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    GE Fanuc AutomationComputer Numerical Control ProductsLaser C1000 / C2000 / C4000―Model Efor CE MarkMaintenance ManualGFZ-70315EN/01May 2001

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    GFL-001Warnings, Cautions, and Notesas Used in this PublicationWarningWarning notices are used in this publication to emphasize that hazardous voltages, currents,temperatures, or other conditions that could cause personal injury exist in this equipment or maybe associated with its use.In situatio...

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    B-70315EN/01 TABLE OF CONTENTSc - 1TABLE OF CONTENTS1111OVERVIEWOVERVIEWOVERVIEWOVERVIEW.............................................................................................

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    TABLE OF CONTENTS B-70315EN/01c - 25555MAINTENANCEMAINTENANCEMAINTENANCEMAINTENANCE .................................................................................................

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    B-70315EN/01 TABLE OF CONTENTSc - 38888UNIT CONFIGURATIONUNIT CONFIGURATIONUNIT CONFIGURATIONUNIT CONFIGURATION .....................................................................

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    TABLE OF CONTENTS B-70315EN/01c - 49.9.2Adjusting the Flow Sensor (C2000-E, C4000-E).................................................................. 2109.10 DISCHARGE AGING.......

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    B-70315EN/01 TABLE OF CONTENTSc - 511.1.2Cleaning and Replacing the Rear Mirror............................................................................. 25711.1.3Cleaning and...

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    TABLE OF CONTENTS B-70315EN/01c - 6EEEECONTROL SEQUENCES IN LASER OSCILLATORCONTROL SEQUENCES IN LASER OSCILLATORCONTROL SEQUENCES IN LASER OSCILLATORCONTROL SEQUENCES IN LASER O...

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    B-70315EN/01 1.OVERVIEW- 1 -1 OVERVIEWThis manual describes the maintenance of the FANUC LASERC1000/C2000/C4000-MODEL E, as well as the structure,configurati...

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    1.OVERVIEW B-70315EN/01- 2 -1.1 ORGANIZATION OF THE MANUALThis manual is organized as described below.1.OverviewThis chapter describes the organization of th...

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    B-70315EN/01 1.OVERVIEW- 3 -1.2 APPLICABLE MODELSThis manual covers the following models :ModelAbbreviationFANUC LASER C1000-MODEL EC1000-EFANUC LASER C2000-...

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    1.OVERVIEW B-70315EN/01- 4 -1.3 RELATED MANUALSThe following manuals are available for the FANUC LASER C1000/C2000/C4000-MODEL E :DESCRIPTIONSB-63192ENCONNEC...

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    B-70315EN/01 1.OVERVIEW- 5 -1.4 TO USE THE LASER OSCILLATOR SAFETYIn this manual, the words Warning and Caution, corresponding todifferent levels of safety r...

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    2.SAFETY B-70315EN/01- 6 -2 SAFETYC1000-E, C2000-E, and C4000-E produce the rated output laserpower of 1000W, 2000W, and 4000W. The CO2 laser beam is ...

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    B-70315EN/01 2.SAFETY- 7 -2.1 LASER BEAM1)Potential hazardsLaser oscillator emits CO2 laser beam(10.6 µm), which is highpower and invisible.•Being ...

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    2.SAFETY B-70315EN/01- 8 -3)Position of laser beam emissionFig.2.1(a) is the position of panel that laser beam exposure isoccurred without panel in C1...

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    B-70315EN/01 2.SAFETY- 9 -Fig.2.1(a) Laser beam exposure position without panel as operating (C1000-E)Fig.2.1(b) Laser beam exposure position without ...

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    2.SAFETY B-70315EN/01- 10 -Fig.2.1(d) The position of laser beam delivery (C1000-E)

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    B-70315EN/01 2.SAFETY- 11 -Fig.2.1(e) The position of laser beam delivery (C2000-E)Fig.2.1(f) The position of laser beam delivery (C4000-E)

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    2.SAFETY B-70315EN/01- 12 -2.2 HIGH VOLTAGE1)Potential hazardsThere is RF voltage of 3 to 4kVo-p in the cabinet of the laseroscillator.There is 200 VA...

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    B-70315EN/01 2.SAFETY- 13 -Fig.2.2(a) Position of high voltage in C1000-E (Front, maintenance side)Fig.2.2(b) Position of high voltage in C1000-E (Bac...

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    2.SAFETY B-70315EN/01- 14 -Fig.2.2(c) Position of high voltage in C2000-E (Front, maintenance side)Fig.2.2(d) Position of high voltage in C2000-E (Bac...

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    B-70315EN/01 2.SAFETY- 15 -Fig.2.2(e) Position of high voltage in C4000-E (Front, maintenance side)Fig.2.2(f) Position of high voltage in C4000-E (Bac...

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    2.SAFETY B-70315EN/01- 16 -2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION)1)Potential hazardsCO2 beam is delivery from oscillator. Direct or scattered bea...

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    B-70315EN/01 2.SAFETY- 17 -2.4 FIRE1)Potential hazardsWhen you work with the laser oscillator or machine, hotfragments or slag can scatter from your w...

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    2.SAFETY B-70315EN/01- 18 -2.5 TOXIC FUME1)Potential hazardsSome materials such as certain plastics can emit toxic fumewhen they burn under the laser ...

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    B-70315EN/01 2.SAFETY- 19 -2.6 HIGH TEMPERATURE1)Potential hazardsWhen you touch a part of high temperature, your skin burn.2)Safety recommendationsTh...

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    2.SAFETY B-70315EN/01- 20 -Fig.2.6(a) Position of high temperature in C1000-E (Front, maintenance side).Fig.2.6(b) Position of high temperature in C10...

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    B-70315EN/01 2.SAFETY- 21 -Fig.2.6(c) Position of high temperature in C2000-E (Front, maintenance side).Fig.2.6(d) Position of high temperature in C20...

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    2.SAFETY B-70315EN/01- 22 -Fig.2.6(e) Position of high temperature in C4000-E (Front, maintenance side).Fig.2.6(f) Position of high temperature in C40...

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    B-70315EN/01 2.SAFETY- 23 -2.7 WARNING LABELSFig.2.7(a)-(f) show the location of the warning labels indicating thehigh voltage and laser beam path.Fig...

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    2.SAFETY B-70315EN/01- 24 -Fig.2.7(a) Location of the warning sticker (C1000-E:Front side).Fig.2.7(b) Location of the warning sticker (C2000-E:Back si...

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    B-70315EN/01 2.SAFETY- 25 -Fig.2.7(c) Location of the warning sticker (C2000-E:Front side).Fig.2.7(d) Location of the warning sticker (C2000-E:Back si...

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    2.SAFETY B-70315EN/01- 26 -Fig.2.7(e) Location of the warning sticker (C4000-E:Front side).Fig.2.7(f) Location of the warning sticker (C4000-E:Back si...

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    B-70315EN/01 2.SAFETY- 27 -Detail of warning sticker(1) Warning logotype (C1000-E)(1) Warning logotype (C2000-E, C4000-E)

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    2.SAFETY B-70315EN/01- 28 -(2) Warning logotype(3) Label for defeasible non-interlocked protective housing(4) Label for defeasible non-interlocked pro...

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    B-70315EN/01 2.SAFETY- 29 -(6) Aperture label(7) Label of non-interlocked protective panel(8) Identification label

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    2.SAFETY B-70315EN/01- 30 -(9) Address label(10) High voltage warning label(11) Supply voltage label(12) Label of over-current protective

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    B-70315EN/01 2.SAFETY- 31 -(13) Label of motor and transformer (C1000-E)(13) Label of motor and transformer (C2000-E)(13) Label of motor and transform...

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    2.SAFETY B-70315EN/01- 32 -(14) Label of warning light(15) Maintenance label(16) Certification label(17) Short-circuit interrupting capacity of main b...

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    B-70315EN/01 2.SAFETY- 33 -(18) Label for regurating the atmospheric gases in the oscillatorhousing(19) Label for cooling water and laser gas

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    2.SAFETY B-70315EN/01- 34 -2.8 HIGH-PRESSURE GASDo not allow any dangerous or high-pressure gas to get into theoscillator housing. The oscillator cabi...

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    B-70315EN/01 2.SAFETY- 35 -2.9 KEY CONTROLAll the laser products have to comply with the various kinds of lasersafety regulations, which include the u...

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    2.SAFETY B-70315EN/01- 36 -2.10 SHUTTER LOCKThe shutter lock is prepared because it dose not put out the laser beamby mistake. If you do not put out t...

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    B-70315EN/01 2.SAFETY- 37 -2.11 EMERGENCY STOP BUTTONPress the emergency stop button when it is dangerous and breaksdown. The oscillator is stopped di...

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    2.SAFETY B-70315EN/01- 38 -2.12 WARNING LIGHT (OPTIONAL)Laser oscillator is equipped with the warning light optionally. Thelight is flashed during dis...

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    B-70315EN/01 3.INTERNAL STRUCTURE- 39 -3 INTERNAL STRUCTURE

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    3.INTERNAL STRUCTURE B-70315EN/01- 40 -3.1 GENERALFigs.3.1(a) to (c) show the block diagram of the laser oscillator.The FANUC LASER C1000/C2000/C4000-MODEL E consists of alaser resonator...

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    B-70315EN/01 3.INTERNAL STRUCTURE- 41 -Fig.3.1(b) Block diagram (C2000-E)

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    3.INTERNAL STRUCTURE B-70315EN/01- 42 -Fig.3.1(c) Block diagram (C4000-E)(1) Laser resonatorThe laser resonator consists of several discharge tubes,connected in series using folding mirr...

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    B-70315EN/01 3.INTERNAL STRUCTURE- 43 -(3) Forced gas circulating systemA gas circulating system is configured by connecting theresonator and turbo blower with a circulating pipe. Laser ...

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    3.INTERNAL STRUCTURE B-70315EN/01- 44 -3.2 COMPONENT DETAILSThe following describes the details of each component of the laseroscillator. Figs.3.2(a) to (f) show the internal structure.F...

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    B-70315EN/01 3.INTERNAL STRUCTURE- 45 -Fig.4.2(c) Internal structure of C2000-E (Front, maintenance side)Fig.4.2(d) Internal structure of C2000-E (Back side)

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    3.INTERNAL STRUCTURE B-70315EN/01- 46 -Fig.4.2(e) Internal structure of C4000-E (Front, maintenance side)Fig.4.2(f) Internal structure of C4000-E (Back side)

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    B-70315EN/01 3.INTERNAL STRUCTURE- 47 -(1) ResonatorThe resonator consists of an output coupler, rear mirror, foldingmirrors, discharge tubes, power sensor unit, etc. It convertselectric...

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    3.INTERNAL STRUCTURE B-70315EN/01- 48 -(9) Turbo blowerDuring laser oscillation, the laser gas pressure is 100 to 700(1330 to 9310 Pa) when DGN. The turbo blower circulates thisrough-vac...

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    B-70315EN/01 3.INTERNAL STRUCTURE- 49 -(17) ShutterThe shutter consists of a gold-coated reflecting mirror, mountedon the rotating arm of a rotary solenoid. The shutter can beopened and ...

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    3.INTERNAL STRUCTURE B-70315EN/01- 50 -(24) Input unitThe input unit consists of an interface PCB, stabilized powersupply, and power magnetics cabinet. It transfers signalsbetween the la...

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    B-70315EN/01 3.INTERNAL STRUCTURE- 51 -(32) Safety boxThis is consisted of relay and indicator for interlock circuit.(Run ON, HV ON, Shutter open)

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    4.INSTALLATION B-70315EN/01- 52 -4 INSTALLATION

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    B-70315EN/01 4.INSTALLATION- 53 -4.1 INSTALLATION PROCEDUREUse the following procedure to make adjustments and checks duringinstallation.(1) Check the environment at ...

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    4.INSTALLATION B-70315EN/01- 54 -Fig.4.1(a) Clamp layout (C1000-E)

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    B-70315EN/01 4.INSTALLATION- 55 -Fig.4.1(b) Clamp layout (C2000-E)

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    4.INSTALLATION B-70315EN/01- 56 -Fig.4.1(c) Clamp layout (C4000-E)

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    B-70315EN/01 4.INSTALLATION- 57 -(3) Check the units installed in the main unit cabinet.•Check items1)Check whether any printed circuit boards are loose orremoved.2...

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    4.INSTALLATION B-70315EN/01- 58 -2)Gas leakage from external piping3)Laser gas composition and purity (See Section4.4.1.2.)4)Quality of cooling water (See Section 4.4...

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    B-70315EN/01 4.INSTALLATION- 59 -the chiller unit, pass cooling water through the systemat a flow rate of about 10liters/minute. Then, checkthat there is no water lea...

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    4.INSTALLATION B-70315EN/01- 60 -(14) Check that the laser gas pressure is controlled normally.1)Set all bits of parameter No. 15025 through parameter No.15028 to 0 b...

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    B-70315EN/01 4.INSTALLATION- 61 -(16) Check the oscillation characteristics and output. See Section4.3(1) for details of the check method.•Check items1)Oscillation ...

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    4.INSTALLATION B-70315EN/01- 62 -4.2 PREPARATION PRIOR TO SHIPMENTPrior to shipment and transportation, the packing and checkingoperations described below must be per...

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    B-70315EN/01 4.INSTALLATION- 63 -4.2.1 Packing for TransportationFor transportation, the packing requirements described below must beobserved.FANUC LASER C1000/C2000/...

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    4.INSTALLATION B-70315EN/01- 64 -4.2.2 Removing Cooling WaterRemove cooling water according to the procedure below.(1) Open the cooling water inlet (IN) and outlet (O...

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    B-70315EN/01 4.INSTALLATION- 65 -(5) Next, connect the compressed air hose to the cooling wateroutlet (OUT). At this time, ensure that cooling water inlet isopen. Rem...

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    4.INSTALLATION B-70315EN/01- 66 -4.3 DETAILS OF CHECKING(1) Oscillation characteristics1)Check that bit 4 of parameter No. 15000 is set to 1.2)Start the oscillator. W...

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    B-70315EN/01 4.INSTALLATION- 67 -5)Upon the completion of the check, restore the parametersmodified in step 1) to their original values.If discharge stops in step 5) ...

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    4.INSTALLATION B-70315EN/01- 68 -seconds, with Pc = rated output and Du = 100% set byprogramming. At this time, provide a flow of air with adrier. If a guide laser is...

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    B-70315EN/01 4.INSTALLATION- 69 -3)Upon the completion of setting, close the main valve of thegas cylinder.1.If the primary pressure of the regulator is abruptlyreduc...

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    4.INSTALLATION B-70315EN/01- 70 - CAUTIONA large increase in pressure indicates that, gas isleaking from the oscillator. The cause of the leak maybe:1.O-ring deterior...

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    B-70315EN/01 4.INSTALLATION- 71 -1)On the NC setting screen, enable parameter rewriting.2)Check the parameters, and enter the same values as thosegiven in the paramet...

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    4.INSTALLATION B-70315EN/01- 72 -3)Perform discharge by setting the HV ON switch to ON.Check that discharge is performed continuously.4)Then, perform internal dischar...

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    B-70315EN/01 4.INSTALLATION- 73 -4.4 OSCILLATOR CONNECTIONSThe oscillator has connections for cooling water piping, laser gaspiping, and power and signal cables. For ...

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    4.INSTALLATION B-70315EN/01- 74 -Fig. 4.4.1(b) Waterconnection and gas connection (C2000-E)Fig. 4.4.1(c) Waterconnection and gas connection (C4000-E)

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    B-70315EN/01 4.INSTALLATION- 75 -4.4.1.1 Specification of the cooling waterThe quality of cooling water is specified in the table below. If tapwater is used, it shou...

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    4.INSTALLATION B-70315EN/01- 76 -4.4.1.3 Chemical cleanerTo remove contaminants adhering to the inside surfaces of the coolingwater system, clean the system using the...

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    B-70315EN/01 4.INSTALLATION- 77 -4.4.2 Laser Gas4.4.2.1 Laser gas specificationSupply the laser oscillator with a mixture of gases that satisfy theconditions listed b...

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    4.INSTALLATION B-70315EN/01- 78 -4.4.3 Electrical ConnectionThe laser oscillator incorporates a safety circuit. The safety circuit isenabled by using a terminal board...

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    B-70315EN/01 4.INSTALLATION- 79 -Fig.4.4.3.1(a) Cable connection (C1000-E)Fig.4.4.3.1(b) Location of CNL1 (C1000-E)Fig.4.4.3.1(c) Cable connection of (C2000-E)

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    4.INSTALLATION B-70315EN/01- 80 -Fig.4.4.3.1(d) Cable connection (C4000-E)Fig.4.4.3.1(e) Location of CNL1 (C2000-E, C4000-E)c)OFF interlock signals (OFI1 and OFI2)Mak...

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    B-70315EN/01 4.INSTALLATION- 81 -4)CNL1 terminal B8PF2A8PF1B7OFI2A7OFI1B6A2A6A1B5EMS2A5EMS1B4RUN2A4RUN1B3SHL2A3SHLB2A2SCB1IB2A1IB1CNL1 pin arrangement (as viewed fro...

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    4.INSTALLATION B-70315EN/01- 82 -4.4.3.2 Details of safety circuitThe figure shows the safety circuit for each oscillator.Fig.4.4.3.2(a) Safety circuit of C11000-E

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    B-70315EN/01 4.INSTALLATION- 83 -Fig.4.4.3.2(b) Safety circuit of C2000-E

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    4.INSTALLATION B-70315EN/01- 84 -Fig.4.4.3.2(c) Safety circuit of C4000-E

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    B-70315EN/01 4.INSTALLATION- 85 -4.4.4 Inter-unit ConnectionsThe C1000-E has an oscillator section and exhaust pump section.Interconnection is made according to the p...

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    5.MAINTENANCE B-70315EN/01- 86 -5 MAINTENANCEIn FANUC LASER C1000/C2000/C4000-MODEL E, periodicinspection items have been reduced, and adjustments have been madeeasy....

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    B-70315EN/01 5.MAINTENANCE- 87 -5.1 DAILY INSPECTIONTable 5.1 lists daily inspection items. Inspect the FANUC LASERC1000/C2000/C4000-MODEL E according to this table. ...

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    5.MAINTENANCE B-70315EN/01- 88 -5.2 PERIODIC MAINTENANCETable 5.2 shows the periodic maintenance items and the periods. Theoperation hour can be known from the indica...

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    B-70315EN/01 5.MAINTENANCE- 89 -5.3 DETAILS OF MAINTENANCEWhen opening the panels and doors during maintenance, keep thepower turned off. Before replacing oil, be sur...

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    5.MAINTENANCE B-70315EN/01- 90 -Fig.5.3(b) Oil gauge of turbo blower and exhaust pump (C2000-E)Fig.5.3(c) Oil gauge of turbo blower and exhaust pump (C4000-E)

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    B-70315EN/01 5.MAINTENANCE- 91 -5.3.1 Turbo Blower Oil(1) Check methodCheck the amount of oil in the turbo blower while referring tothe figure below. The oil level sh...

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    5.MAINTENANCE B-70315EN/01- 92 -NOTEExecute discharge ageing after changing turboblower oil.Fig.5.3.1 Turbo blower oil check points

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    B-70315EN/01 5.MAINTENANCE- 93 -5.3.2 Exhaust Pump Oil(1) Check methodWatch the oil gauge, and check that the oil level is betweengraduations L and H. Also check whet...

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    5.MAINTENANCE B-70315EN/01- 94 -5.3.3 Exhaust Pump Filter(1) Replacement methodReplace the filter every 3000 hours, or when the exhaust powerhas degraded. If the filt...

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    B-70315EN/01 5.MAINTENANCE- 95 -5.4 MAINTENANCE PARTSThe maintenance parts are listed below. Refer to the following tablesfor maintenance unit and parts specification...

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    5.MAINTENANCE B-70315EN/01- 96 -No.ItemSpecificationsC1000-EC2000-EC4000-E44 Water flow switchA91L-0001-0214/18000145 Micro switch for beam path unitA55L-0001-0225/01...

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    B-70315EN/01 5.MAINTENANCE- 97 -No.ItemSpecificationsC1000-EC2000-EC4000-E80 Trigger electorodeA98L-0005-018744881 Trigger O ringJB-OR4D-P1044882 Water coupler for L...

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    5.MAINTENANCE B-70315EN/01- 98 -REPAIRABLE PARTSNo.ItemSpecificationsC1000-EC2000-EC4000-E1 Laser PSU unitA14B-0082-B2091242 Matching boxA14B-0082-B3161003 Matching b...

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    B-70315EN/01 6.TROUBLESHOOTING- 99 -6 TROUBLESHOOTING

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    6.TROUBLESHOOTING B-70315EN/01- 100 -6.1 TROUBLESHOOTING PROCEDUREThe troubleshooting procedure to be applied depends on the failureoccurrence status as indicated below. Perform c...

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    B-70315EN/01 6.TROUBLESHOOTING- 101 -6.2 ERROR MESSAGES AND COUNTERMEASURESSee the conceptual diagram of alarm processing and the list of errorcode in the appendix.

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    6.TROUBLESHOOTING B-70315EN/01- 102 -6.3 RESPONDING TO ALARM MESSAGES ON THE SCREENALM No.4061AD converter 1 is not normal.Alarm output conditionThis alarm is issued when the A/D ...

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    B-70315EN/01 6.TROUBLESHOOTING- 103 -ALM No.4063Anomaly of laser power supply unitThis message appears when the laser power supply unit becomesabnormal or performs protective oper...

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    6.TROUBLESHOOTING B-70315EN/01- 104 -PhenomenonPresumption cause2An alarm occurs before discharge begins. (Thetime when 200 VAC is supplied to the powersupply)The laser powersuppl...

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    B-70315EN/01 6.TROUBLESHOOTING- 105 -Cause of troubleSolution6Pressure sensorabnormalReplace the pressure sensor.7Internal leakage,leakage of waterCheck the faulty location, and r...

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    6.TROUBLESHOOTING B-70315EN/01- 106 -ALM No.4066Discharge starting anomalyAfter HV is turned on(start discharge), the discharge starts. Thisalarm occurs when at least one discharg...

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    B-70315EN/01 6.TROUBLESHOOTING- 107 -ALM No.4067Overheating laser oscillator housingThe temperature of the input side of the electrode cooling fan ismonitored and sends alarm when...

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    6.TROUBLESHOOTING B-70315EN/01- 108 -ALM No.4068Too much incident laser beam back to the resonator.This alarm is issued, if a workpiece reflects laser beam morethan the rating to ...

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    B-70315EN/01 6.TROUBLESHOOTING- 109 -ALM No.4069Anomaly of power supply unit voltage of IF PCBThis alarm appears when there occurs the anomaly in thestabilized power unit voltage ...

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    6.TROUBLESHOOTING B-70315EN/01- 110 -ALM No.4071Anomaly of assist gasWhen starting machining, the CNC monitors for a ready signalfrom the assist gas supply unit in the machine. If...

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    B-70315EN/01 6.TROUBLESHOOTING- 111 -ALM No.4073Decrease of laser gas pressureThe pressure of the laser gas supplied to the laser oscillator ismonitored.This alarm is issued, if t...

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    6.TROUBLESHOOTING B-70315EN/01- 112 -ALM No.4074Roots blower overheatThis alarm is issued if the maximum allowable temperature ofthe motor sequence section of the Roots blower is ...

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    B-70315EN/01 6.TROUBLESHOOTING- 113 -ALM No.4076Laser output decreaseThis alarm is issued, if the monitored laser output is much lowerthan the specified laser output, that is the ...

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    6.TROUBLESHOOTING B-70315EN/01- 114 -ALM No.4077Overheat of beam absorberLaser beam is introduced into the beam absorber, when theoscillation takes place with shutter closed. This...

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    B-70315EN/01 6.TROUBLESHOOTING- 115 -ALM No.4078Gas pressure anomaly in discharge tubeThe gas pressure is monitored after the discharge start readycondition (LRDY) is established....

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    6.TROUBLESHOOTING B-70315EN/01- 116 -ALM No.4079Press the RESET keyIf the emergency stop button is pressed after the discharge startready condition (LRDY) is set up, the shutter i...

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    B-70315EN/01 6.TROUBLESHOOTING- 117 -Cause of troubleSolution3 Gas leakage from piping 1) Check whether any component joints in thegas circulating system are loose. If a loosejoin...

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    6.TROUBLESHOOTING B-70315EN/01- 118 -ALM No.4081Anomaly of gas pressure controlPressing the RUN (pressure control start) button starts expellingair from the laser gas tube. When a...

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    B-70315EN/01 6.TROUBLESHOOTING- 119 -ALM No.4082Anomaly of pressure sensorThis alarm appears when the signal of the pressure sensor usedfor pressure control detector vanishes.Alar...

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    6.TROUBLESHOOTING B-70315EN/01- 120 -Cause of troubleSolution5Laser oscillator ambienttemperature out of specifiedrangeCheck whether the ambient temperature fallswithin the range ...

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    B-70315EN/01 6.TROUBLESHOOTING- 121 -ALM No.4088Discharge tube voltage dropThis alarm is issued, if the voltage applied to the discharge tubedrops largely. More specific, the disc...

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    6.TROUBLESHOOTING B-70315EN/01- 122 -ALM No.4089Assist gas not outputThis alarm is issued, if an attempt is made to radiate a laser beam,when no assist gas is selected, or an assi...

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    B-70315EN/01 6.TROUBLESHOOTING- 123 -ALM No.4096UNDER TRACINGThis alarm is issued when an attempt is made to change the traceaxis by using the trace axis selection function during...

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    6.TROUBLESHOOTING B-70315EN/01- 124 -ALM No.4100INVERTER1If the inverter used to power the turbo blower is abnormal, thisalarm is issued.When this alarm is issued, check that the ...

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    B-70315EN/01 6.TROUBLESHOOTING- 125 -ALM No.4101OUT OF FREQUENCY 1This alarm is issued, if a frequency reached signal is not receivedwithin 120 seconds after the turbo blower is s...

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    6.TROUBLESHOOTING B-70315EN/01- 126 -ALM No.4106BLOWER OIL SHORTAGEThis alarm is issued if the signal from the turbo blower oil sensorindicates that the oil level has fallen below...

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    B-70315EN/01 6.TROUBLESHOOTING- 127 -ALM No.4132PARAMETER WAS CHANGEDAlarm output conditionThis alarm is issued when the setting in parameter No. 15223, 15242, or15243 is altered ...

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    6.TROUBLESHOOTING B-70315EN/01- 128 -6.4 MAJOR FAULTS6.4.1 Laser Power Supply Alarm Display(1) If an alarm is issued to indicate the occurrence of a power supplyfault, check the d...

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    B-70315EN/01 6.TROUBLESHOOTING- 129 -Type of alarmSourceMajor causesRFIThis alarm is issued if a high RF currentflows through the discharge tube whenthe oscillator is operating in...

  • Page 138

    6.TROUBLESHOOTING B-70315EN/01- 130 -(2) Is there anomaly in the laser power sensor output? Is the DCresistor between the terminals of the power sensor unit in therange 100Ω-500...

  • Page 139

    B-70315EN/01 6.TROUBLESHOOTING- 131 -6.4.8 Excessive Laser Gas ConsumptionPossible causes are listed below. Take appropriate action.Cause of troubleSolution1 Gas leakage betweenga...

  • Page 140

    6.TROUBLESHOOTING B-70315EN/01- 132 -Causes of inverter alarms (Model : SJH300)MessageContentsCauseE15Overvoltage protection in receivingpower (supply voltage increase)Increased s...

  • Page 141

    B-70315EN/01 6.TROUBLESHOOTING- 133 -Display methodd081(Function/FUNC keys)(1)E01.3(Up/Down keys)(2)1000(Up/Down keys)(3)28.0(Up/Down keys)(4)280(Up/Down keys)(5)15(Up/Down keys)(...

  • Page 142

    6.TROUBLESHOOTING B-70315EN/01- 134 -Causes of alarms(2) Inverter (A90L-0001-0464/CE : Model JH300)When an alarm is issued, the digital panel displays a messageindicating the type...

  • Page 143

    B-70315EN/01 6.TROUBLESHOOTING- 135 -6.5 OBSERVING VOLTAGE OF POWER LINE6.5.1 Measurement of VoltageAscertain the followings, (1) line voltage: 200/220VAC, +10%, -15% (2) frequenc...

  • Page 144

    6.TROUBLESHOOTING B-70315EN/01- 136 -(2) Fuse used on the IF PCBFU3 : A60L-0001-0175#3.2 For +5V(3.2A)(3) Stabilized power supply unitFig.6.5.3(b) shows the external appearance o...

  • Page 145

    B-70315EN/01 6.TROUBLESHOOTING- 137 -6.5.4 Checking the IF PCB SignalsBy using the IF PCB pins, check that each signal of the IF PCB isnormal. Fig. 6.5.3(a) show the pin locations...

  • Page 146

    6.TROUBLESHOOTING B-70315EN/01- 138 -6.6 INDICATION OF STATE BY MEANS OF SELF DIAGNOSTICFUNCTIONWhen the machine breaks down, it is necessary to know if the troubleis in the CNC, ...

  • Page 147

    B-70315EN/01 6.TROUBLESHOOTING- 139 -CNC→→→→PMC status display#7#6#5#4#3#2#1#0F220MWRMSHTONL SHTOFLMWRMLaser power alarm signalSHTONLShutter on state signalSHTOFLShutter o...

  • Page 148

    6.TROUBLESHOOTING B-70315EN/01- 140 -904GAS PRES. CONTROLDisplays a value specified in a pressure command for the pressurecontroller that controls pressure inside the discharge tu...

  • Page 149

    B-70315EN/01 6.TROUBLESHOOTING- 141 -921RF VOLTAGE 7922RF CURRENT 7923RF VOLTAGE 8924RF CURRENT 8Voltage (V) and current (mA) of discharge tubes 1 to 8 (strictlyspeaking, power su...

  • Page 150

    6.TROUBLESHOOTING B-70315EN/01- 142 -910DCW 5910DCW 6910DCW 7910DCW 8Injection power of power supplies 1 to 8 (valid when bit 5 ofparameter No. 15008 is 1).Unit : W#7#6#5#4#3#2#1#...

  • Page 151

    B-70315EN/01 6.TROUBLESHOOTING- 143 -*RALExhaust pump alarm0 : Abnormal1 : NormalSONOpen shutter sensorThe shutter is open when this bit is set to 1.SOFClosed shutter sensorThe sh...

  • Page 152

    6.TROUBLESHOOTING B-70315EN/01- 144 -*TC2Turbo current sensor 20 : Abnormal1 : Normal*OH2Abnormal turbo temperature 20 : Abnormal1 : Normal#7#6#5#4#3#2#1#0964*OH3*TC3*RV3*VB3*AR3*...

  • Page 153

    B-70315EN/01 6.TROUBLESHOOTING- 145 -SP2Pressure/power select signalHSCHigh-speed A/D conversion start#7#6#5#4#3#2#1#0970PS08PS07PS06PS05PS04PS02PS02PS01PS01 to PS08Power select s...

  • Page 154

    6.TROUBLESHOOTING B-70315EN/01- 146 -IBGuide laser-on command0 : OFF1 : ONFWInverter start signal0 : Stopped1 : StartedPCSGas pressure PWM command0 : OFF1 : ONLSCLow speed A/D con...

  • Page 155

    B-70315EN/01 7.OSCILLATOR CONNECTIONS- 147 -7 OSCILLATOR CONNECTIONS

  • Page 156

    7.OSCILLATOR CONNECTIONS B-70315EN/01- 148 -7.1 ELECTRICAL CONNECTIONSFig.7.1(a) Electrical connection diagram (C1000-E)

  • Page 157

    B-70315EN/01 7.OSCILLATOR CONNECTIONS- 149 -Fig.7.1(b) Electrical connection diagram (C2000-E)

  • Page 158

    7.OSCILLATOR CONNECTIONS B-70315EN/01- 150 -Fig.7.1(c) Electrical connection diagram (C4000-E)

  • Page 159

    B-70315EN/01 7.OSCILLATOR CONNECTIONS- 151 -7.2 COOLING WATER PIPINGFig.7.2(a) Water flow system diagram (C1000-E)

  • Page 160

    7.OSCILLATOR CONNECTIONS B-70315EN/01- 152 -Fig.7.2(b) Water flow system diagram (C2000-E)

  • Page 161

    B-70315EN/01 7.OSCILLATOR CONNECTIONS- 153 -Fig.7.2(c) Water flow system diagram (C4000-E)

  • Page 162

    7.OSCILLATOR CONNECTIONS B-70315EN/01- 154 -7.3 GAS PIPINGFigs.7.3(a) shows the flow of supply gas and exhaust gas in the laseroscillator. Figs.7.3(b) to (d) are system diagrams showing the pipingin...

  • Page 163

    B-70315EN/01 7.OSCILLATOR CONNECTIONS- 155 -Fig.7.3(a) Schematic diagram of laser gas flow (2/2)

  • Page 164

    7.OSCILLATOR CONNECTIONS B-70315EN/01- 156 -Fig.7.3(b) Gas flow system diagram (C1000-E)Fig.7.3(c) Gas flow system diagram (C2000-E)

  • Page 165

    B-70315EN/01 7.OSCILLATOR CONNECTIONS- 157 -Fig.7.3(d) Gas flow system diagram (C4000-E)

  • Page 166

    8.UNIT CONFIGURATION B-70315EN/01- 158 -8 UNIT CONFIGURATION

  • Page 167

    B-70315EN/01 8.UNIT CONFIGURATION- 159 -8.1 INPUT UNITThe input unit consists of a power magnetics cabinet, interface PCB,and stabilized power supply. The power magnetics cabinet isco...

  • Page 168

    8.UNIT CONFIGURATION B-70315EN/01- 160 -Fig.8.1(b) Layout of input unit (1/2) (C1000-E)Fig.8.1(c) Layout of input unit (2/2) (C1000-E)

  • Page 169

    B-70315EN/01 8.UNIT CONFIGURATION- 161 -C2000-EQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3QF4QF5QF6ThermalRelayQF2QF7TransformerunitQF8KM2KM3KM4InverterAC FANMagnetic valveStabilized PSUIF ...

  • Page 170

    8.UNIT CONFIGURATION B-70315EN/01- 162 -C4000-EQF1ThermalRelayKM1PSUNo. 2PSUNo. 1QF3QF4QF5QF7ThermalRelayQF2KM2KM3KM4PSUNo. 3InverterCNC INPUT UNITAS ALARM SHORTPOWER OFFWhen an alarm...

  • Page 171

    B-70315EN/01 8.UNIT CONFIGURATION- 163 -Fig.8.1(g) Layout of input unit (C4000-E)

  • Page 172

    8.UNIT CONFIGURATION B-70315EN/01- 164 -8.2 INTERMEDIATE PCB BIntermediate PCB B is used to group signals sent from the shuttersection and to output the grouped signals to the interfa...

  • Page 173

    B-70315EN/01 8.UNIT CONFIGURATION- 165 -8.3 GAS CONTROLLER (C1000-E)The gas controller consists of components such as a suction unit,exhaust unit, and pressure sensor. Fig.8.3(a) show...

  • Page 174

    8.UNIT CONFIGURATION B-70315EN/01- 166 -(9) Exhaust flow rate adjustment valveThis valve adjusts the flow rate of laser gas exhausted from theoscillator during normal operation. This ...

  • Page 175

    B-70315EN/01 8.UNIT CONFIGURATION- 167 -Fig.8.3(b) Block diagram of gas controller (C1000-E)

  • Page 176

    8.UNIT CONFIGURATION B-70315EN/01- 168 -8.4 PRESSURE CONTROL UNITFig.8.4(a) shows installation, and Fig.8.4(b) shows piping of thepressure controller respectively. The functions of ea...

  • Page 177

    B-70315EN/01 8.UNIT CONFIGURATION- 169 -Fig.8.4(a) Mounting diagram of pressure control unitFig.8.4(b) Block diagram of gas pressure controller

  • Page 178

    9.SETTING AND ADJUSTMENT B-70315EN/01- 170 -9 SETTING AND ADJUSTMENT

  • Page 179

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 171 -9.1 LASER POWER SUPPLY UNITThis unit is precisely adjusted at the factory and should not requireany further adjustment. If the power supply unit, matchi...

  • Page 180

    9.SETTING AND ADJUSTMENT B-70315EN/01- 172 -9.1.2 Base Discharge Adjustment9.1.2.1 Rewriting the parameterRewrite the parameters according to the table below. (Uponcompletion of adjustment, return...

  • Page 181

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 173 -the power supply clockwise slowly, and increase the value ofRFI by 4 mA or increase the value of DCV by 0.7 V. Afterturning off HV, turn on HV and check...

  • Page 182

    9.SETTING AND ADJUSTMENT B-70315EN/01- 174 -(5) After output of the maximum command value, wait 3 minutes.Record the DCV, DCI, RFV, and RFI values of each powersupply. Then, check that the value o...

  • Page 183

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 175 -9.1.7 Checking of Electric Shutter Operation(1) Insert heat-sensitive paper into the laser optical path afterpassing through the shutter mirror.(2) outp...

  • Page 184

    9.SETTING AND ADJUSTMENT B-70315EN/01- 176 -9.1.8 Alarm Level of Laser PSUAlarm level setting value of laser PSU is shown the following table.Table 9.1.8 Alarm level setting valueTable 9.1.8 Alarm...

  • Page 185

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 177 -9.2 TURBO PCBThese PCBs are precisely adjusted at the factory and should notrequire any further adjustment. If the turbo blower or turbo PCB isreplaced,...

  • Page 186

    9.SETTING AND ADJUSTMENT B-70315EN/01- 178 -(7) In the alarm state, adjust trimmer VR1 so that VC (voltage acrossVA1 and 0V) matches the following value:VC=VSO×0.778(8) Press the reset key of the...

  • Page 187

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 179 -9.3 INVERTER9.3.1 Adjusting the Inverter (A90L-0001-0500/8LF : Model NameSJH300)ConnectionThe following cables are connected to the inverter:R, S, T : M...

  • Page 188

    9.SETTING AND ADJUSTMENT B-70315EN/01- 180 -(1) Names and descriptions of the components of the digitaloperator's panelNameDescriptionMonitorDisplays settings such frequency and output currentvalu...

  • Page 189

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 181 -(2) Method of operation(a) Method of displaying the monitor mode, basic setting mode,and extended function modeMonitor (4-digit LED display)<1> Di...

  • Page 190

    9.SETTING AND ADJUSTMENT B-70315EN/01- 182 -(b) Function setting methodChange the operation command destination(operator → control terminal).<1> The extended function mode is displayed.(A-...

  • Page 191

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 183 -(c) Function code setting method(A029 is displayed.)Press the key.The code No. of the monitor mode, basic setting mode, or extended function monitor ca...

  • Page 192

    9.SETTING AND ADJUSTMENT B-70315EN/01- 184 -Parameter settingsCodeName of functionInitialvalueSettingvalueRemarksd001Output frequency monitorHzd002Output current monitorAd003Rotation direction mon...

  • Page 193

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 185 -CodeName of functionInitialvalueSettingvalueRemarksMultistagespeedselectionA039Jogging selection000000: Free run at JG stop time (disabled during operat...

  • Page 194

    9.SETTING AND ADJUSTMENT B-70315EN/01- 186 -CodeName of functionInitialvalueSettingvalueRemarksA101 01 start0.00Hz0.00HzA102 01 end0.00Hz0.00Hz0.00 to 1500A103 01 start ratio20%20%A104 01 end rati...

  • Page 195

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 187 -CodeName of functionInitialvalueSettingvalueRemarksC001Intelligent input terminal 1 selection1818C002Intelligent input terminal 2 selection1615C003Intel...

  • Page 196

    9.SETTING AND ADJUSTMENT B-70315EN/01- 188 -CodeName of functionInitialvalueSettingvalueRemarksb034 Run time/power ON time level0hr0hr0. to 9999.(0 to 99990hr)/1000 to 6553(100000 to 655300)hrb035...

  • Page 197

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 189 -9.3.2 Adjusting the Inverter (A90L-0001-0464/CE, Model Name :JH300)(1) ConnectionThe following cables are connected to the inverter:R. S. T: Three-phase...

  • Page 198

    9.SETTING AND ADJUSTMENT B-70315EN/01- 190 -- Remote operator(1) Connecting the remote operatorBe sure to turn the power supply off when connecting theconnector.High performance remote operator (H...

  • Page 199

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 191 -- High performance remote operator(1) Keys and LCD Screen[READ and COPY keys](valid only for HRW).READ- Used to read data from the inverter.NOTE : If a ...

  • Page 200

    9.SETTING AND ADJUSTMENT B-70315EN/01- 192 -(2) MONITOR/FUNCTION modeThe operator has two modes; MONITOR mode and FUNCTIONmode. In the MONITOR mode, the monitor screen to displayoperation status a...

  • Page 201

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 193 -(b) Monitor screen displayScreen scrolling range"MONITOR" key1)Item selection cursor ( )Used to update set values including the frequency.Move...

  • Page 202

    9.SETTING AND ADJUSTMENT B-70315EN/01- 194 -(3) Parameter settingsThe following table lists the parameters for which the values havebeen changed from the initial values. If the inverter has been s...

  • Page 203

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 195 -9.4 GAS CONTROLLERThis unit is precisely adjusted at the factory and should not requireany further adjustment. If the intake unit, exhaust unit, or atmo...

  • Page 204

    9.SETTING AND ADJUSTMENT B-70315EN/01- 196 -(3) Remove the orange gas tube by loosening the hexagon cap nutssecuring the tube. This causes the atmospheric pressure sensor todetect the atmospheric ...

  • Page 205

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 197 -9.4.3 Adjusting the Exhaust Unit (Adjusting the Laser GasConsumption)(1) Remove the piping from the filter of the gas controller, thenattach a gas meter...

  • Page 206

    9.SETTING AND ADJUSTMENT B-70315EN/01- 198 -Fig.9.4 Details of C1000-E gas controller sensor and flow rate adjustment valve

  • Page 207

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 199 -9.5 SETTING THE GAS SUPPLY PRESSURE SENSOR ANDATMOSPHERIC PRESSURE SENSORThe sensors operate in one of four modes. In the measurement mode,a pressure va...

  • Page 208

    9.SETTING AND ADJUSTMENT B-70315EN/01- 200 --Switch output 2 operation indicator lamp (red LED):Turned on when OUT1 is on.-UP () and DOWN () buttons:Used to change the mode and settings.-SET butto...

  • Page 209

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 201 -9.5.2 Setting ProcedureWhen setting in each mode, follow the procedure described below.Setting in the initial setting modePerform basic setting for the ...

  • Page 210

    9.SETTING AND ADJUSTMENT B-70315EN/01- 202 -Setting in the pressure setting modePerform operating pressure setting for the sensor. Note that differentvalues are set for the gas supply pressure sen...

  • Page 211

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 203 -Zero clearClear the initial offset value of the sensor. This setting can be made inthe measurement mode. Set the atmospheric pressure sensor only.Check ...

  • Page 212

    9.SETTING AND ADJUSTMENT B-70315EN/01- 204 -9.6 PRESSURE CONTROL UNITThis unit is precisely adjusted at the factory and should not requireany further adjustment. If the pressure controller is repl...

  • Page 213

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 205 -9.6.2 Setting the Atmospheric Pressure SensorWhile setting the sensor, the pressure controller is open to theatmosphere. To prevent dust from entering t...

  • Page 214

    9.SETTING AND ADJUSTMENT B-70315EN/01- 206 -9.7 ADJUSTING THE EXHAUST CONTROL UNIT (ADJUSTINGTHE LASER GAS CONSUMPTION)This unit is precisely adjusted at the factory and should not requireany furt...

  • Page 215

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 207 -9.8 SETTING THE POWER INPUT COMPENSATIONCOEFFICIENTThis coefficient is precisely adjusted at the factory and should notrequire any further adjustment.If...

  • Page 216

    9.SETTING AND ADJUSTMENT B-70315EN/01- 208 -9.9 WATER FLOW SENSORThis sensor is precisely adjusted at the factory and should not requireany further adjustment. If the water distribution unit or wa...

  • Page 217

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 209 -- Supplement -If a flowmeter is unavailable, a temporary setting can be madeby positioning the flow rate indicator as shown in Fig.9.9.1.Fig.9.9.1 Flow ...

  • Page 218

    9.SETTING AND ADJUSTMENT B-70315EN/01- 210 -9.9.2 Adjusting the Flow Sensor (C2000-E, C4000-E)(1) Adjust the flow rate of cooling water flowing into the oscillatorto an alarm setting flow rate. Us...

  • Page 219

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 211 -9.10 DISCHARGE AGINGIf the laser oscillator is not used for a long time (one week or more) orif the laser gas circulation system is opened to the atmosp...

  • Page 220

    9.SETTING AND ADJUSTMENT B-70315EN/01- 212 -•Automatic operation1Create this program:G32 P1 Q1 ;G24 S700 P100 Q50 R900. ;S specifies an outputG32 P0 ;(W), Q specifies aduty cycle (%), andR spec...

  • Page 221

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 213 -Gas flow system agingPerform gas flow system aging, after a part such as a turbo blower,heat exchanger, or a pipe is replaced or if dust or any other im...

  • Page 222

    9.SETTING AND ADJUSTMENT B-70315EN/01- 214 -Fig.9.10(b) Inlet of cleaner flange (C1000-E)Fig.9.10(c) Inlet of cleaner flange (C2000-E)

  • Page 223

    B-70315EN/01 9.SETTING AND ADJUSTMENT- 215 -Fig.9.10(d) Inlet of cleaner flange (C4000-E)3Start the oscillator, and check it for leakage.Vacuum it twice.4Start the oscillator, and keep the turbo b...

  • Page 224

    10.REPLACEMENT PROCEDURES B-70315EN/01- 216 -10 REPLACEMENT PROCEDURES

  • Page 225

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 217 -10.1 INPUT UNIT10.1.1 Replacing the Stabilized Power SupplyReplace the stabilized power supply as follows:(1) Turn off the power to the CNC, then turn off the p...

  • Page 226

    10.REPLACEMENT PROCEDURES B-70315EN/01- 218 -10.1.3 Replacing the IF PCB on the Oscillator SideReplace the IF PCB on the oscillator side as follows:(1) Turn off the power to the CNC, then turn off the powe...

  • Page 227

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 219 -10.2 REPLACING THE LASER POWER SUPPLYFigs.10.2(a) to (c) show the laser power supply. Replace the laserpower supply as described below.Fig. 10.2(a)

  • Page 228

    10.REPLACEMENT PROCEDURES B-70315EN/01- 220 -Fig. 10.2(b)

  • Page 229

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 221 -Fig. 10.2(c)

  • Page 230

    10.REPLACEMENT PROCEDURES B-70315EN/01- 222 -(1) Replacing the power supply1)Turn off the power to the laser oscillator, then drain thecooling water.2)Remove the following water joints, power cables, andsi...

  • Page 231

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 223 -1)To check whether an FET module PCB is damaged,measure the resistance between check pins D and Sshown in the figure.A resistance of less than 10 kW indicates t...

  • Page 232

    10.REPLACEMENT PROCEDURES B-70315EN/01- 224 -10.3 REPLACING THE MATCHING BOXReplace the matching box as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In additio...

  • Page 233

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 225 -10.4 REPLACING THE TURBO BLOWERWhen the turbo blower is replaced, the gas circulating system is opento the atmosphere for a long time. Pay particular attention ...

  • Page 234

    10.REPLACEMENT PROCEDURES B-70315EN/01- 226 -9)Supply a prescribed amount of turbo oil to the turbo-blower.10) Check that there are no cooling water leaks, turn on theoscillator, then check for gas leakage...

  • Page 235

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 227 -10.5 REPLACING THE TURBO PCBReplace the turbo PCB as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, ope...

  • Page 236

    10.REPLACEMENT PROCEDURES B-70315EN/01- 228 -10.6 REPLACING INTERMEDIATE PCB BReplace intermediate PCB B as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In add...

  • Page 237

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 229 -10.7 REPLACING THE EXHAUST PUMPWhen the exhaust pump is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention ...

  • Page 238

    10.REPLACEMENT PROCEDURES B-70315EN/01- 230 -Fig. 10.7 Exhaust pump unit layout

  • Page 239

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 231 -10.8 REPLACING THE PRESSURE CONTROL UNITWhen the pressure control unit is replaced, the gas circulating systemis open to the atmosphere for a long time. Pay par...

  • Page 240

    10.REPLACEMENT PROCEDURES B-70315EN/01- 232 -10.8.2 Pressure Control Unit (C2000-E, C4000-E)(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open the main cir...

  • Page 241

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 233 -10.9 REPLACING THE EXHAUST CONTROL UNIT (C2000-E,C4000-E)When the exhaust control unit is replaced, the gas circulating systemis open to the atmosphere for a lo...

  • Page 242

    10.REPLACEMENT PROCEDURES B-70315EN/01- 234 -10.10 REPLACING A DISCHARGE TUBEWhen a discharge tube is replaced, the gas circulating system is opento the atmosphere for a long time. Pay particular attention...

  • Page 243

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 235 -(10) Insert the new discharge tube into the discharge tube holder byreversing step (6), then perform assembly by reversing steps (4)and (5).(11) Mount the reson...

  • Page 244

    10.REPLACEMENT PROCEDURES B-70315EN/01- 236 -10.11 REPLACING A FAN UNITThe laser oscillator contains many fan units, which are classified intothe following two types:(1) Fan unitConsists of several fans an...

  • Page 245

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 237 -10.11.2 Replacing a Fan-assisted RadiatorReplace a fan-assisted radiator as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscil...

  • Page 246

    10.REPLACEMENT PROCEDURES B-70315EN/01- 238 -10.11.3 Attaching and Detaching a Cable To and From the TerminalBlock(1) As shown below, a cable is secured by a fitting. By pressing thefitting from the top wi...

  • Page 247

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 239 -10.12 REPLACING THE POWER SENSOR UNITThe power sensor is a very delicate component. Be careful not totouch or apply force to the black, light-sensitive surface....

  • Page 248

    10.REPLACEMENT PROCEDURES B-70315EN/01- 240 -10.13 REPLACING THE SHUTTER SECTIONFig.10.13(a) External view of shutter section (C1000-E)Fig.10.13(b) External view of shutter section (C2000-E, C4000-E)Replac...

  • Page 249

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 241 -10.13.1 Replacing the Shutter Unit(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open the main circuit breaker ...

  • Page 250

    10.REPLACEMENT PROCEDURES B-70315EN/01- 242 -10.14 REPLACING THE BEAM ABSORBERReplace the beam absorber as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addi...

  • Page 251

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 243 -10.15 REPLACING THE INVERTERReplace the inverter as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open...

  • Page 252

    10.REPLACEMENT PROCEDURES B-70315EN/01- 244 -10.16 REPLACING THE WATER DISTRIBUTION UNITReplace the water distribution unit as follows. The IN side and OUTside of the distribution unit of C1000-E are separ...

  • Page 253

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 245 -Fig.10.16(a) Detail of water distribution unit (C1000-E) (Refer to water flow diagram)

  • Page 254

    10.REPLACEMENT PROCEDURES B-70315EN/01- 246 -Fig.10.16(b) Detail of water distribution unit (C2000-E) (Refer to water flow diagram)

  • Page 255

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 247 -Fig.10.16(c) Detail of water distribution unit (C4000-E) (Refer to water flow diagram)

  • Page 256

    10.REPLACEMENT PROCEDURES B-70315EN/01- 248 -10.17 REPLACING THE CONDENSATION SENSORReplace the condensation sensor as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscilla...

  • Page 257

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 249 -10.18 REPLACING THE GUIDE LASERReplace the guide laser as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition...

  • Page 258

    10.REPLACEMENT PROCEDURES B-70315EN/01- 250 -10.19 REPLACING THE TRIGGER ELECTRODEUse the procedure below for trigger electrode replacement.(1) Turn off the power to the CNC, then turn off the main circuit...

  • Page 259

    B-70315EN/01 10.REPLACEMENT PROCEDURES- 251 -Fig.10.19 Layout of trigger electrode

  • Page 260

    11.LASER OPTICAL SYSTEM B-70315EN/01- 252 -11 LASER OPTICAL SYSTEM

  • Page 261

    B-70315EN/01 11.LASER OPTICAL SYSTEM- 253 -11.1 CLEANING AND REPLACING THE OPTICAL PARTSThe optical parts in the laser oscillator, including the output mirror,rear mirror, folding mirrors, and ...

  • Page 262

    11.LASER OPTICAL SYSTEM B-70315EN/01- 254 -11.1.1 Cleaning and Replacing the Output MirrorFig.11.1(a) Structure of output coupler holderFig.11.1(b)To clean the output mirror, follow the procedu...

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    B-70315EN/01 11.LASER OPTICAL SYSTEM- 255 -Before starting cleaning, wipe away any foreign matter from aroundthe parts to be removed. If a removed part is inadvertently soiled,wipe it clean wit...

  • Page 264

    11.LASER OPTICAL SYSTEM B-70315EN/01- 256 -(8) Move the lens cleaning paper horizontally to and fro across themirror.NOTESince the lens cleaner has a high surface tension, itmay be difficult to...

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    B-70315EN/01 11.LASER OPTICAL SYSTEM- 257 -11.1.2 Cleaning and Replacing the Rear MirrorTo clean the rear mirror, follow the procedure given below. Since it isnecessary to touch optical parts a...

  • Page 266

    11.LASER OPTICAL SYSTEM B-70315EN/01- 258 -(6) Place the mirror with its reflecting side (the side facing thedischarge tubes) facing up. Gently blow clean air (using, forexample, a camera blowe...

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    B-70315EN/01 11.LASER OPTICAL SYSTEM- 259 -(16) Perform a leak check.(17) This completes cleaning and replacement.(18) Perform discharge aging.(19) Then, perform alignment. CAUTIONDo not make a...

  • Page 268

    11.LASER OPTICAL SYSTEM B-70315EN/01- 260 -11.1.3 Cleaning and Replacing the Folding MirrorsFig.11.1.3(a) Structure diagram of folding mirror unit (C1000-E)To clean the folding mirrors, follow ...

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    B-70315EN/01 11.LASER OPTICAL SYSTEM- 261 -(6) Move the lens cleaning paper horizontally to and fro across themirror.NOTESince the lens cleaner has a high surface tension, itmay be difficult to...

  • Page 270

    11.LASER OPTICAL SYSTEM B-70315EN/01- 262 -(18) Then, perform alignment. CAUTIONNever adjust any part other than the cleaned orreplaced folding mirrors.Fig.11.1.3(b) Structure diagram of foldin...

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    B-70315EN/01 11.LASER OPTICAL SYSTEM- 263 -11.1.4 Cleaning and Replacing the Zero-shift Mirror and CircularPolarization MirrorThe zero-shift mirror and circular polarization mirror are used in ...

  • Page 272

    11.LASER OPTICAL SYSTEM B-70315EN/01- 264 -(10) After the completion of cleaning, reinstall the zero-shift mirrorin its holder, then install the mirror and holder. Slide the mirrorinto its hold...

  • Page 273

    B-70315EN/01 11.LASER OPTICAL SYSTEM- 265 -11.2 ALIGNMENT OF THE RESONATORThe internal surfaces of the output mirror and rear mirror are concave.For laser oscillation, the curvature centers and...

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    11.LASER OPTICAL SYSTEM B-70315EN/01- 266 -Fig.11.2(a) Adjustment place of alignment (C1000-E)

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    B-70315EN/01 11.LASER OPTICAL SYSTEM- 267 -Fig.11.2(b) Adjustment place of alignment (C2000-E)

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    11.LASER OPTICAL SYSTEM B-70315EN/01- 268 -Fig.11.2(c) Adjustment place of alignment (C4000-E)

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    B-70315EN/01 11.LASER OPTICAL SYSTEM- 269 -11.2.1 Method of Obtaining a Maximum Power by Adjusting AllMirrors(1) Record the adjustment screw readings of the output mirror(O.C.), rear mirror (R....

  • Page 278

    11.LASER OPTICAL SYSTEM B-70315EN/01- 270 -4)Collect a burn pattern. If the mode is good, end thisprocedure. If not, start all over again from step 1). At thistime, collect a burn pattern in e...

  • Page 279

    B-70315EN/01 11.LASER OPTICAL SYSTEM- 271 -11.2.2 Alignment Procedure during Installation after Transportation(1) Record the adjustment screw readings of the output mirror(O.C.), rear mirror (R...

  • Page 280

    11.LASER OPTICAL SYSTEM B-70315EN/01- 272 -11.2.3 Alignment Procedure at Mirror Cleaning Time(1) Record the adjustment screw readings of the output mirror(O.C.), rear mirror (R.M.), and folding...

  • Page 281

    B-70315EN/01 11.LASER OPTICAL SYSTEM- 273 -11.2.4 Obtaining a Maximum Power(1) Minimize the output power of internal discharge. If a largeoutput is used, the mode present when a maximum power i...

  • Page 282

    11.LASER OPTICAL SYSTEM B-70315EN/01- 274 -(4)(5)(3)(2)In 3, the power is decreased,indicating that the direction is wrong.So, in 5, the adjustment screw isreturned to the original position.(1)...

  • Page 283

    B-70315EN/01 11.LASER OPTICAL SYSTEM- 275 -11.3 ALIGNMENT OF THE GUIDE LASERFig.11.3(a) Layout of guide laser (C1000-E)Fig.11.3(b) Layout of guide laser (C2000-E, C4000-E)

  • Page 284

    11.LASER OPTICAL SYSTEM B-70315EN/01- 276 -Make an adjustment so that the center of the CO2 laser beam isaligned with the center of the laser diode beam.(1) Attach an acrylic plate approximatel...

  • Page 285

    B-70315EN/01 11.LASER OPTICAL SYSTEM- 277 -11.4 ALIGNMENT OF THE BEAM FOLDING UNITThe beam folding unit has two mirrors. One mirror is fixed, on whichlaser beams from the output mirror are refl...

  • Page 286

    11.LASER OPTICAL SYSTEM B-70315EN/01- 278 -Fig.11.4(a) Beam holding unit (C2000-E)Fig.11.4(b) Beam holding unit (C4000-E)

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    APPENDIX

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  • Page 289

    B-70315EN/01 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR- 281 -A EXTERNAL VIEW OF LASEROSCILLATORFig.A(a) External view of laser oscillator (C1000-E)

  • Page 290

    A.EXTERNAL VIEW OF LASER OSCILLATOR APPENDIX B-70315EN/01- 282 -Fig.A(b) External view of laser oscillator (C2000-E : short optical path length type)Fig.A(c) External view of laser oscillator (C2000-E : long optical path length type)

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    B-70315EN/01 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR- 283 -Fig.A(d) External view of laser oscillator (C4000-E : short optical path length type)Fig.A(e) External view of laser oscillator (C4000-E : long optical path length type)

  • Page 292

    B.SPECIFICATIONS APPENDIX B-70315EN/01- 284 -B SPECIFICATIONSItemContentsModelC1000-EC2000-EC4000-EPrincipleRF discharge excited fast axial gas flow CO2 laserStructureOscillator and Vacuumpump ...

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    B-70315EN/01 APPENDIX C.ERROR CODE LIST- 285 -C ERROR CODE LISTNumberContentsAlarm level4061A/D CONVERTER-1ALARM 14062A/D CONVERTER-2ALARM 14063RF POWER SUPPLYALARM 24065SHUTTER ACTIONALARM 24066D...

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    C.ERROR CODE LIST APPENDIX B-70315EN/01- 286 -PURGE : Completion stateLRDY : Discharge ready stateLSTR : Discharge ready stateALARMMONITOR1ALARMMONITOR2ALARM?RUN ONHV ONALARM?RESETRESETMONITO...

  • Page 295

    B-70315EN/01 APPENDIX D.PARAMTER LIST- 287 -D PARAMTER LISTThis appendix describes the parameters for the Series 16i-L.Many parameters depend on the laser oscillator model and unit.Check the ...

  • Page 296

    D.PARAMTER LIST APPENDIX B-70315EN/01- 288 -D.1 PARAMETERS FOR ENABLING/DISABLING VARIOUSFUNCTIONS#7#6#5#4#3#2#1#015000FLTCLBBMOAGALGCLPCData type:BitLPCPower control function0:Invalid (stand...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 289 -LHC0: Does not control the oscillator with external signals (standard).1: Controls the oscillator with external signals.In the automatic operation ...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 290 -SPB0:Outputs a beam in skip operation.1:Outputs no beam in skip operation.EDG0:Turns the beam off when switching the assist gas during edgemachinin...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 291 -TRM0:Enables the zero-point, start-point and end-point soft keys for thetrace setting screen.1:Disables the zero-point, start-point and end-point s...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 292 -#7#6#5#4#3#2#1#015008RMPEGEDCWSOCTALGPCMSTData type:BitMST0:When a reference displacement amount is specified with a plussign (+) in the trace comm...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 293 -#7#6#5#4#3#2#1#015009TEMBCGBEMAFZBS2BS1AS2AS1Data type:BitAS1,AS2,BS1,BS2Parameters for the laser gas mixing function.This function stores and moni...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 294 -#7#6#5#4#3#2#1#015011OPVCSCLVEEDSData type:BitEDS0:Uses the conventional conditions as the cutting conditions duringexecution of edge machining or ...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 295 -D.2 PARAMETERS FOR POWER SUPPLY SELECTION#7#6#5#4#3#2#1#015025PS8PS7PS6PS5PS4PS3PS2PS115026PS16PS15PS14PS13PS12PS11PS10PS9Data type:BitPS1 to PS16P...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 296 -D.3 PARAMETERS FOR CONTOURING CONDITIONS15040Power output settingData type:WordUnit of data:WRange of data:0 to 700015041Pulse frequency settingDat...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 297 -D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS15050Edge detection angleData type:WordUnit of data:degRange of data:0 to 180A corner is assumed to be ...

  • Page 306

    D.PARAMTER LIST APPENDIX B-70315EN/01- 298 -15056Type of piercing assist gasData type:WordUnit of data:Range of data:0 to 7Set a type of assist gas to be used for piercing.15057Return distanc...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 299 -D.5 PARAMETERS FOR PIERCING CONDITIONS15080Piercing powerData type:WordUnit of data:WRange of data:0 to 7000Set the piercing power.15081Initial pie...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 300 -15086Number of piercing stepsData type:WordUnit of data:Range of data:0 to 32767Set the number of piercing steps15087Piercing end timeData type:Two...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 301 -D.6 PARAMETERS FOR POWER CONTROL#7#6#5#4#3#2#1#015089LP8LP7LP6LP5LP4LPZLPYLPXData type:BitLP*0:Does not use the *-axis for speed calculation for th...

  • Page 310

    D.PARAMTER LIST APPENDIX B-70315EN/01- 302 -15095Allowable variation in power control speedData type:ByteUnit of data:mm/min (specified increment for B8F1-08 or earlier) or %Range of data:0 t...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 303 -EGM0:Cancels the power control mode in the edge machining or start-up processing mode.1:Stops power control only during return distance movement in...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 304 -D.7 PARAMETERS FOR ASSIST GAS PRESSURE AND TIMESETTING15100Selection of assist gasData type:WordUnit of data:Range of data:0 to 7Select a type of a...

  • Page 313

    B-70315EN/01 APPENDIX D.PARAMTER LIST- 305 -15114Pre-flow pressure 115115Pre-flow pressure 215116Pre-flow pressure 3Data type:WordUnit of data:0.01MPa or 0.1 bar(kg/cm2)Range of data:0 to 255...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 306 -15136Assist gas pressureData type:WordUnit of data:0.01MPa or 0.1 bar(kg/cm2)Range of data:0 to 255Set a desired assist gas pressure.15137Assist ga...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 307 -D.8 PARAMETERS FOR LASER MAINTENANCE TIMINGINDICATION FUNCTIONS15150Laser RUN ON timeData type:Two-wordUnit of data:0.1hourRange of data:0 to 99999...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 308 -#7#6#5#4#3#2#1#015160MDSMNTData type:BitMNT0:Does not display the laser maintenance screen.1:Displays the laser maintenance screen.When the value i...

  • Page 317

    B-70315EN/01 APPENDIX D.PARAMTER LIST- 309 -D.9 PARAMETERS FOR THE OSCILLATOR15200Power used for power compensation factor determination when half of thedischarge tubes are usedData type:Word...

  • Page 318

    D.PARAMTER LIST APPENDIX B-70315EN/01- 310 -15206Time constant for the power sensor input filterData type:WordUnit of data:msecRange of data:8 to 32767This time constant is used when the lase...

  • Page 319

    B-70315EN/01 APPENDIX D.PARAMTER LIST- 311 -15212Maximum specifiable power when the duty ratio is not clampedData type:WordUnit of data:WRange of data:0 to 32767If PRM No. 15213 does not clam...

  • Page 320

    D.PARAMTER LIST APPENDIX B-70315EN/01- 312 -D.10 PARAMETERS FOR DISCHARGE15220Maximum bias command at discharge startData type:WordUnit of data:mVRange of data:0 to 32767Set the maximum bias ...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 313 -D.11 PARAMETERS FOR GAS CONTROL (1)15240Negative pressure in exhaust completionData type:WordUnit of data: (1=13Pa)Range of data:0 to 32767Range Th...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 314 -15246Pressure control integration gainData type:WordUnit of data:Range of data:0 to 32767This is feedback integration gain for gas pressure control...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 315 -15257Number of abnormal vibrations detectedData type:WordUnit of data:Range of data:0 to 32767If the number of abnormal vibrations detected exceeds...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 316 -D.12 PARAMETERS FOR HIGHLY REFLECTIVE MATERIALALARMS15265Maximum allowable power increaseData type:WordUnit of data:WRange of data:0 to 32767If the...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 317 -D.13 PARAMETERS FOR LASER POWER/VOLTAGE DROP15270Discharge tube voltage in normal operationData type:WordUnit of data:VRange of data:0 to 32767Set ...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 318 -D.14 PARAMETERS FOR POWER TABLE SETTING15280Table interval when half of the discharge tubes are used15281Table interval when all discharge tubes ar...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 319 -15300Power command 0 when all discharge tubes are used15301Power command 1 when all discharge tubes are used15302Power command 2 when all discharge...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 320 -D.15 AUTOMATIC AGING FUNCTION15320Command power for power compensation coefficient calculationData type:WordUnit of data:Range of data:0 to 7000153...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 321 -15328Pulse duty cycle command for agingData type:WordUnit of data:%Range of data:0 to 10015329Power command time for agingData type:WordUnit of dat...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 322 -15336Time data 2 when the HV is turned off after LSTRData type:Two-wordUnit of data:MonthRange of data:1 to 12 (0 to 99999999) (Automatically set b...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 323 -D.16 POWER CONTROL (2)15450Allowable variation in power control speedData type:WordUnit of data:mm/minRange of data:0 to 32767Standard setting:4Set...

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    D.PARAMTER LIST APPENDIX B-70315EN/01- 324 -D.17 LASER GAS MIXER FUNCTION15710Wait time for checking the remaining amount in the gas cylinderData type:WordUnit of data:secRange of data:0 to 3...

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    B-70315EN/01 APPENDIX D.PARAMTER LIST- 325 -15715Vacuum criteria gas pressureData type:WordUnit of data:(1=13Pa)Range of data:0 to 32767Standard setting:This value is used for determining the...

  • Page 334

    D.PARAMTER LIST APPENDIX B-70315EN/01- 326 -D.18 PARAMETERS FOR GAS PRESSURE CONTROL (2)#7#6#5#4#3#2#1#015800TPCData type:BitTPCThe control function of driving the turbo blower with a constan...

  • Page 335

    B-70315EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 327 -E CONTROL SEQUENCES IN LASEROSCILLATOR

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70315EN/01- 328 -E.1 OUTLINE OF LASER OSCILLATION SEQUENCESSEQ 0PURGE = 0LRDY = 0PTLP = 0LSTR = 0SEQ 10PURGE = 1LRDY = 0PTLP = 0LSTR = 0SEQ 20PURGE = 0LRDY = 1PTLP = 0LSTR = 0SEQ 30PURGE = 0L...

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    B-70315EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 329 -[SQ10] INITIAL stateAfter power is turned on, laser comes into PURGE=1 state. Thissignal is on when atmospheric pressure sensor monitors that the intra-tube pressure equals a...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70315EN/01- 330 -E.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCESIntra-tube gas pressure control is performed in the following steps asshown in the figure.PRM15205PRM15256SQ18SQ20SQ26SQ27SQ28SQ3...

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    B-70315EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 331 -[SQ16, 17, 18]Setting the laser start switch to ON starts evacuation, which continuesuntil the pressure designated by PRM No. 15240 is reached. Afterevacuation up to the valu...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70315EN/01- 332 -E.3 TUBE VOLTAGE CONTROL SEQUENCESThe control of tube voltage is done simultaneously with that of gaspressure as shown in Fig. E.3 in the following sequences.H.V.ONLSTR(No co...

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    B-70315EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 333 -[SQ291]When HV is turned on, high voltage is applied to discharge tubes andvoltage control begins. Here command is increased in ramp mode upto the value of PRM 15220 (maximum...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70315EN/01- 334 -E.4 OSCILLATION SEQUENCES FLOW CHARTPOWER ON SEQUENCEPURGE = ONOFI = OFFRUN = ONAlarm 1Monitor treatmentstartPCR = OFFOFI =ONPURGE = OFFWAIT = ONCLON = ONWait for 3 secondsRP...

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    B-70315EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 335 -VEN = ONPCL = ONWait for 5 secondsPUG = ONPUG = OFFControl valve full closeIntra-tube pressure<PRM.15204Timer >PRM.15259ALM.4080VEN = OFFRBA = ONGRDY = ONTimer count12N...

  • Page 344

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70315EN/01- 336 -Gas pressure control200VAC to Laserpower supply unitPRM.15240 →PRM.15241Wait for 120 secondsPRM.15241+20>Intra-tube pressure>PRM.15241-20WAIT = OFFLRDY = ONHV = ONLRD...

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    B-70315EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 337 -LRDY = ON :Discharge preparation completion signal is on by which HV ONbecomes ready.HV = ON :When HV is turned on, you proceed to the sequence below.LRDY = OFF :When HV is t...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70315EN/01- 338 -The output command value is changed from a low level to the valueset in PRM 15220 (maximum bias command value at discharge time)in a ramp mode by the bias command to facilita...

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    B-70315EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 339 -In the PRM 15000 bit 4 = 1 (setting of doing power calibration), thefollowing sequences proceed. In the setting of not doing powercalibration, laser enters immediately oscill...

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    F.REFIXING AND REPLACING GAS TUBE APPENDIX B-70315EN/01- 340 -F REFIXING AND REPLACING GAS TUBEReplacing both of polyethylene and copper tubes is the same. Takecare only for the combination between tube materials and ferrulematerials.Polyet...

  • Page 349

    B-70315EN/01 APPENDIX F.REFIXING AND REPLACING GAS TUBE- 341 -REPLACING TUBE(1) Cut the end face of the tube at right angles, and install a nut,back ferrule, and front ferrule as shown in Fig. F. Pay attentionto the orientation of the back ...

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    G.REFIXING AND REPLACING WATER TUBE APPENDIX B-70315EN/01- 342 -G REFIXING AND REPLACING WATERTUBETwo types of joints for water piping are available for use in theoscillator: one is made of brass, and the other is made of stainlesssteel. However, t...

  • Page 351

    B-70315EN/01 APPENDIX G.REFIXING AND REPLACING WATER TUBE- 343 -REPLACING TUBE(1) Cut the end face of the tube at right angles, and install a nut andsleeve as shown in Fig. G. Pay attention to the orientation of thesleeve.(2) Install the tube by ins...

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    H.GLOSSARY APPENDIX B-70315EN/01- 344 -H GLOSSARYNameMeaningAccess panelThat protective component of a housing or enclosure which, when removed orshifted, can cause exposure to la...

  • Page 353

    B-70315EN/01 APPENDIX H.GLOSSARY- 345 -NameMeaningOperationLaser product's action covering all intended functions, not including maintenanceor service.Optical resonatorDevice in w...

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    B-70315EN/01 INDEXi - 1INDEXAAAAA/D CONVETER-3 ......................................... 122AD converter 1 is not normal........................

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    INDEX B-70315EN/01i - 2PCB.............................................................. 109Anomaly of pressure sensor .........................

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    B-70315EN/01 INDEXi - 3GLOSSARY ..................................................... 344HHHHHIGH TEMPERATURE...................................

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    INDEX B-70315EN/01i - 4AND TIME SETTING ................................ 304PARAMETERS FOR CONTOURINGCONDITIONS.................................

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    B-70315EN/01 INDEXi - 5REPLACING THE TURBO PCB................... 227REPLACING THE WATER DISTRIBUTIONUNIT.......................................

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    Revision RecordFANUC LASER C1000/C2000/C4000-MODEL E For Europe MAINTENANCE MANUAL (B-70315EN)01May, 2001EditionDateContentsEditionDateContents

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