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    GE Fanuc AutomationComputer Numerical Control ProductsC Series LaserMaintenance ManualGFZ-70125EN/03December 1999

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    GFL-001Warnings, Cautions, and Notesas Used in this PublicationWarningWarning notices are used in this publication to emphasize that hazardous voltages, currents,temperatures, or other conditions that could cause personal injury exist in this equipment or maybe associated with its use.In situatio...

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    Table of ContentsB--70125EN/03c--11. OVERVIEW1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1.1ORGANIZATION OF THE MANUAL2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...

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    TABLE OF CONTENTSB--70125EN/03c--25.3DETAILS OF MAINTENANCE72. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5.3.1Turbo Blower Oil72. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...

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    TABLE OF CONTENTSB--70125EN/03c--39. SETTING AND ADJUSTMENT194. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1LASER POWER SUPPLY UNIT195. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.1Checking ...

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    TABLE OF CONTENTSB--70125EN/03c--410.12 REPLACING THE POWER SENSOR UNIT256. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.13 REPLACING THE SHUTTER SECTION257. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.13.1 Replaci...

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    TABLE OF CONTENTSB--70125EN/03c--5D.5PARAMETERS FOR PIERCING CONDITIONS349. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D.6PARAMETERS FOR HIGH--SPEED PIERCING CONDITIONS350. . . . . . . . . . . . . . . . . . . . . . . . . .D.7PARAMETERS FOR POWER CONTROL352. . . . . ....

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    B--70125EN/031. OVERVIEW11 OVERVIEWThis manual describes the maintenance of the FANUC LASER C series,as well as the structure, configuration, and operation of the laser oscillator.This manual is aimed at those personnel responsible for laser oscillatormaintenance.

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    B--70125EN/031. OVERVIEW2This manual is organized as described below.1. OverviewThis chapter describes the organization of this manual, applicablemodels, related manuals, and notes on reading this manual.2. SafetyThis chapter describes the handling of lasers, and provides warnings,cautions and no...

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    B--70125EN/031. OVERVIEW3This manual covers the following models :ModelsAbbreviationFANUC LASER--MODEL C1500BC1500BFANUC LASER--MODEL C2000BC2000BFANUC LASER--MODEL C2000CC2000CFANUC LASER--MODEL C3000CC3000CFANUC LASER--MODEL C3000DC3000DFANUC LASER--MODEL C4000AC4000AFANUC LASER--MODEL C6000BC6...

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    B--70125EN/031. OVERVIEW4The following manuals are available for the FANUC LASER C series :FANUC Series 0--LDESCRIPTIONSB--61572ECONNECTION MANUAL B--61573EOPERATOR’S MANUALB--61574EMAINTENANCE MANUALB--61575EFANUC Series 16--LADESCRIPTIONSB--61852ECONNECTION MANUAL B--61853EOPERATOR’S MANUAL...

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    B--70125EN/031. OVERVIEW5In this manual, the words Warning and Caution, corresponding todifferent levels of safety requirements, are provided to ensure the user’ssafety and protect against damage to the laser oscillator.Moreover, sections entitled Note are used to provide supplementaryinformati...

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    B--70125EN/032. SAFETY62 SAFETYThis chapter describes precautions to be observed to ensure the safeoperation of the laser oscillator.Read this chapter thoroughly before attempting to use the laser oscillator.Also, read the safety precautions in the operator’s manual supplied by themachine tool ...

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    B--70125EN/032. SAFETY7(1) It is extremely dangerous to expose your eyes to direct, scattered, orreflected CO2 laser light. Always wear protective glasses while thelaser is operating.Exposure to laser light can cause blindness. If your eyes areaccidentally exposed, seek medical advice immediately...

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    B--70125EN/032. SAFETY8(7) Before daily inspection or the replacement of a maintenance part,open the main circuit breaker and turn the power supply off (doublepower--off).To prevent the power from being inadvertently turned on, lock thecircuit breaker open, and affix an indication of work in prog...

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    B--70125EN/032. SAFETY9(16) During machining, extremely hot chips are likely to be generated.Unless sufficient caution is exercised, there is a danger of the operatorbeing burnt, or of a fire being started.(17) Some materials may burn or explode when laser machined. Beforeattempting to machine an...

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    B--70125EN/032. SAFETY10(1)The laser oscillator is controlled according to the values set in internalparameters of the CNC. If the laser oscillator is operated using valuesother than those set in the parameters, the laser oscillator willmalfunction. In the worst case, the laser oscillator can be ...

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    B--70125EN/032. SAFETY11The oscillator uses high voltages and laser beam radiation. Such hazardsare indicated with warning labels attached to the positions shown in Fig.2.4 (a) to (i).Fig. 2.4 (a) Warning label positions (C1500B, C2000B, and C2000C front view)Fig. 2.4 (b) Warning label positions ...

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    B--70125EN/032. SAFETY12Fig. 2.4 (c) Warning label positions (C3000C: Auxiliary machine)

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    B--70125EN/032. SAFETY13Fig. 2.4 (d) Warning label positions (C3000C and C3000D front view)Fig. 2.4 (e) Warning label positions (C3000C and C3000D rear view)

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    B--70125EN/032. SAFETY14Fig. 2.4 (f) Warning label positions (C4000A front view)Fig. 2.4 (g) Warning label positions (C4000A rear view)

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    B--70125EN/032. SAFETY15Fig. 2.4 (h) Warning label positions (C6000B, JAPAN/FDA)Fig. 2.4 (i) Warning label positions (C6000B, JAPAN/FDA)

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    B--70125EN/032. SAFETY161. Class indication label (JPN)C1500B1800WC2000B3500WC2000C3500WC3000C4000WC3000D4000WC4000A5000WC6000B7000WMODELMAXIMUMOUTPUT2. Class indication label (FDA)MODELMAXIMUMOUTPUTC1500B1800WC2000B3500WC2000C3500WC3000C4000WC3000D4000WC4000A5000WC6000B7000W

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    B--70125EN/032. SAFETY173. Warning label4. Aperture label5. Suspension method label (C1500B, C2000B, C2000C, C3000C,C3000D, C4000A, and C6000B)

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    B--70125EN/032. SAFETY186. Label on the door provided with a safety protection provision7. Label inside the door provided with a safety protection provision8. Label on the access panel9. Label inside the access panel

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    B--70125EN/032. SAFETY1910.Discharge section label11.Certification label12.Equipment nameplate13.Manufacturer ’s address label

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    B--70125EN/032. SAFETY20The figures below show the laser optical paths inside the oscillator.(Dischargetube No. 1)(Dischargetube No. 3)Safety coverShort opticalpath typebeam outputdirectionLong optical pathtype beam outputdirection(Discharge tube No. 2)(Discharge tube No. 4)Short opti-cal pathtyp...

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    B--70125EN/032. SAFETY21SHORT OPTICALPATH TYPEBEAM OUTPUTDIRECTIONLONG OPTICALPATH B TYPEBEAM OUTPUTDIRECTIONSHORT OPTICALPATH TYPEBEAM OUTPUTDIRECTIONLONG OPTICALPATH B TYPEBEAM OUTPUTDIRECTIONFig. 2.5 (b) Optical paths in the C3000C, C3000DSHORT OPTICALPATH TYPEBEAM OUTPUTDIRECTIONLONG OPTICALP...

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    B--70125EN/032. SAFETY22Fig. 2.5 (d) Optical paths in the C6000B

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    B--70125EN/033. INTERNAL STRUCTURE233 INTERNAL STRUCTURE

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    B--70125EN/033. INTERNAL STRUCTURE24Fig. 3.1 (a) to (g) show the block diagram of the laser oscillator.The FANUC LASER C series consists of a laser resonator, laser excitationpower supply, forced gas circulating system, pressure controller, exhaustcontroller, CNC interface, and a protective housi...

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    B--70125EN/033. INTERNAL STRUCTURE25Fig.3.1 (a) Block diagram (C1500B)

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    B--70125EN/033. INTERNAL STRUCTURE26Fig.3.1 (b) Block diagram (C2000B)

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    B--70125EN/033. INTERNAL STRUCTURE27SIGNALCABLE(TOCNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRRORFOLDINGMIRROREXHAUSTCONTROLLERHOURMETEREXHAUSTPUMPPRESSURECONTROLLERLASERPSUUNITMATCHINGBOXLASERPSUUNITMATCHINGBOXDISCHARGETUBEDISCHARGETUBEDISCHARGETUBEDISCHARGETUBEEXHAUSTGASLASERGASTURBOBLOWERINLETH/EOUTLE...

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    B--70125EN/033. INTERNAL STRUCTURE28Fig.3.1 (d) Block diagram (C3000C)

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    B--70125EN/033. INTERNAL STRUCTURE29SIGNALCABLE(TOCNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRRORFOLDINGMIRROREXHAUSTCONTROLLERHOURMETEREXHAUSTPUMPPRESSURECONTROLLERLASERPSUUNITLASERPSUUNITMATCHINGBOXDISCHARGETUBEDISCHARGETUBEDISCHARGETUBEEXHAUSTGASLASERGASTURBOBLOWERINLETH/EOUTLETH/ETURBOPCBHFINVERTERDE...

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    B--70125EN/033. INTERNAL STRUCTURE30SIGNALCABLE(TOCNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRROREXHAUSTCONTROLLERHOURMETERPRESSURECONTROLLERLASERPSUUNITLASERPSUUNITMATCHINGBOXEXHAUSTGASLASERGASTURBOBLOWERTURBOPCBHFINVERTERDEWSENSORWATERDISTRIBUTORWATERFLOWSENSORTO PARTSFROMPARTSBEAMABSORBEROUTPUTCOUPLER...

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    B--70125EN/033. INTERNAL STRUCTURE31SIGNALCABLE(TOCNC)INPUTUNITSTABILIZEDPSUFOLDINGMIRRORFOLDINGMIRRORPOWERSENSORINLETH/EINLETH/ETURBOPCBINLETH/EINLETH/EGUIDELASERTOPARTSFROMPARTSFig.3.1 (g) Block diagram (C6000B)

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    B--70125EN/033. INTERNAL STRUCTURE32The following describes the details of each component of the FANUCLASER C series. Fig. 3.2 (a) to (l) show the internal structure.(1) ResonatorThe resonator consists of an output mirror, rear mirror, foldingmirrors, discharge tubes, power sensor unit, etc. It c...

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    B--70125EN/033. INTERNAL STRUCTURE33(11) Pressure controllerThis unit constantly monitors the gas pressure in the discharge tubesand supplies fresh laser gas to the gas circulating system, thusmaintaining a constant pressure in the discharge tubes. This unit alsomonitors the laser gas supply stat...

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    FS16--L/ :FS16i--LB--70125EN/033. INTERNAL STRUCTURE34(19) Water distribution unitThis unit distributes cooling water, supplied from either a chiller unitor a temperature--regulated external water supply, to each unit in thelaser oscillator. For safety, the water distribution unit is equippedwith...

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    B--70125EN/033. INTERNAL STRUCTURE35(29) Control PCBThis PCB sends the contractor open/close signal to the powermagnetics cabinet, as directed by commands received from the CNC.It also notifies the CNC of the open/close status of the circuit breakerin the power magnetics cabinet.(30) Condensation...

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    B--70125EN/033. INTERNAL STRUCTURE36Fig. 3.2 (a) C1500B internal structure (front)Fig. 3.2 (b) C1500B internal structure (rear)

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    B--70125EN/033. INTERNAL STRUCTURE37Fig. 3.2 (c) C2000B internal structure (front)Fig. 3.2 (d) C2000B internal structure (rear)

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    B--70125EN/033. INTERNAL STRUCTURE38Fig. 3.2 (e) C2000C internal structureFig. 3.2 (f) C3000C internal structure (oscillator section, front)

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    B--70125EN/033. INTERNAL STRUCTURE39Fig. 3.2 (g) C3000C internal structure (auxiliary machine section, front)Fig. 3.2 (h) C3000C internal structure

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    B--70125EN/033. INTERNAL STRUCTURE40Fig. 3.2 (i) C4000A internal structureFig. 3.2 (j) C6000B internal structure (oscillator section, front)

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    B--70125EN/033. INTERNAL STRUCTURE41Fig. 3.2 (k) C6000B internal structure (oscillator section, rear)

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    B--70125EN/033. INTERNAL STRUCTURE42553434Fig. 3.2 (l) Discharge tube and trigger electrode

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    B--70125EN/034. INSTALLATION434 INSTALLATION

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    B--70125EN/034. INSTALLATION44Use the following procedure to make adjustments and checks duringinstallation.(1) Check the environment at the installation location.DEnvironmental conditions1) Ambient temperature : +5°C to +30°C2) Temperature variation : 1.1°C/minute maximum3) Humidity: 75% or b...

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    B--70125EN/034. INSTALLATION45DETAIL OF RESONATOR CLAMP PART ADETAIL OF SHUTTER CLAMP PARTDETAIL OF RESONATOR CLAMPRESONATOR CLAMP ARESONATOR CLAMPSHUTTER CLAMPFig. 4.1 (a) Clamp layout (C1500B, C2000B, C2000C, C3000C, C3000D)

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    B--70125EN/034. INSTALLATION46DETAIL OF SHUTTER CLAMP PARTDETAIL OF RESONATOR CLAMP PART ADETAIL OF RESONATOR CLAMPRESONATOR CLAMP ARESONATOR CLAMPSHUTTER CLAMPFig. 4.1 (b) Clamp layout (C4000A)

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    B--70125EN/034. INSTALLATION47RESONATORCLAMP ARESONATORCLAMP CSHUTTERCLAMPRESONATORCLAMP BFig 4.1 (c) Clamp layout (C6000B)

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    B--70125EN/034. INSTALLATION48RESONATORCLAMP CRESONATORCLAMP CRESONATOR CLAMP BRESONATOR CLAMP AFig 4.1 (d) Clamp layout (C6000B)

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    B--70125EN/034. INSTALLATION49(3) Check the units installed in the main unit cabinet.DCheck items1) Check whether any printed circuit boards are loose or removed.2) Check whether any cables are damaged (such as damagedsheathing).3) Check whether any connectors are loose or detached.4) Check that ...

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    B--70125EN/034. INSTALLATION503) Laser gas composition and purity (See Section 4.4.4.2.)4) Quality of cooling water (See Section 4.4.4.1.)5) Flow of cooling water (IN, OUT)(9) Check the input power supply voltage, frequency and phasesequence.DCheck items1) 200/220 VAC +10%, --15%, 50/60 Hz1 Hz, 3...

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    B--70125EN/034. INSTALLATION514) Provided no water leakage is observed in step 3) above, allowcooling water to flow through the oscillator at the specified flowrate. Set the output pressure of the cooling water circulatingunit to 0.5 MPa. Then, check that there is no water leakage atthe following...

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    B--70125EN/034. INSTALLATION522) If the laser gas flow rate is abnormal, perform adjustment asdescribed in Section 9.5.3) Reset the values of the bits of parameter No. 15025 [201]through parameter No. 15028 [203] to their original values.This completes the check.(15) Perform laser oscillation to ...

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    B--70125EN/034. INSTALLATION53Prior to shipment and transportation, the packing and checking operationsdescribed below must be performed.(1)Disconnect all NC connecting cables.(2)Disconnect the power cable and ground cable of the input unit in themain unit cabinet.(3)Remove the laser gas pipes, a...

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    B--70125EN/034. INSTALLATION54Remove cooling water according to the procedure below.(1)Open the cooling water inlet (IN) and outlet (OUT), and leave bothopen. Cooling water will stop draining from the unit after about 10minutes.(2)Once the cooling water has stopped draining, connect a compresseda...

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    B--70125EN/034. INSTALLATION55(1)Oscillation characteristics1) Check that bit 4 of parameter No. 15000 (16--L or 16i--L) or bit 4of parameter No. 200 (0--L) is set to 1.2) Start the oscillator. When a discharge start switch is provided, donot set the switch to ON until after LRDY has been set.3) ...

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    B--70125EN/034. INSTALLATION564) Start the oscillator. When a discharge start switch is provided, donot set this switch to ON until after LRDY has been set.5) Check that the discharge tubes do not stop discharging for 30minutes after the start of discharge.6) Upon the completion of the check, res...

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    B--70125EN/034. INSTALLATION576) Upon the completion of the check, restore the parameters modifiedin step 1) to their original values.An alarm, if issued in step 5), indicates an error. Check the externallaser gas piping and laser gas composition, or perform aging.(4)Beam mode check1) Remove the ...

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    B--70125EN/034. INSTALLATION58(5)External gas piping leakage check (clamp test)1) Using an approved gas pipe, connect the gas inlet of the oscillatorto the cluster piping, or to the secondary side of the regulatormounted on the gas cylinder.CAUTIONRubber hoses were once commonly used for laser ga...

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    B--70125EN/034. INSTALLATION59(6)Check for leakage within the oscillatorDNegative pressure method1) On the setting screen, enable parameter rewriting.2) On the parameter screen, change the setting of parameter No.15240 (16--L, 16i--L) or parameter No. 235 (0--L) to 0.3) Set the oscillator start s...

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    B--70125EN/034. INSTALLATION60DPressurizationCAUTIONThe turbo blower is not designed to withstandpressurization. So, whenever possible, do not perform aleakage check by pressurizing the turbo blower. Even wheninternal pressurization is inevitable, never apply a pressurein excess of 0.08 MPa. Othe...

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    B--70125EN/034. INSTALLATION61CAUTION1 If the oscillator is started with an incorrect parameter valuespecified, there is a risk of the oscillator being damaged ordestroyed.Be particularly careful when entering andchecking parameter values.2 Some parameters may require modification to, for example...

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    B--70125EN/034. INSTALLATION622) Set the RUN key to ON to start the oscillator.3) Perform discharge by setting the HV ON switch to ON. Check thatdischarge is performed continuously.4) Then, perform internal discharge using the settings indicatedbelow. Two methods of internal discharge are support...

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    B--70125EN/034. INSTALLATION63The oscillator has connections for cooling water piping, laser gas piping,and power and signal cables. For details of the electrical connections forthe NC and machine, refer to the corresponding connection manuals.FANUC Series 0--LCONNECTION MANUAL B--61573EFANUC Ser...

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    B--70125EN/034. INSTALLATION64Even when the concentration of the anticorrosive is controlled asexplained above, the cooling water must, nevertheless, be replaced everyyear.To remove contaminants adhering to the inside surfaces of the coolingwater system, clean the system using the cleaning agent ...

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    B--70125EN/034. INSTALLATION65Supply the laser oscillator with a mixture of gases that satisfy theconditions listed below.(1)Composition ratio and accuracyCO2 : 50.25%He : 402.00%N2 : 552.75% (N2 balance)(2)Water (H2O): 5 ppm or less(3)Hydrocarbon (CnHm): 1 ppm or less(4)Gas purity: 99.99% or hig...

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    B--70125EN/034. INSTALLATION66Connect the cables to the laser oscillator as described below.(1)Power cableU (R)V (S)W (T)Power supply: 200 VAC +10%/--15%, 50/60 Hz1 Hz, 3or220 VAC +10%/--15%, 60 Hz1 Hz, 3(2)Ground cableConnect the ground cable to the ground connection section (class--1).(3)I/O si...

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    B--70125EN/034. INSTALLATION67The C6000A has an oscillator section and power supply section, while theC3000C has an oscillator section and auxiliary machine section.Interconnection is made according to the procedure described below.(1)Power cable (CP200)This cable feeds 200 VAC to the high--frequ...

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    B--70125EN/034. INSTALLATION68(1)Connect gas OUT of the oscillator section to gas IN of the auxiliarymachine section, using the gas pipe provided with the oscillator.(2)Supply laser gas through gas IN of the oscillator section. Exhaust gasfrom the exhaust pump is output through gas OUT of the aux...

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    B--70125EN/035. MAINTENANCE695 MAINTENANCEIn FANUC LASER C series, periodic inspection items have beenreduced, and adjustments have been made easy. To keep the oscillator ina satisfactory operating condition over a long period, however, it isnecessary to carry out periodic maintenance (including ...

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    B--70125EN/035. MAINTENANCE70Table 5.1 lists daily inspection items. Inspect the FANUC LASER Cseries according to this table. When parts (including oil) have been usedfor a prescribed period, replace them quickly.Table 5.1 Daily inspection items for FANUC LASER C seriesItemPeriodContent and instr...

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    B--70125EN/035. MAINTENANCE71The FANUC LASER C series contains consumables that must bereplaced periodically. Table 5.2 (a), (b) lists such consumables and therelated periodic maintenance work. Perform periodic maintenance aswell as daily inspection described in Section 5.1 by using the listedper...

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    B--70125EN/035. MAINTENANCE72When opening the panels and doors during maintenance, keep the powerturned off.Before replacing oil, be sure to check that purging is completed.(1)Check methodCheck the amount of oil in the turbo blower while referring to thefigure below. The oil level should be betwe...

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    B--70125EN/035. MAINTENANCE73NOTEExecute discharge ageing after changing turbo blower oil.Fig. 5.3.1 Turbo blower oil check points(1)Check methodWatch the oil gauge, and check that the oil level is between graduationsL and H. Also check whether the oil is dark.If the oil level is below L, add oil...

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    B--70125EN/035. MAINTENANCE747) Supply 1.8 liters of new oil through the oil inlet, while watchingthe oil gauge.8) Attach the oil inlet plug.9) Put the maintenance panel back in place, and turn on the power.(1)Replacement methodReplace the filter every 3000 hours, or when the exhaust power hasdeg...

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    B--70125EN/035. MAINTENANCE75Replace the filter every 1500 hours, or when oil mist occurs. Fig. 5.3.4shows the exhaust pipe filter. None of the C1500B, C2000B, C2000C,C3000C, C3000D, and C4000A is equipped with this filter.(1)Replacement methodClampHousing headHousingO--ring(G90 or G85, depending...

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    B--70125EN/035. MAINTENANCE7610) Take out a new cartridge filter (A97L--0201--0211, AdvanTechToyo TCG--045--SIFS) from its bag, and put a plate gasket(supplied together with the cartridge filter) on both ends of thefilter.11) Insert the cartridge filter into the housing head, and fasten it withth...

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    B--70125EN/035. MAINTENANCE77The maintenance parts are listed below. Refer to the following tables formaintenance unit and part specification information.The partspecifications for oscillators compatible with CE marking are not listedbelow.Nonrepairable partsNameSpecificationModel (Q’ty)NameSpe...

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    B--70125EN/035. MAINTENANCE78NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationO RING for DischargeTubeA98L--0003--0004/P22.4S8000000TubeA98L--0003--0004/P26S0881212160A98L--0003--0004/P30.6S00000024PIPING O RINGA98L--0003--0004/P588800000DISCHARGE TUBEA290...

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    B--70125EN/035. MAINTENANCE79NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationSEMICONDUCTORLASERA04B--0805--C414(1)(1)(1)(1)(1)(1)(1)LASERA04B--0811--D4011111111FAN (for SHUTTER)A90L--0001--03491111100A90L--0001--03960000000A90L--0001--0335/B0000010COOLING...

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    B--70125EN/035. MAINTENANCE80NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationCIRCUIT BRAKERJPN, ULA60L--0001--0308/F0500001CB7000A60L--0001--0391/V050002QF2, 303QF2--44QF2--510QF2--58--13A60L--0001--0308/B0303CB2--45CB2--604CB2--5000A60L--0001--0391/V0400...

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    B--70125EN/035. MAINTENANCE81NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationSURGE ABSORBERA74L--0001--0008/10D50D46565611A74L--0001--01000000111A74L--0001--0091/B0000111NOISE FILTERA70L--0001--0064/100000001A70L--0001--00540000011TRIGGERELECTRODEASSEMBLY...

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    B--70125EN/035. MAINTENANCE82NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationBEAM ABSORBERA97L--0200--0937/B1000000A97L--0200--0872/C000(1)000A97L--0200--0872/D0001100A97L--0200--0873000(1)000A97L--0201--09720000010BEAM ABSORBERASSEMBLYA290--4560--V200000...

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    B--70125EN/035. MAINTENANCE83NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationRF FET MODULE PCB A20B--1006--0050(16)(32)0(32)00(32)A20B--1007--01402424348A20B--1007--01502424348STEP--UPTRANSFORMER PCBA20B--1006--0070(2)002000TRANSFORMER PCBA20B--1006--0071...

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    B--70125EN/035. MAINTENANCE84NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationNC SIDE IF PCB for 0L A16B--1212--02701111000NC SIDE IF PCB for 15,R--GA16B--1212--04201111000STABILIZED POWERSUPPLYA20B--1005--0120(1)(1)(1)(1)(1)(1)(1)SUPPLYA20B--1005--0124111...

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    B--70125EN/035. MAINTENANCE85NameModel (Q’ty)SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500BSpecificationWATER DISTRIBUTERUNITA04B--0810--C4201000000UNITA04B--0807--C4200100000A04B--0813--C4200010000A04B--0811--C4200001000A04B--0814--C4200000100A04B--0815--C4200000010A A04B--0812--C...

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    B--70125EN/036. TROUBLESHOOTING866 TROUBLESHOOTING

  • Page 94

    B--70125EN/036. TROUBLESHOOTING87The troubleshooting procedure to be applied depends on the failureoccurrence status as indicated below. Perform checking according to theitems listed below.(1)Action in response to alarm screen display (See Sections 6.2 and 6.3.)(2)Major faults1) Laser power suppl...

  • Page 95

    B--70125EN/036. TROUBLESHOOTING88The alarm number, DGN, and parameter number (PRM NO.) vary withthe CNC model. So, the FS16--L or FS16i--L number comes first, and theFS0--L number is enclosed in parentheses.Anomaly of AD converter 1 (Refer to DGN = 981 [844, 845/bit 7])FS0--L: AD converter 1 on P...

  • Page 96

    B--70125EN/036. TROUBLESHOOTING89Anomaly of laser power supply unit(Refer to DGN 966, 967, 974, 975 [842, 854].)This alarm is issued, if a fault occurs in the laser power supply unit.The cause of the fault and the required action are described below.The laser power supply unit issues this alarm a...

  • Page 97

    B--70125EN/036. TROUBLESHOOTING90No.Presumption causePhenomenon5The RF voltage of all the units is high dur-ing discharge and the laser power is low.The base discharge is narrow and tends todisappear. When the purge is repeatedlyperformed, the RF voltage gradually de-creases and the laser power r...

  • Page 98

    B--70125EN/036. TROUBLESHOOTING91Shutter anomaly (Related DGNs are shown below.)The table below lists the valid combinations of shutter open and closecommands and open and close position detection signals. The shutterposition is detected three seconds after opening or closing of theshutter is spe...

  • Page 99

    B--70125EN/036. TROUBLESHOOTING92Discharge anomaly (Refer to DGN = 909 to 914 [861 to 868]Pressing the HVON (start discharge) button causes the unit to startdischarging. This alarm is issued, if at least one discharge tube failsto operate.No.Cause of troubleSolution1Anomaly of parametersettingMak...

  • Page 100

    B--70125EN/036. TROUBLESHOOTING93Overheat of laser cabinet (Refer to DGN = 961/bit 1 [841/bit7])The temperature of the input side of the electrode cooling fan ismonitored and sends alarm when it exceeds 60 degree. When thetemperature decreases, the alarm state is solved automatically. Beforethat ...

  • Page 101

    B--70125EN/036. TROUBLESHOOTING94Too much incident laser beam back to the resonator.(Refer to DGN = 906 [878])This alarm is issued, if a workpiece reflects laser beam more than therating to the laser oscillator. This can happen when the laser beam isused to drill, cut, or weld materials (such as ...

  • Page 102

    B--70125EN/036. TROUBLESHOOTING95Anomaly of assist gas (Refer to DGN = G221/bit 7 [145/bit7]When starting machining, the NC monitors for a ready signal from theassist gas supply unit in the machine. If this signal is not sent normally,the NC issues this alarm.Check the DGN data and the signal fro...

  • Page 103

    B--70125EN/036. TROUBLESHOOTING96Decrease of laser gas pressure (Refer to DGN = 960/bit 5 [840/bit 4])The pressure of the laser gas supplied to the laser oscillator ismonitored. This alarm is issued, if this pressure becomes lower thanthe permissible level (1 kgf/cm2).No.Cause of troubleSolution1...

  • Page 104

    B--70125EN/036. TROUBLESHOOTING97Condensation (Refer to DGN = 961/bit 2 [840/bit 6])There is a condensation sensor at the inlet of the water branch unit inthe oscillator. This alarm is issued, when condensation is detected.No.Cause of troubleSolution1Tool low cooling watertemperatureSet the water...

  • Page 105

    B--70125EN/036. TROUBLESHOOTING98Overheat of beam absorber (Refer to DGN = 961/bit 7 [841/bit 3])Laser beam is introduced into the beam absorber, when the oscillationtakes place with shutter closed. This absorber is water--cooled andsends alarm when the temperature exceeds a critical one. In the ...

  • Page 106

    B--70125EN/036. TROUBLESHOOTING99Gas pressure anomaly in discharge tube (Refer to DGN = 905 [860])The gas pressure is monitored after the discharge start ready condition(LRDY) is established. This alarm is issued, if the monitored gaspressure deviates by100 (= 1330 Pa) from the set gas pressure.N...

  • Page 107

    B--70125EN/036. TROUBLESHOOTING100Leakage of gas tube/anomaly of exhaust pump(Refer to DGN = 905 [860])When the RUN (pressure control start) button is pressed, the exhaustpump starts operating and expels gas from the gas circulating systemto cause a low--pressure condition. This alarm is displaye...

  • Page 108

    B--70125EN/036. TROUBLESHOOTING101Anomaly of gas pressure control (Refer to DGN = 905 [860]Pressing the RUN (pressure control start) button starts expelling airfrom the laser gas tube. When a specified degree of vacuum is attained,laser gas is supplied into the laser gas tube, and gas pressure co...

  • Page 109

    B--70125EN/036. TROUBLESHOOTING102Anomaly of pressure sensor (Refer to DGN = 905 [860]This alarm appears when the signal of the pressure sensor used forpressure control detector vanishes.No.Cause of troubleSolution1Disconnected cable be-tween pressure sensorand IF PCBCheck the cable connection. I...

  • Page 110

    B--70125EN/036. TROUBLESHOOTING103Anomalous selection of the number of discharge tubes.Anomalous selection of the number of discharge tubes. (Only FS0--L)No.Cause of troubleSolution1The case of FS0--L.The number of dischargetubes is selected tubeother than 2 or4.The number of discharge tubes shou...

  • Page 111

    B--70125EN/036. TROUBLESHOOTING104Shutter temperature abnormal (Refer to bit 6 of DGN 961 [bit 2 of 841].)This alarm is issued when the temperature of the shutter mirrorexceeds a preset maximum. The table below lists the causes of faultsand the corresponding countermeasures.No.Cause of troubleSol...

  • Page 112

    B--70125EN/036. TROUBLESHOOTING105Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].)This alarm is issued, if an attempt is made to radiate a laser beam, whenthe laser oscillator is not in the LSTR state (discharging state).Vacuum pump operation abnormal (Refer to bit 3 of DGN.)...

  • Page 113

    B--70125EN/036. TROUBLESHOOTING106Inverter abnormalIf the inverter used to power the turbo blower is abnormal, this alarmis issued. When this alarm is issued, check that the alarm LED on theLED indicator section of the inverter is lit. At this time, do not turnoff the power to the inverter becaus...

  • Page 114

    B--70125EN/036. TROUBLESHOOTING107Turbo blower not stoppedThis alarm is issued if a turbo blower is not stopped within 120 secondsafter RUN OFF. The power can be turned off even if the purgecomplete signal is not turned on.No.Cause of troubleSolution1Cable connection abnormal Check the cable conn...

  • Page 115

    B--70125EN/036. TROUBLESHOOTING108External reflecting mirror not installedThis alarm is issued, if the beam reflecting unit is not attached with amirror or mirror holder.No.Cause of troubleSolution1Mirror not mountedMount a 0--degree shift mirror.2Sensor abnormalReplace the switch.3Cable abnormal...

  • Page 116

    B--70125EN/036. TROUBLESHOOTING109(1)If an alarm is issued to indicate the occurrence of a power supply fault,check the diagnosis screen to determine which power supply unitissued that alarm signal. The bit corresponding to the power supplyunit that issued the alarm signal is set to 1.Unlike conv...

  • Page 117

    B--70125EN/036. TROUBLESHOOTING110(4)Table 6.4.1 explains each type of alarm.Table 6.4.1 Causes of power supply alarmsType of alarmSourceMajor causesDCI 1DCI 2DCI 3This alarm is issued if the DCcurrent of the power supply unitis high when the oscillator is op-erating in CW/pulse mode.Load short--...

  • Page 118

    B--70125EN/036. TROUBLESHOOTING111(5)If an alarm is issued at restart or at the start of discharge (HV ON), thepower supply unit has been damaged.1) When only the DCI alarm is issuedThe high--speed diode or FET module may be damaged. Locate theproblem and replace any faulty component or module.2)...

  • Page 119

    B--70125EN/036. TROUBLESHOOTING112First check if PRM No. 15216 [262] is taking the value of 60, which isa standard. In case the fluctuation continues with this value used, read thelaser output monitor value indicated in DGN=906 [878]. Its range offluctuation is smaller than 50. If it exceeds this...

  • Page 120

    B--70125EN/036. TROUBLESHOOTING113No. Cause of troubleSolution1Anomalous settingof thermal relayAscertain if the setting of the contacter is done at5.5 A. If not so, correct it.2Too high viscosityof oil(1) Check if the room temperature is lower than 5degree. If so, raise it.(2) Check the deterior...

  • Page 121

    B--70125EN/036. TROUBLESHOOTING114No. Cause of troubleSolution1Gas leakage be-tween gas cylinderand oscillatorAscertain the following.(1) Anomalous mounting of regulator.(2) Anomalous connection between tube and reg-ulator.(3) Anomalous connection of gas inlet fitting ofoscillator.2Anomalous adju...

  • Page 122

    B--70125EN/036. TROUBLESHOOTING115OC : Momentary overcurrentNo.Cause of troubleSolution1Turbo blower or cable short--cir-cuitedReplace the short--circuited unit orcable.2Turbo blower or cable short--cir-cuited with groundReplace the short--circuited unit orcable.3Invalid setting of inverter accel...

  • Page 123

    B--70125EN/036. TROUBLESHOOTING116(2)Inverter (A90L--0001--0465: Model JH300)When an alarm is issued, the digital panel displays a messageindicating the type of alarm. The table below lists the messages,descriptions, and causes.MessageDescriptionCauseE01Overcurrent during turbo blowerconstant--sp...

  • Page 124

    B--70125EN/036. TROUBLESHOOTING117Ascertain the followings,1) line voltage: 200/220 VAC, +10%, --15%2) frequency: 50/60 Hz -- 1 Hz3) 3 phasesHere the combination of 220 V and 50 Hz is prohibited.Using a phase rotation sensor, R, S and T phases of which are connectedto U, V and W phases of the inp...

  • Page 125

    B--70125EN/036. TROUBLESHOOTING118Ascertain if the voltage of each DC power unit is within rated range. Hererefer to Fig. 6.5.3 (a), (b), (c) for the external view of the IF PCB in theoscillator. Refer to Fig. 6.5.3 (d) for the external view of the stabilizedpower supply unit.IF PCBFS0--LA16B--11...

  • Page 126

    B--70125EN/036. TROUBLESHOOTING119(4)Stabilized power supply unitFig. 6.5.3 (d) shows the external appearance of +24V stabilized powerunit.Fuse of the stabilized power supply unitDesignation of power supply unitA20B--1005--0120Designation of fuseFU : A60L--0001--0175#5.0 (5.0A)FU : A60L--0001--01...

  • Page 127

    B--70125EN/036. TROUBLESHOOTING120FU4* LB6 SHUTTER RELAY (A58L--0001--0265#24P)* This printed circuit board is below A16B--1110--0260.CN23CNCNCNCNCNCNCNCNCNCN11121314151617182425LPWLB6CORMOUTGPCMAIMPICN34SPIPTMLTP+240--15515A16B--1110--0260SP2SP3SP4MBISP5SP6CP87RIICII1 2 31 2 31 2 31 2 3RELAYG6B1...

  • Page 128

    B--70125EN/036. TROUBLESHOOTING121CN23CNCNCNCN11121314CNXPATLITERELAY(A58L--0001--0265#24P)CNCN2425CN2CN1F1F2F3A100LF16SHUTTERRELAY(A58L--0001--0265#24P)CORGPCMOUTLPWLTP0+5--15+15+240LA4A16B--1110--022Fig. 6.5.3 (c) External appearance of IF PCB (FS--0L)FUFUTPIIFig. 6.5.3 (d) Layout of fuse for s...

  • Page 129

    B--70125EN/036. TROUBLESHOOTING122By using the IF PCB pins, check that each signal of the IF PCB is normal.Fig. 6.5.3 (a) and Fig. 6.5.3 (b) show the pin locations.FS0--LFS16--LFS16i--LSignal functionCORCORVoltage to operate the laser power supply0 V to 5VGPCGPCSpecification of pressure inside th...

  • Page 130

    B--70125EN/036. TROUBLESHOOTING123When the machine breaks down, it is necessary to know if the trouble isin the CNC, PMC, machine or laser.Even when there does not exist machine failure, the machine mighthang--up for waiting of external signals. Then the check of inside stateof CNC, interface bet...

  • Page 131

    B--70125EN/036. TROUBLESHOOTING124#7POV7G223[G147]#6POV6#5POV5#4POV4#3POV3#2POV2#1POV1#0POV0POV7 -- POV6 Power override signal (input)#7F220[F171]#6MWRM#5#4SHTONL#3SHTOFL#2#1#0MWRM Laser power alarm signal (output)SHTONL Shutter on state signal (output)SHTOFL Shutter off state signal (output)#7BE...

  • Page 132

    B--70125EN/036. TROUBLESHOOTING125900DOIML0ALASER POWER COMMANDDisplays a value specified in a laser output power command and sent tothe DA converter.901DOIML08LASER BIAS COMMANDDisplays a value specified in a preparatory discharge command and sent tothe DA converter.902R@LSPONPULSE ON TIMEDispla...

  • Page 133

    B--70125EN/036. TROUBLESHOOTING126909RF VOLTAGE 1910RF CURRENT 1911RF VOLTAGE 2912RF CURRENT 2913RF VOLTAGE 3914RF CURRENT 3915RF VOLTAGE 4916RF CURRENT 4917RF VOLTAGE 1918RF CURRENT 1919RF VOLTAGE 2920RF CURRENT 2921RF VOLTAGE 3922RF CURRENT 3923RF VOLTAGE 4924RF CURRENT 4Unit of voltage applied...

  • Page 134

    B--70125EN/036. TROUBLESHOOTING127FRQ Power frequency detection0 : 50 Hz1 : 60 Hz*AP Air pressure sensor0 : Lower than air pressure1 : Same as air pressure*MGP Laser gas pressure0 : Low1 : Normal*RBT Blower temperature0 : Abnormal1 : Normal*SFI Safety interlock0 : Interlocked1 : Normal#7*ABT961DI...

  • Page 135

    B--70125EN/036. TROUBLESHOOTING128#7962DIIML02#6#5*OH1#4*TCA1#3*M--R#2*L--V#1*AR1#0*IAL1*IAL1 Inverter alarm 10 : Abnormal1 : Normal*AR1 Frequency signal 10 : Mismatch1 : Match*L--V Turbo blower oil0 : Oil level too low1 : Normal*M--R External folding mirror0 : Mirror not mounted1 : Normal*TCA1 T...

  • Page 136

    B--70125EN/036. TROUBLESHOOTING129#7964DIIML04#6#5*OH3#4*TCA3#3*REV3#2*VIB3#1*AR3#0*IAL3*IAL3 Inverter alarm 30 : Abnormal1 : Normal*AR3 Frequency signal 30 : Mismatch1 : Match*VIB3 Vibration sensor 30 : Abnormal1 : Normal*REV3 Rotation sensor 30 : Less than 8000 rpm1 : 8000 rpm or more*TCA3 Turb...

  • Page 137

    B--70125EN/036. TROUBLESHOOTING130#7PS08970DOIML02#6PS07#5PS06#4PS05#3PS04#2PS03#1PS02#0PS01PS01 -- PS08 Power select signals 1 to 80 : Not selected1 : Selected#7TWV972DOIML04#6BPV#5PTL#4GRDY#3VEN#2RPA#1RBA#0PUGPUG Purge valve0: Closed1: OpenRBA Turbo blower activation0: Stopped1: ActivatedRPA Va...

  • Page 138

    B--70125EN/036. TROUBLESHOOTING131IB Semiconductor laser--on command0: OFF1: ONFW Inverter start signal0: Stopped1: StartedPCS Gas pressure PWM commandLSCST Low speed A/D conversion start0: OFF1: ON#7PSAR8974R@LSDIC2#6PSAR7#5PSAR6#4PSAR5#3PSAR4#2PSAR3#1PSAR2#0PSAR1Power unit alarms 1 to 80: Norma...

  • Page 139

    B--70125EN/036. TROUBLESHOOTING132#7#6#5#4#3#2#1#0DGN No88Output command value + Bias command89(CNC internal DO)Displays a value specified in a laser output power command and sent tothe DA converter.#7#6#5#4#3#2#1#0DGN No90Bias command91(CNC internal DO)Value written in the DA converter at pre di...

  • Page 140

    B--70125EN/036. TROUBLESHOOTING133MVW Quantity of cooling water0 : Abnormal1 : NormalAP Atmospheric pressure sensor0 : Less than standard value1 : Greater than standard value#7#6#5#4#3#2#1#0DGN NoCAT841SHOFSHONDL1ABTSHTIALENB(CNC internal DI)CAT Cabinet temperature0 : Abnormal1 : NormalSHOF Shutt...

  • Page 141

    B--70125EN/036. TROUBLESHOOTING134#7#6#5#4#3#2#1#0DGN No846ADDT2EOC2847(CNC internal DI)ADDT2 Data read from the AD converter 2EOC2 Conversion completion signal of the AD converter 20: Under conversion1: Completion#7#6#5#4#3#2#1#0DGN No848PCBID(CNC internal DI)PCBID PCB A16B--1212--0270 is mounte...

  • Page 142

    B--70125EN/036. TROUBLESHOOTING135SEL4 -- SEL0 AD converter 2 switching signalSEL4 SEL3 SEL2 SEL1 SEL0Pressure in side tube00000Output voltage of RF power supply unit (1)00001Output current of RF power supply unit (1)00010Output voltage of RF power supply unit (2)00011Output current of RF power s...

  • Page 143

    B--70125EN/036. TROUBLESHOOTING136GRDY Laser gas supply valve open/close signal0 : Laser gas supply valve close1 : Laser gas supply valve openVEN Exhaust valve open/close signal0 : Exhaust valve close1 : Exhaust valve open#7#6#5#4#3#2#1#0DGN NoPSS8857PSS7PSS6PSS5PSS4PSS3PSS2PSS1(CNC internal DO)P...

  • Page 144

    B--70125EN/036. TROUBLESHOOTING137DGN No877EIN(CNC internal DI)EIN Input from tracing sensor.(Value which is not multiplied by the correction factor)+10V2047. . . . . .0V0. . . . . .--10V--2047. . . . . .DGN No878LSADC(CNC internal DI)LSADC Power sensor output. (Unit W)(Value which is not multipl...

  • Page 145

    B--70125EN/037. OSCILLATOR CONNECTIONS1387 OSCILLATOR CONNECTIONS

  • Page 146

    B--70125EN/037. OSCILLATOR CONNECTIONS139FLOW SENSOR (distributor unit)IF UNIT BFOR i0L : A04B--0810--H010FOR i16L: A04B--0810--H011FOR 16iL: A04B--0810--H014MB FANRF RADIATOR UNITRE FAN UNITRE RADIATOR UNITSHUTTER FAN UNITHOUR METERPURGE, GAS SUPPLY, GAS EXHAUST VALVEEXHAUST VALVE3 WAY VALVEBYPA...

  • Page 147

    B--70125EN/037. OSCILLATOR CONNECTIONS140INPUT UNITA04B--0810--C311 (JPN)A04B--0810--C312 (USA)TURBO PCBMIRROR SWLASER PSUMB UNITTUBE ASS’YFRAMEGROUNDTURBO BLOWERHF INVERTEROUTPUT OFTHERMALCLOSE WHENALARMTO HOUR METERSTABILIZED PSU(BREAKERRELAYPANEL)EXHAUST PUMP UNITINPUT UNITCLASS 1 GROUND(FRA...

  • Page 148

    B--70125EN/037. OSCILLATOR CONNECTIONS141FLOW SENSOR (distributor unit)IF UNIT BFOR i 0L : A04B--0810--H010FOR i16L: A04B--0810--H011FOR 16iL: A04B--0810--H014MB FANRF RADIATOR UNITRE FAN UNITRE RADIATOR UNITSHUTTER FAN UNITHOUR METERPURGE, GAS SUPPLY, GAS EXHAUST VALVEEXHAUST VALVE3 WAY VALVEBYP...

  • Page 149

    B--70125EN/037. OSCILLATOR CONNECTIONS142TURBO PCBMIRROR SWLASER PSUMB UNITTUBE ASS’YFRAMESTABILIZED PSUTURBO BLOWERHF INVERTEROUTPUT OFTHERMAL WHENALARM CLOSETO HOUR METEREXHAUST PUMP(BREAKERRELAYPANEL)TERMINAL(TO MACHINE SIDE INTERLOCK)INPUT UNITCLASS 1 GROUND(FRAME)FRAMEINPUT UNITA04B--0807-...

  • Page 150

    B--70125EN/037. OSCILLATOR CONNECTIONS143(Square)IF UNIT Bi0L: A04B--0813--H010i16L: A04B--0813--H01116iL: A04B--0813--H014RE FAN UNITRE RADIATOR FAN UNITRF RADIATOR FAN UNITSHUTTER FAN UNITPURGE, GAS SUPPLY, GAS EXHAUST VALVE(PRESSURE CONTROLLER)EXHAUST VALVE3 WAY VALVEBYPASS VALVEWARNING LIGHTE...

  • Page 151

    B--70125EN/037. OSCILLATOR CONNECTIONS144CLASS 1 GROUNDTURBO PCBINPUT UNITA04B--0813--C310 (JIS, USA)MIRROR SWLASER PSUMB UNITTUBE ASS’YLOCKERFRAMETURBO BLOWERSTABILIZED PSUNOIZE FILTEREXHAUST PUMPTERMINAL XT20(TO MACHINE SIDE SHUTTER LOCK)HF INVERTEROUTPUT OFTHERMAL WHENALARM CLOSE(BREAKERRELA...

  • Page 152

    B--70125EN/037. OSCILLATOR CONNECTIONS145WATER FLOW SENSOR (distributor unit)IF UNIT Bi0L: A04B--0811--H010i16L: A04B--0811--H01116iL: A04B--0811--H014MB FANRE FAN UNITRE RADIATOR UNITRF RADIATOR UNITSHUTTER FAN UNITPURGE, GAS, SUPPLY, GAS EXHAUST VALVE (PRESSURE CONTROLLER)EXHAUST VALVE3 WAY VAL...

  • Page 153

    B--70125EN/037. OSCILLATOR CONNECTIONS146INPUT UNITA04B--0811--C315TURBO PCBMIRROR SWTURBO BLOWERFAN UNITHF INVERTERLASER PSUMB UNITLOCKERFRAMETUBE ASS’YEXHAUST PUMPSTABILIIZED PSUHOUR METEROUTPUT OFTHERMAL WHENALARM COLSE(BREAKERRELAYPANEL)INPUT UNITCLASS 1 GROUND(MAIN LOCKER FRAME)FRAMETERMIN...

  • Page 154

    B--70125EN/037. OSCILLATOR CONNECTIONS147(Square)IF UNITi16L : A04B--0813--H01116iL : A04B--0813--H014MB FANRE FAN UNITRF RADIATOR FAN UNITSHUTTER FAN UNITINVERTER FAN UNITPURGE, GAS SUPPLY, GAS EXHAUST VALVE (PRESSURE CONTROLLER)EXHAUST VALVE3 WAY VALVEBYPASS VALVEWARNING LIGHTEXHAUST CONTROLLER...

  • Page 155

    B--70125EN/037. OSCILLATOR CONNECTIONS148CLASS 1 GROUNDTURBO PCBINPUT UNITA04B--0814--C310 (JAPANESE)A04B--0814--C311 (USA)MIRROR SWLASER PSUMB UNITTUBE ASS’YLOCKERFRAMETURBO BLOWERSTABILIZED PSUNOIZE FILTEREXHAUST PUMPTERMINAL XT20(TO MACHINE SIDE SHUTTER LOCK)HF INVERTEROUTPUT OFTHERMAL WHENA...

  • Page 156

    B--70125EN/037. OSCILLATOR CONNECTIONS149(Square)IF UNIT Bi16L : A04B--0815--H01116iL : A04B--0815--H014MB FANRE FAN UNITRF RADIATORN FAN UNITRF RADIATOR FAN UNITSHUTTER FAN UNITINVERTER FAN UNITPURGE, GAS SUPPLY, GAS EXHAUST VALVE (PRESSURE CONTROLLER)EXHAUST VALVE3 WAY VALVEBYPASS VALVEWARNING ...

  • Page 157

    B--70125EN/037. OSCILLATOR CONNECTIONS150CLASS 1 GROUNDTURBO PCBINPUT UNITA04B--0815--C310 (JAPANESE)A04B--0815--C311 (USA)MIRROR SWLASER PSUMB UNITTUBE ASS’YLOCKERFRAMETURBO BLOWERSTABILIZED PSUNOIZE FILTEREXHAUST PUMPTERMINAL XT20(TO MACHINE SIDE SHUTTER LOCK)HF INVERTEROUTPUT OFTHERMAL WHENA...

  • Page 158

    B--70125EN/037. OSCILLATOR CONNECTIONS151WARNING LIGHTEXHAUST CONTROLLEREXHAUST VALVE3 WAY VALVEBYPASS VALVEPRESSURE CONTROLLERPURGE, GAS SUPPLY, GAS EXHAUST VALVEPRESSURE SENSORCONTROL VALVEPRES. SW BPRES. SW ARELAY PCB--ARELAY PCB--BSHUTTER UNITSHUTTER SW UNITSHUTTER TEMP SENSORABSORBER TEMP SE...

  • Page 159

    B--70125EN/037. OSCILLATOR CONNECTIONS152TUBE ASS’Y(Square)(Black)TURBO PCBTURBO BLOWERINVERTERTO NOISE FILTERLASER PSUMATCHING BOXINPUT UNITTO INPUT UNITINPUT A PCBSTABILIZED PSUTO RELAY PCB--B (CN57)TO INPUT UNITTO INPUT UNIT(TO MACHINE SIDE INTERLOCK)TO INPUT UNIT (QF1)MAIN LOCKER FRAMEFig. ...

  • Page 160

    B--70125EN/037. OSCILLATOR CONNECTIONS153INPUT UNITJPNULTO LASER PCU (NO1 TO NO8)TO INVERTER (NO1, NO2)NOISE FILTERMB FANRF RADIATOR UNITRE FAN UNITRE RADIATOR UNITSHUTTER FAN UNITHOUR METEREXHAUST PUMP(EACH 2 pcs)(FRAME)CLASS 1GROUND(FRAME)(Square)(Black)Fig. 7.1 (o) Electrical connection diagra...

  • Page 161

    B--70125EN/037. OSCILLATOR CONNECTIONS154Fig. 7.2 (a) Water flow diagram (C1500B)7.2COOLING WATERPIPING

  • Page 162

    B--70125EN/037. OSCILLATOR CONNECTIONS155Fig. 7.2 (b) Water flow diagram (C2000B)

  • Page 163

    B--70125EN/037. OSCILLATOR CONNECTIONS156DISTRIB--UTOROUTDISTRIB--UTORINLASERPSULASERPSUNOZZLEOUTPUTMIRRORBEAMABSORBERFOLDINGMIRRORHOLDERNo.2OUTLETHEATEXCHANGERVANEPUMPDRAINCOOLINGPLATE(LOWERSIDE)COOLINGPLATE(UPPERSIDE)FOLDINGMIRRORHOLDERNo.3FOLDINGMIRRORHOLDINGNo.1REARMIRRORRFRADIATORUNITBUNITBR...

  • Page 164

    B--70125EN/037. OSCILLATOR CONNECTIONS157Fig. 7.2 (d) Water flow diagram (C3000C)

  • Page 165

    B--70125EN/037. OSCILLATOR CONNECTIONS158DISTRIB--UTORINDISTRIB--UTOROUTFLOW SENSORNOZZLEBNO.3FOLDINGMIRRORFOLDERNO.4FOLDINGMIRRORFOLDERNO.1RERADIATORUNITBFOLDINGMIRRORFOLDERNO.3FOLDINGMIRRORFOLDERNO.2LASERPSUNO.1LASERPSUNO.2LASERPSUNO.3COOLINGPLATE(UPPERSIDE)NOZZLEBNO.1NOZZLEBNOZZLEBNO.5NOZZLEBN...

  • Page 166

    B--70125EN/037. OSCILLATOR CONNECTIONS159FLOW SENSORFLOW SENSORNOZZLEBNO.5COOLINGPLATE(LOWERSIDE)NOZZLEBNOZZLEBNO.7NO.8COOLINGPLATE(UPPERSIDE)NOZZLEBNO.6FOLDINGMIRRORFOLDERNO.1FOLDINGMIRRORFOLDERNO.6NOZZLEBNO.1NOZZLEBNO.4NOZZLEBNO.3NOZZLEBNO.2FOLDINGMIRRORFOLDERNO.2FOLDINGMIRRORFOLDERNO.5TURBOBLO...

  • Page 167

    B--70125EN/037. OSCILLATOR CONNECTIONS160FLOW SENSORDISTRIB--UTOROUTDRAINVALVEFOLDINGMIRRORHOLDERNO.1FOLDINGMIRRORHOLDERNO.2REARMIRRORHOLDERRFRADIATORUNITA(R)RFRADIATORUNITC(R)RFRADIATORUNITB(R)RFRADIATORUNITA(O)RFRADIATORUNITC(O)RFRADIATORUNITB(O)TURBOBLOWERNO.1TURBOBLOWERNO.3TURBOBLOWERNO.2TURB...

  • Page 168

    B--70125EN/037. OSCILLATOR CONNECTIONS161FLOW SENSORDRAINBALVERERADIATORUNITCRERADIATORUNITDLASERPSUNO.1LASERPSUNO.3LASERPSUNO.5LASERPSUNO.7LASERPSUNO.2LASERPSUNO.4LASERPSUNO.6LASERPSUNO.8RERADIATORUNITA1RERADIATORUNITB1F.M.FOLDERNO.3F.M.FOLDERNO.4RERADIATORUNITA2RERADIATORUNITB2OUTLETH/ENO.2INLE...

  • Page 169

    B--70125EN/037. OSCILLATOR CONNECTIONS162Fig. 7.3 (a) shows the flow of supply gas and exhaust gas in the laseroscillator. Figs. 7.3 (b) to (h) are system diagrams showing the piping inthe laser oscillator.Pressure value100 (=1330Pa)or morePressure value300 to 700(=4000 to9300Pa)Pressure value700...

  • Page 170

    B--70125EN/037. OSCILLATOR CONNECTIONS163LASERMODELC1500BLASEROSCILLATORA04B--0810--B301EXHAUSTCONTROLLERAIRDISTRIBUTER(PFA)EXHAUSTPUMPUNITEXHAUSTPUMP(BU)(Y)GASOUTGASIN2--F--PT3/8²OUTLETH/EINLETH/ETURBOBLOWERMOTOR(Y)GASOUT(BU)(O)BASE(PFA)(PFA)O.M.F.M.(Y)(Y)PRESSURECONTROLLERR.M.DISTRIB--UTORLASE...

  • Page 171

    B--70125EN/037. OSCILLATOR CONNECTIONS1642--F--PT3/8²GASOUT(BU)(O)BASE(PFA)(PFA)R.M.O.M.F.M.(Y)(Y)PRESSURECONTROLLERDISTRIB--UTOREXHAUSTPUMPINLETH/ETURBOBLOWERMOTOR(Y)OUTLETH/E(Y)(BU)GASINGASOUTEXHAUSTPUMPUNIT(PFA)AIRDISTRIBUTEREXHAUSTCONTROLLERLASERMODELC2000BLASEROSCILLATORA04B--0807--B301LASE...

  • Page 172

    B--70125EN/037. OSCILLATOR CONNECTIONS165LASERMODELC2000CLASEROSCILLATORA04B--0813--B301EXHAUSTCONTROLLER(PFA)EXHAUSTPUMPUNITEXHAUSTPUMPOUTLETH/E2--F--PT3/8²GASOUTR.M.O.M.PRESSURECONTROLLERDISTRIB--UTORINLETH/ETURBOBLOWERMOTORGASINGASOUTAIRDISTRIBUTERLASERGASSETTINGPRESSURE0.15MPaBASE(PFA)(Y)(Y)...

  • Page 173

    B--70125EN/037. OSCILLATOR CONNECTIONS166²GASOUT(BU)(O)BASE(PFA)(PFA)R.M.O.M.F.M.(Y)(Y)PRESSURECONTROLLERDISTRIB--UTORINLETH/EMOTOR(Y)OUTLETH/E(Y)(BU)GASINGASOUTEXHAUSTPUMPUNIT(PFA)AIRDISTRIBUTEREXHAUSTCONTROLLER(Y)(Y)RESONATORF.M.F--PT3/8²F--PT3/8(PFA)INLETH/EMOTOR(PFA)AUXLASERMODELC3000CLASER...

  • Page 174

    B--70125EN/037. OSCILLATOR CONNECTIONS167LASERMODELC3000DLASEROSCILLATORA04B--0814--B301EXHAUSTCONTROLLER(PFA)EXHAUSTPUMPUNITOUTLETH/E2--F--PT3/8²GASOUTR.M.O.M.PRESSURECONTROLLERDISTRIB--UTORINLETH/ETURBOBLOWERGASINGASOUTAIRDISTRIBUTERLASERGASSETTINGPRESSURE0.15MPaBASE(PFA)(Y)(Y)F.M.(BU)(BU)(PFA...

  • Page 175

    B--70125EN/037. OSCILLATOR CONNECTIONS168LASERMODELC4000ALASEROSCILLATORA04B--0815--B301EXHAUSTCONTROLLER(PFA)EXHAUSTPUMPUNITOUTLETH/E2--F--PT3/8²GASOUTR.M.O.M.PRESSURECONTROLLERDISTRIB--UTORINLETH/ETURBOBLOWERGASINGASOUTAIRDISTRIBUTERLASERGASSETTINGPRESSURE0.15MPaBASE(PFA)(Y)(Y)F.M.(BU)(BU)(PFA...

  • Page 176

    B--70125EN/037. OSCILLATOR CONNECTIONS1692--F--PT3/8²(BU)(O)BASE(PFA)(PFA)R.M.O.M.F.M.(Y)(Y)PRESSURECONTROLLEREXHAUSTPUMPINLETH/ETURBOBLOWER(Y)OUTLETH/E(Y)(BU)EXHAUSTPUMPUNIT(PFA)AIREXHAUSTCONTROLLER(Y)(Y)F.M.RESONATOR(PFA)(PFA)(PFA)(PFA)(PFA)(PFA)INLETH/EINLETH/EINLETH/ETURBOBLOWEROUTLETH/EFILT...

  • Page 177

    B--70125EN/038. UNIT CONFIGURATION1708 UNIT CONFIGURATION

  • Page 178

    B--70125EN/038. UNIT CONFIGURATION171The input unit consists of a power magnetics cabinet, interface PCB, andstabilized power supply. The power magnetics cabinet is configured asdescribed below:(1)C1500B (Japanese market, UL versions)CB1CB2MS1To laser power supply No.1CB3MS2To laser power supply ...

  • Page 179

    B--70125EN/038. UNIT CONFIGURATION172(4)C3000C (Japanese market, UL versions)CB1CB2MS1To laser power supply No.1CB3MS2To laser power supply No.2CB4MS3To laser power supply No.3CB5MS4To laser power supply No.4NBK1To fan, control power supplyCB6To auxiliary sectionAuxiliarysectionCB7MS5To high--fre...

  • Page 180

    B--70125EN/038. UNIT CONFIGURATION173(6)C4000A (Japanese market, UL version)QF1QF2KM1To laser power supplyNo.1QF3KM2To laser power supplyNo.2QF4KM3To laser power supplyNo.3QF6KM5To high--frequencyinverterQF8QF7KM6To IF PCBTo exhaust pump andIF PCB (fan motor)QF9XT45To serge absorberZ110, Z111QF5K...

  • Page 181

    B--70125EN/038. UNIT CONFIGURATION174Fig. 8.1 (a) Input unit (C1500B, the interior)

  • Page 182

    B--70125EN/038. UNIT CONFIGURATION175Fig. 8.1 (b) Input unit (C1500B, UL)

  • Page 183

    B--70125EN/038. UNIT CONFIGURATION176Fig. 8.1 (c) Input unit (C2000B, the interior)

  • Page 184

    B--70125EN/038. UNIT CONFIGURATION177Fig. 8.1 (d) Input unit (C2000B, UL)

  • Page 185

    B--70125EN/038. UNIT CONFIGURATION178Fig. 8.1 (e) Input unit (C2000C, Japan)

  • Page 186

    B--70125EN/038. UNIT CONFIGURATION179Fig. 8.1 (f) Input unit (C2000C, UL)

  • Page 187

    B--70125EN/038. UNIT CONFIGURATION180Fig. 8.1 (g) Input unit (C3000C, oscillator, the interior, UL)

  • Page 188

    B--70125EN/038. UNIT CONFIGURATION181Fig. 8.1 (h) Input unit (C3000C, auxiliary sections, the interior, UL)

  • Page 189

    B--70125EN/038. UNIT CONFIGURATION182Fig. 8.1 (i) Input unit (C3000D, Japanese)

  • Page 190

    B--70125EN/038. UNIT CONFIGURATION183Fig. 8.1 (j) Input unit (C3000D, UL)

  • Page 191

    B--70125EN/038. UNIT CONFIGURATION184Fig. 8.1 (k) Input unit (C4000A, Japanese)

  • Page 192

    B--70125EN/038. UNIT CONFIGURATION185Fig. 8.1 (l) Input unit (C4000A, UL)

  • Page 193

    B--70125EN/038. UNIT CONFIGURATION186Fig. 8.1 (m) Input unit--1 (C6000B, Japan, UL)

  • Page 194

    B--70125EN/038. UNIT CONFIGURATION187STABILIZED PSOINPUT UNITCONTROL PCBFig. 8.1 (n) Input unit--2 (C6000B, JAPAN)

  • Page 195

    B--70125EN/038. UNIT CONFIGURATION188STABILIZED PSUINPUT UNITCONTROL PCBFig. 8.1 (o) Input unit--2 (C6000B, UL)

  • Page 196

    B--70125EN/038. UNIT CONFIGURATION189IF UNITFig. 8.1 (p) Input unit--3 (C6000B, JAPAN, UL)

  • Page 197

    B--70125EN/038. UNIT CONFIGURATION190Relay PCB B is used to group signals sent from the shutter section andto output the grouped signals to the interface PCB. CN59 is an outputterminal for connecting a measuring instrument used in alignment.Fig. 8.2 shows the layout of relay PCB B.CN50BCN52BCN53B...

  • Page 198

    B--70125EN/038. UNIT CONFIGURATION191Fig. 8.3 (a) shows installation, and Fig. 8.3 (b) shows piping of thepressure controller respectively. The functions of each of the componentsshown in the figures are outlined below:(1)Pressure control valveThis valve is provided to maintain a specified laser ...

  • Page 199

    B--70125EN/038. UNIT CONFIGURATION192Fig. 8.3 (a) Pressure controller layout

  • Page 200

    B--70125EN/038. UNIT CONFIGURATION193Fig. 8.3 (b) Block diagram of gas pressure controller

  • Page 201

    B--70125EN/039. SETTING AND ADJUSTMENT1949 SETTING AND ADJUSTMENT

  • Page 202

    B--70125EN/039. SETTING AND ADJUSTMENT195This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the power supply unit, matching box, or dischargetube is replaced, however, the unit should be set and adjusted as describedbelow.When an FET module or diode in...

  • Page 203

    B--70125EN/039. SETTING AND ADJUSTMENT196Enhanced pulse setting disableParameter No. 15213: 320004) C2000COutput compensation disableBit 4 of parameter No. 15000, parameter No. 15201 (bit 4 ofparameter No. 200, parameter No. 231, No. 232): 0Laser power feedback disableParameter No. 15208 (paramet...

  • Page 204

    B--70125EN/039. SETTING AND ADJUSTMENT1977) C6000BOutput compensation disableBit 4 of parameter No. 15000, parameter No. 15201 (bit 4 ofparameter No. 200, parameter No. 231, No. 232): 0Laser power feedback disableParameter No. 15208 (parameter No. 233): 0Maximum output command settingParameter No...

  • Page 205

    B--70125EN/039. SETTING AND ADJUSTMENT198(1)Start the oscillator, and wait 10 minutes in the LRDY state. Then setHV ON and wait until the gas pressure is stabilized in the basedischarge state. (Wait about 3 minutes. See DGN 905 [16--L, 16i--L]or DGN 860 [0--L].) Check that all discharge tubes are...

  • Page 206

    B--70125EN/039. SETTING AND ADJUSTMENT199Power supplies 1, 2, 3,7, 8, and 9Power supplies 4, 5, 6,10, 11, and 12Fig. 9.1.2.5 Base discharge adjustment points (indicated by arrows)(3)Check that the laser output Pa becomes 100 W or less after 3 minutes.If the laser output exceeds 100 W, make the ad...

  • Page 207

    B--70125EN/039. SETTING AND ADJUSTMENT200(1)Start the oscillator, and wait until the gas pressure is stabilized in thebase discharge state. (Wait about 3 minutes. See DGN 905 [16--L,16i--L] or DGN 860 [0--L].) Then, check that all discharge tubes arecontinuously discharging. If a discharge tube s...

  • Page 208

    B--70125EN/039. SETTING AND ADJUSTMENT201Fig. 9.1.2.7 (a) Laser power supply unit layout (6 kW PSU)Fig. 9.1.2.7 (b) Adjust trimmer position (6 kW PSU)

  • Page 209

    B--70125EN/039. SETTING AND ADJUSTMENT202Fig. 9.1.2.7 (c) Adjust trimmer position (9 kW PSU)(1)Specify the output of a half of the rated output value, and turn on thebeam. While checking that the power supply output (Note 4) does notexceed the maximum power supply output (Note 4) and that the val...

  • Page 210

    B--70125EN/039. SETTING AND ADJUSTMENT203(1)With the C2000B and C2000C, specify a pulse test command in thetable of parameter No. 15207 and No. 15210.(2)Output the pulse test command specified in the table by 5 Hz and 5%for a pulse test time, and check that no alarm is issued. If a problemis obse...

  • Page 211

    B--70125EN/039. SETTING AND ADJUSTMENT204NOTE4 Settings for each oscillator5 Setting pinsC1500BC2000BC3000CC3000CC6000BC6000Bwithout a trigger(No.1, 4 PSU)(No.2, 3 PSU)(No. 1, 4, 5, 8No. 2, 3, 6, 7electrodePSU)PSU)S2 settingB201B202B201B202B201B203S5 settingSHORTSHORTSHORTSHORTUSUALSHORTIplus+12m...

  • Page 212

    B--70125EN/039. SETTING AND ADJUSTMENT205These PCBs are precisely adjusted at the factory and should not requireany further adjustment. If the turbo blower or turbo PCB is replaced,however, VR1 to VR4 should be adjusted and set oil level censor asdescribed below.Turbo PCB: A16B--1600--0670:C1500B...

  • Page 213

    B--70125EN/039. SETTING AND ADJUSTMENT206Adjustment position C1500B : VR1 onlyC2000B : VR1 onlyC2000C : VR1 onlyC3000C : VR1 VR2 onlyC3000D : VR1 onlyC4000A : VR1 onlyC6000B : VR1 to VR4Fig. 9.2 (a) Detail of turbo PCB (A16B--1600--0670)

  • Page 214

    B--70125EN/039. SETTING AND ADJUSTMENT207VL4 TerminalVL3 TerminalVL2 TerminalVL1 TerminalVA4 TerminalVA3 TerminalUpperBase mountingfaceVA1 TerminalVA2 TerminalVR1VR2VR3VR40V (GND)Fig. 9.2 (b) Turbo PCB (A16B--1600--0770) details

  • Page 215

    B--70125EN/039. SETTING AND ADJUSTMENT208The inverter is precisely adjusted at the factory and should not require anyfurther adjustment. If it is replaced, however, the high--frequency invertershould be set and adjusted as described below.The type of the high--frequency inverter varies with the o...

  • Page 216

    B--70125EN/039. SETTING AND ADJUSTMENT209(7)Adjust the acceleration/deceleration period.Adjust the period from when the turbo blower starts rotating until therotation stabilizes, and the period from when deceleration starts untilthe turbo blower stops.1) While the inverter output frequency is 0 H...

  • Page 217

    B--70125EN/039. SETTING AND ADJUSTMENT210Selection of T1 or T10 of the DS1 switch determines the factor ofthe acceleration or deceleration time. When T10 is selected, thetime is multiplied by 10. TX1: 3 to 15 sec TX10: 15 to 150 sec.Set the regulators correctlywith reference to the rele-vant item...

  • Page 218

    B--70125EN/039. SETTING AND ADJUSTMENT211(1)ConnectionThe following cables are connected to the inverter:R. S. T:Three--phase power supplyU. V. W:Turbo blower power supplyH, O, L:Frequency command1:Reset signal2:Parameter soft lock signal8:Inversion signal11:Frequency reach signalAL0, AL1: Alarm ...

  • Page 219

    B--70125EN/039. SETTING AND ADJUSTMENT212DFrequency setting, multi--speed setting or other frequencydisplays, motor rotational speed display, frequency conversiondisplay, or output current display.NOTEWhen conflicting data is set, a warning WARN.... will bedisplayed. For 6 seconds thereafter, do ...

  • Page 220

    B--70125EN/039. SETTING AND ADJUSTMENT213The operator has two modes; MONITOR mode and FUNCTION mode.In the MONITOR mode, the monitor screen to display operation statusappears. In the function mode, the function screen appears. The functionscreen has a hierarchical structure used to change operati...

  • Page 221

    B--70125EN/039. SETTING AND ADJUSTMENT214¤Frequency commandDisplays the current frequency command status.Operation modeDisplayMonitor/function modeRemote operatorFRTerminalFTOptional PCB 1F1Optional PCB 2F2"FS0.00 Hz0.00HzAC130.00sOC130.00sMonitor29 OR FR¡©ST“MONITOR” keyScreen scroll...

  • Page 222

    B--70125EN/039. SETTING AND ADJUSTMENT215"1 Command"2 Initial"3 Function"4 Option"Monitor29 OR FR¡ST“FUNCTION” keyFunction mode menuscreen(Function mode 1st layer)¡Next layer markThis mark indicates that there is one more layer to display. To go tothe next layer, mo...

  • Page 223

    B--70125EN/039. SETTING AND ADJUSTMENT216(3)Parameter settingsThe following table lists the parameters for which the values have beenchanged from the initial values. If the inverter has been shipped alonefrom FANUC, the user must change the parameters as listed below.To change the parameters, an ...

  • Page 224

    B--70125EN/039. SETTING AND ADJUSTMENT21722012504151440Monitor (LED display)This display shows frequen-cy, motor current, motor revo-lution speed, and trip historyPOWER LampPower lamp ofcontrol circuitUp key, Down keyThese keys are usedto change data andincrease or decreasethe frequency.STOP/RESE...

  • Page 225

    B--70125EN/039. SETTING AND ADJUSTMENT218This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the pressure controller is replaced or requiresre--adjustment, however, it should be set and adjusted as described below:(1)Turn the CNC on. Never turn on the g...

  • Page 226

    B--70125EN/039. SETTING AND ADJUSTMENT219PRESSURESENSORATMOSPHERICPRESSURE SWITCHLASER GAS PRESSURESWITCHFig. 9.4.2 Pressure controller sensor layout

  • Page 227

    B--70125EN/039. SETTING AND ADJUSTMENT220This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the exhaust adjustment valve is accidentallytouched or if the exhaust controller is replaced, however, the gas flowshould be checked and the exhaust flow adjust...

  • Page 228

    B--70125EN/039. SETTING AND ADJUSTMENT221This coefficient is precisely adjusted at the factory and should not requireany further adjustment. If the rear mirror of the laser oscillator or thepower sensor unit is replaced, however, the power input compensationcoefficient should be checked and set a...

  • Page 229

    B--70125EN/039. SETTING AND ADJUSTMENT222This sensor is precisely adjusted at the factory and should not require anyfurther adjustment. If the water distribution unit or water flow sensor isreplaced, however, this sensor should be set and adjusted as describedbelow:(1)Loosen the four bolts securi...

  • Page 230

    B--70125EN/039. SETTING AND ADJUSTMENT223(10) Gradually reduce the flow rate of the water supply. Check the rateat which the switch trips off. Then, gradually increase the flow rate.If the alarm flow rate is within the following range, the sensor isnormal.If the alarm range is exceeded, repeat st...

  • Page 231

    B--70125EN/039. SETTING AND ADJUSTMENT224(1)Adjust the flow rate of cooling water flowing into the oscillator to analarm setting flow rate. Use a flowmeter with a proper and accuraterated flow rate.ModelAlarm setting flow rateRated flow rateC2000C50 /min75 /minC3000D79 /min120 /minC4000A120 /min1...

  • Page 232

    B--70125EN/039. SETTING AND ADJUSTMENT225If the laser oscillator is not used for a long time (one week or more) or ifthe laser gas circulation system is opened to the atmosphere (when amirror is cleaned or when a component of the gas system is replaced, forexample), aging must be performed before...

  • Page 233

    B--70125EN/039. SETTING AND ADJUSTMENT226DManual operationThis method can be used if the machine operator’s panel has aswitch for starting internal discharge manually.1) Enter the desired output and duty cycle on the setting screen.2) Press the internal discharge switch to start internal discha...

  • Page 234

    B--70125EN/0310. REPLACEMENT PROCEDURES22710 REPLACEMENT PROCEDURES

  • Page 235

    B--70125EN/0310. REPLACEMENT PROCEDURES228Replace the stabilized power supply as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)Disconnect all cables from the stabilized power supply.(...

  • Page 236

    B--70125EN/0310. REPLACEMENT PROCEDURES229Replace the FS16--L interface PCBs on the oscillator side as follows:When IF PCB (A02B--0128--C202)(1)Replacing the upper PCB (A16B--1110--0260)1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main ci...

  • Page 237

    B--70125EN/0310. REPLACEMENT PROCEDURES230Fig. 10.1.4 (a) Removing the IF PCB unit (FS16--L: A02B--0128--C202)Fig. 10.1.4 (b) Removing the PCB from the PCB holder

  • Page 238

    B--70125EN/0310. REPLACEMENT PROCEDURES231Figs. 10.2 (a) to (l) show the laser power supply. Replace the laser powersupply as described below.(1)Replacing the power supply1) Turn off the power to the laser oscillator, then drain the coolingwater.2) Remove the following water joints, power cables,...

  • Page 239

    B--70125EN/0310. REPLACEMENT PROCEDURES2322. Remove the damaged diode by removing the screws and nutsat the both ends.In case of 9 kW power supply at first replace the cooling heatsink and diode plate 1 and 2, then replace the diode block A andB to remove diode.CAUTIONWhen removing a diode, if it...

  • Page 240

    B--70125EN/0310. REPLACEMENT PROCEDURES2333. Mount a new FET module PCB, fix it using the six screws, thenconnect the cables.When the 9--kW power supply is being used, connect the CN51or CN52 cable to the new FET PCB securely, then temporarilytighten all the screws so that the FET PCB is free to ...

  • Page 241

    B--70125EN/0310. REPLACEMENT PROCEDURES234Fig. 10.2 (a) Laser power supply unit layout (front side)Fig. 10.2 (b) Laser power supply unit layout (upside)

  • Page 242

    B--70125EN/0310. REPLACEMENT PROCEDURES235Fig. 10.2 (c) Laser power unit layout (inner side)Fig. 10.2 (d) Laser power unit layout (inner part details)

  • Page 243

    B--70125EN/0310. REPLACEMENT PROCEDURES236Fig. 10.2 (e) Diode unit layout (Fig. 10.2 (d) B part details)Fig. 10.2 (f) Diode unit layout (Fig. 10.2 (d) C part details)

  • Page 244

    B--70125EN/0310. REPLACEMENT PROCEDURES237Fig. 10.2 (g) FET module PCB layout (Fig. 10.2 (d) A part details)Cover mountingscrewCover for XT22Fig. 10.2 (h) Layser PSU layout (9 kW)

  • Page 245

    B--70125EN/0310. REPLACEMENT PROCEDURES238Diod unit 2Diod unit 1Step up transformer PCBFig. 10.2 (i) Laser PSU internal details (9 kW)

  • Page 246

    B--70125EN/0310. REPLACEMENT PROCEDURES239F typeR typeCathodCathodAnodeAnodeFig. 10.2 (j) Mounting position of diod (9 kW)

  • Page 247

    B--70125EN/0310. REPLACEMENT PROCEDURES240Diod plate 1Cooling heat sinkDiod plate 2Diod block ADiod block BDiod block face of ADiod block face of BFiber reinforced plasticFiber reinforced plasticFig. 10.2 (k) Replacing diod (9 kW)Fig. 10.2 (l) FET PCB heat sink fixing (9 kW)

  • Page 248

    B--70125EN/0310. REPLACEMENT PROCEDURES241Replace the matching box as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)Disconnect the power and signal cables from the matching box.(3)Rem...

  • Page 249

    B--70125EN/0310. REPLACEMENT PROCEDURES242When the turbo blower is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.Clean the flang...

  • Page 250

    B--70125EN/0310. REPLACEMENT PROCEDURES2437) Tighten the nut of the damping rubber. Carefully follow theprocedure below to prevent the damping rubber from being twistedand damaged.Tightening procedure (C1500B, C2000B, C2000C, C3000C,C6000B)1. Position the antivibration rubber such that its partin...

  • Page 251

    B--70125EN/0310. REPLACEMENT PROCEDURES244Fig. 10.4 Turbo blower layout

  • Page 252

    B--70125EN/0310. REPLACEMENT PROCEDURES245Replace the turbo PCB as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)Disconnect all cables from the turbo PCB.(3)Remove the four screws or ...

  • Page 253

    B--70125EN/0310. REPLACEMENT PROCEDURES246When the exhaust pump is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.Replace the exh...

  • Page 254

    B--70125EN/0310. REPLACEMENT PROCEDURES247Fig. 10.7 Exhaust pump unit layout

  • Page 255

    B--70125EN/0310. REPLACEMENT PROCEDURES248When the pressure control unit is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention to theimmediate surroundings to ensure that dust and other contaminants do notenter the gas circulating system.Replac...

  • Page 256

    B--70125EN/0310. REPLACEMENT PROCEDURES249When the exhaust control unit is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention to theimmediate surroundings to ensure that dust and other contaminants do notenter the gas circulating system.Replace...

  • Page 257

    B--70125EN/0310. REPLACEMENT PROCEDURES250Fig. 10.9 (a) Exhaust controller layout (C1500B)

  • Page 258

    B--70125EN/0310. REPLACEMENT PROCEDURES251Fig. 10.9 (b) Exhaust controller layout (C3000C)

  • Page 259

    B--70125EN/0310. REPLACEMENT PROCEDURES252Fig. 10.9 (c) Exhaust controller layout(C2000B, C2000C, C3000D, C4000A)

  • Page 260

    B--70125EN/0310. REPLACEMENT PROCEDURES253Fig. 10.9 (d) Exhaust controller layout (C6000B)

  • Page 261

    B--70125EN/0310. REPLACEMENT PROCEDURES254When a discharge tube is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.(1) Turn off th...

  • Page 262

    B--70125EN/0310. REPLACEMENT PROCEDURES255The laser oscillator contains many fan units, which are classified into thefollowing two types:(1)Fan unitConsists of several fans and a terminal block.(2)Fan--assisted radiatorConsists of a water--cooled radiator, several fans, and a terminal block.The r...

  • Page 263

    B--70125EN/0310. REPLACEMENT PROCEDURES256The power sensor is a very delicate component. Be careful not to touchor apply force to the black, light--sensitive surface. Also, ensure that nodust enters the sensor.When removing the power sensor unit from the rear mirror or mountingthe unit on the rea...

  • Page 264

    B--70125EN/0310. REPLACEMENT PROCEDURES257Replace the shutter section as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)The C1500B, C2000B, C2000C, C3000C, C3000D, and C4000A alsorequi...

  • Page 265

    B--70125EN/0310. REPLACEMENT PROCEDURES258Fig. 10.13.3 (a) C1500B, C2000B, C2000C, C3000C, C3000D, and C4000Ashutter unit layout

  • Page 266

    B--70125EN/0310. REPLACEMENT PROCEDURES259RelayFig. 10.13.3 (b) Shutter unit layout

  • Page 267

    B--70125EN/0310. REPLACEMENT PROCEDURES260Replace the beam absorber as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)The beam absorber is water--cooled. Drain the water from the beama...

  • Page 268

    B--70125EN/0310. REPLACEMENT PROCEDURES261Fig. 10.14 (a) Beam absorber layout (C1500B, C2000B, C2000C)3Fig. 10.14 (b) Beam absorber layout (C3000C, C3000D)

  • Page 269

    B--70125EN/0310. REPLACEMENT PROCEDURES262POSITIONADJUSTMENTSCREWTHERMALSWFig. 10.14 (c) Beam absorber layout (C4000A)

  • Page 270

    B--70125EN/0310. REPLACEMENT PROCEDURES263Fig. 10.14 (d) Beam absorber layout (C6000B)

  • Page 271

    B--70125EN/0310. REPLACEMENT PROCEDURES264Replace the high--frequency inverter as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)Disconnect the cables from the high--frequency inverter...

  • Page 272

    B--70125EN/0310. REPLACEMENT PROCEDURES265Replace the water distribution unit as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)Drain all cooling water from the oscillator, using compr...

  • Page 273

    B--70125EN/0310. REPLACEMENT PROCEDURES266Fig. 10.16 (a) Detail of water destributer unit (C1500B)Refer to water flow diagram (Fig. 7.2 (a)).

  • Page 274

    B--70125EN/0310. REPLACEMENT PROCEDURES267Fig. 10.16 (b) Detail of water destributer unit (C2000B)Refer to water flow diagram (Fig. 7.2 (b)).

  • Page 275

    B--70125EN/0310. REPLACEMENT PROCEDURES268Fig. 10.16 (c) Detail of water destributer unit (C2000C)Refer to water flow diagram (Fig. 7.2 (c)).

  • Page 276

    B--70125EN/0310. REPLACEMENT PROCEDURES269Fig. 10.16 (d) Detail of water destributer unit (C3000C)Refer to water flow diagram (Fig. 7.2 (d)).

  • Page 277

    B--70125EN/0310. REPLACEMENT PROCEDURES270Valve(closed)PositionwhenwaterisremovedValve(open)NormalpositionFig. 10.16 (e) Detail of water destributer unit (C3000D)Refer to water flow diagram (Fig. 7.2 (e)).

  • Page 278

    B--70125EN/0310. REPLACEMENT PROCEDURES271Valve(closed)PositionwhenwaterisremovedValve(open)NormalpositionFig. 10.16 (f) Detail of water destributer unit (C4000A)Refer to water flow diagram (Fig. 7.2 (f)).

  • Page 279

    B--70125EN/0310. REPLACEMENT PROCEDURES272Fig. 10.16 (g) Detail of distribution unit A (C6000B)Refer to water flow diagram.

  • Page 280

    B--70125EN/0310. REPLACEMENT PROCEDURES273Fig. 10.16 (h) Detail of distribution unit B (C6000B)Refer to water flow diagram.

  • Page 281

    B--70125EN/0310. REPLACEMENT PROCEDURES274Replace the flow sensor as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)Drain all cooling water from the oscillator, using compressed air, f...

  • Page 282

    B--70125EN/0310. REPLACEMENT PROCEDURES275Fig. 10.17 (b) Detail of flow sensor (C2000C, C3000D, C4000A, C6000B)

  • Page 283

    B--70125EN/0310. REPLACEMENT PROCEDURES276Replace the condensation sensor as follows:(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.(2)Disconnect the condensation sensor Faston terminal from the ...

  • Page 284

    B--70125EN/0310. REPLACEMENT PROCEDURES277Use the procedure below for trigger electrode replacement.(1)Turn off the power to the CNC, then turn off the main circuit breakerand power supply.(2)Remove bolt £and screw ¢, then remove the trigger electrode.(3)Check that O--ring ¤is set in the nozzl...

  • Page 285

    B--70125EN/0310. REPLACEMENT PROCEDURES278¡©¢£¤¥¡Trigger electrode©Feeder¢Feeder mounting screw£Trigger electrode mounting screw¤O--ring (P10)¥Discharge tube nozzle AFig. 10.20 Trigger electrode replacement

  • Page 286

    B--70125EN/0311. LASER OPTICAL SYSTEM27911 LASER OPTICAL SYSTEMTable 11 lists the optical parts and their features. Use this table todetermine the feature of each optical part. When mounting these parts,be careful to orient them correctly and ensure that they are being mountedon compatible units....

  • Page 287

    B--70125EN/0311. LASER OPTICAL SYSTEM280The optical parts in the laser oscillator, including the output mirror, rearmirror, folding mirrors, and circular polarization mirror, must be cleanedor replaced periodically. Similarly, if the laser output or beam modepattern becomes abnormal, the optical ...

  • Page 288

    B--70125EN/0311. LASER OPTICAL SYSTEM281Fig. 11.1 (a) Structure of diagram output mirror (C1500B, C2000B, C2000C)

  • Page 289

    B--70125EN/0311. LASER OPTICAL SYSTEM282Fig. 11.1 (b) Structure of diagram rear mirror (C1500B, C2000B, C2000C)

  • Page 290

    B--70125EN/0311. LASER OPTICAL SYSTEM283Fig. 11.1 (c) Structure of diagram output mirror (C3000C, C3000D, C4000A, C6000B)

  • Page 291

    B--70125EN/0311. LASER OPTICAL SYSTEM284Fig. 11.1 (d) Structure of diagram rear mirror (C3000C, C3000D, C4000A, C6000B)

  • Page 292

    B--70125EN/0311. LASER OPTICAL SYSTEM285Fig. 11.1 (e) Cleaning mirror 1Fig. 11.1 (f) Cleaning mirror 2Fig. 11.1 (g) Cleaning mirror 3

  • Page 293

    B--70125EN/0311. LASER OPTICAL SYSTEM286Fig. 11.1 (h) Schematic diagram of mounting of output coupler/rear mirror to the holder

  • Page 294

    B--70125EN/0311. LASER OPTICAL SYSTEM287To clean the output mirror, follow the procedure given below. Since it isnecessary to touch the optical parts and vacuum parts while cleaning theoutput mirror, wear clean gloves or finger cots. Do not touch these partswith your bare hands.The output mirror ...

  • Page 295

    B--70125EN/0311. LASER OPTICAL SYSTEM288(8) Move the lens cleaning paper horizontally to and fro across themirror.Since the lens cleaner has a high surface tension, it may bedifficult to move the cleaning paper. As the paper is slowlymoved to and fro across the mirror, however, the ethyl alcoholw...

  • Page 296

    B--70125EN/0311. LASER OPTICAL SYSTEM289To clean the rear mirror, follow the procedure given below. Since it isnecessary to touch optical parts and vacuum parts while cleaning the rearmirror, wear clean gloves or finger cots. Do not touch these parts directlywith your bare hands.Before starting c...

  • Page 297

    B--70125EN/0311. LASER OPTICAL SYSTEM290(9) Blow clean air (using, for example, a camera blower) across themirror surface to completely evaporate the ethyl alcohol or lenscleaner.(10) Repeat steps (7) to (9) until all dirt on the mirror surface has beenremoved. Finally, clean the mirror surface w...

  • Page 298

    B--70125EN/0311. LASER OPTICAL SYSTEM291To clean the folding mirrors, follow the procedure given below. Since itis necessary to touch the optical parts and vacuum parts while cleaningthe folding mirrors, wear clean gloves or finger cots. Do not touch theseparts with your bare hands.Before startin...

  • Page 299

    B--70125EN/0311. LASER OPTICAL SYSTEM292(11) When replacing a mirror, remove the mirror from its holder. Sincevacuum grease is applied to the rear of the mirror, insert a tool suchas a standard screwdriver into the slot on the side plane of the mirrormounting section, and pry out the mirror. Be c...

  • Page 300

    B--70125EN/0311. LASER OPTICAL SYSTEM293O--RING (G55)FOLDING MIRROR UNITFOLDING MIRRORMIRROR HOLDERMIRROR HOLDER ATTACHMENT SCREWFig. 11.1.3 (a) Structure diagram of folding mirror unit

  • Page 301

    B--70125EN/0311. LASER OPTICAL SYSTEM294FOLDING MIRROR UNITFOLDING MIRRORO--RING (G65)MIRROR HOLDERMIRROR HOLDER ATTACHMENT SCREWFig. 11.1.3 (b) Structure diagram of folding mirror unit: C6000BThe zero--shift mirror and circular polarization mirror are used in theoptical path length unit, install...

  • Page 302

    B--70125EN/0311. LASER OPTICAL SYSTEM295[Procedure](1) Turn off the power to the CNC, then open the main circuit breaker orturn off the power supply of the laser oscillator.(2) Remove the mirror holder from the block (alignment unit) byloosening the mirror holder mounting screw.(3) Remove the mir...

  • Page 303

    B--70125EN/0311. LASER OPTICAL SYSTEM296The internal surfaces of the output mirror and rear mirror are concave. Forlaser oscillation, the curvature centers and mirror surfaces of the twomirrors must lie on the same axis. When this axis matches the tube axisof the discharge tubes, in other words, ...

  • Page 304

    B--70125EN/0311. LASER OPTICAL SYSTEM2974) Obtain a maximum power based on the folding mirror (FM1) byusing the folding mirror (FM4) as the reference.5) Collect a burn pattern. If the mode is good, end this procedure. Ifnot, start all over again from step 1). At this time, collect a burnpattern i...

  • Page 305

    B--70125EN/0311. LASER OPTICAL SYSTEM2985) Collect a burn pattern. If the mode is good, end this procedure. Ifnot, start all over again from step 1). At this time, collect a burnpattern in each step. If the mode is finally good, end this procedure.FM5FM6R.M.FM4FM2O.C.FM3FM1BeamFig. 11.2.1.1 (c) M...

  • Page 306

    B--70125EN/0311. LASER OPTICAL SYSTEM2995) Obtain a maximum power based on O.C. by using R.M. as thereference. Then, repeat this procedure starting with step 2). At thistime, collect a burn pattern in each step. If the mode is finally good,end this procedure.(5)C4000A1) Obtain a maximum power bas...

  • Page 307

    B--70125EN/0311. LASER OPTICAL SYSTEM300(1)Minimize the output power of internal discharge. If a large output isused, the mode present when a maximum power is obtained is notalways the best mode due to thermal distortion of each mirror.However, a capability of detecting an output variation due to...

  • Page 308

    B--70125EN/0311. LASER OPTICAL SYSTEM301(1)For information about burn pattern collection, see Section 4.3(1).(2)In the automatic operation mode, execute the program below to emita laser beam to an acrylic block.[Example of program: For the C1500B]G32 P1 Q1;G24 S1500 Q100 R4.0;G32 P0;M30;In the pr...

  • Page 309

    B--70125EN/0311. LASER OPTICAL SYSTEM302Do not determine the maximum power position of A at the actualmaximum power point (peak point). Instead, find the first position 1’with the same power after a peak, and set a position halfway between1 and 1’. Adjust B to obtain a maximum power at that p...

  • Page 310

    B--70125EN/0311. LASER OPTICAL SYSTEM303ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (...

  • Page 311

    B--70125EN/0311. LASER OPTICAL SYSTEM304ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (...

  • Page 312

    B--70125EN/0311. LASER OPTICAL SYSTEM305ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (FM1)FOLDING MIRROR SIDE (FM2)FOLDING MIRROR SIDE (FM3)FOLDING MIRROR SIDE (FM4)A...

  • Page 313

    B--70125EN/0311. LASER OPTICAL SYSTEM306ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRROR SIDE (R.M.)BEAM PATH (SHORT PATH TIME)OUTPUT COUPLER SIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (FM1)FOLDING MIRROR SIDE (FM2)FOLDING MIRROR SIDE (FM3)FOLDING MIRROR SIDE (FM4)A...

  • Page 314

    B--70125EN/0311. LASER OPTICAL SYSTEM307ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)REAR MIRRORSIDE (R.M.)BEAM PATH (SHORT PATH TIME)OUTPUT COUPLERSIDE (O.C.)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)FOLDING MIRROR SIDE (FM1)FOLDING MIRRORSIDE (FM2)FOLDING MIRROR SIDE (FM3)FOLDING MIRROR SIDE (FM4)ADJU...

  • Page 315

    B--70125EN/0311. LASER OPTICAL SYSTEM308REAR MIRROR SIDE (R.M.)OUTPUT COUPLERSIDE (O.C.)FOLDING MIRROR SIDE (FM1)ADJUSTMENT SCREW OFALIGNMENT (m: X AXIS)ADJUSTMENT SCREW OFALIGNMENT (n: Y AXIS)ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)ADJUSTMENT SCREW OFALIGN...

  • Page 316

    B--70125EN/0311. LASER OPTICAL SYSTEM309(1)Attach an acrylic plate approximately 3 to 10 m from the outlet of thelaser oscillator, and obtain a burn pattern for the CO2 laser beam (oneshot, rated output, CW 100%, 0.1--second duration). Do not attemptto touch the plate immediately after the patter...

  • Page 317

    B--70125EN/0311. LASER OPTICAL SYSTEM310Fig. 11.2.2.2 Semiconductor laser unit (A04B--0811--D401)

  • Page 318

    B--70125EN/0311. LASER OPTICAL SYSTEM311The oscillators of the short optical path types and the C3000C of longoptical path type contain a beam folding unit to divert the laser beamwithin the oscillator. If the beam output direction changes as a result ofaligning the resonator, the beam folding un...

  • Page 319

    B--70125EN/0311. LASER OPTICAL SYSTEM312Fig. 11.2.3 (a) Corner reflectors unit (C1500B, C2000B, C2000C)

  • Page 320

    B--70125EN/0311. LASER OPTICAL SYSTEM313Fig. 11.2.3 (b) Corner reflectors unit (C3000C, C3000D, C4000A, Short optical path length type)

  • Page 321

    B--70125EN/0311. LASER OPTICAL SYSTEM314Fig. 11.2.3 (c) Corner reflectors unit (C3000C, Long optical path length type)

  • Page 322

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX317A EXTERNAL VIEW

  • Page 323

    APPENDIXB--70125EN/03A. EXTERNAL VIEW318Fig. A (a) C1500B (short optical path length type)

  • Page 324

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX319Fig. A (b) C1500B (long optical path length type)

  • Page 325

    APPENDIXB--70125EN/03A. EXTERNAL VIEW320Fig. A (c) C2000B (short optical path length type)

  • Page 326

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX321Fig. A (d) C2000B (long optical path length type)

  • Page 327

    APPENDIXB--70125EN/03A. EXTERNAL VIEW322Fig. A (e) C2000C (short optical path length type)

  • Page 328

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX323Fig. A (f) C2000C (long optical path length type)

  • Page 329

    APPENDIXB--70125EN/03A. EXTERNAL VIEW324Fig. A (g) C3000C (short optical path length type, resonator section)

  • Page 330

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX325Fig. A (h) C3000C (long optical path length type, resonator section)

  • Page 331

    APPENDIXB--70125EN/03A. EXTERNAL VIEW326Fig. A (i) C3000C (auxiliary equipment section)

  • Page 332

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX327Fig. A (j) C3000D (short optical path length type)

  • Page 333

    APPENDIXB--70125EN/03A. EXTERNAL VIEW328Fig. A (k) C3000D (long optical path B type)

  • Page 334

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX329Fig. A (l) C4000A (short optical path length type)

  • Page 335

    APPENDIXB--70125EN/03A. EXTERNAL VIEW330Fig. A (m) C4000A (long optical path B type)

  • Page 336

    B--70125EN/03A. EXTERNAL VIEWAPPENDIX331Fig. A (n) C6000B

  • Page 337

    APPENDIXB--70125EN/03B. FANUC LASER C SERIESSPECIFICATIONS332B FANUC LASER C SERIES SPECIFICATIONS

  • Page 338

    B--70125EN/03B. FANUC LASER C SERIESSPECIFICATIONSAPPENDIX333ItemC1500B(shortoptical path)C1500B(longoptical path)C2000B(shortoptical path)C2000B(longoptical path)C2000C(shortoptical path)C2000C(longoptical path)TypeC1500BC2000BC2000CMethodHigh--speed axial carbon dioxide gas laser using high--fr...

  • Page 339

    APPENDIXB--70125EN/03B. FANUC LASER C SERIESSPECIFICATIONS334ItemC3000C(short optical path)C3000C(long optical path)C3000D(short optical path)C3000D(long optical path)TypeC3000CC3000DMethodHigh--speed axial carbon dioxide gas laser using high--frequency discharge excitationStructureOscillator and...

  • Page 340

    B--70125EN/03B. FANUC LASER C SERIESSPECIFICATIONSAPPENDIX335ItemC4000A(short optical path)C4000A(long optical path)C6000BTypeC4000AC6000BMethodHigh--speed axial carbon dioxide gas laser using high--frequency discharge excitationStructureCombination resonator/power supply typeRated laser output40...

  • Page 341

    APPENDIXB--70125EN/03C. ERROR CODE LIST336C ERROR CODE LISTNo.ContentsAlarm level16L0LContentsAlarm level4061661Anomaly in AD converter 1ALARM 14062662Anomaly in AD converter 2ALARM 14063663Anomaly in RF/DC power unitALARM 24065665Anomaly in shutter actionALARM 24066666There exists discharge tube...

  • Page 342

    B--70125EN/03C. ERROR CODE LISTAPPENDIX337No.Alarm levelContents16LAlarm levelContents0L4085685Decrease of laser outputALARM 14087687Overheat in shutter mirrorALARM 24088688Decrease of discharge tube voltageALARM 14089689Selection signal of assist gas not com-manded (in beam on state)Shutter : cl...

  • Page 343

    APPENDIXB--70125EN/03D. PARAMETERS338D PARAMETERSThis appendix describes the parameters related to sequence control insidethe laser oscillator and laser cutting conditions for FS16--L, FS16i--L, andFS0--L.Many parameters are specific to one type of laser oscillator and onemachine. So, the user sh...

  • Page 344

    B--70125EN/03D. PARAMETERSAPPENDIX339Parameter numbers starting from 15000 are used for the FS16--L orFS16i--L. Those starting from 0200 or 3900 are used for the FS0--L.No.Parameter description#715000#6#5FLTFLT#4CLBCLB#3BMOBMO#2AGAAGA#1LGCLGC#0LPCLPC0200FLT 1 : filter in power control valid (stan...

  • Page 345

    APPENDIXB--70125EN/03D. PARAMETERS340LGC 1 : Two stage gain selection of intra--tubePressure control valid (usually)0 : Invalid(When this bit is 1, PRM No. 15245 [207] becomes valid.)When this bit is 1, different control gains are used in the pressure controlin discharge start preparation complet...

  • Page 346

    B--70125EN/03D. PARAMETERSAPPENDIX341#715002#6PSHC10M#5BMA#4#3#2PCGGVW#1ADC#0BMA3979BMA 1 : Enables beam output with the shutter closed in the automaticoperation mode (for maintenance).0 : Disables beam output with the shutter closed in the automaticoperation mode (standard).PCG 1 : Performs high...

  • Page 347

    APPENDIXB--70125EN/03D. PARAMETERS342#7CWY15004#6ECH#5#4EDG#3BMC#2SPB#1STC#0AGCAGC 1 : Controls machining pressure for the set time.0 : Uses a flow pattern.STC 1 : Controls the shutter with an external signal.0 : Controls the shutter with a G code.SPB 1 : Outputs no beam in skip operation.0 : Out...

  • Page 348

    B--70125EN/03D. PARAMETERSAPPENDIX343#715006#6#5#4PCL#3#2PIN#1TRM#0TRM 1 : Disables the start--point and end--point soft keys for the trace settingscreen.0 : Enables the start--point and end--point soft keys for the trace settingscreen.PIN 1 : Specifies a G13 address using inch input.0 : Specifie...

  • Page 349

    APPENDIXB--70125EN/03D. PARAMETERS344#7TEM15009#6BCG#5BEM#4AFZ#3BS2#2BS1#1AS2#0AS1This parameter is used for the laser gas mixing function to record andmonitor the operating state of the mixer. This parameter is automaticallyset, so this parameter need not be set manually.AS2,AS1 The state of tan...

  • Page 350

    B--70125EN/03D. PARAMETERSAPPENDIX345#7PS815025#6PS7#5PS6#4PS5#3PS4#2PS3#1PS2#0PS1#7PS1615026#6PS15#5PS14#4PS13#3PS12#2PS11#1PS10#0PS9PS1 -- 16 Discharge tube selection when half of the discharge tubes are used[How to set] Select desired discharge tubes when half of the discharge tubes integrated...

  • Page 351

    APPENDIXB--70125EN/03D. PARAMETERS34615040LPWRLPWR0204LPWR Power output setting for contour processing (cutting/welding)(Setting data)[Setting range] 0 to 7000[Unit] WATT[How to set] This parameter can be set in laser setting screen and processing program.15041LHZLHZ0205LHZ Pulse frequency settin...

  • Page 352

    B--70125EN/03D. PARAMETERSAPPENDIX34715050EDANGEDANG Edge detection angleA corner is assumed to be present when the angle formed by two blocks issmaller than the specified angle.[Setting range] 0 to 180[Unit] deg15051PCPWRPCPWR Peak piercing power valueSet a peak power value for piercing to be pe...

  • Page 353

    APPENDIXB--70125EN/03D. PARAMETERS348[Setting range] 0 to 255[Unit] 0.01 MPa15056EPCAGSEPCAGS Type of piercing assist gasSet a type of assist gas to be used for piercing.[Setting range] 0 to 715057ERTLGHERTLGH Return distanceSet a return distance from the top of a corner to the next block.[Settin...

  • Page 354

    B--70125EN/03D. PARAMETERSAPPENDIX34915070LPWRPLPWRP0227LPWRP selection of laser power for piercing (Setting data)[Setting range] 0 to 7000[Unit] WATT[How to set] This parameter can be set in laser setting screen or processing program.15071LHZPLHZP0228LHZP Selection of pulse frequency for piercin...

  • Page 355

    APPENDIXB--70125EN/03D. PARAMETERS35015080HPPWRHPPWR High--speed piercing power[Setting range] 0 to 7000[Unit] Watt15081HPFRQHPFRQ Initial high--speed piercing frequency[Setting range] 5 to 2000[Unit] Hz15082STFRQSTFRQ Incremental high--speed piercing frequency[Setting range] 0 to 2000[Unit] Hz15...

  • Page 356

    B--70125EN/03D. PARAMETERSAPPENDIX35115086STPNMSTPNM Number of high--speed piercing steps[Setting range] 0 to 3276715087HPTIMHPTIMHigh--speed piercing end time[Setting range] 0 to 9999999[Unit] msec

  • Page 357

    APPENDIXB--70125EN/03D. PARAMETERS352#715088#6#5#4#3#2#1#0IPCIPC For power control mode specification (models A and B):0 : The format for specifying S and F in the same block is used.1 : The format for specifying G63 or entering the external signal(G224#1) is used.#7LP815089#6LP7#5LP6#4LP5#3LP4#2...

  • Page 358

    B--70125EN/03D. PARAMETERSAPPENDIX35315093LDTY0LDTY00244LDTY0 Power control constantWhen power control has been enabled with bit 0 of PRM No. 15000 [200],power control is performed according to the value of LDTY0. LDTY0 isused to specify the duty ratio when the feedrate is 0, thus enablingmodific...

  • Page 359

    APPENDIXB--70125EN/03D. PARAMETERS354#715096#6#5#4#3#2PCD#1PCF#0PCPPCP 0 : Does not exercise feedrate--based output control in newly specifiedpower control.1 : Exercises feedrate--based output control in newly specified powercontrol.PCF 0 : Does not exercise feedrate--based frequency control in n...

  • Page 360

    B--70125EN/03D. PARAMETERSAPPENDIX35515100LAGASLLAGASL0214LAGASL Selection of assist gas (Setting data)[Setting range] 0 to 7[How to set] This parameter can be set either in laser setting screen or in materialprocessing program.15101LAFWSLLAFWSL0225LAFWSL Selection of flow pattern (Setting data)[...

  • Page 361

    APPENDIXB--70125EN/03D. PARAMETERS35615114LAGPR1LAGPR1021515115LAGPR2LAGPR2021615116LAGPR3LAGPR30217LAGPR1, 2, 3 Pre--flow pressure 1, 2, 3 (Setting data)[Setting range] 0 to 255[Unit] 0.01 MPa[How to set] This parameter can be set in laser setting screen.15120LAGEX1LAGEX1021815121LAGEX2LAGEX2021...

  • Page 362

    B--70125EN/03D. PARAMETERSAPPENDIX35715132AGPSTAGPST3990AGPST Maximum assist gas pressureSet an assist gas pressure (MPa) at which 12.5 V is output.[Setting range] 0 to 255[Unit] MPa[Standard setting] 25515135AGTIMAGTIM Assist gas pressure set timeSet a desired assist gas pressure set time.[Setti...

  • Page 363

    APPENDIXB--70125EN/03D. PARAMETERS35815150LTTIMELTTIME0187LTTIME Laser RUN ON timeA cumulative RUN ON time is automatically set.[Setting range] 0 to 99999999[Unit] 0.1 hourStandard setting: Automatically set15151VPTIMEVPTIME Vacuum pump operation timeA cumulative vacuum pump operation time is aut...

  • Page 364

    B--70125EN/03D. PARAMETERSAPPENDIX35915200LPCMD1LPCMD1 Power used for power compensation factor determination when half of thedischarge tubes are usedSet a power to find the power compensation factor when half of thedischarge tubes are used.[Setting range] 0 to 32767[Unit] WATT[Standard setting] ...

  • Page 365

    APPENDIXB--70125EN/03D. PARAMETERS3600232LPCMD3LPCMD3 Power command for power calibration in mode of 8 discharge tubes.This is power command for power calibration in mode of 8 dischargetubes.Duty is 100%.[Setting range] 0 to 32767[Unit] WATT[Standard setting] Refer to the parameter data sheet del...

  • Page 366

    B--70125EN/03D. PARAMETERSAPPENDIX36115207PCLMTPCLMT3986PCLMT Maximum specifiable powerIf a specified laser power after power compensation and power feedbackprocessing exceeds the setting in this parameter, the laser power isclamped to the setting.[Setting range] 0 to 32767[Unit] WATT[Standard se...

  • Page 367

    APPENDIXB--70125EN/03D. PARAMETERS362[Unit] WATT[Standard setting] Refer to the parameter data sheet delivered with the machine.15212PPCLMTPPCLMT Maximum specifiable power when the duty ratio is not clampedIf PRM No. 15213 does not clamp the duty ratio to 50%, and a specifiedpower after power com...

  • Page 368

    B--70125EN/03D. PARAMETERSAPPENDIX36315220LVICMDLVICMD0247LVICMD Maximum bias command at discharge startDischarge current command is given when discharge start signal (HVON)is commanded in discharge preparation completion (LRDY) state to startdischarge. This command is increased by ramp.Command t...

  • Page 369

    APPENDIXB--70125EN/03D. PARAMETERS36415223LVCMDLVCMD0250LVCMD Bias command in oscillator preparation completion stateAfter the start of discharge is confirmed, the bias voltage of dischargecurrent command is replaced by this parameter. This replacement isperformed during a rise in the gas pressur...

  • Page 370

    B--70125EN/03D. PARAMETERSAPPENDIX36515240LEXPSLEXPS0235LEXPS Negative pressure in exhaust completionThis is the ultimate vacuu when gas flow system is evacuated in laser[Starting range] 0 to 32767[Unit] ×13 Pa[Standard setting] Refer to the parameter data sheet delivered with the machine.15241L...

  • Page 371

    APPENDIXB--70125EN/03D. PARAMETERS3660236LPPSLPPS Intra--tube pressure during oscillationThis is intra--tube gas pressure in laser preparation completion (LSTR)state.[Unit] ×13 Pa[Standard setting] Refer to the parameter data sheet delivered with the machine.15244LCCGNLCCGN0264LCCGN Gas pressure...

  • Page 372

    B--70125EN/03D. PARAMETERSAPPENDIX36715248GPNRAVGPNRAV4399GPNRAV Allowable gas pressure insufficiencyThe insufficient gas pressure alarm is issued when the gas pressure in thedischarge tube does not reach [(specified tube pressure for oscillation) --(this allowable value)].[Setting range] 0 to 32...

  • Page 373

    APPENDIXB--70125EN/03D. PARAMETERS36815257VIBCNTVIBCNT Number of abnormal vibrations detectedIf the number of abnormal vibrations detected exceeds the value specifiedin this parameter, an abnormal vibration alarm is issued.[Setting range] 0 to 32767[Unit] Number[Standard setting] 3015258LGPTCLGPT...

  • Page 374

    B--70125EN/03D. PARAMETERSAPPENDIX36915265PWRUPPWRUP3982PWRUP Maximum allowable power increaseIf the actual power exceeds the specified power by the value specified inthis parameter, a beam reflection error is reported.[Setting range] 0 to 32767[Unit] WATT[Standard setting] Refer to the prameter ...

  • Page 375

    APPENDIXB--70125EN/03D. PARAMETERS37015270NRMLTVNRMLTV0199NRMLTV Discharge tube voltage in normal operationIn this parameter, the voltage to be applied to the discharge tube in normalbase discharge is set. The value set in this parameter serves as thereference voltage used for discharge tube volt...

  • Page 376

    B--70125EN/03D. PARAMETERSAPPENDIX37115276GCHTMGCHTM3992GCHTM Laser gas replacement timeSet a time for laser gas replacement in laser start operation.[Setting range] 0 to 32767[Unit] sec[Standard setting] Refer to the parameter data sheet delivered with the machine.

  • Page 377

    APPENDIXB--70125EN/03D. PARAMETERS37215280LPCPW115281LPCPW2LPCPW1 Table interval when half of the discharge tubes are usedSet a power command setting interval.[Setting range] 30 to 1200[Standard setting] Refer to the parameter data sheet delivered with the machine.LPCPW2 Table interval when all d...

  • Page 378

    B--70125EN/03D. PARAMETERSAPPENDIX37315295LPCP15LPCP25028215296LPCP16LPCP26028315297LPCP17LPCP27028415298LPCP18LPCP280285LPCP20--28 Power command in mode of 4 discharge tubesPower command is increased by increment of PRM No. 15280[266] formode of 4 discharge tubes starting from 0.[Setting range] ...

  • Page 379

    APPENDIXB--70125EN/03D. PARAMETERS37415320LPCDLPCD2C Command power for power compensation coefficient calculation (validwhen EGE = 1)If the automatic aging function is enabled, a power compensationcoefficient is calculated after aging ends.[Setting range] 0 to 7000[Unit] W[Standard setting] Refer...

  • Page 380

    B--70125EN/03D. PARAMETERSAPPENDIX37515324LPSCLPSC Intra--tube pressure setting at oscillation time for power compensationcoefficient calculation (50 Hz) (valid when EGE = 1)For an oscillator with an inverter mounted, the same value as parameterNo. 15325 is to be set.This parameter specifies a va...

  • Page 381

    APPENDIXB--70125EN/03D. PARAMETERS37615328LDCD2ELDCD2E Pulse duty cycle command for aging (valid when EGE = 1)This parameter specifies a duty cycle to be used when aging is performedwith the automatic aging function.[Setting range] 0 to 100[Unit] %[Standard setting] 5015329PLCTMEPLCTME Power comm...

  • Page 382

    B--70125EN/03D. PARAMETERSAPPENDIX37715332LFCMD2LFCMD2 Oscillation frequency command value for power compensation[Setting range] 5 to 2000[Unit] Hz[Standard setting] 10015333LDCMD2LDCMD2 Pulse duty cycle command during power compensation and aging[Setting range] 0 to 100[Unit] %[Standard setting]...

  • Page 383

    APPENDIXB--70125EN/03D. PARAMETERS37815338LOFTIMHLOFTIMH Aging time data 4 (valid when EGE = 1)When the automatic aging function is enabled, the hour when theoscillator was stopped previously is recorded.[Setting range] 0 to 24 (Automatically set by the CNC)

  • Page 384

    B--70125EN/03D. PARAMETERSAPPENDIX37915500KEKE0252KE Detector gain factorThis parameter sets a gain factor for the displacement detector in Z--axistracing control.[Setting range] 2048 (0.5 × 212) to 6144 (1.5 × 212)[Standard setting] 4096NOTEThis parameter can be set on the tracer setting scree...

  • Page 385

    APPENDIXB--70125EN/03D. PARAMETERS38015504EMULEMUL0295EMUL Displacement multiplication factorSet a displacement multiplication factor to match a greater value to bedetected in tracing control. (Usually, 1 is set.)[Setting] 1 or 5[Standard setting] 1Set valueMaximum displacement(mm)Resolution(mm)1...

  • Page 386

    B--70125EN/03D. PARAMETERSAPPENDIX381#715510#6#5TRA#4#3#2#1#0TRA 1 : Uses an absolute coordinate system to display the current position onthe tracer setting screen.0 : Uses a relative coordinate system to display the current position onthe tracer setting screen.D.18PARAMETERS FORTRACING (DISPLAY)

  • Page 387

    APPENDIXB--70125EN/03D. PARAMETERS38215510INTGTINTGT0255INTGT Integral time constantSet an integral time constant for integral processing of deviations inZ--axis tracing control.[Setting range] 0 to 32767[Unit] msec[Standard setting] 015511ZRWTHZRWTH0256ZRWTH Integral compensation zero widthSet a...

  • Page 388

    B--70125EN/03D. PARAMETERSAPPENDIX38315520ISOUTISOUT0257ISOUT Phase compensation time constantSet a time constant for displacement phase compensation in Z--axistracing control.[Setting range] 0 to 32767[Unit] msec[Standard setting] 0 (Values of less than 2 are invalid.)15521CMPGCMPG0258CMPG Phase...

  • Page 389

    APPENDIXB--70125EN/03D. PARAMETERS38415530NMDEFNMDEF0224NMDEF Reference displacementSet a reference distance to be controlled from the quill top to a workpieceto be controlled in Z--axis tracing control.[Setting range] PRM No. 15531 [260] to PRM No. 15532 [261][Unit] 0.001 mmNOTEThis parameter ca...

  • Page 390

    B--70125EN/03D. PARAMETERSAPPENDIX385[Setting range] 0 to 32767[Unit] 0.001 mm[Standard setting] 120015537EOVRSEOVRS3987EOVRS Detection displacement for issuing the tracing range exceeded alarmIn Z--axis tracing control, when the absolute value, E, of a tracingdeviation (detection displacement (E...

  • Page 391

    APPENDIXB--70125EN/03D. PARAMETERS38615540ZTCGMZTCGM029615541WTCGMWTCGM398415542XTCGM15543YTCGMZTCGM Conversion factor for feedrate control voltage in Z--axis tracing controlWTCGM Conversion factor used to convert a voltage for feedrate specification inW--axis tracing controlXTCGM Conversion fact...

  • Page 392

    B--70125EN/03D. PARAMETERSAPPENDIX38715550APRCHAPRCH0251APRCH Approach completion detection rangeSet a range of displacements assumed to represent approach completionin Z--axis tracing control. Approach completion is assumed when thestate where displacements lie within a specified approach comple...

  • Page 393

    APPENDIXB--70125EN/03D. PARAMETERS388#7815700#67#56#45#34#2Z#1Y#0XX -- 8 Set axes required to calculate a move command for a mirror movementaxis.1 : Used for move command calculation0 : Not used for move command calculationNOTESet the bits for nonexistent axes to 0.#7815701#67#56#45#34#2Z#1Y#0XX ...

  • Page 394

    B--70125EN/03D. PARAMETERSAPPENDIX38915704MIRCOMMIRCOM Mirror block axis reference position compensationWhen correcting the mirror block axis position to obtain an optimumpropagation distance, set the distance from the origin in this parameter.[Setting range]32767[Unit] mm[Standard setting] 01570...

  • Page 395

    APPENDIXB--70125EN/03D. PARAMETERS39015710BMBCTMBMBCTM4390BMBCTM External piping exhaust time[Setting range] 0 to 32767[Unit] sec[Standard setting] 10 (2/m pipe length)15711GMMWTGMMWT4411GMMWT Gas mixture wait time[Setting range] 0 to 32767[Unit] min[Standard setting] 6015712GMVWTGMVWT4412GMVWT G...

  • Page 396

    B--70125EN/03D. PARAMETERSAPPENDIX39115715VCCKPRVCCKPR Vacuum criteria gas pressure[Setting range] 0 to 32767[Unit] ×13 Pa[Standard setting] 10015716TVTMRTVTMR4391TVTMR Evacuation wait time[Setting range] 0 to 32767[Unit] min[Standard setting] Refer to the parameter data sheet delivered with the...

  • Page 397

    APPENDIXB--70125EN/03D. PARAMETERS392#715800#6#5#4#3#2#1#0TPCTPC 0 : Disables the turbo blower constant power drive control function.1 : Enables the turbo blower constant power drive control function.15801LPPSMLPPSM Maximum intra--tube pressure when the turbo blower constant powerdrive control fu...

  • Page 398

    B--70125EN/03D. PARAMETERSAPPENDIX39315804TPWTPW Maximum open time of the exhaust valve for intra--tube pressure controlat oscillation time[Unit] msec[Setting range] 0 to 3000

  • Page 399

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR394E CONTROL SEQUENCES IN LASER OSCILLATOR

  • Page 400

    B--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATORAPPENDIX395SEQ 0PURGELRDY=0PTLPLSTR=0=0=0POWER ONSEQ 10PURGELRDY=0PTLPLSTR=1=0=0POWER OFFINITIALRUN ONSEQ 11(WAIT = 1)RUN OFFSEQ 20PURGELRDY=1PTLPLSTR=0=0=0HV ONSEQ 19(WAIT = 1)READY OF DISCHARGINGSEQ 21(RFHV = 0)SEQ 29(RFHV = 1)HV OFFSEQ 30PURG...

  • Page 401

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR396[SEQ 0] POWER OFF stateThis is the state prior to power on where all the signals are in off state.[SEQ 10] INITIAL stateAfter power is turned on, laser comes into PURGE=1 state. This signalis on when atmospheric pressure sensor monito...

  • Page 402

    B--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATORAPPENDIX397Intra--tube gas pressure control is performed in the following steps asshown in the figure.PRM15256SQ18SQ20SQ26SQ27SQ28SQ30 SQ23SQ20SQ12SQ16SQ17SQ49SQ13GAS PRESSUREPRM1524215243[236]PRM15241[237]PRM15240[235]RUNON45 70secHV ONLSTR HVO...

  • Page 403

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR398[SQ 10]This is the state after power is turned on in which intra--tube gas pressureequals atmospheric pressure.[SQ16, 17, 18]Setting the laser start switch (RUN) to ON starts evacuation, whichcontinues until the pressure designated by...

  • Page 404

    B--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATORAPPENDIX399[SQ49, 13, 12]In the SQ20 state, setting the laser start switch (RUN key) to OFFterminates gas pressure control, after which the turbo blower is shutdown, taking about 70 seconds to stop. If evacuation after RUN OFF hasbeen enabled, e...

  • Page 405

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR400The control of tube voltage is done simultaneously with that of gaspressure as shown in Fig. E.3 in the following sequences.H.V.ONSQ20PRM15222(PRM249)PRM15249(20sec)PRM15205(PRM3991)[TIME]PRM15200, 15201(PRM231, 232)PRM15220(PRM247)GA...

  • Page 406

    B--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATORAPPENDIX401[SQ 291]When HV is turned on, high voltage is applied to discharge tubes andvoltage control begins. Here command is increased in ramp mode up tothe value of PRM 15220 [247] (maximum bias command at dischargestart). The time required t...

  • Page 407

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR402[SQ 294]When normal base discharge is confirmed and PRM15000 bit 4 [200 bit4] is 1 (power calibration is done), this sequence begins to obtain powercalibration coefficient. Power calibration is to calibrate so that real andcommand pow...

  • Page 408

    B--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATORAPPENDIX403RUN = ONNOYESPower ON sequencePURGEOFI= OFF= ONAlarm 1 monitortreatment startPCROFI= ON= OFFPURGEWAIT= ON= OFFCLON= ONWait for 3 secondsRPA = ONCAMCON = FULL OPENChiller monitor startTIMER A = RESETWait for 3 seconds1PURGE=ON This sig...

  • Page 409

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR404TIMER A RESETThis timer begins counting after the start ofevacuation.21VEN= ONPCL= OFFWait for 5 secondsGRDY = ONGRDY= OFFCAMCON = FULL CLOSENOYESIntra--tube pressureTimer countYESTimer A > 600SECNOVENRBA= ON= OFFGRDY= ONALM 4080 [...

  • Page 410

    B--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATORAPPENDIX405VEN=OFFExhaust valve is closed.RBA=ONStart of Roots blower.2Wait for 45 secondsGas pressure controlstartNOYESWAIT= OFFLRDY= ONHV = ONNOYESAlarm 2 monitortreatment startLRDYPSS 1--8 = SET= OFFPSRDYRFHV= ON= ONPTLP= ON3200 VAC to DCpowe...

  • Page 411

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR406HV=ONWhen HV is turned on, laser can proceed to the nextsequence. HV ON can either be done in manual mode orautomatic mode using PMC.LRDY=OFFWhen HV is turned on, LRDY becomes off.PSS1--8=SET This is to select power units and usually ...

  • Page 412

    B--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATORAPPENDIX407discharge is confirmed, BIAS COMMAND is changed automaticallyfrom PRM15220[247] to PRM15223 [250] (BIAS COMMAND). If allthe tubes are confirmed normal discharge, intra--tube pressure is changedfrom PRM15241 [237] to PRM15242, 15243 [2...

  • Page 413

    APPENDIXB--70125EN/03E. CONTROL SEQUENCESIN LASER OSCILLATOR408The result is compared with PRM15203 [240] (power calibrationlimit). When PRM15204 [241] exceeds PRM15203 [240], the formeris clamped by the latter.LSTR=ON Oscillation preparation completion signal is on.Here oscillation in both manua...

  • Page 414

    B--70125EN/03F. REFIXING AND REPLACINGGAS TUBEAPPENDIX409F REFIXING AND REPLACING GAS TUBEReplacing both of polyethylene and copper tubes is the same. Take careonly for the combination between tube materials and ferrule materials.Polyethylene tube : nylon ferrule (back, front)(A98L--0004--0348/2-...

  • Page 415

    APPENDIXB--70125EN/03F. REFIXING AND REPLACINGGAS TUBE4101 Loosen tube fixing nut.Make sure to hold the fitting base with wrench.2 Remove tube.Removed tube is accompanied by ferrule as shown in Fig. F.1. Makesure that neither of tube nor ferrule is contaminated with dust. Whencontaminated, wipe t...

  • Page 416

    B--70125EN/03F. REFIXING AND REPLACINGGAS TUBEAPPENDIX4111 Cut the tube perpendicular to its length, then mount new ferrules onthe tube.Referring to Fig. F.1, mount fixing nut, back ferrule, and front ferruleonto tube.Here make sure not to introduce dust into tube and ferrule. If dustentered, wip...

  • Page 417

    APPENDIXB--70125EN/03G. REFIXING AND REPLACINGWATER TUBE412G REFIXING AND REPLACING WATER TUBEFor brass and stainless steel tubes, be careful to make proper selection offitting material and structure.Here make sure not to wet inside of apparatus in draining and removingtube.

  • Page 418

    B--70125EN/03G. REFIXING AND REPLACINGWATER TUBEAPPENDIX4131)Loosen tube fixing nut.Make sure to hold the fitting base with wrench.2) Remove tube.a) In case of brass fitting:Removed tube is accompanied as shown in Fig. G.1 by plasticsleeve.NutTubePlastic sleeveFig. G.1 Removing/remounting the wat...

  • Page 419

    APPENDIXB--70125EN/03G. REFIXING AND REPLACINGWATER TUBE4141) (a) In case of brass fittingMount a new sleeve on the tube.(b) In case of stainless steel fittingIf a sleeve is necessary, mount a new sleeve on the tube. If nosleeve is necessary, insert the tube as is.In mounting sleeve, refer to Fig...

  • Page 420

    B--70125EN/03H. GLOSSARYAPPENDIX415H GLOSSARYNameMeaningAccess panelThat protective component of a housing orenclosure which, when removed or shifted, cancause exposure to laser radiationAEL Accessibleemission levelMaximum accessible emission level set up for eachclass of laser productsAlighmentO...

  • Page 421

    APPENDIXB--70125EN/03H. GLOSSARY416NameMeaningFeedbackCorrective action in which a quantity to be controlledis compared with a target value by feeding part of anoutput signal to the input through a specially createdclosed loop so that the quantity to be controlledmatches the target valueLaserDevi...

  • Page 422

    B--70125EN/03H. GLOSSARYAPPENDIX417NameMeaningProtective housingLaser product housing or its part designed to protecthumans from exposure to a laser beam exceedingan accessible emission level or strong collateralradiationPulse durationTime interval between the points at which an instan-taneous va...

  • Page 423

    IndexB--70125EN/03i--1AAdjusting the beam center of the semiconductor laser beamsuperimposed on the CO2 laser beam, 309Adjusting the diameter of the semiconductor laser beam, 309Adjusting the exhaust controller (adjusting the laser gasconsumption), 220Adjusting the flow sensor of the C2000C, C300...

  • Page 424

    INDEXB--70125EN/03i--2Inter--unit connections (C3000C only), 67Internal structure, 23Intra--tube gas pressure control sequences, 397LLaser gas, 65Laser gas mixer function, 390Laser gas specification, 65Laser optical system, 279Laser oscillator status display (FS0--L), 132Laser oscillator status d...

  • Page 425

    INDEXB--70125EN/03i--3Replacing the flow sensor (C1500B, C2000B, C3000C), 274Replacing the FS0--L interface PCB (A16B--1110--0223) on theoscillator side, 228Replacing the FS16--L, FS16i--L interface PCBs on theoscillator side, 229Replacing the high--frequency inverter, 264Replacing the input unit...

  • Page 426

    · No part of this manual may bereproduced in any form.· All specifications and designsare subject to change withoutnotice.

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