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    GE Fanuc AutomationComputer Numerical Control ProductsLaser C1000 / C2000 / C4000―Model EMaintenance ManualGFZ-70265EN/01February 2001

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    GFL-001Warnings, Cautions, and Notesas Used in this PublicationWarningWarning notices are used in this publication to emphasize that hazardous voltages, currents,temperatures, or other conditions that could cause personal injury exist in this equipment or maybe associated with its use.In situatio...

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    B-70265EN/01 TABLE OF CONTENTSc - 1TABLE OF CONTENTS1111OVERVIEWOVERVIEWOVERVIEWOVERVIEW.............................................................................................

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    TABLE OF CONTENTS B-70265EN/01c - 24.4.4Inter-unit Connections ............................................................................................................ 585555...

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    B-70265EN/01 TABLE OF CONTENTSc - 37.3VACUUM GAS CONNECTION ................................................................................................... 1258888OSCILLATOR ...

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    TABLE OF CONTENTS B-70265EN/01c - 49.9.2Adjusting the Flow Sensor (C2000-E, C4000-E).................................................................. 18410101010REPLACEMENT PROC...

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    B-70265EN/01 TABLE OF CONTENTSc - 511.2.1Method of Obtaining a Maximum Power by Adjusting All Mirrors ................................... 23911.2.2Alignment Procedure during Inst...

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    TABLE OF CONTENTS B-70265EN/01c - 6E.3TUBE VOLTAGE CONTROL SEQUENCES.............................................................................. 305E.4OSCILLATION SEQUENCES FLO...

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    B-70265EN/01 1.OVERVIEW- 1 -1 OVERVIEWThis manual describes the maintenance of the FANUC LASERC1000/C2000/C4000-MODEL E, as well as the structure,configurati...

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    1.OVERVIEW B-70265EN/01- 2 -1.1 ORGANIZATION OF THE MANUALThis manual is organized as described below.1.OverviewThis chapter describes the organization of th...

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    B-70265EN/01 1.OVERVIEW- 3 -1.2 APPLICABLE MODELSThis manual covers the following models:ModelAbbreviationFANUC LASER C1000-MODEL EC1000-EFANUC LASER C2000-M...

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    1.OVERVIEW B-70265EN/01- 4 -1.3 RELATED MANUALSThe following manuals are available for the FANUC LASER C1000/C2000/C4000-MODEL E :DESCRIPTIONSB-63192ENCONNEC...

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    B-70265EN/01 1.OVERVIEW- 5 -1.4 TO USE THE LASER OSCILLATOR SAFETYThis manual contains precautions which must be observed duringoperation of the laser oscill...

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    2.SAFETY B-70265EN/01- 6 -2 SAFETYThis chapter describes precautions to be observed to ensure the safeoperation of the laser oscillator.Read this chap...

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    B-70265EN/01 2.SAFETY- 7 -2.1 WARNING(1) It is extremely dangerous to expose your eyes to direct, scattered,or reflected CO2 laser light. Always wear ...

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    2.SAFETY B-70265EN/01- 8 -(6) A high voltage of 3 to 4 kV0-p is applied to some places in thelaser oscillator cabinet. Therefore, do not turn the powe...

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    B-70265EN/01 2.SAFETY- 9 -(12) Do not allow any dangerous or high-pressure gas to get into theoscillator housing. The oscillator cabinet has a hermeti...

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    2.SAFETY B-70265EN/01- 10 -2.2 CAUTION(1) If there is a possibility of being exposed to CO2 laser radiationexceeding the maximum permissible exposure ...

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    B-70265EN/01 2.SAFETY- 11 -2.3 NOTE(1) During installation or maintenance necessitating the opening ofan oscillator door or the removal of a panel, on...

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    2.SAFETY B-70265EN/01- 12 -2.4 WARNING LABELSThe oscillator uses high voltages and laser beam radiation. Suchhazards are indicated with warning labels...

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    B-70265EN/01 2.SAFETY- 13 -Fig.2.4(c) Warning label positions (C2000-E : front view)Fig.2.4(d) Warning label positions (C2000-E : rear view)

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    2.SAFETY B-70265EN/01- 14 -Fig.2.4(e) Warning label positions (C4000-E : front view)Fig.2.4(f) Warning label positions (C4000-E : rear view)

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    B-70265EN/01 2.SAFETY- 15 -(1) Class indication label (JPN)MAXIMUM OUTPUTC1000-E2000WC2000-E5000WC4000-E8000W(1) Class indication label (FDA)MAXIMUM O...

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    2.SAFETY B-70265EN/01- 16 -(2) Warning label(3) Aperture label(4) Suspension method label(5) Access panel

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    B-70265EN/01 2.SAFETY- 17 -(6) Label inside the access panel (7) Discharge section label(8) Certification label(9) Equipment nameplate(10) Manufacture...

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    2.SAFETY B-70265EN/01- 18 -(11) Label for regulating the atmospheric gases in the oscillatorhousing

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    B-70265EN/01 2.SAFETY- 19 -2.5 OPTICAL PATHS IN THE OSCILLATORThe figures below show the laser optical paths inside the oscillator.Fig.2.5(a) Optical ...

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    2.SAFETY B-70265EN/01- 20 -Fig.2.5(b) Optical paths in the C2000-EFig.2.5(c) Optical paths in the C4000-E

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    B-70265EN/01 3.INTERNAL STRUCTURE- 21 -3 INTERNAL STRUCTURE

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    3.INTERNAL STRUCTURE B-70265EN/01- 22 -3.1 OUTLINEFigs.3.1(a) to (c) show the internal structure of the laser oscillator.The oscillator consists of a laser resonator, discharge drive uni...

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    B-70265EN/01 3.INTERNAL STRUCTURE- 23 -Fig.3.1(c) C4000-E internal structure(1) Laser resonatorThe laser resonator consists of several discharge tubes,connected in series using folding m...

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    3.INTERNAL STRUCTURE B-70265EN/01- 24 -(4) Pressure controllerThe laser gas pressure within the forced gas circulating system iscontrolled by commands issued from the CNC, thus ensurings...

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    B-70265EN/01 3.INTERNAL STRUCTURE- 25 -3.2 COMPONENT DETAILSThis section describes the internal structure of the oscillator morespecifically. Figs.3.2(a) to (c) are internal structural d...

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    3.INTERNAL STRUCTURE B-70265EN/01- 26 -Fig.3.2(c) C4000-E structural drawing (1) ResonatorThe resonator consists of an output mirror, rear mirror, foldingmirrors, discharge tubes, power...

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    B-70265EN/01 3.INTERNAL STRUCTURE- 27 -(6) Trigger electrodeA predischarge placed outside the laser oscillation area canfacilitate the start of the main discharge. With it, the laser out...

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    3.INTERNAL STRUCTURE B-70265EN/01- 28 -(14) Exhaust pump unitThis unit is used to vacuum-exhaust laser gas from the gascirculating system such that its pressure falls to that used forlas...

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    B-70265EN/01 3.INTERNAL STRUCTURE- 29 -(21) Matching boxThe matching box contains a matching circuit, consisting of coilsand capacitors, which ensures that power is effectively input tot...

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    3.INTERNAL STRUCTURE B-70265EN/01- 30 -(30) Guide laser (laser diode)A laser diode is overlaid on the same optical axis as a guidebeam for checking the optical axis because the CO2 laser...

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    B-70265EN/01 4.INSTALLATION- 31 -4 INSTALLATION

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    4.INSTALLATION B-70265EN/01- 32 -4.1 INSTALLATION PROCEDUREUse the following procedure to make adjustments and checks duringinstallation.(1) Check the environment at ...

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    B-70265EN/01 4.INSTALLATION- 33 -(2) Remove resonator and shutter clamps.The clamps are used only in transit. In particular, loosen theresonator clamp before it is st...

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    4.INSTALLATION B-70265EN/01- 34 -Resonator clampShutter clampDetails of resonatorclampDetails of shutter clampFig.4.1(b) Details of resonator and shutter clamps secti...

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    B-70265EN/01 4.INSTALLATION- 35 -Details of resonatorclamp ADetails of shutter clampDetails of resonatorclamp BShutter clampResonatorclamp AResonatorclamp BFig.4.1(c)...

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    4.INSTALLATION B-70265EN/01- 36 -(3) Check the outsides of units installed in the oscillator as follows:Check items1Check whether any printed circuit boards are loose...

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    B-70265EN/01 4.INSTALLATION- 37 -(7) Check the input power supply voltage, frequency and phasesequence. (See Section 6.5 for details.)(8) Turn on the power, then chec...

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    4.INSTALLATION B-70265EN/01- 38 -(e) Stop the chiller unit, then switch the operation mode frommanual (local) mode to automatic (remote) mode.(f) If there is no water...

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    B-70265EN/01 4.INSTALLATION- 39 -(13) Perform laser oscillation to achieve discharge aging. If theoscillator is left unused for three days or more, discharge agingis ...

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    4.INSTALLATION B-70265EN/01- 40 -4.2 PREPARATION PRIOR TO SHIPMENTFor shipment and transportation, follow the steps explained below.(1) Disconnect all CNC connecting ...

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    B-70265EN/01 4.INSTALLATION- 41 -4.2.1 Packing for TransportationPrior to shipment and transportation, the packing and checkingoperations described below must be perf...

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    4.INSTALLATION B-70265EN/01- 42 -4.2.2 Removing Cooling WaterRemove cooling water according to the procedure below.(1) Open the cooling water inlet (IN) and outlet (O...

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    B-70265EN/01 4.INSTALLATION- 43 -4.3 DETAILS OF CHECKING4.3.1 External Gas Piping Leakage Check (Clamp Test)(1) Using an approved gas pipe, connect the gas inlet of t...

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    4.INSTALLATION B-70265EN/01- 44 -(d) Upon the completion of this check, close the main valve ofthe gas cylinder.CAUTIONPeriodically check the external gas piping forl...

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    B-70265EN/01 4.INSTALLATION- 45 -4.3.2 Parameter CheckLaser oscillator parameter data sheets are attached to each oscillator.Machine tool builders may prepare a param...

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    4.INSTALLATION B-70265EN/01- 46 -4.3.3 Check for Leakage within the Oscillator(1) Modify the parameters listed below.PRM.No.15008 bit 6 1→ 0 (Automatic aging is dis...

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    B-70265EN/01 4.INSTALLATION- 47 -4.3.4 Locating a LeakageWhen there is a gas leakage, locate the leakage by using a leakagechecker or liquid leakage checker.CAUTIONTh...

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    4.INSTALLATION B-70265EN/01- 48 -4.3.5 Oscillation Characteristics(1) Modify the parameters listed below.PRM No.15000 bit 4 Setting → 1 (Three-minute correction is...

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    B-70265EN/01 4.INSTALLATION- 49 -4.3.6 Discharge Margin Check(1) Modify the parameters listed below.PRM No.15000 bit 4 1 → 0 (Power correction is disabled.)PRM.No....

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    4.INSTALLATION B-70265EN/01- 50 -4.3.7 Power Supply Margin Check (Pulse Check)(1) Modify the parameters listed below.PRM No.15000 bit 2 0 → 1 (Use of assist gas is...

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    B-70265EN/01 4.INSTALLATION- 51 -4.3.8 Beam Mode Check(1) Remove the guide pipe or the first bend mirror located betweenthe exit of the laser beam of the oscillator a...

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    4.INSTALLATION B-70265EN/01- 52 -4.3.9 Discharge AgingIf the oscillator is left unused for a long time (three days or more), orif the laser gas circulating system has...

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    B-70265EN/01 4.INSTALLATION- 53 -2Press the internal discharge switch to perform internaldischarge.(4) After 15 minutes has passed, set the RUN key to OFF to stop the...

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    4.INSTALLATION B-70265EN/01- 54 -4.4 OSCILLATOR CONNECTIONSThe oscillator has connections for cooling water piping, laser gaspiping, and power and signal cables. For ...

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    B-70265EN/01 4.INSTALLATION- 55 -[Reference] Cooling water capacity of the oscillatorModelWater capacityC1000-EAbout 6 litersC2000-EAbout 7 litersC4000-EAbout 8 lite...

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    4.INSTALLATION B-70265EN/01- 56 -4.4.1.5 Pure Water Supply UnitIt is recommended that a pure water supply unit (ion-exchange resin)be installed at the water inlet of ...

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    B-70265EN/01 4.INSTALLATION- 57 -4.4.2 Laser Gas4.4.2.1 Laser gas specificationSupply the laser oscillator with a mixture of gases that satisfy theconditions listed b...

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    4.INSTALLATION B-70265EN/01- 58 -4.4.3 Electrical ConnectionsConnect the cables to the laser oscillator as described below.(1) Power cableU(R)V(S)W(T)Power supply: 20...

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    B-70265EN/01 5.MAINTENANCE- 59 -5 MAINTENANCEIn FANUC LASER C1000/C2000/C4000-MODEL E, periodicinspection items have been reduced, and adjustments have been madeeasy....

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    5.MAINTENANCE B-70265EN/01- 60 -5.1 DAILY INSPECTIONTable 5.1 lists daily inspection items. Inspect the FANUC LASERC1000/C2000/C4000-MODEL E according to this table. ...

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    B-70265EN/01 5.MAINTENANCE- 61 -5.2 PERIODIC MAINTENANCEThe FANUC LASER C1000/C2000/C4000-MODEL E containconsumables that must be replaced periodically. Table 5.2(a) ...

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    5.MAINTENANCE B-70265EN/01- 62 -5.3 DETAILS OF MAINTENANCEWhen opening the panels and doors during maintenance, keep thepower turned off. Before replacing oil, be sur...

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    B-70265EN/01 5.MAINTENANCE- 63 -(2) Take out a bottle of oil from an oil kit (A04B-0800-K326).Remove the nozzle from the bottle, and take off the inner lid,then put t...

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    5.MAINTENANCE B-70265EN/01- 64 -5.3.2 Changing the Exhaust Pump OilCheck methodWatch the oil gauge, and check that the oil level is betweengraduations L and H. Also c...

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    B-70265EN/01 5.MAINTENANCE- 65 -Replacement method(1) Stop the oscillator, and turn off the power.(2) Remove the oil inlet plug. There is an O-ring on it. Be carefuln...

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    5.MAINTENANCE B-70265EN/01- 66 -5.3.3 Replacing the Exhaust Pump FilterReplacement methodWhen the operation time reaches 3000 hours or the exhaust capacitygets lowere...

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    B-70265EN/01 5.MAINTENANCE- 67 -5.4 MAINTENANCE PARTSThe maintenance parts are listed below. Refer to the following tablesfor maintenance unit and part specification ...

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    5.MAINTENANCE B-70265EN/01- 68 -Maintenance parts [Nonrepairable parts]Model (Q'ty)ItemNameSpecificationC1000-E C2000-E C4000-E35A57L-0001-0057/08001036Tempataure swi...

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    B-70265EN/01 5.MAINTENANCE- 69 -Maintenance parts [Nonrepairable parts]Model (Q'ty)ItemNameSpecificationC1000-E C2000-E C4000-E64A58L-0001-02432KM1,23KM1-35KM1-565A58...

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    5.MAINTENANCE B-70265EN/01- 70 -Maintenance parts [Repairable parts]Model (Q’ty)itemNameSpecificationC1000-E C2000-E C4000-E1Laser power supply unitA14B-0082-B20912...

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    B-70265EN/01 6.TROUBLESHOOTING- 71 -6 TROUBLESHOOTING

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    6.TROUBLESHOOTING B-70265EN/01- 72 -6.1 TROUBLESHOOTING PROCEDUREThe troubleshooting procedure to be applied depends on the failureoccurrence status as indicated below. Perform ch...

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    B-70265EN/01 6.TROUBLESHOOTING- 73 -6.2 ERROR MESSAGES AND COUNTERMEASURESSee the conceptual diagram of alarm processing and the list of errorcode in the Appendix C.

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    6.TROUBLESHOOTING B-70265EN/01- 74 -6.3 RESPONDING TO ALARM MESSAGES ON THE SCREENThe alarm numbers, DGNs, and parameter Nos. are of the FS16i-L.ALM No.4061AD converter 1 is not n...

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    B-70265EN/01 6.TROUBLESHOOTING- 75 -Related parametersPRM.15025, 15027 Power supply selectionDGN.966 #0-#7 Power supply unit operation statusDGN.970 #0-#7 Power supply unit sel...

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    6.TROUBLESHOOTING B-70265EN/01- 76 -PhenomenonPresumption cause6The RF voltage of all the units is high duringdischarge and the laser power is low. Thedischarge is tends to disapp...

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    B-70265EN/01 6.TROUBLESHOOTING- 77 -ALM No.4065Shutter anomalyAlarm output conditionThis alarm is issued when the shutter open command and the shutter statusdo not match in LRDY o...

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    6.TROUBLESHOOTING B-70265EN/01- 78 -ALM No.4066Discharge starting anomalyAfter HV is turned on(start discharge), the discharge starts. Thisalarm occurs when at least one discharge...

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    B-70265EN/01 6.TROUBLESHOOTING- 79 -Cause of troubleSolution1 Excessive environmentaltemperatureLower the ambient temperature by ventilation(5 to 30°C)2 Excessive cooling waterte...

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    6.TROUBLESHOOTING B-70265EN/01- 80 -ALM No.4069Anomaly of power supply unit voltage of IF PCBThis alarm appears when there occurs the anomaly in the stabilizedpower unit voltage +...

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    B-70265EN/01 6.TROUBLESHOOTING- 81 -ALM No.4071Anomaly of assist gasWhen starting machining, the CNC monitors for a ready signal fromthe assist gas supply unit in the machine. If ...

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    6.TROUBLESHOOTING B-70265EN/01- 82 -ALM No.4073Decrease of laser gas pressureThe pressure of the laser gas supplied to the laser oscillator ismonitored.This alarm is issued, if th...

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    B-70265EN/01 6.TROUBLESHOOTING- 83 -ALM No.4075CondensationA condensation sensor is mounted near the output mirror holder in theoscillator. This alarm occurs when the sensor detec...

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    6.TROUBLESHOOTING B-70265EN/01- 84 -Cause of troubleSolution3Anomaly ofintermediate PCB B(A16B-1600-0361)If the above checks do not reveal any abnormality,and there is no output f...

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    B-70265EN/01 6.TROUBLESHOOTING- 85 -Cause of troubleSolution1 Anomaly of parametersetting of gas pressurecontrolCheck whether the values of PRM NO.15000/bit1,15244,15245,15246 are...

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    6.TROUBLESHOOTING B-70265EN/01- 86 -ALM No.4080Leakage of gas tube/anomaly of exhaust pumpWhen the RUN (pressure control start) button is pressed, the exhaustpump starts evacuatin...

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    B-70265EN/01 6.TROUBLESHOOTING- 87 -Cause of troubleSolution5 Anomaly of exhaustpumpIf the above checks do not reveal anyabnormality, the performance of the exhaustpump has deteri...

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    6.TROUBLESHOOTING B-70265EN/01- 88 -Cause of troubleSolution2 Gas leakage frompiping1) Check whether any component joints of the gascirculating system are loose. If a loose joint ...

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    B-70265EN/01 6.TROUBLESHOOTING- 89 -ALM No.4085Decrease of laser output powerThis alarm appears when the laser output power decreases and takesan abnormally higher calibration coe...

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    6.TROUBLESHOOTING B-70265EN/01- 90 -ALM No.4087Shutter temperature abnormalThis alarm is issued when the temperature of the shutter mirrorexceeds a preset maximum (80°C)Alarm out...

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    B-70265EN/01 6.TROUBLESHOOTING- 91 -ALM No.4088Discharge tube voltage dropThis alarm is issued, if the voltage applied to the discharge tube dropslargely. More specific, the disch...

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    6.TROUBLESHOOTING B-70265EN/01- 92 -ALM No.4089Assist gas not outputThis alarm is issued, if an attempt is made to radiate a laser beam,when no assist gas is selected, or an assis...

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    B-70265EN/01 6.TROUBLESHOOTING- 93 -ALM No.4096UNDER TRACINGThis alarm is issued when an attempt is made to change the trace axisby using the trace axis selection function during ...

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    6.TROUBLESHOOTING B-70265EN/01- 94 -ALM No.4100INVETER1If the inverter used to power the turbo blower is abnormal, this alarmis issued.When this alarm is issued, check that the al...

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    B-70265EN/01 6.TROUBLESHOOTING- 95 -Cause of troubleSolution1Cable connectionabnormalCheck whether the cable is securely connected tothe inverter. If not, reattach the cable.2Faul...

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    6.TROUBLESHOOTING B-70265EN/01- 96 -Cause of troubleSolution1 The oil level is lowerthan specified.Replenish the turbo blower with oil until the oillevel on the oil gauge is betwe...

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    B-70265EN/01 6.TROUBLESHOOTING- 97 -6.4 MAJOR FAULTS6.4.1 Laser Power Supply Alarm Display(1) If an alarm is issued to indicate the occurrence of a power supplyfault, check the di...

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    6.TROUBLESHOOTING B-70265EN/01- 98 -If the power supply unit fails just because the high-speed diode orFET module is damaged, the power supply unit can be repaired bycomponent or ...

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    B-70265EN/01 6.TROUBLESHOOTING- 99 -6.4.6 Electromagnetic Contactor of Exhaust Pump Trips ThermallyPossible causes are listed below. Take appropriate action.Cause of troubleSoluti...

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    6.TROUBLESHOOTING B-70265EN/01- 100 -6.4.8 Excessive Laser Gas ConsumptionPossible causes are listed below. Take appropriate action.Cause of troubleSolution1 Gas leakage betweenga...

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    B-70265EN/01 6.TROUBLESHOOTING- 101 -6.4.9 Inverter Alarm Display(1) Inverter (A90L-0001-0500/8LF Model SJH300 : C1000-E)When an inverter alarm is issued, a message as shown below...

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    6.TROUBLESHOOTING B-70265EN/01- 102 -Status of inverter when the alarm was issuedIndicationStatusIndicationStatus0Reset5Operation command isinput with frequency 0.1Stopped6Being s...

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    B-70265EN/01 6.TROUBLESHOOTING- 103 -(2) Inverter (A90L-0001-0465 Model JH300 : C2000-E, C4000-E)When an alarm is issued, the digital panel displays a messageindicating the type o...

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    6.TROUBLESHOOTING B-70265EN/01- 104 -6.5 OBSERVING VOLTAGE OF POWER LINE6.5.1 Measurement of VoltageAscertain the followings, (1) line voltage: 200/220VAC, +10%, -15% (2) frequenc...

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    B-70265EN/01 6.TROUBLESHOOTING- 105 -(2) Fuse used on the IF PCBFU3 : A60L-0001-0175#3.2 For +5V(3.2A)(3) Stabilized power supply unitFig. 6.5.3 (b) shows the external appearance...

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    6.TROUBLESHOOTING B-70265EN/01- 106 -6.5.4 Checking the IF PCB SignalsBy using the IF PCB pins, check that each signal of the IF PCB isnormal. Fig. 6.5.3(a) show the pin locations...

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    B-70265EN/01 6.TROUBLESHOOTING- 107 -6.6 INDICATION OF STATE BY MEANS OF SELF DIAGNOSTICFUNCTIONWhen the machine breaks down, it is necessary to know if the troubleis in the CNC, ...

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    6.TROUBLESHOOTING B-70265EN/01- 108 -CNC→→→→PMC status display#7#6#5#4#3#2#1#0F220MWRMSHTONL SHTOFLMWRMLaser power alarm signalSHTONLShutter on state signalSHTOFLShutter o...

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    B-70265EN/01 6.TROUBLESHOOTING- 109 -904GAS PRES. CONTROLDisplays a value specified in a pressure command for the pressurecontroller that controls pressure inside the discharge tu...

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    6.TROUBLESHOOTING B-70265EN/01- 110 -921RF VOLTAGE 7922RF CURRENT 7923RF VOLTAGE 8924RF CURRENT 8Voltage (V) and current (mA) of discharge tubes 1 to 8 (strictlyspeaking, power su...

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    B-70265EN/01 6.TROUBLESHOOTING- 111 -945DCW 5946DCW 6947DCW 7948DCW 8Injection power of power supplies 1 to 8 (valid when bit 5 ofparameter No. 15008 is 1).Unit : W#7#6#5#4#3#2#1#...

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    6.TROUBLESHOOTING B-70265EN/01- 112 -*RALExhaust pump alarm0 : Abnormal1 : NormalSONOpen shutter sensorThe shutter is open when this bit is set to 1.SOFClosed shutter sensorThe sh...

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    B-70265EN/01 6.TROUBLESHOOTING- 113 -*TC2Turbo current sensor 20 : Abnormal1 : Normal*OH2Abnormal turbo temperature 20 : Abnormal1 : Normal#7#6#5#4#3#2#1#0964*OH3*TC3*RV3*VB3*AR3*...

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    6.TROUBLESHOOTING B-70265EN/01- 114 -SP2Pressure/power select signalHSCHigh-speed A/D conversion start#7#6#5#4#3#2#1#0970PS08PS07PS06PS05PS04PS02PS02PS01PS01 to PS08Power select s...

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    B-70265EN/01 6.TROUBLESHOOTING- 115 -IBSemiconductor laser-on command0 : OFF1 : ONFWInverter start signal0 : Stopped1 : StartedPCSGas pressure PWM command0 : OFF1 : ONLSCLow speed...

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    7.OSCILLATOR CONNECTIONS B-70265EN/01- 116 -7 OSCILLATOR CONNECTIONS

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    B-70265EN/01 7.OSCILLATOR CONNECTIONS- 117 -7.1 ELECTRICAL CONNECTIONSAn electrical connection diagram for the C1000-E is given below.Fig.7.1(a) Electrical connection diagram for C1000-E (1/2)

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    7.OSCILLATOR CONNECTIONS B-70265EN/01- 118 -Fig.7.1(a) Electrical connection diagram for C1000-E (2/2)

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    B-70265EN/01 7.OSCILLATOR CONNECTIONS- 119 -An electrical connection diagram for the C2000-E is given below.Fig.7.1(b) Electrical connection diagram for C2000-E (1/2)

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    7.OSCILLATOR CONNECTIONS B-70265EN/01- 120 -Fig.7.1(b) Electrical connection diagram for C2000-E (2/2)

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    B-70265EN/01 7.OSCILLATOR CONNECTIONS- 121 -An electrical connection diagram for the C4000-E is given below.Fig.7.1(c) Electrical connection diagram for C4000-E (1/2)

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    7.OSCILLATOR CONNECTIONS B-70265EN/01- 122 -Fig.7.1(c) Electrical connection diagram for C4000-E (2/2)

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    B-70265EN/01 7.OSCILLATOR CONNECTIONS- 123 -7.2 COOLING WATER PIPINGA cooling water flow diagram for the C1000-E is given below.Fig.7.2(a) Water flow diagram for C1000-EA cooling water flow diagram ...

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    7.OSCILLATOR CONNECTIONS B-70265EN/01- 124 -A cooling water flow diagram for the C4000-E is given below.Fig.7.2(c) Water flow diagram for C4000-E

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    B-70265EN/01 7.OSCILLATOR CONNECTIONS- 125 -7.3 VACUUM GAS CONNECTIONA vacuum system diagram for the C1000-E is given below.Fig.7.3(a) Vacuum system diagram for C1000-E

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    7.OSCILLATOR CONNECTIONS B-70265EN/01- 126 -A vacuum system diagram for the C2000-E is given below.Fig.7.3(b) Vacuum system diagram for C2000-E

  • Page 135

    B-70265EN/01 7.OSCILLATOR CONNECTIONS- 127 -A vacuum system diagram for the C4000-E is given below.Fig.7.3(c) Vacuum system diagram for C4000-E

  • Page 136

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 128 -8 OSCILLATOR CONNECTIONS

  • Page 137

    B-70265EN/01 8.OSCILLATOR CONNECTIONS- 129 -8.1 UNIT CONFIGURATIONThe input unit consists of a power magnetics cabinet, interface PCB,and stabilized power supply.Figs.8.1(a) to (c) show the power ma...

  • Page 138

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 130 -QF1QF2KM1QF3KM2QF6KM5QF7XT45To laser powersupply No.1To laser powersupply No.2To Exhaust pumpand IF PCB (fanmotor)To surge absorberZ110,Z111QF4KM3To inver...

  • Page 139

    B-70265EN/01 8.OSCILLATOR CONNECTIONS- 131 -Fig.8.1(e) Input unit 2 (C1000-E : Japanese market)Fig.8.1(f) Input unit 2 (C1000-E : UL versions)

  • Page 140

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 132 -Fig.8.1(g) Input unit (C2000-E : Japanese market)

  • Page 141

    B-70265EN/01 8.OSCILLATOR CONNECTIONS- 133 -Fig.8.1(h) Input unit (C2000-E : UL versions)

  • Page 142

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 134 -Fig.8.1(i) Input unit (C4000-E : Japanese market)

  • Page 143

    B-70265EN/01 8.OSCILLATOR CONNECTIONS- 135 -Fig.8.1(j) Input unit (C4000-E : UL versions)

  • Page 144

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 136 -8.2 RELAY PCB BRelay PCB B is used to group signals sent from the shutter sectionand to output the grouped signals to the interface PCB. CN59 is anoutput ...

  • Page 145

    B-70265EN/01 8.OSCILLATOR CONNECTIONS- 137 -8.3 GAS CONTROLLER (C1000-E)The gas controller consists of components such as a suction unit,exhaust unit, and pressure sensor. Fig.8.3(a) shows installat...

  • Page 146

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 138 -(8) Pressure control valveThis valve is provided to maintain a specified laser gas pressurein the oscillator. The valve is consistently and precisely open...

  • Page 147

    B-70265EN/01 8.OSCILLATOR CONNECTIONS- 139 -Fig.8.3(b) Block diagram of gas controller

  • Page 148

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 140 -8.4 PRESSURE CONTROL UNIT (C2000-E, C4000-E)Fig.8.4(a) shows installation, and Fig.8.4(b) shows piping of thepressure controller respectively. The functio...

  • Page 149

    B-70265EN/01 8.OSCILLATOR CONNECTIONS- 141 -(8) Gas distributorThe distributor distributes the laser gas, supplied from anexternal source (such as a gas cylinder), to the output mirror,rear mirror, ...

  • Page 150

    8.OSCILLATOR CONNECTIONS B-70265EN/01- 142 -Fig.8.4(b) Block diagram of gas pressure control unit

  • Page 151

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 143 -9 SETTING AND ADJUSTMENT

  • Page 152

    9.SETTING AND ADJUSTMENT B-70265EN/01- 144 -9.1 LASER POWER SUPPLY UNITThis unit is precisely adjusted at the factory and should not requireany further adjustment. If the power supply unit, matchi...

  • Page 153

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 145 -9.1.2 Base Discharge Adjustment9.1.2.1 Rewriting the parameterRewrite the parameters according to the table below. (Uponcompletion of adjustment, return...

  • Page 154

    9.SETTING AND ADJUSTMENT B-70265EN/01- 146 -turning off HV, turn on HV and check that stable discharge ismaintained for 5 minutes. Until this stable discharge state isconfirmed, repeat this step.(...

  • Page 155

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 147 -(5) After output of the maximum command value, wait 3 minutes.Record the DCV, DCI, RFV, and RFI values of each powersupply. Then, check that the value o...

  • Page 156

    9.SETTING AND ADJUSTMENT B-70265EN/01- 148 -9.1.7 Checking of Electric Shutter Operation(1) Insert heat-sensitive paper into the laser optical path afterpassing through the shutter mirror.(2) outp...

  • Page 157

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 149 -9.2 TURBO PCBThese PCBs are precisely adjusted at the factory and should notrequire any further adjustment. If the turbo blower or turbo PCB isreplaced,...

  • Page 158

    9.SETTING AND ADJUSTMENT B-70265EN/01- 150 -(7) In the alarm state, adjust trimmer VR1 so that VC (voltage acrossVA1 and 0V) matches the following value:VC=VSO×0.778(8) Press the reset key of the...

  • Page 159

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 151 -9.3 INVERTER9.3.1 Adjusting the Inverter (A90L-0001-0500/8LF : C1000-E)(1) ConnectionThe following cables are connected to the inverter:R, S, T : Main p...

  • Page 160

    9.SETTING AND ADJUSTMENT B-70265EN/01- 152 -(1) Names and descriptions of the components of the digitaloperator's panelNameDescriptionMonitorDisplays settings such frequency and output currentvalu...

  • Page 161

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 153 -(2) Method of operation(a) Method of displaying the monitor mode, basic setting mode,and extended function modeMonitor (4-digit LED display)<1> Di...

  • Page 162

    9.SETTING AND ADJUSTMENT B-70265EN/01- 154 -(b) Function setting methodChange the operation command destination(operator → control terminal).<1> The extended function mode is displayed.(A-...

  • Page 163

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 155 -(c) Function code setting method(A029 is displayed.)Press the key.The code No. of the monitor mode, basic setting mode, or extended function monitor ca...

  • Page 164

    9.SETTING AND ADJUSTMENT B-70265EN/01- 156 -Parameter settingsCodeName of functionInitialvalueSettingvalueRemarksd001Output frequency monitorHzd002Output current monitorAd003Rotation direction mon...

  • Page 165

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 157 -CodeName of functionInitialvalueSettingvalueRemarksMultistagespeedselectionA039Jogging selection000000: Free run at JG stop time (disabled during operat...

  • Page 166

    9.SETTING AND ADJUSTMENT B-70265EN/01- 158 -CodeName of functionInitialvalueSettingvalueRemarksA101 01 start0.00Hz0.00HzA102 01 end0.00Hz0.00Hz0.00 to 1500A103 01 start ratio20%20%A104 01 end rati...

  • Page 167

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 159 -CodeName of functionInitialvalueSettingvalueRemarksC001Intelligent input terminal 1 selection1818C002Intelligent input terminal 2 selection1615C003Intel...

  • Page 168

    9.SETTING AND ADJUSTMENT B-70265EN/01- 160 -CodeName of functionInitialvalueSettingvalueRemarksb034 Run time/power ON time level0hr0hr0. to 9999.(0 to 99990hr)/1000 to 6553(100000 to 655300)hrb035...

  • Page 169

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 161 -9.3.2 Adjusting the Inverter(A90L-0001-0465 Model Name JH300 : C2000-E, C4000-E)(1) ConnectionThe following cables are connected to the inverter:R. S. T...

  • Page 170

    9.SETTING AND ADJUSTMENT B-70265EN/01- 162 -- Remote operator(1) Connecting the remote operatorBe sure to turn the power supply off when connecting theconnector.High performance remote operator (H...

  • Page 171

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 163 -- High performance remote operator(1) Keys and LCD Screen[READ and COPY keys](valid only for HRW).READ- Used to read data from the inverter.NOTE : If a ...

  • Page 172

    9.SETTING AND ADJUSTMENT B-70265EN/01- 164 -(2) MONITOR/FUNCTION modeThe operator has two modes; MONITOR mode and FUNCTIONmode. In the MONITOR mode, the monitor screen to displayoperation status a...

  • Page 173

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 165 -(b) Monitor screen displayScreen scrolling range"MONITOR" key1)Item selection cursor ( )Used to update set values including the frequency.Move...

  • Page 174

    9.SETTING AND ADJUSTMENT B-70265EN/01- 166 -(3) Parameter settingsThe following table lists the parameters for which the values havebeen changed from the initial values. If the inverter has been s...

  • Page 175

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 167 -FUNC (Function) keyThis key is used for changingcommands. When pressing keyafter setting data and parameter,they are automaticallymemorized.Up key, Down...

  • Page 176

    9.SETTING AND ADJUSTMENT B-70265EN/01- 168 -9.4 GAS CONTROLLER (C1000-E)This unit is precisely adjusted at the factory and should not requireany further adjustment. If the intake unit, exhaust uni...

  • Page 177

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 169 -(3) Remove the orange gas tube by loosening the hexagon cap nutssecuring the tube. This causes the atmospheric pressure sensor todetect the atmospheric ...

  • Page 178

    9.SETTING AND ADJUSTMENT B-70265EN/01- 170 -9.4.3 Adjusting the Exhaust Unit (Adjusting the Laser GasConsumption)(1) Remove the piping from the filter of the gas controller, thenattach a gas meter...

  • Page 179

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 171 -Fig.9.4.3 Details of C1000-E gas controller sensor and flow rate adjustment valve

  • Page 180

    9.SETTING AND ADJUSTMENT B-70265EN/01- 172 -9.5 SETTING THE GAS SUPPLY PRESSURE SENSOR ANDATMOSPHERIC PRESSURE SENSOR (C1000-E)The sensors operate in one of four modes. In the measurement mode,a p...

  • Page 181

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 173 --UP () and DOWN () buttons:Used to change the mode and settings.-SET button:Used to change the mode and set a value finally.NOTEThe indicator section of...

  • Page 182

    9.SETTING AND ADJUSTMENT B-70265EN/01- 174 -9.5.2 Setting ProcedureWhen setting in each mode, follow the procedure described below.Setting in the initial setting modePerform basic setting for the ...

  • Page 183

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 175 -Setting in the pressure setting modePerform operating pressure setting for the sensor. Note that differentvalues are set for the gas supply pressure sen...

  • Page 184

    9.SETTING AND ADJUSTMENT B-70265EN/01- 176 -Zero clearClear the initial offset value of the sensor. This setting can be made inthe measurement mode. Set the atmospheric pressure sensor only.Check ...

  • Page 185

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 177 -9.6 PRESSURE CONTROL UNIT (C2000-E, C4000-E)This unit is precisely adjusted at the factory and should not requireany further adjustment. If the pressure...

  • Page 186

    9.SETTING AND ADJUSTMENT B-70265EN/01- 178 -(5) Replace the gas tube and secure the nuts.(6) Turn on the gas pressure control start signal (RUN). Check thatthe red LED next to the sensor goes off ...

  • Page 187

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 179 -9.7 ADJUSTING THE EXHAUST CONTROL UNIT (ADJUSTINGTHE LASER GAS CONSUMPTION) (C2000-E, C4000-E)This unit is precisely adjusted at the factory and should ...

  • Page 188

    9.SETTING AND ADJUSTMENT B-70265EN/01- 180 -9.8 SETTING THE POWER INPUT COMPENSATIONCOEFFICIENTThis coefficient is precisely adjusted at the factory and should notrequire any further adjustment.If...

  • Page 189

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 181 -Use a power probe calibrated periodically. A calibrated powerprobe has a calibration coefficient attached. A correct outputmeasurement value is Pr' (pro...

  • Page 190

    9.SETTING AND ADJUSTMENT B-70265EN/01- 182 -9.9 WATER FLOW SENSORThis sensor is precisely adjusted at the factory and should not requireany further adjustment. If the water distribution unit or wa...

  • Page 191

    B-70265EN/01 9.SETTING AND ADJUSTMENT- 183 -- Supplement -If a flowmeter is unavailable, a temporary setting can be madeby positioning the flow rate indicator as shown in Fig.9.9.1.Fig. 9.9.1 Flow...

  • Page 192

    9.SETTING AND ADJUSTMENT B-70265EN/01- 184 -9.9.2 Adjusting the Flow Sensor (C2000-E, C4000-E)(1) Adjust the flow rate of cooling water flowing into the oscillatorto an alarm setting flow rate. Us...

  • Page 193

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 185 -10 REPLACEMENT PROCEDURES

  • Page 194

    10.REPLACEMENT PROCEDURES B-70265EN/01- 186 -10.1 INPUT UNIT10.1.1 Replacing the Stabilized Power SupplyReplace the stabilized power supply as follows:(1) Turn off the power to the CNC, then turn off the p...

  • Page 195

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 187 -10.1.3 Replacing the IF PCB on the Oscillator SideReplace the IF PCB on the oscillator side as follows:(1) Turn off the power to the CNC, then turn off the powe...

  • Page 196

    10.REPLACEMENT PROCEDURES B-70265EN/01- 188 -10.2 REPLACING THE LASER POWER SUPPLYFigs. 10.2 (a) to (c) show the laser power supply. Replace the laserpower supply as described below.Fig. 10.2(a)

  • Page 197

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 189 -Fig. 10.2(b)

  • Page 198

    10.REPLACEMENT PROCEDURES B-70265EN/01- 190 -Fig. 10.2(c)

  • Page 199

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 191 -(1) Replacing the power supply1)Turn off the power to the laser oscillator, then drain thecooling water.2)Remove the following water joints, power cables, andsi...

  • Page 200

    10.REPLACEMENT PROCEDURES B-70265EN/01- 192 -(c) Checking for and replacing a damaged FET module PCB(See Fig. 10.2 (b).)1)To check whether an FET module PCB is damaged,measure the resistance between check ...

  • Page 201

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 193 -10.3 REPLACING THE MATCHING BOXReplace the matching box as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In additio...

  • Page 202

    10.REPLACEMENT PROCEDURES B-70265EN/01- 194 -10.4 REPLACING THE TURBO BLOWERWhen the turbo blower is replaced, the gas circulating system is opento the atmosphere for a long time. Pay particular attention ...

  • Page 203

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 195 -CAUTIONUsually, all oil is drained from a turbo blower prior toshipping. Even so, however, the turbo blower mustnot be inclined because trace amounts of oil wil...

  • Page 204

    10.REPLACEMENT PROCEDURES B-70265EN/01- 196 -10.5 REPLACING THE TURBO PCBReplace the turbo PCB as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, ope...

  • Page 205

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 197 -10.6 REPLACING RELAY PCB BReplace relay PCB B as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open th...

  • Page 206

    10.REPLACEMENT PROCEDURES B-70265EN/01- 198 -10.7 REPLACING THE EXHAUST PUMPWhen the exhaust pump is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention ...

  • Page 207

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 199 -(3) Disconnect the tubes from the pump outlet and inlet. Then,disconnect the heavy-duty power cables from the terminal blockon the side of the pump.(4) Remove t...

  • Page 208

    10.REPLACEMENT PROCEDURES B-70265EN/01- 200 -10.8 REPLACING THE INTAKE UNIT AND PRESSURECONTROL UNITWhen the pressure control unit is replaced, the gas circulating systemis open to the atmosphere for a lon...

  • Page 209

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 201 -TWV Three way valve V3VEV Exhaust valveV4BPW Bypass valveV5Fig.10.8(c) Details of exhaust control unit (C2000-E, C4000-E)

  • Page 210

    10.REPLACEMENT PROCEDURES B-70265EN/01- 202 -Replace the pressure control unit as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open the main circu...

  • Page 211

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 203 -10.9 REPLACING THE EXHAUST UNIT AND EXHAUSTCONTROL UNITWhen the exhaust unit is replaced, the gas circulating system is opento the atmosphere for a long time. P...

  • Page 212

    10.REPLACEMENT PROCEDURES B-70265EN/01- 204 -10.10 REPLACING A DISCHARGE TUBEWhen a discharge tube is replaced, the gas circulating system is opento the atmosphere for a long time. Pay particular attention...

  • Page 213

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 205 -10.11 REPLACING A FAN UNITThe laser oscillator contains many fan units, which are classified intothe following two types:(1) Fan unitConsists of several fans an...

  • Page 214

    10.REPLACEMENT PROCEDURES B-70265EN/01- 206 -10.11.2 Attaching and Detaching a Cable To and From the TerminalBlock(1) As shown below, a cable is secured by a fitting. By pressing thefitting from the top wi...

  • Page 215

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 207 -10.11.3 Replacing a Fan-assisted RadiatorReplace a fan-assisted radiator as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscil...

  • Page 216

    10.REPLACEMENT PROCEDURES B-70265EN/01- 208 -10.12 REPLACING THE POWER SENSOR UNITThe power sensor is a very delicate component. Be careful not totouch or apply force to the black, light-sensitive surface....

  • Page 217

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 209 -10.13 REPLACING THE SHUTTER SECTIONFig.10.13(a) External view of shutter section (C1000-E)Fig.10.13(b) Details of shutter unit (C1000-E)Fig.10.13(c) Details of ...

  • Page 218

    10.REPLACEMENT PROCEDURES B-70265EN/01- 210 -10.13.1 Replacing the Shutter Unit(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open the main circuit breaker ...

  • Page 219

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 211 -(3) Install a new sensor unit. At this time, ensure that the wire markof the photoelectric switch matches the label indication (OPEN,CLOSE) of the shutter unit....

  • Page 220

    10.REPLACEMENT PROCEDURES B-70265EN/01- 212 -10.13.4 REPLACING THE BEAM ABSORBERReplace the beam absorber as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In ad...

  • Page 221

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 213 -(5) Repeat step 3), then check the position of the absorber. If themark is still not aligned with the center of the absorber, adjustthe absorber again.(6) In st...

  • Page 222

    10.REPLACEMENT PROCEDURES B-70265EN/01- 214 -10.14 REPLACING THE INVERTERReplace the high-frequency inverter as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In...

  • Page 223

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 215 -10.15 REPLACING THE WATER DISTRIBUTION UNITFig.10.16(a) Detail of water distribution unit (C1000-E)Refer to water flow diagram.Fig.10.16(b) Detail of water dist...

  • Page 224

    10.REPLACEMENT PROCEDURES B-70265EN/01- 216 -Valve (closed)When draining waterValve (opened)UsuallyFig.10.16(c) Detail of water distribution unit (C4000-E)Refer to water flow diagram.Replace the water dist...

  • Page 225

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 217 -(6) Operate the chiller unit manually to circulate the cooling water.Check that no water leaks from the joints that were disconnectedduring the replacement. Aft...

  • Page 226

    10.REPLACEMENT PROCEDURES B-70265EN/01- 218 -10.16 REPLACING THE CONDENSATION SENSORReplace the condensation sensor as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscilla...

  • Page 227

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 219 -10.17 REPLACING THE GUIDE LASERReplace the guide laser as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition...

  • Page 228

    10.REPLACEMENT PROCEDURES B-70265EN/01- 220 -10.18 REPLACING THE TRIGGER ELECTRODEUse the procedure below for trigger electrode replacement.(1) Turn off the power to the CNC, then turn off the main circuit...

  • Page 229

    B-70265EN/01 10.REPLACEMENT PROCEDURES- 221 -1 Trigger electrode2 Feeder3 Feeder mounting screw4 Trigger electrode mounting screw5 O-ring (P10)6 Discharge tube nozzle AFig.10.18 Trigger electrode replacement

  • Page 230

    11.LASER OPTICAL SYSTEM B-70255EN/01- 222 -11 LASER OPTICAL SYSTEMTable 11 lists the optical parts and their features. Use this table todetermine the feature of each optical part. When mountin...

  • Page 231

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 223 -11.1 CLEANING AND REPLACING THE OPTICAL PARTSThe optical parts in the laser oscillator, including the output mirror,rear mirror, folding mirrors, and...

  • Page 232

    11.LASER OPTICAL SYSTEM B-70255EN/01- 224 -11.1.1 Cleaning and Replacing the Output Mirror1Alignment stage2Output mirror3Rear mirror4O-ring (JASO 1028)5O-ring (JASO 2025)6O-ring (G35)7Mirror h...

  • Page 233

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 225 -8Mirror stopper9Screw10 Power sensor11 Screw12 Screw13 Mirror base14 Screw1Alignment stage2Rear mirror3O-ring for mirror holding4O-ring5Mirror holder...

  • Page 234

    11.LASER OPTICAL SYSTEM B-70255EN/01- 226 -Procedure(1) Turn off the power to the CNC, then open the main circuitbreaker or turn off the power supply of the laser oscillator.(2) Remove the bea...

  • Page 235

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 227 -(9) Blow clean air (using, for example, a camera blower) across themirror surface to completely evaporate the ethyl alcohol or lenscleaner.(10) Repea...

  • Page 236

    11.LASER OPTICAL SYSTEM B-70255EN/01- 228 -(16) Perform a leak check.For the C2000-E and C4000-E, retighten the mirror holder screwin the vacuum state. Then, loosen it and turn it by fingers.A...

  • Page 237

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 229 -11.1.2 Cleaning and Replacing the Rear MirrorTo clean the rear mirror, follow the procedure given below. Since it isnecessary to touch optical parts ...

  • Page 238

    11.LASER OPTICAL SYSTEM B-70255EN/01- 230 -(6) Place the mirror with its reflecting side (the side facing thedischarge tubes) facing up. Gently blow clean air (using, forexample, a camera blow...

  • Page 239

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 231 -(16) Perform a leak check.Install the power sensor and BNC cable.(17) This completes cleaning and replacement.(18) Perform discharge aging.(19) Then,...

  • Page 240

    11.LASER OPTICAL SYSTEM B-70255EN/01- 232 -11.1.3 Cleaning and Replacing the Folding MirrorsFig.11.1.3(a) Structure diagram of folding mirror unit (C1000-E)To clean the folding mirrors, follow...

  • Page 241

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 233 -Procedure(1) Turn off the power to the CNC, then open the main circuitbreaker or turn off the power supply of the laser oscillator.(2) Loosen the mir...

  • Page 242

    11.LASER OPTICAL SYSTEM B-70255EN/01- 234 -(11) When replacing a mirror, remove the mirror from its holder.Grease is applied to the back of the mirror. So, insert the tip of astandard screwdri...

  • Page 243

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 235 -11.2 ALIGNMENT OF THE RESONATORThe internal surfaces of the output mirror and rear mirror are concave.For laser oscillation, the curvature centers an...

  • Page 244

    11.LASER OPTICAL SYSTEM B-70255EN/01- 236 -Fig.11.2(a) Alignment adjustment points of C1000-E

  • Page 245

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 237 -Fig.11.2(b) Alignment adjustment points of C2000-E

  • Page 246

    11.LASER OPTICAL SYSTEM B-70255EN/01- 238 -Fig.11.2(c) Alignment adjustment points of C4000-E

  • Page 247

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 239 -11.2.1 Method of Obtaining a Maximum Power by Adjusting AllMirrors(1) Record the adjustment screw readings of the output mirror(O.C.), rear mirror (R...

  • Page 248

    11.LASER OPTICAL SYSTEM B-70255EN/01- 240 -4)Collect a burn pattern. If the mode is good, end thisprocedure. If not, start all over again from step 1). At thistime, collect a burn pattern in ...

  • Page 249

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 241 -11.2.2 Alignment Procedure during Installation after Transportation(1) Record the adjustment screw readings of the output mirror(O.C.), rear mirror (...

  • Page 250

    11.LASER OPTICAL SYSTEM B-70255EN/01- 242 -11.2.3 Alignment Procedure at Mirror Cleaning Time(1) Record the adjustment screw readings of the output mirror(O.C.), rear mirror (R.M.), and foldin...

  • Page 251

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 243 -11.2.4 Obtaining a Maximum Power(1) Minimize the output power of internal discharge. If a largeoutput is used, the mode present when a maximum power ...

  • Page 252

    11.LASER OPTICAL SYSTEM B-70255EN/01- 244 -11.2.5 Burn pattern Collection and Beam Mode Evaluation(1) For information about burn pattern collection, see Section 4.3(8).(2) In the automatic ope...

  • Page 253

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 245 -(4)(5)(3)(2)In 3, the power is decreased,indicating that the direction is wrong.So, in 5, the adjustment screw isreturned to the original position.(1...

  • Page 254

    11.LASER OPTICAL SYSTEM B-70255EN/01- 246 -11.3 ALIGNMENT OF THE GUIDE LASERFig.11.3(a) Guide laser (C1000-E)Fig.11.3(b) Guide laser (C2000-E, C4000-E)

  • Page 255

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 247 -Make an adjustment so that the center of the CO2 laser beam isaligned with the center of the laser diode beam.(1) Attach an acrylic plate approximate...

  • Page 256

    11.LASER OPTICAL SYSTEM B-70255EN/01- 248 -11.4 ALIGNMENT OF THE BEAM FOLDING UNITThe beam folding unit has two mirrors. One mirror is fixed, on whichlaser beams from the output mirror are ref...

  • Page 257

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 249 -Fig.11.4(a) Beam holding unit (C2000-E)Fig.11.4(b) Beam holding unit (C4000-E)

  • Page 258

    APPENDIX

  • Page 259

    B-70265EN/01 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR- 253 -A EXTERNAL VIEW OF LASEROSCILLATORFig.A(a) External view of laser oscillator (C1000-E)

  • Page 260

    A.EXTERNAL VIEW OF LASER OSCILLATOR APPENDIX B-70265EN/01- 254 -Fig.A(b) External view of laser oscillator (C2000-E : short optical path length type)Fig.A(c) External view of laser oscillator (C2000-E : long optical path length type)

  • Page 261

    B-70265EN/01 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR- 255 -Fig.A(d) External view of laser oscillator (C4000-E : short optical path length type)Fig.A(e) External view of laser oscillator (C4000-E : long optical path B type)

  • Page 262

    B.SPECIFICATIONS APPENDIX B-70265EN/01- 256 -B SPECIFICATIONSItemC1000-EC2000-E(short opticalpath)C2000-E(long opticalpath)C4000-E(short opticalpath)C4000-E(long opticalpath)TypeC1000-EC2000-EC...

  • Page 263

    B-70265EN/01 APPENDIX B.SPECIFICATIONS- 257 -ItemC1000-EC2000-E(short opticalpath)C2000-E(long opticalpath)C4000-E(short opticalpath)C4000-E(long opticalpath)Electric shutterProvidedWarning la...

  • Page 264

    C.ERROR CODE LIST APPENDIX B-70265EN/01- 258 -C ERROR CODE LISTNumberContentsAlarm level4061A/D CONVERTER-1ALARM 14062A/D CONVERTER-2ALARM 14063RF POWER SUPPLYALARM 24065SHUTTER ACTIONALARM 24066D...

  • Page 265

    B-70265EN/01 APPENDIX C.ERROR CODE LIST- 259 -PURGE : Completion stateLRDY : Discharge ready stateLSTR : Discharge ready /TREATALARMMONITOR1ALARMMONITOR2ALARM?RUN ONHV ONALARM?RESETRES...

  • Page 266

    D.PARAMTER LIST APPENDIX B-70265EN/01- 260 -D PARAMTER LISTThis appendix describes the parameters for the Series 16i-L.Many parameters depend on the laser oscillator model and unit.Check the ...

  • Page 267

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 261 -D.1 PARAMETERS FOR ENABLING/DISABLING VARIOUSFUNCTIONS#7#6#5#4#3#2#1#015000FLTCLBBMOAGALGCLPCData type:BitLPCPower control function0:Invalid (stand...

  • Page 268

    D.PARAMTER LIST APPENDIX B-70265EN/01- 262 -LHC0: Does not control the oscillator with external signals (standard).1: Controls the oscillator with external signals.In the automatic operation ...

  • Page 269

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 263 -SPB0:Outputs a beam in skip operation.1:Outputs no beam in skip operation.EDG0:Turns the beam off when switching the assist gas during edgemachinin...

  • Page 270

    D.PARAMTER LIST APPENDIX B-70265EN/01- 264 -TRM0:Enables the zero-point, start-point and end-point soft keys for thetrace setting screen.1:Disables the zero-point, start-point and end-point s...

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    B-70265EN/01 APPENDIX D.PARAMTER LIST- 265 -#7#6#5#4#3#2#1#015008RMPEGEDCWSOCTALGPCMSTData type:BitMST0:When a reference displacement amount is specified with a plussign (+) in the trace comm...

  • Page 272

    D.PARAMTER LIST APPENDIX B-70265EN/01- 266 -#7#6#5#4#3#2#1#015009TEMBCGBEMAFZBS2BS1AS2AS1Data type:BitAS1,AS2,BS1,BS2Parameters for the laser gas mixing function.This function stores and moni...

  • Page 273

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 267 -#7#6#5#4#3#2#1#015011OPVCSCLVEEDSData type:BitEDS0:Uses the conventional conditions as the cutting conditions duringexecution of edge machining or ...

  • Page 274

    D.PARAMTER LIST APPENDIX B-70265EN/01- 268 -D.2 PARAMETERS FOR POWER SUPPLY SELECTION#7#6#5#4#3#2#1#015025PS8PS7PS6PS5PS4PS3PS2PS115026PS16PS15PS14PS13PS12PS11PS10PS9Data type:BitPS1 to PS16P...

  • Page 275

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 269 -D.3 PARAMETERS FOR CONTOURING CONDITIONS15040Power output settingData type:WordUnit of data:WRange of data:0 to 700015041Pulse frequency settingDat...

  • Page 276

    D.PARAMTER LIST APPENDIX B-70265EN/01- 270 -D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS15050Edge detection angleData type:WordUnit of data:degRange of data:0 to 180A corner is assumed to be ...

  • Page 277

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 271 -15056Type of piercing assist gasData type:WordUnit of data:Range of data:0 to 7Set a type of assist gas to be used for piercing.15057Return distanc...

  • Page 278

    D.PARAMTER LIST APPENDIX B-70265EN/01- 272 -D.5 PARAMETERS FOR PIERCING CONDITIONS15080Piercing powerData type:WordUnit of data:WRange of data:0 to 7000Set the piercing power.15081Initial pie...

  • Page 279

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 273 -15086Number of piercing stepsData type:WordUnit of data:Range of data:0 to 32767Set the number of piercing steps15087Piercing end timeData type:Two...

  • Page 280

    D.PARAMTER LIST APPENDIX B-70265EN/01- 274 -D.6 PARAMETERS FOR POWER CONTROL#7#6#5#4#3#2#1#015089LP8LP7LP6LP5LP4LPZLPYLPXData type:BitLP*0:Does not use the *-axis for speed calculation for th...

  • Page 281

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 275 -15095Allowable variation in power control speedData type:ByteUnit of data:mm/min (specified increment for B8F1-08 or earlier) or %Range of data:0 t...

  • Page 282

    D.PARAMTER LIST APPENDIX B-70265EN/01- 276 -EGM0:Cancels the power control mode in the edge machining or start-up processing mode.1:Stops power control only during return distance movement in...

  • Page 283

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 277 -D.7 PARAMETERS FOR ASSIST GAS PRESSURE AND TIMESETTING15100Selection of assist gasData type:WordUnit of data:Range of data:0 to 7Select a type of a...

  • Page 284

    D.PARAMTER LIST APPENDIX B-70265EN/01- 278 -15114Pre-flow pressure 115115Pre-flow pressure 215116Pre-flow pressure 3Data type:WordUnit of data:0.01MPa or 0.1 kg/cm2Range of data:0 to 255Set t...

  • Page 285

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 279 -15136Assist gas pressureData type:WordUnit of data:0.01MPa or 0.1 kg/cm2Range of data:0 to 255Set a desired assist gas pressure.15137Assist gas pre...

  • Page 286

    D.PARAMTER LIST APPENDIX B-70265EN/01- 280 -D.8 PARAMETERS FOR LASER MAINTENANCE TIMINGINDICATION FUNCTIONS15150Laser RUN ON timeData type:Two-wordUnit of data:0.1hourRange of data:0 to 99999...

  • Page 287

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 281 -#7#6#5#4#3#2#1#015160MDSMNTData type:BitMNT0:Does not display the laser maintenance screen.1:Displays the laser maintenance screen.When the value i...

  • Page 288

    D.PARAMTER LIST APPENDIX B-70265EN/01- 282 -D.9 PARAMETERS FOR THE OSCILLATOR15200Power used for power compensation factor determination when half of thedischarge tubes are usedData type:Word...

  • Page 289

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 283 -15206Time constant for the power sensor input filterData type:WordUnit of data:msecRange of data:8 to 32767This time constant is used when the lase...

  • Page 290

    D.PARAMTER LIST APPENDIX B-70265EN/01- 284 -15212Maximum specifiable power when the duty ratio is not clampedData type:WordUnit of data:WRange of data:0 to 32767If PRM No. 15213 does not clam...

  • Page 291

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 285 -D.10 PARAMETERS FOR DISCHARGE15220Maximum bias command at discharge startData type:WordUnit of data:mVRange of data:0 to 32767Set the maximum bias ...

  • Page 292

    D.PARAMTER LIST APPENDIX B-70265EN/01- 286 -D.11 PARAMETERS FOR GAS CONTROL (1)15240Negative pressure in exhaust completionData type:WordUnit of data: (1=13Pa)Range of data:0 to 32767Range Th...

  • Page 293

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 287 -15246Pressure control integration gainData type:WordUnit of data:Range of data:0 to 32767This is feedback integration gain for gas pressure control...

  • Page 294

    D.PARAMTER LIST APPENDIX B-70265EN/01- 288 -15257Number of abnormal vibrations detectedData type:WordUnit of data:Range of data:0 to 32767If the number of abnormal vibrations detected exceeds...

  • Page 295

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 289 -D.12 PARAMETERS FOR HIGHLY REFLECTIVE MATERIALALARMS15265Maximum allowable power increaseData type:WordUnit of data:WRange of data:0 to 32767If the...

  • Page 296

    D.PARAMTER LIST APPENDIX B-70265EN/01- 290 -D.13 PARAMETERS FOR LASER POWER/VOLTAGE DROP15270Discharge tube voltage in normal operationData type:WordUnit of data:VRange of data:0 to 32767Set ...

  • Page 297

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 291 -D.14 PARAMETERS FOR POWER TABLE SETTING15280Table interval when half of the discharge tubes are used15281Table interval when all discharge tubes ar...

  • Page 298

    D.PARAMTER LIST APPENDIX B-70265EN/01- 292 -15300Power command 0 when all discharge tubes are used15301Power command 1 when all discharge tubes are used15302Power command 2 when all discharge...

  • Page 299

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 293 -D.15 AUTOMATIC AGING FUNCTION15320Command power for power compensation coefficient calculationData type:WordUnit of data:Range of data:0 to 7000153...

  • Page 300

    D.PARAMTER LIST APPENDIX B-70265EN/01- 294 -15328Pulse duty cycle command for agingData type:WordUnit of data:%Range of data:0 to 10015329Power command time for agingData type:WordUnit of dat...

  • Page 301

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 295 -15336Time data 2 when the HV is turned off after LSTRData type:Two-wordUnit of data:MonthRange of data:1 to 12 (0 to 99999999) (Automatically set b...

  • Page 302

    D.PARAMTER LIST APPENDIX B-70265EN/01- 296 -D.16 POWER CONTROL (2)15450Allowable variation in power control speedData type:WordUnit of data:mm/minRange of data:0 to 32767Standard setting:4Set...

  • Page 303

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 297 -D.17 LASER GAS MIXER FUNCTION15710Wait time for checking the remaining amount in the gas cylinderData type:WordUnit of data:secRange of data:0 to 3...

  • Page 304

    D.PARAMTER LIST APPENDIX B-70265EN/01- 298 -15715Vacuum criteria gas pressureData type:WordUnit of data:(1=13Pa)Range of data:0 to 32767Standard setting:This value is used for determining the...

  • Page 305

    B-70265EN/01 APPENDIX D.PARAMTER LIST- 299 -D.18 PARAMETERS FOR GAS PRESSURE CONTROL (2)#7#6#5#4#3#2#1#015800TPCData type:BitTPCThe control function of driving the turbo blower with a constan...

  • Page 306

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/01- 300 -E CONTROL SEQUENCES IN LASEROSCILLATOR

  • Page 307

    B-70265EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 301 -E.1 OUTLINE OF LASER OSCILLATION SEQUENCESSEQ 0PURGE = 0LRDY = 0PTLP = 0LSTR = 0SEQ 10PURGE = 1LRDY = 0PTLP = 0LSTR = 0SEQ 20PURGE = 0LRDY = 1PTLP = 0LSTR = 0SEQ 30PURGE = 0LRDY = 0PTLP = 1LSTR ...

  • Page 308

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/01- 302 -[SQ10] INITIAL stateAfter power is turned on, laser comes into PURGE=1 state. Thissignal is on when atmospheric pressure sensor monitors that the intra-tube pressure equals atmospheric pressure....

  • Page 309

    B-70265EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 303 -E.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCESIntra-tube gas pressure control is performed in the following steps asshown in the figure.PRM15205PRM15256SQ18SQ20SQ26SQ27SQ28SQ30 SQ23 SQ20SQ12SQ16S...

  • Page 310

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/01- 304 -[SQ16, 17, 18]Setting the laser start switch to ON starts evacuation, which continuesuntil the pressure designated by PRM No. 15240 is reached. Afterevacuation up to the value set in PRM No. 152...

  • Page 311

    B-70265EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 305 -E.3 TUBE VOLTAGE CONTROL SEQUENCESThe control of tube voltage is done simultaneously with that of gaspressure as shown in Fig. E.3 in the following sequences.H.V.ONLSTR(No compensation)LSTR(In c...

  • Page 312

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/01- 306 -[SQ291]When HV is turned on, high voltage is applied to discharge tubes andvoltage control begins. Here command is increased in ramp mode upto the value of PRM 15220 (maximum bias command at dis...

  • Page 313

    B-70265EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 307 -E.4 OSCILLATION SEQUENCES FLOW CHARTPOWER ON SEQUENCEPURGE = ONOFI = OFFRUN = ONAlarm 1Monitor treatmentstartPCR = OFFOFI =ONPURGE = OFFWAIT = ONCLON = ONWait for 3 secondsRPA = ONControl valve ...

  • Page 314

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/01- 308 -VEN = ONPCL = ONWait for 5 secondsPUG = ONPUG = OFFControl valve full closeIntra-tube pressure<PRM.15204Timer >PRM.15259ALM.4080VEN = OFFRBA = ONGRDY = ONTimer count12NoYesYesNoWait for PR...

  • Page 315

    B-70265EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 309 -Gas pressure control200VAC to Laserpower supply unitPRM.15240 →PRM.15241Wait for 120 secondsPRM.15241+20>Intra-tube pressure>PRM.15241-20WAIT = OFFLRDY = ONHV = ONLRDY = OFFPSS1 to 8 = S...

  • Page 316

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/01- 310 -LRDY = ON :Discharge preparation completion signal is on by which HV ONbecomes ready.HV = ON :When HV is turned on, you proceed to the sequence below.LRDY = OFF :When HV is turned on, LRDY is tu...

  • Page 317

    B-70265EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 311 -The output command value is changed from a low level to the valueset in PRM 15220 (maximum bias command value at discharge time)in a ramp mode by the bias command to facilitate discharge. The ti...

  • Page 318

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/01- 312 -In the PRM 15000 bit 4 = 1 (setting of doing power calibration), thefollowing sequences proceed. In the setting of not doing powercalibration, laser enters immediately oscillation preparationcom...

  • Page 319

    B-70265EN/01 APPENDIX F.REFIXING AND REPLACING GAS TUBE- 313 -F REFIXING AND REPLACING GAS TUBEReplacing both of polyethylene and copper tubes is the same. Takecare only for the combination between tube materials and ferrulematerials.Polyeth...

  • Page 320

    F.REFIXING AND REPLACING GAS TUBE APPENDIX B-70265EN/01- 314 -REPLACING TUBE(1) Cut the end face of the tube at right angles, and install a nut,back ferrule, and front ferrule as shown in Fig. F. Pay attentionto the orientation of the back ...

  • Page 321

    B-70265EN/01 APPENDIX G.REFIXING AND REPLACING WATER TUBE- 315 -G REFIXING AND REPLACING WATERTUBETwo types of joints for water piping are available for use in theoscillator: one is made of brass, and the other is made of stainlesssteel. However, t...

  • Page 322

    G.REFIXING AND REPLACING WATER TUBE APPENDIX B-70265EN/01- 316 -REPLACING TUBE(1) Cut the end face of the tube at right angles, and install a nut andsleeve as shown in Fig. G. Pay attention to the orientation of thesleeve.(2) Install the tube by in...

  • Page 323

    B-70265EN/01 APPENDIX H.GLOSSARY- 317 -H GLOSSARYNameMeaning<A>Access panelThat protective component of a housing or enclosure which, when removed or shifted,can cause expos...

  • Page 324

    H.GLOSSARY APPENDIX B-70265EN/01- 318 -NameMeaningMaximum outputMaximum radiation power or maximum radiation energy per pulse that a laser productoutputs in all directions where t...

  • Page 325

    B-70265EN/01 INDEXi - 1INDEXAAAAAD converter 1 is not normal........................... 74AD converter 2 is not normal..........................

  • Page 326

    INDEX B-70265EN/01i - 2Anomaly of pressure sensor ............................. 88Anticorrosive.................................................

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    B-70265EN/01 INDEXi - 3IIIIINDICATION OF STATE BY MEANS OF SELFDIAGNOSTIC FUNCTION........................ 107INPUT UNIT .......................

  • Page 328

    INDEX B-70265EN/01i - 4CONDITIONS............................................. 270PARAMETERS FOR ENABLING/DISABLINGVARIOUS FUNCTIONS ...........

  • Page 329

    B-70265EN/01 INDEXi - 5THE SCREEN............................................... 74Rewriting the parameter................................ 14...

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    Revision RecordFANUC LASER C1000/C2000/C4000-MODEL E MAINTENANCE MANUAL (B-70265EN)01Feb., 2001EditionDateContentsEditionDateContents

  • Page 331

    · No part of this manual may bereproduced in any form.· All specifications and designsare subject to change withoutnotice.

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