compressed ai...

  • Page 328

    B–70115EN/0310. REPLACEMENT PROCEDURES326Fig. 10.17 (b) Detail of flow sensor (C2000C, C3000D, C4000A, C6000B)

  • Page 329

    B–70115EN/0310. REPLACEMENT PROCEDURES327Replace the Dew sensor as follows:(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2) Disconnect the dew sensor Faston terminal from the terminal block...

  • Page 330

    B–70115EN/0310. REPLACEMENT PROCEDURES328Use the procedure below for trigger electrode replacement.(1) Turn off the power to the CNC, then turn off the main circuit breakerand power supply.(2) Remove bolt and screw , then remove the trigger electrode.(3) Check that O–ring is set in the nozz...

  • Page 331

    B–70115EN/0310. REPLACEMENT PROCEDURES329 Trigger electrode Feeder Feeder mounting screw Trigger electrode mounting screw O–ring (P10) Discharge tube nozzle AFig. 10.20 Trigger electrode replacement

  • Page 332

    B–70115EN/0311. LASER OPTICAL SYSTEM33011 LASER OPTICAL SYSTEMTable 11 lists the optical parts and their features. Use this table todetermine the feature of each optical part. When mounting these parts,be careful to orient them correctly and ensure that they are being mountedon compatible uni...

  • Page 333

    B–70115EN/0311. LASER OPTICAL SYSTEM331The optical parts in the laser oscillator, including the output mirror, rearmirror, folding mirrors, and circular polarization mirror, must be cleanedor replaced periodically. Similarly, if the laser output or beam modepattern becomes abnormal, the optica...

  • Page 334

    B–70115EN/0311. LASER OPTICAL SYSTEM332Fig. 11.1 (a) Structure of diagram output coupler (C1500B, C2000B, C2000C)

  • Page 335

    B–70115EN/0311. LASER OPTICAL SYSTEM333Fig. 11.1 (b) Structure of diagram rear mirror (C1500B, C2000B, C2000C)

  • Page 336

    B–70115EN/0311. LASER OPTICAL SYSTEM334Fig. 11.1 (c) Structure of diagram output coupler (C3000C, C3000D, C4000A, C6000B)

  • Page 337

    B–70115EN/0311. LASER OPTICAL SYSTEM335Fig. 11.1 (d) Structure of diagram rear mirror (C3000C, C3000D, C4000A, C6000B)

  • Page 338

    B–70115EN/0311. LASER OPTICAL SYSTEM336To clean the output coupler, follow the procedure given below. Since itis necessary to touch the optical parts and vacuum parts while cleaningthe output coupler, wear clean gloves or finger cots. Do not touch theseparts with your bare hands.The output co...

  • Page 339

    B–70115EN/0311. LASER OPTICAL SYSTEM337Fig. 11.1.1 (a) Cleaning mirror 1Fig. 11.1.1 (b) Cleaning mirror 2Fig. 11.1.1 (c) Cleaning mirror 3

  • Page 340

    B–70115EN/0311. LASER OPTICAL SYSTEM338Fig. 11.1.1 (d) Schematic diagram of mounting of output coupler/rear mirror to the holder

  • Page 341

    B–70115EN/0311. LASER OPTICAL SYSTEM339(8) Move the lens cleaning paper horizontally to and fro across themirror.NOTESince the lens cleaner has a high surface tension, it may bedifficult to move the cleaning paper. As the paper is slowlymoved to and fro across the mirror, however, the ethylalc...

  • Page 342

    B–70115EN/0311. LASER OPTICAL SYSTEM340To clean the rear mirror, follow the procedure given below. Since it isnecessary to touch optical parts and vacuum parts while cleaning the rearmirror, wear clean gloves or finger cots. Do not touch these parts directlywith your bare hands.Before startin...

  • Page 343

    B–70115EN/0311. LASER OPTICAL SYSTEM341NOTESince the lens cleaner has a high surface tension, it may bedifficult to move the cleaning paper. As the paper is slowlymoved to and fro across the mirror, however, the ethylalcohol will gradually evaporate.(9) Blow clean air (using, for example, a ca...

  • Page 344

    B–70115EN/0311. LASER OPTICAL SYSTEM342To clean the folding mirrors, follow the procedure given below. Since itis necessary to touch the optical parts and vacuum parts while cleaningthe folding mirrors, wear clean gloves or finger cots. Do not touch theseparts with your bare hands.Before star...

  • Page 345

    B–70115EN/0311. LASER OPTICAL SYSTEM343(11) When replacing a mirror, remove the mirror from its holder. Sincevacuum grease is applied to the rear of the mirror, insert a tool suchas a standard screwdriver into the slot on the side plane of the mirrormounting section, and pry out the mirror. B...

  • Page 346

    B–70115EN/0311. LASER OPTICAL SYSTEM344O–RING (G55)FOLDING MIRROR UNITFOLDING MIRRORMIRROR HOLDERMIRROR HOLDER ATTACHMENT SCREWFig. 11.1.3 (a) Structure diagram of folding mirror unit

  • Page 347

    B–70115EN/0311. LASER OPTICAL SYSTEM345FOLDING MIRROR UNITFOLDING MIRRORO–RING (G65)MIRROR HOLDERMIRROR HOLDER ATTACHMENT SCREWFig. 11.1.3 (b) Structure diagram of folding mirror unit: C6000BThe zero–shift mirror and circular polarization mirror are used in theoptical path length unit, ins...

  • Page 348

    B–70115EN/0311. LASER OPTICAL SYSTEM346[Procedure](1) Turn off the power to the CNC, then open the main circuit breaker orturn off the power supply of the laser oscillator.(2) Remove the mirror holder from the block (alignment unit) byloosening the mirror holder mounting screw.(3) Remove the mi...

  • Page 349

    B–70115EN/0311. LASER OPTICAL SYSTEM347The internal surfaces of the output mirror and rear mirror are concave. Forlaser oscillation, the curvature centers and mirror surfaces of the twomirrors must lie on the same axis. When this axis matches the tube axisof the discharge tubes, in other word...

  • Page 350

    B–70115EN/0311. LASER OPTICAL SYSTEM3484) Obtain a maximum power based on the folding mirror (FM1) byusing the folding mirror (FM4) as the reference.5) Collect a burn pattern. If the mode is good, end this procedure. Ifnot, start all over again from step 1). At this time, collect a burnpatte...

  • Page 351

    B–70115EN/0311. LASER OPTICAL SYSTEM3495) Collect a burn pattern. If the mode is good, end this procedure. Ifnot, start all over again from step 1). At this time, collect a burnpattern in each step. If the mode is finally good, end this procedure.FM5FM6R.M.FM4FM2ÌÌÌÌÌÌÌÌO.C.FM3FM1Be...

  • Page 352

    B–70115EN/0311. LASER OPTICAL SYSTEM3505) Obtain a maximum power based on O.C. by using R.M. as thereference. Then, repeat this procedure starting with step 2). At thistime, collect a burn pattern in each step. If the mode is finally good,end this procedure.(5) C4000A1) Obtain a maximum powe...

  • Page 353

    B–70115EN/0311. LASER OPTICAL SYSTEM351(1) Minimize the output power of internal discharge. If a large output isused, the mode present when a maximum power is obtained is notalways the best mode due to thermal distortion of each mirror.However, a capability of detecting an output variation due...

  • Page 354

    B–70115EN/0311. LASER OPTICAL SYSTEM352(1) For information about burn pattern collection, see Section 4.3(1).(2) In the automatic operation mode, execute the program below to emita laser beam to an acrylic block.[Example of program: For the C1500B]G32 P1 Q1;G24 S1500 Q100 R4.0;G32 P0;M30;In...

  • Page 355

    B–70115EN/0311. LASER OPTICAL SYSTEM353Do not determine the maximum power position of A at the actualmaximum power point (peak point). Instead, find the first position 1’with the same power after a peak, and set a position halfway between1 and 1’. Adjust B to obtain a maximum power at tha...

  • Page 356

    B–70115EN/0311. LASER OPTICAL SYSTEM354ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE ...

  • Page 357

    B–70115EN/0311. LASER OPTICAL SYSTEM355ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE ...

  • Page 358

    B–70115EN/0311. LASER OPTICAL SYSTEM356ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (FM1)FOLDING MIRROR SIDE (FM2)FOLDING MIRROR SIDE (FM3)FOLDING MIRROR SIDE (FM4)...

  • Page 359

    B–70115EN/0311. LASER OPTICAL SYSTEM357ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (FM1)FOLDING MIRROR SIDE (FM2)FOLDING MIRROR SIDE (FM3)FOLDING MIRROR SIDE (FM4)...

  • Page 360

    B–70115EN/0311. LASER OPTICAL SYSTEM358ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (FM1)FOLDING MIRROR SIDE (FM2)FOLDING MIRROR SIDE (FM3)FOLDING MIRROR SIDE (FM4)...

  • Page 361

    B–70115EN/0311. LASER OPTICAL SYSTEM359REAR MIRROR SIDE (R.M.)OUTPUT COUPLER SIDE (O.C.)FOLDING MIRROR SIDE (FM1)ADJUSTMENT SCREW OFALIGNMENT (m: X AXIS)ADJUSTMENT SCREW OFALIGNMENT (n: Y AXIS)ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)ADJUSTMENT SCREW OFALI...

  • Page 362

    B–70115EN/0311. LASER OPTICAL SYSTEM360(1) Attach an acrylic plate approximately 3 to 10 m from the outlet of thelaser oscillator, and obtain a burn pattern for the CO2 laser beam (oneshot, rated output, CW 100%, 0.1–second duration). Do not attemptto touch the plate immediately after the pa...

  • Page 363

    B–70115EN/0311. LASER OPTICAL SYSTEM361Fig. 11.2.2.2 Laser diode unit (A04B–0811–D401)

  • Page 364

    B–70115EN/0311. LASER OPTICAL SYSTEM362The oscillators of the short optical path types and the C3000C of longoptical path type contain a beam folding unit to divert the laser beamwithin the oscillator. If the beam output direction changes as a result ofaligning the resonator, the beam folding ...

  • Page 365

    B–70115EN/0311. LASER OPTICAL SYSTEM363Fig. 11.2.3 (a) Corner reflectors unit (C1500B, C2000B, C2000C)

  • Page 366

    B–70115EN/0311. LASER OPTICAL SYSTEM364Fig. 11.2.3 (b) Corner reflectors unit (C3000C, C3000D, C4000A, Short optical path length type)

  • Page 367

    B–70115EN/0311. LASER OPTICAL SYSTEM365Fig. 11.2.3 (c) Corner reflectors unit (C3000C, Long optical path length type)

  • Page 368

    APPENDIX

  • Page 369

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX369A EXTERNAL VIEW

  • Page 370

    APPENDIXB–70115EN/03A. EXTERNAL VIEW370Fig. A (a) C1500B (short optical path length type)

  • Page 371

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX371Fig. A (b) C1500B (long optical path length type)

  • Page 372

    APPENDIXB–70115EN/03A. EXTERNAL VIEW372Fig. A (c) C2000B (short optical path length type)

  • Page 373

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX373Fig. A (d) C2000B (long optical path length type)

  • Page 374

    APPENDIXB–70115EN/03A. EXTERNAL VIEW374Fig. A (e) C2000C (short optical path length type)

  • Page 375

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX375Fig. A (f) C2000C (long optical path length type)

  • Page 376

    APPENDIXB–70115EN/03A. EXTERNAL VIEW376Fig. A (g) C3000C (short optical path length type, resonator section)

  • Page 377

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX377Fig. A (h) C3000C (Long optical path A type)

  • Page 378

    APPENDIXB–70115EN/03A. EXTERNAL VIEW378Fig. A (i) C3000C (Long optical path B type)

  • Page 379

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX379Fig. A (j) C3000C (auxiliary equipment section)

  • Page 380

    APPENDIXB–70115EN/03A. EXTERNAL VIEW380Fig. A (k) C3000D (short optical path length type)

  • Page 381

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX381Fig. A (l) C3000D (long optical path B type)

  • Page 382

    APPENDIXB–70115EN/03A. EXTERNAL VIEW382Fig. A (m) C4000A (short optical path length type)

  • Page 383

    B–70115EN/03A. EXTERNAL VIEWAPPENDIX383Fig. A (n) C4000A (long optical path B type)

  • Page 384

    APPENDIXB–70115EN/03A. EXTERNAL VIEW384Fig. A (o) C6000B

  • Page 385

    B–70115EN/03B. FANUC LASER C SERIES SPECIFICATIONSAPPENDIX385B FANUC LASER C SERIES SPECIFICATIONS

  • Page 386

    APPENDIXB–70115EN/03B. FANUC LASER C SERIES SPECIFICATIONS386ItemC1500B(shortoptical path)C1500B(longoptical path)C2000B(shortoptical path)C2000B(longoptical path)C2000C(shortoptical path)C2000C(longoptical path)TypeC1500BC2000BC2000CMethodHigh–speed axial carbon dioxide gas laser using high...

  • Page 387

    B–70115EN/03B. FANUC LASER C SERIES SPECIFICATIONSAPPENDIX387ItemC3000C(short optical path)C3000C(long optical path)C3000D(short optical path)C3000D(long optical path)TypeC3000CC3000DMethodHigh–speed axial carbon dioxide gas laser using high–frequency discharge excitationStructureOscillator...

  • Page 388

    APPENDIXB–70115EN/03B. FANUC LASER C SERIES SPECIFICATIONS388ItemC4000A(short optical path)C4000A(long optical path)C6000BTypeC4000AC6000BMethodHigh–speed axial carbon dioxide gas laser using high–frequency discharge excitationStructureCombination resonator/power supply typeRated laser outp...

  • Page 389

    B–70115EN/03C. ERROR CODE LISTAPPENDIX389C ERROR CODE LISTNo.16L0LContentsAlarm level4061661Anomaly in AD converter 1ALARM 14062662Anomaly in AD converter 2ALARM 14063663Anomaly in RF/DC power unitALARM 24065665Anomaly in shutter actionALARM 24066666There exists discharge tube withoutdischargeA...

  • Page 390

    APPENDIXB–70115EN/03C. ERROR CODE LIST390No.Alarm levelContents16LAlarm levelContents0L4085685Decrease of laser outputWarning can bereset4087687Overheat in shutter mirrorALARM 24088688Decrease of discharge tube voltageALARM 14089689Selection signal of assist gas not com-manded (in beam on state...

  • Page 391

    B–70115EN/03D. PARAMETERSAPPENDIX391D PARAMETERSThis appendix describes the parameters related to sequence control insidethe laser oscillator and laser cutting conditions for FS16–L, FS16i–L, andFS0–L.Many parameters are specific to one type of laser oscillator and onemachine. So, the us...

  • Page 392

    APPENDIXB–70115EN/03D. PARAMETERS392Parameter numbers starting from 15000 are used for the FS16–L orFS16i–L. Those starting from 0200 or 3900 are used for the FS0–L.No.Parameter description#715000#6#5FLTFLT#4CLBCLB#3BMOBMO#2AGAAGA#1LGCLGC#0LPCLPC0200FLT 1 : filter in power control valid ...

  • Page 393

    B–70115EN/03D. PARAMETERSAPPENDIX393LGC 1 : Two stage gain selection of intra–tubePressure control valid (usually)0 : Invalid(When this bit is 1, PRM No. 15245 [207] becomes valid.)When this bit is 1, different control gains are used in the pressure controlin discharge start preparation compl...

  • Page 394

    APPENDIXB–70115EN/03D. PARAMETERS394#715002#6PSHC10M#5BMA#4#3#2PCGGVW#1ADC#0BMA3979BMA 1 : Enables beam output with the shutter closed in the automaticoperation mode (for maintenance).0 : Disables beam output with the shutter closed in the automaticoperation mode (standard).PCG 1 : Performs hig...

  • Page 395

    B–70115EN/03D. PARAMETERSAPPENDIX395#7CWY15004#6ECH#5#4EDG#3BMC#2SPB#1STC#0AGCAGC 1 : Controls machining pressure for the set time.0 : Uses a flow pattern.STC 1 : Controls the shutter with an external signal.0 : Controls the shutter with a G code.SPB 1 : Outputs no beam in skip operation.0 : Ou...

  • Page 396

    APPENDIXB–70115EN/03D. PARAMETERS396#715006#6#5#4PCL#3#2PIN#1TRM#0TRM 1 : Disables the start–point and end–point soft keys for the trace settingscreen.0 : Enables the start–point and end–point soft keys for the trace settingscreen.PIN 1 : Specifies a G13 address using inch input.0 : Spe...

  • Page 397

    B–70115EN/03D. PARAMETERSAPPENDIX397#7TEM15009#6BCG#5BEM#4AFZ#3BS2#2BS1#1AS2#0AS1This parameter is used for the laser gas mixing function to record andmonitor the operating state of the mixer. This parameter is automaticallyset, so this parameter need not be set manually.AS2,AS1 The state of t...

  • Page 398

    APPENDIXB–70115EN/03D. PARAMETERS398#7PS815025#6PS7#5PS6#4PS5#3PS4#2PS3#1PS2#0PS1#7PS1615026#6PS15#5PS14#4PS13#3PS12#2PS11#1PS10#0PS9PS1 – 16 Discharge tube selection when half of the discharge tubes are used[How to set] Select desired discharge tubes when half of the discharge tubes integrat...

  • Page 399

    B–70115EN/03D. PARAMETERSAPPENDIX39915040LPWRLPWR0204LPWR Power output setting for contour processing (cutting/welding) (Setting data)[Setting range] 0 to 7000[Unit] WATT[How to set] This parameter can be set in laser setting screen and processing program.15041LHZLHZ0205LHZ Pulse frequency sett...

  • Page 400

    APPENDIXB–70115EN/03D. PARAMETERS40015050EDANGEDANG Edge detection angleA corner is assumed to be present when the angle formed by two blocks issmaller than the specified angle.[Setting range] 0 to 180[Unit] deg15051PCPWRPCPWR Peak piercing power valueSet a peak power value for piercing to be p...

  • Page 401

    B–70115EN/03D. PARAMETERSAPPENDIX401[Setting range] 0 to 255[Unit] 0.01 MPa15056EPCAGSEPCAGS Type of piercing assist gasSet a type of assist gas to be used for piercing.[Setting range] 0 to 715057ERTLGHERTLGH Return distanceSet a return distance from the top of a corner to the next block.[Setti...

  • Page 402

    APPENDIXB–70115EN/03D. PARAMETERS40215070LPWRPLPWRP0227LPWRP selection of laser power for piercing (Setting data)[Setting range] 0 to 7000[Unit] WATT[How to set] This parameter can be set in laser setting screen or processing program.15071LHZPLHZP0228LHZP Selection of pulse frequency for pierci...

  • Page 403

    B–70115EN/03D. PARAMETERSAPPENDIX40315080HPPWRHPPWR High–speed piercing power[Setting range] 0 to 7000[Unit] Watt15081HPFRQHPFRQ Initial high–speed piercing frequency[Setting range] 5 to 2000[Unit] Hz15082STFRQSTFRQ Incremental high–speed piercing frequency[Setting range] 0 to 2000[Unit] ...

  • Page 404

    APPENDIXB–70115EN/03D. PARAMETERS40415086STPNMSTPNM Number of high–speed piercing steps[Setting range] 0 to 3276715087HPTIMHPTIMHigh–speed piercing end time[Setting range] 0 to 9999999[Unit] msec

  • Page 405

    B–70115EN/03D. PARAMETERSAPPENDIX405#715088#6#5#4#3#2#1#0IPCIPC For power control mode specification (models A and B):0 : The format for specifying S and F in the same block is used.1 : The format for specifying G63 or entering the external signal(G224#1) is used.#7LP815089#6LP7#5LP6#4LP5#3LP4#...

  • Page 406

    APPENDIXB–70115EN/03D. PARAMETERS40615093LDTY0LDTY00244LDTY0 Power control constantWhen power control has been enabled with bit 0 of PRM No. 15000 [200],power control is performed according to the value of LDTY0. LDTY0 isused to specify the duty ratio when the feedrate is 0, thus enablingmodif...

  • Page 407

    B–70115EN/03D. PARAMETERSAPPENDIX407#715096#6#5#4#3#2PCD#1PCF#0PCPPCP 0 : Does not exercise feedrate–based output control in newly specifiedpower control.1 : Exercises feedrate–based output control in newly specified powercontrol.PCF 0 : Does not exercise feedrate–based frequency control ...

  • Page 408

    APPENDIXB–70115EN/03D. PARAMETERS40815100LAGASLLAGASL0214LAGASL Selection of assist gas (Setting data)[Setting range] 0 to 7[How to set] This parameter can be set either in laser setting screen or in materialprocessing program.15101LAFWSLLAFWSL0225LAFWSL Selection of flow pattern (Setting data)...

  • Page 409

    B–70115EN/03D. PARAMETERSAPPENDIX40915114LAGPR1LAGPR1021515115LAGPR2LAGPR2021615116LAGPR3LAGPR30217LAGPR1, 2, 3 Pre–flow pressure 1, 2, 3 (Setting data)[Setting range] 0 to 255[Unit] 0.01 MPa[How to set] This parameter can be set in laser setting screen.15120LAGEX1LAGEX1021815121LAGEX2LAGEX20...

  • Page 410

    APPENDIXB–70115EN/03D. PARAMETERS41015132AGPSTAGPST3990AGPST Maximum assist gas pressureSet an assist gas pressure (MPa) at which 12.5 V is output.[Setting range] 0 to 255[Unit] MPa[Standard setting] 25515135AGTIMAGTIM Assist gas pressure set timeSet a desired assist gas pressure set time.[Sett...

  • Page 411

    B–70115EN/03D. PARAMETERSAPPENDIX41115150LTTIMELTTIME0187LTTIME Laser RUN ON timeA cumulative RUN ON time is automatically set.[Setting range] 0 to 99999999[Unit] 0.1 hourStandard setting: Automatically set15151VPTIMEVPTIME Vacuum pump operation timeA cumulative vacuum pump operation time is a...

  • Page 412

    APPENDIXB–70115EN/03D. PARAMETERS41215200LPCMD1LPCMD1 Power used for power calibration factor determination when half of thedischarge tubes are usedSet a power to find the power calibration factor when half of the dischargetubes are used.[Setting range] 0 to 32767[Unit] WATT[Standard setting] R...

  • Page 413

    B–70115EN/03D. PARAMETERSAPPENDIX4130232LPCMD3LPCMD3 Power command for power calibration in mode of 8 discharge tubes.This is power command for power calibration in mode of 8 dischargetubes.Duty is 100%.[Setting range] 0 to 32767[Unit] WATT[Standard setting] Refer to the parameter data sheet de...

  • Page 414

    APPENDIXB–70115EN/03D. PARAMETERS41415207PCLMTPCLMT3986PCLMT Maximum specifiable power If a specified laser power after power compensation and power feedbackprocessing exceeds the setting in this parameter, the laser power isclamped to the setting.[Setting range] 0 to 32767[Unit] WATT[Standard ...

  • Page 415

    B–70115EN/03D. PARAMETERSAPPENDIX415[Unit] WATT[Standard setting] Refer to the parameter data sheet delivered with the machine.15212PPCLMTPPCLMT Maximum specifiable power when the duty ratio is not clampedIf PRM No. 15213 does not clamp the duty ratio to 50%, and a specifiedpower after power co...

  • Page 416

    APPENDIXB–70115EN/03D. PARAMETERS41615220LVICMDLVICMD0247LVICMD Maximum bias command at discharge startDischarge current command is given when discharge start signal (HVON)is commanded in discharge preparation completion (LRDY) state to startdischarge. This command is increased by ramp.Command...

  • Page 417

    B–70115EN/03D. PARAMETERSAPPENDIX41715223LVCMDLVCMD0250LVCMD Bias command in oscillator preparation completion stateAfter the start of discharge is confirmed, the bias voltage of dischargecurrent command is replaced by this parameter. This replacement isperformed during a rise in the gas press...

  • Page 418

    APPENDIXB–70115EN/03D. PARAMETERS41815240LEXPSLEXPS0235LEXPS Negative pressure in exhaust completionThis is the ultimate vacuu when gas flow system is evacuated in laser[Starting range] 0 to 32767[Unit] 13 Pa[Standard setting] Refer to the parameter data sheet delivered with the machine.15241LP...

  • Page 419

    B–70115EN/03D. PARAMETERSAPPENDIX4190236LPPSLPPS Intra–tube pressure during oscillationThis is intra–tube gas pressure in laser preparation completion (LSTR)state.[Unit] 13 Pa[Standard setting] Refer to the parameter data sheet delivered with the machine.15244LCCGNLCCGN0264LCCGN Gas pressur...

  • Page 420

    APPENDIXB–70115EN/03D. PARAMETERS42015248GPNRAVGPNRAV4399GPNRAV Allowable gas pressure insufficiencyThe insufficient gas pressure alarm is issued when the gas pressure in thedischarge tube does not reach [(specified tube pressure for oscillation) –(this allowable value)].[Setting range] 0 to ...

  • Page 421

    B–70115EN/03D. PARAMETERSAPPENDIX42115257VIBCNTVIBCNT Number of abnormal vibrations detectedIf the number of abnormal vibrations detected exceeds the value specifiedin this parameter, an abnormal vibration alarm is issued.[Setting range] 0 to 32767[Unit] Number[Standard setting] 3015258LGPTCLGP...

  • Page 422

    APPENDIXB–70115EN/03D. PARAMETERS42215265PWRUPPWRUP3982PWRUP Maximum allowable power increaseIf the actual power exceeds the specified power by the value specified inthis parameter, a beam reflection error is reported.[Setting range] 0 to 32767[Unit] WATT[Standard setting] Refer to the prameter...

  • Page 423

    B–70115EN/03D. PARAMETERSAPPENDIX42315270NRMLTVNRMLTV0199NRMLTV Discharge tube voltage in normal operation In this parameter, the voltage to be applied to the discharge tube in normalbase discharge is set. The value set in this parameter serves as thereference voltage used for discharge tube v...

  • Page 424

    APPENDIXB–70115EN/03D. PARAMETERS42415276GCHTMGCHTM3992GCHTM Laser gas replacement timeSet a time for laser gas replacement in laser start operation.[Setting range] 0 to 32767[Unit] sec[Standard setting] Refer to the parameter data sheet delivered with the machine.

  • Page 425

    B–70115EN/03D. PARAMETERSAPPENDIX42515280LPCPW115281LPCPW2LPCPW1 Table interval when half of the discharge tubes are usedSet a power command setting interval.[Setting range] 30 to 1200[Standard setting] Refer to the parameter data sheet delivered with the machine.LPCPW2 Table interval when all ...

  • Page 426

    APPENDIXB–70115EN/03D. PARAMETERS42615295LPCP15LPCP25028215296LPCP16LPCP26028315297LPCP17LPCP27028415298LPCP18LPCP280285LPCP20–28 Power command in mode of 4 discharge tubesPower command is increased by increment of PRM No. 15280[266] formode of 4 discharge tubes starting from 0.[Setting range...

  • Page 427

    B–70115EN/03D. PARAMETERSAPPENDIX42715320LPCDLPCD2C Command power for power calibration coefficient calculation (validwhen EGE = 1)If the automatic aging function is enabled, a power calibration coefficientis calculated after aging ends.[Setting range] 0 to 7000[Unit] W[Standard setting] Refer ...

  • Page 428

    APPENDIXB–70115EN/03D. PARAMETERS42815324LPSCLPSC Intra–tube pressure setting at oscillation time for power calibrationcoefficient calculation (50 Hz) (valid when EGE = 1)For an oscillator with an inverter mounted, the same value as parameterNo. 15325 is to be set.This parameter specifies a v...

  • Page 429

    B–70115EN/03D. PARAMETERSAPPENDIX42915328LDCD2ELDCD2E Pulse duty cycle command for aging (valid when EGE = 1)This parameter specifies a duty cycle to be used when aging is performedwith the automatic aging function.[Setting range] 0 to 100[Unit] %[Standard setting] 5015329PLCTMEPLCTME Power com...

  • Page 430

    APPENDIXB–70115EN/03D. PARAMETERS43015332LFCMD2LFCMD2 Oscillation frequency command value for power calibration[Setting range] 5 to 2000[Unit] Hz[Standard setting] 10015333LDCMD2LDCMD2 Pulse duty cycle command during power calibration and aging[Setting range] 0 to 100[Unit] %[Standard setting] ...

  • Page 431

    B–70115EN/03D. PARAMETERSAPPENDIX43115338LOFTIMHLOFTIMH Aging time data 4 (valid when EGE = 1)When the automatic aging function is enabled, the hour when theoscillator was stopped previously is recorded.[Setting range] 0 to 24 (Automatically set by the CNC)

  • Page 432

    APPENDIXB–70115EN/03D. PARAMETERS43215500KEKE0252KE Detector gain factorThis parameter sets a gain factor for the displacement detector in Z–axistracing control.[Setting range] 2048 (0.5 212) to 6144 (1.5 212)[Standard setting] 4096NOTEThis parameter can be set on the tracer setting scree...

  • Page 433

    B–70115EN/03D. PARAMETERSAPPENDIX43315504EMULEMUL0295EMUL Displacement multiplication factorSet a displacement multiplication factor to match a greater value to bedetected in tracing control. (Usually, 1 is set.)[Setting] 1 or 5[Standard setting] 1Set valueMaximum displacement(mm)Resolution(mm...

  • Page 434

    APPENDIXB–70115EN/03D. PARAMETERS434#715510#6#5TRA#4#3#2#1#0TRA 1 : Uses an absolute coordinate system to display the current position onthe tracer setting screen.0 : Uses a relative coordinate system to display the current position onthe tracer setting screen.D.18PARAMETERS FORTRACING (DISPLAY)

  • Page 435

    B–70115EN/03D. PARAMETERSAPPENDIX43515510INTGTINTGT0255INTGT Integral time constantSet an integral time constant for integral processing of deviations inZ–axis tracing control.[Setting range] 0 to 32767[Unit] msec[Standard setting] 015511ZRWTHZRWTH0256ZRWTH Integral compensation zero widthSet...

  • Page 436

    APPENDIXB–70115EN/03D. PARAMETERS43615520ISOUTISOUT0257ISOUT Phase compensation time constantSet a time constant for displacement phase compensation in Z–axistracing control.[Setting range] 0 to 32767[Unit] msec[Standard setting] 0 (Values of less than 2 are invalid.)15521CMPGCMPG0258CMPG Pha...

  • Page 437

    B–70115EN/03D. PARAMETERSAPPENDIX43715530NMDEFNMDEF0224NMDEF Reference displacement Set a reference distance to be controlled from the quill top to a workpieceto be controlled in Z–axis tracing control.[Setting range] PRM No. 15531 [260] to PRM No. 15532 [261][Unit] 0.001 mmNOTEThis parameter...

  • Page 438

    APPENDIXB–70115EN/03D. PARAMETERS438[Setting range] 0 to 32767[Unit] 0.001 mm[Standard setting] 120015537EOVRSEOVRS3987EOVRS Detection displacement for issuing the tracing range exceeded alarm In Z–axis tracing control, when the absolute value,DE, of a tracingdeviation (detection displacement...

  • Page 439

    B–70115EN/03D. PARAMETERSAPPENDIX43915540ZTCGMZTCGM029615541WTCGMWTCGM398415542XTCGM15543YTCGMZTCGM Conversion factor for feedrate control voltage in Z–axis tracing controlWTCGM Conversion factor used to convert a voltage for feedrate specification inW–axis tracing controlXTCGM Conversion f...

  • Page 440

    APPENDIXB–70115EN/03D. PARAMETERS44015550APRCHAPRCH0251APRCH Approach completion detection rangeSet a range of displacements assumed to represent approach completionin Z–axis tracing control. Approach completion is assumed when thestate where displacements lie within a specified approach com...

  • Page 441

    B–70115EN/03D. PARAMETERSAPPENDIX441#7815700#67#56#45#34#2Z#1Y#0XX – 8 Set axes required to calculate a move command for a mirror movementaxis.1 : Used for move command calculation0 : Not used for move command calculationNOTESet the bits for nonexistent axes to 0.#7815701#67#56#45#34#2Z#1Y#0X...

  • Page 442

    APPENDIXB–70115EN/03D. PARAMETERS44215704MIRCOMMIRCOM Mirror block axis reference position compensation When correcting the mirror block axis position to obtain an optimumpropagation distance, set the distance from the origin in this parameter.[Setting range]"32767[Unit] mm[Standard settin...

  • Page 443

    B–70115EN/03D. PARAMETERSAPPENDIX44315710BMBCTMBMBCTM4390BMBCTM External piping exhaust time[Setting range] 0 to 32767[Unit] sec[Standard setting] 10 (2/m pipe length)15711GMMWTGMMWT4411GMMWT Gas mixture wait time[Setting range] 0 to 32767[Unit] min[Standard setting] 6015712GMVWTGMVWT4412GMVWT ...

  • Page 444

    APPENDIXB–70115EN/03D. PARAMETERS44415715VCCKPRVCCKPR Vacuum criteria gas pressure[Setting range] 0 to 32767[Unit] 13 Pa[Standard setting] 10015716TVTMRTVTMR4391TVTMR Evacuation wait time[Setting range] 0 to 32767[Unit] min[Standard setting] Refer to the parameter data sheet delivered with the ...

  • Page 445

    B–70115EN/03D. PARAMETERSAPPENDIX445#715800#6#5#4#3#2#1#0TPCTPC 0 : Disables the turbo blower constant power drive control function.1 : Enables the turbo blower constant power drive control function.15801LPPSMLPPSM Maximum intra–tube pressure when the turbo blower constant powerdrive control ...

  • Page 446

    APPENDIXB–70115EN/03D. PARAMETERS44615804TPWTPW Maximum open time of the exhaust valve for intra–tube pressure controlat oscillation time[Unit] msec[Setting range] 0 to 3000

  • Page 447

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX447E CONTROL SEQUENCES IN LASER OSCILLATOR

  • Page 448

    APPENDIXB–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATOR448SEQ 0PURGELRDY=0PTLPLSTR=0=0=0POWER ONSEQ 10PURGELRDY=0PTLPLSTR=1=0=0POWER OFFINITIALRUN ONSEQ 11(WAIT = 1)RUN OFFSEQ 20PURGELRDY=1PTLPLSTR=0=0=0HV ONSEQ 19(WAIT = 1)READY OF DISCHARGINGSEQ 21(RFHV = 0)SEQ 29(RFHV = 1)HV OFFSEQ 30PU...

  • Page 449

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX449[SEQ 0] POWER OFF stateThis is the state prior to power on where all the signals are in off state.[SEQ 10] INITIAL stateAfter power is turned on, laser comes into PURGE=1 state. This signalis on when atmospheric pressure sensor m...

  • Page 450

    APPENDIXB–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATOR450Intra–tube gas pressure control is performed in the following steps asshown in the figure.PRM15256SQ18SQ20SQ26SQ27SQ28SQ30 SQ23SQ20SQ12SQ16SQ17SQ49SQ13 GAS PRESSUREPRM1524215243[236]PRM15241[237]PRM15240[235]RUNON45)70secHV ONLSTR...

  • Page 451

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX451[SQ 10]This is the state after power is turned on in which intra–tube gas pressureequals atmospheric pressure.[SQ16, 17, 18]Setting the laser start switch (RUN) to ON starts evacuation, whichcontinues until the pressure designated...

  • Page 452

    APPENDIXB–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATOR452[SQ49, 13, 12]In the SQ20 state, setting the laser start switch (RUN key) to OFFterminates gas pressure control, after which the turbo blower is shutdown, taking about 70 seconds to stop. If evacuation after RUN OFF hasbeen enabled...

  • Page 453

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX453The control of tube voltage is done simultaneously with that of gaspressure as shown in Fig. E.3 in the following sequences.H.V.ONSQ20PRM15222(PRM249)PRM15249(20sec)PRM15205(PRM3991)[TIME]PRM15200, 15201(PRM231, 232)PRM15220(PRM247)...

  • Page 454

    APPENDIXB–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATOR454[SQ 291]When HV is turned on, high voltage is applied to discharge tubes andvoltage control begins. Here command is increased in ramp mode up tothe value of PRM 15220 [247] (maximum bias command at dischargestart). The time require...

  • Page 455

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX455[SQ 294]When normal base discharge is confirmed and PRM15000 bit 4 [200 bit4] is 1 (power calibration is done), this sequence begins to obtain powercalibration coefficient. Power calibration is to calibrate so that real andcommand p...

  • Page 456

    APPENDIXB–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATOR456RUN = ONNOYESPower ON sequencePURGEOFI= OFF= ONAlarm 1 monitortreatment startPCROFI= ON= OFFPURGEWAIT= ON= OFFCLON= ONWait for 3 secondsRPA = ONCAMCON = FULL OPENChiller monitor startTIMER A = RESETWait for 3 seconds1PURGE=ONThis si...

  • Page 457

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX457TIMER A RESETThis timer begins counting after the start ofevacuation.21VEN= ONPCL= OFFWait for 5 secondsGRDY = ONGRDY= OFFCAMCON = FULL CLOSENOYESIntra–tube pressureTimer countYESNOVENRBA= ON= OFFGRDY= ONALM 4080 [680] <PRM 152...

  • Page 458

    APPENDIXB–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATOR458VEN=OFFExhaust valve is closed.RBA=ONStart of Roots blower.2Wait for 45 secondsGas pressure controlstartNOYESWAIT= OFFLRDY= ONHV = ONNOYESAlarm 2 monitortreatment startLRDYPSS 1–8 = SET= OFFPSRDYRFHV= ON= ONPTLP= ON3200 VAC to DCp...

  • Page 459

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX459HV=ON When HV is turned on, laser can proceed to the nextsequence. HV ON can either be done in manual mode orautomatic mode using PMC.LRDY=OFFWhen HV is turned on, LRDY becomes off.PSS1–8=SETThis is to select power units and usual...

  • Page 460

    APPENDIXB–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATOR460discharge is confirmed, BIAS COMMAND is changed automaticallyfrom PRM15220[247] to PRM15223 [250] (BIAS COMMAND). If allthe tubes are confirmed normal discharge, intra–tube pressure is changedfrom PRM15241 [237] to PRM15242, 1524...

  • Page 461

    B–70115EN/03E. CONTROL SEQUENCES IN LASER OSCILLATORAPPENDIX461The result is compared with PRM15203 [240] (power calibrationlimit). When PRM15204 [241] exceeds PRM15203 [240], the formeris clamped by the latter.LSTR=ON Oscillation preparation completion signal is on.Here oscillation in both man...

  • Page 462

    APPENDIXB–70115EN/03F. REFIXING AND REPLACING GAS TUBE462F REFIXING AND REPLACING GAS TUBEReplacing both of polyethylene and copper tubes is the same. Take careonly for the combination between tube materials and ferrule materials.Polyethylene tube : nylon ferrule (back, front)(A98L–0004–03...

  • Page 463

    B–70115EN/03F. REFIXING AND REPLACING GAS TUBEAPPENDIX4631 Loosen tube fixing nut.Make sure to hold the fitting base with wrench.2 Remove tube.Removed tube is accompanied by ferrule as shown in Fig. F.1. Makesure that neither of tube nor ferrule is contaminated with dust. Whencontaminated, wi...

  • Page 464

    APPENDIXB–70115EN/03F. REFIXING AND REPLACING GAS TUBE4641 Cut the tube perpendicular to its length, then mount new ferrules onthe tube.Referring to Fig. F.1, mount fixing nut, back ferrule, and front ferruleonto tube.Here make sure not to introduce dust into tube and ferrule. If dustentered, w...

  • Page 465

    B–70115EN/03G. REFIXING AND REPLACING WATER TUBEAPPENDIX465G REFIXING AND REPLACING WATER TUBEFor brass and stainless steel tubes, be careful to make proper selection offitting material and structure.Here make sure not to wet inside of apparatus in draining and removingtube.

  • Page 466

    APPENDIXB–70115EN/03G. REFIXING AND REPLACINGWATER TUBE4661)Loosen tube fixing nut.Make sure to hold the fitting base with wrench.2) Remove tube.a) In case of brass fitting:Removed tube is accompanied as shown in Fig. G.1 by plasticsleeve.NutTubePlastic sleeveFig. G.1 Removing/remounting the wa...

  • Page 467

    B–70115EN/03G. REFIXING AND REPLACING WATER TUBEAPPENDIX4671) (a) In case of brass fittingMount a new sleeve on the tube.(b) In case of stainless steel fittingIf a sleeve is necessary, mount a new sleeve on the tube. If nosleeve is necessary, insert the tube as is.In mounting sleeve, refer to ...

  • Page 468

    APPENDIXB–70115EN/03H. GLOSSARY468H GLOSSARYNameMeaningAccess panelThat protective component of a housing or enclosure which, when removed or shifted, cancause exposure to laser radiationAEL Accessible emission levelMaximum accessible emission level set up for eachclass of laser productsAlighme...

  • Page 469

    B–70115EN/03H. GLOSSARYAPPENDIX469NameMeaningFeedbackCorrective action in which a quantity to be controlledis compared with a target value by feeding part of anoutput signal to the input through a specially createdclosed loop so that the quantity to be controlledmatches the target valueLaserDev...

  • Page 470

    APPENDIXB–70115EN/03H. GLOSSARY470NameMeaningProtective housingLaser product housing or its part designed to protecthumans from exposure to a laser beam exceedingan accessible emission level or strong collateralradiationPulse durationTime interval between the points at which an instan-taneous v...

  • Page 471

    IndexB–70115EN/03i–1AAdjusting the beam center of the laser diode beamsuperimposed on the CO2 laser beam, 354Adjusting the diameter of the laser diode beam, 354Adjusting the exhaust control unit (adjusting the laser gasconsumption), 260Adjusting the flow sensor of the C2000C, C3000D, C4000A,a...

  • Page 472

    INDEXB–70115EN/03i–2IIndication of state by means of self diagnostic function, 171Input unit, 211, 273Installation, 66Installation procedure, 67Inter–unit connections (C3000C only), 108Intermediate PCB B, 228Internal structure, 44Intra–tube gas pressure control sequences, 444KKey control,...

  • Page 473

    INDEXB–70115EN/03i–3Refixing tube to brass fitting, 460Related manuals, 4Removing cooling water, 77Replacement procedures, 272Replacing a discharge tube, 299Replacing a fan–assisted radiator, 300Replacing a fun unit, 300Replacing intermediate PCB B, 292Replacing the beam absorber, 305Replac...

  • Page 474

    Revision RecordFANUCLASERC series MAINTENANCE MANUAL (B–70115EN)03Apr., 2000DAdditional descriptions of C2000C, C3000D, C600B andC4000A.02Jul., 1996DAddition of C3000C.DCorrection of errors01May, 1995EditionDateContentsEditionDateContents

  • Page 475

    · No part of this manual may bereproduced in any form.· All specifications and designsare subject to change withoutnotice.

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