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    GE Fanuc AutomationComputer Numerical Control ProductsLaser C1000i―Model AMaintenance ManualGFZ-70255EN/01December 2000

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    GFL-001Warnings, Cautions, and Notesas Used in this PublicationWarningWarning notices are used in this publication to emphasize that hazardous voltages, currents,temperatures, or other conditions that could cause personal injury exist in this equipment or maybe associated with its use.In situatio...

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    B-70255EN/01 TABLE OF CONTENTSc - 1TABLE OF CONTENTS1111OVERVIEWOVERVIEWOVERVIEWOVERVIEW.............................................................................................

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    TABLE OF CONTENTS B-70255EN/01c - 26666TROUBLESHOOTINGTROUBLESHOOTINGTROUBLESHOOTINGTROUBLESHOOTING .................................................................................

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    B-70255EN/01 TABLE OF CONTENTSc - 39.1.3Maximum Output Adjustment.............................................................................................. 1189.1.4Check .......

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    TABLE OF CONTENTS B-70255EN/01c - 410.11.3Replacing a Fan-assisted Radiator ................................................................................... 16610.12REPLACING ...

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    B-70255EN/01 TABLE OF CONTENTSc - 5D.6PARAMETERS FOR POWER CONTROL................................................................................... 217D.7PARAMETERS FOR ASSIST ...

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    B-70255EN/01 1.OVERVIEW- 1 -1 OVERVIEWThis manual describes the maintenance of the FANUC LASER-MODEL C1000iA, as well as the structure, configuration, andope...

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    1.OVERVIEW B-70255EN/01- 2 -1.1 ORGANIZATION OF THE MANUALThis manual is organized as described below.1.OverviewThis chapter describes the organization of th...

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    B-70255EN/01 1.OVERVIEW- 3 -1.2 APPLICABLE MODELSThis manual covers the following models:ModelAbbreviationFANUC LASER-MODEL C1000iAC1000iA

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    1.OVERVIEW B-70255EN/01- 4 -1.3 RELATED MANUALSThe following manuals are available for the FANUC LASER-MODEL C1000iA:DESCRIPTIONSB-63192ENCONNECTION MANUALB-...

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    B-70255EN/01 1.OVERVIEW- 5 -1.4 TO USE THE LASER OSCILLATOR SAFETYThis manual contains precautions which must be observed duringoperation of the laser oscill...

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    2.SAFETY B-70255EN/01- 6 -2 SAFETYThis chapter describes precautions to be observed to ensure the safeoperation of the laser oscillator.Read this chap...

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    B-70255EN/01 2.SAFETY- 7 -2.1 WARNING(1) It is extremely dangerous to expose your eyes to direct, scattered,or reflected CO2 laser light. Always wear ...

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    2.SAFETY B-70255EN/01- 8 -(6) A high voltage of 3 to 4 kV0-p is applied to some places in thelaser oscillator cabinet. Therefore, do not turn the powe...

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    B-70255EN/01 2.SAFETY- 9 -(12) Do not allow any dangerous or high-pressure gas to get into theoscillator housing. The oscillator cabinet has a hermeti...

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    2.SAFETY B-70255EN/01- 10 -2.2 CAUTION(1) If there is a possibility of being exposed to CO2 laser radiationexceeding the maximum permissible exposure ...

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    B-70255EN/01 2.SAFETY- 11 -2.3 NOTE(1) During installation or maintenance necessitating the opening ofan oscillator door or the removal of a panel, on...

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    2.SAFETY B-70255EN/01- 12 -2.4 WARNING LABELSThe oscillator uses high voltages and laser beam radiation. Suchhazards are indicated with warning labels...

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    B-70255EN/01 2.SAFETY- 13 -(1) Class indication label (JPN)(1) Class indication label (FDA)(2) Warning label

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    2.SAFETY B-70255EN/01- 14 -(3) Aperture label(4) Suspension method label(5) Access panel(6) Label inside the access panel

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    B-70255EN/01 2.SAFETY- 15 - (7) Discharge section label(8) Certification label(9) Equipment nameplate(10) Manufacturer's address label(11) Label for r...

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    2.SAFETY B-70255EN/01- 16 -2.5 OPTICAL PATHS IN THE OSCILLATORThe figures below show the laser optical paths inside the oscillator.Fig.2.5(a) Optical ...

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    B-70255EN/01 3.INTERNAL STRUCTURE- 17 -3 INTERNAL STRUCTURE

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    3.INTERNAL STRUCTURE B-70255EN/01- 18 -3.1 OUTLINEFig. 3.1 show the internal structure of the laser oscillator.The C1000iA consists of a laser resonator, discharge drive unit,forced gas ...

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    B-70255EN/01 3.INTERNAL STRUCTURE- 19 -(2) Discharge drive unitThe discharge drive unit consists of a laser power supply,matching box, and discharge tubes. High-frequency output of 2MHz ...

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    3.INTERNAL STRUCTURE B-70255EN/01- 20 -3.2 COMPONENT DETAILSThis section describes the internal structure of the C1000iA morespecifically. Fig. 3.2 is an internal structural drawing.Fig....

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    B-70255EN/01 3.INTERNAL STRUCTURE- 21 -(3) Rear mirrorA reflecting mirror consisting of a Ge (germanium) substrate,coated with dielectric.Having a high reflectance of 99.5%, the rear mir...

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    3.INTERNAL STRUCTURE B-70255EN/01- 22 -(12) Gas controllerThe gas controller always monitors the gas pressure in eachdischarge tube and supplies the fresh laser gas to the circulatingsys...

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    B-70255EN/01 3.INTERNAL STRUCTURE- 23 -(19) Matching boxThe matching box contains a matching circuit, consisting of coilsand capacitors, which ensures that power is effectively input tot...

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    3.INTERNAL STRUCTURE B-70255EN/01- 24 -adjusting the optical path of an external optical system and forobtaining a guide for the machining point.

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    B-70255EN/01 4.INSTALLATION- 25 -4 INSTALLATION

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    4.INSTALLATION B-70255EN/01- 26 -4.1 INSTALLATION PROCEDUREUse the following procedure to make adjustments and checks duringinstallation.(1) Check the environment at ...

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    B-70255EN/01 4.INSTALLATION- 27 -(2) Remove resonator and shutter clamps.The clamps are used only in transit. In particular, loosen theresonator clamp before it is st...

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    4.INSTALLATION B-70255EN/01- 28 -(3) Check the outsides of units installed in the oscillator as follows:Check items1Check whether any printed circuit boards are loose...

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    B-70255EN/01 4.INSTALLATION- 29 -(7) Check the input power supply voltage, frequency and phasesequence. (See Section 6.5 for details.)(8) Turn on the power, then chec...

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    4.INSTALLATION B-70255EN/01- 30 -ModelRated flow ratePressure loss of the flow path in theoscillator at rated flow rateC1000iA35 liters/minute0.12 MPa(e) Stop the chi...

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    B-70255EN/01 4.INSTALLATION- 31 -(c) Reset the values of the bits of parameter No. 15025 throughparameter No. 15028 to their original values.This completes the check....

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    4.INSTALLATION B-70255EN/01- 32 -4.2 PREPARATION PRIOR TO SHIPMENTFor shipment and transportation, follow the steps explained below.(1) Disconnect all CNC connecting ...

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    B-70255EN/01 4.INSTALLATION- 33 -4.2.1 Packing for TransportationPrior to shipment and transportation, the packing and checkingoperations described below must be perf...

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    4.INSTALLATION B-70255EN/01- 34 -4.2.2 Removing Cooling WaterRemove cooling water according to the procedure below.(1) Open the cooling water inlet (IN) and outlet (O...

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    B-70255EN/01 4.INSTALLATION- 35 -4.3 DETAILS OF CHECKINGExternal gas piping leakage check (clamp test)(1) Using an approved gas pipe, connect the gas inlet of theosci...

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    4.INSTALLATION B-70255EN/01- 36 -(d) Upon the completion of this check, close the main valve ofthe gas cylinder.CAUTIONPeriodically check the external gas piping forl...

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    B-70255EN/01 4.INSTALLATION- 37 -(6) Check the gas pressure on the diagnosis screen to determinewhether there is any increase in pressure over 15 minutes. Anincrease ...

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    4.INSTALLATION B-70255EN/01- 38 -(6) After completing the check, reset the value set in (3) above to theoriginal setting.Oscillation characteristics(1) Modify the par...

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    B-70255EN/01 4.INSTALLATION- 39 -(2) If the setting in parameter No. 15223 is changed, a warningmessage indicating a parameter change appears when LRDY isset. Clear t...

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    4.INSTALLATION B-70255EN/01- 40 -An alarm, if issued in step (5), check the external laser gas piping andlaser gas composition, or perform aging.Beam mode check(1) Re...

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    B-70255EN/01 4.INSTALLATION- 41 -Discharge agingIf the oscillator is left unused for a long time (three days or more), orif the laser gas circulating system has been ...

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    4.INSTALLATION B-70255EN/01- 42 -(4) After 15 minutes has passed, set the RUN key to OFF to stop theoscillator.(6) Reset the discharge gas pressure to the normal valu...

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    B-70255EN/01 4.INSTALLATION- 43 -4.4 OSCILLATOR CONNECTIONSThe oscillator has connections for cooling water piping, laser gaspiping, and power and signal cables. For ...

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    4.INSTALLATION B-70255EN/01- 44 -[Reference] Cooling water capacity of the oscillatorModelWater capacityC1000iAAbout 5 liters4.4.1.3 Cleaning agentTo remove foreign ...

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    B-70255EN/01 4.INSTALLATION- 45 -4.4.1.5 Pure Water Supply UnitIt is recommended that a pure water supply unit (ion-exchange resin)be installed at the water inlet of ...

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    4.INSTALLATION B-70255EN/01- 46 -4.4.2 Laser Gas4.4.2.1 Laser gas specificationSupply the laser oscillator with a mixture of gases that satisfy theconditions listed b...

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    B-70255EN/01 4.INSTALLATION- 47 -4.4.3 Electrical ConnectionsConnect the cables to the laser oscillator as described below.(1) Power cableU(R)V(S)W(T)Power supply: 20...

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    5.MAINTENANCE B-70255EN/01- 48 -5 MAINTENANCEIn FANUC LASER-MODEL C1000iA, periodic inspection itemshave been reduced, and adjustments have been made easy. To keepthe...

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    B-70255EN/01 5.MAINTENANCE- 49 -5.1 DAILY INSPECTIONTable 5.1 lists daily inspection items. Inspect the C1000iA accordingto this table. When parts (including oil) hav...

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    5.MAINTENANCE B-70255EN/01- 50 -5.2 PERIODIC MAINTENANCEThe C1000iA contains consumables that must be replacedperiodically. Table 5.2(a) or (b) lists such consumables...

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    B-70255EN/01 5.MAINTENANCE- 51 -5.3 DETAILS OF MAINTENANCEWhen opening the panels and doors during maintenance, keep thepower turned off. Before replacing oil, be sur...

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    5.MAINTENANCE B-70255EN/01- 52 -between L and H. Either superfluous or insufficient oil can be acause of trouble.(3) Lightly wipe the area around the oil inlet, hexag...

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    B-70255EN/01 5.MAINTENANCE- 53 -5.3.2 Changing the Exhaust Pump OilCheck methodWatch the oil gauge, and check that the oil level is betweengraduations L and H. Also c...

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    5.MAINTENANCE B-70255EN/01- 54 -Replacement method(1) Stop the oscillator, and turn off the power.(2) Remove the oil inlet plug. There is an O-ring on it. Be carefuln...

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    B-70255EN/01 5.MAINTENANCE- 55 -5.3.3 Replacing the Exhaust Pump FilterReplacement methodWhen the operation time reaches 3000 hours or the exhaust capacitygets lowere...

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    5.MAINTENANCE B-70255EN/01- 56 -5.4 MAINTENANCE PARTSThe maintenance parts are listed below. Refer to the following tablesfor maintenance unit and part specification ...

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    B-70255EN/01 5.MAINTENANCE- 57 -[Nonrepairable parts]NameSpecificationQ'ty37Gas filterA97L-0201-0771/H-0.5-B138Nylon ferrule 1/4”A98L-0004-0348/2-N639Nylon ferrule ...

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    6.TROUBLESHOOTING B-70255EN/01- 58 -6 TROUBLESHOOTING

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    B-70255EN/01 6.TROUBLESHOOTING- 59 -6.1 TROUBLESHOOTING PROCEDUREThe troubleshooting procedure to be applied depends on the failureoccurrence status as indicated below. Perform ch...

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    6.TROUBLESHOOTING B-70255EN/01- 60 -6.2 ERROR MESSAGES AND COUNTERMEASURESSee the conceptual diagram of alarm processing and the list of errorcode in the Appendix C.

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    B-70255EN/01 6.TROUBLESHOOTING- 61 -6.3 RESPONDING TO ALARM MESSAGES ON THE SCREENThe alarm numbers, DGNs, and parameter Nos. are of the FS16i-L.ALM No.4061AD converter 1 is not n...

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    6.TROUBLESHOOTING B-70255EN/01- 62 -Alarm output conditionThis alarm is issued when any or all of the signals from bits 0 to 7 at address06H in DI of the laser interface are set t...

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    B-70255EN/01 6.TROUBLESHOOTING- 63 -PhenomenonPresumption cause5The RF voltage of all the units is high duringdischarge and the laser power is low. Thedischarge tends to disappear...

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    6.TROUBLESHOOTING B-70255EN/01- 64 -ALM No.4065Shutter anomalyAlarm output conditionThis alarm is issued when the shutter open command and the shutter statusdo not match in LRDY o...

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    B-70255EN/01 6.TROUBLESHOOTING- 65 -Alarm output conditionWhen HV is turned on, discharge starts six seconds later to reach themaximum bias command value. After the time set in pa...

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    6.TROUBLESHOOTING B-70255EN/01- 66 -Cause of troubleSolution4 Anomaly of temperaturesensorCheck the continuity of the temperaturesensor. If any disconnection is found, replacethe ...

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    B-70255EN/01 6.TROUBLESHOOTING- 67 -Alarm output conditionThis alarm is issued when the enable signal in the interface becomes 0during the time from RUN-ON to immediately before p...

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    6.TROUBLESHOOTING B-70255EN/01- 68 -Related parametersG221#7 AGRDY Assist gas ready signalG222#5 AGST Assist gas start signalF222#2-#0 AG1-AG3 Assist gas selection signalALM No...

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    B-70255EN/01 6.TROUBLESHOOTING- 69 -Related parametersPRM.15009#7 TEM Tank supply pressureDGN.960#5 *MGP Laser gas supply pressure sensorCause of troubleSolution1 Tool low suppl...

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    6.TROUBLESHOOTING B-70255EN/01- 70 -Cause of troubleSolution4 Anomaly in temperature sensor The temperature sensor is designed tobe actuated by temperatures of 60°C orabove. If t...

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    B-70255EN/01 6.TROUBLESHOOTING- 71 -Cause of troubleSolution1Lack of output fromlaser power sensorunitThe thermocouple inside the power sensor unit maybe damaged, or there may be ...

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    6.TROUBLESHOOTING B-70255EN/01- 72 -Alarm output conditionThis alarm is issued when the actual gas pressure deviates by ±100 or morefrom the set level in LRDY or a later step. Mo...

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    B-70255EN/01 6.TROUBLESHOOTING- 73 -ALM No.4080Leakage of gas tube/anomaly of exhaust pumpWhen the RUN (pressure control start) button is pressed, theexhaust pump starts evacuatin...

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    6.TROUBLESHOOTING B-70255EN/01- 74 -Cause of troubleSolution5 Anomaly of exhaustpumpIf the above checks do not reveal anyabnormality, the performance of the exhaustpump has deteri...

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    B-70255EN/01 6.TROUBLESHOOTING- 75 -Cause of troubleSolution2 Gas leakage frompiping1) Check whether any component joints of the gascirculating system are loose. If a loose joint ...

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    6.TROUBLESHOOTING B-70255EN/01- 76 -ALM No.4085Decrease of laser output powerThis alarm appears when the laser output power decreases andtakes an abnormally higher calibration coe...

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    B-70255EN/01 6.TROUBLESHOOTING- 77 -Cause of troubleSolution1 Contamination of shutter mirrorClean the shutter mirror. If this alarmrecurs after the shutter mirror iscleaned, repl...

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    6.TROUBLESHOOTING B-70255EN/01- 78 -Cause of troubleSolutionturbo blower gascirculatingperformanceinverter are normal. Replace the turbo blower orhigh-frequency inverter if found ...

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    B-70255EN/01 6.TROUBLESHOOTING- 79 -ALM No.4095A/D CONVETER-3This alarm is issued when A/D converter 3 does not return theconversion completion signal in the specified time after ...

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    6.TROUBLESHOOTING B-70255EN/01- 80 -Cause of troubleSolution2 Gas leakage frominternal piping1) Check whether any component joints of the gascirculating system are loose. If a loo...

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    B-70255EN/01 6.TROUBLESHOOTING- 81 -ALM No.4101OUT OF FREQUENCY 1This alarm is issued, if a frequency reached signal is not receivedwithin 120 seconds after the turbo blower is st...

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    6.TROUBLESHOOTING B-70255EN/01- 82 -Cause of troubleSolution4 Anomaly of cableconnectionCheck whether the cable is securely connected tothe turbo PCB. If not, reattach the cable.A...

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    B-70255EN/01 6.TROUBLESHOOTING- 83 -ALM No.4132PARAMETER WAS CHANGEDAlarm output conditionThis alarm is issued when the setting in parameter No. 15223, 15242, or15243 is altered i...

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    6.TROUBLESHOOTING B-70255EN/01- 84 -6.4 MAJOR FAULTS6.4.1 Laser Power Supply Alarm Display(1) If an alarm is issued to indicate the occurrence of a power supplyfault, check the di...

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    B-70255EN/01 6.TROUBLESHOOTING- 85 -Type of alarmSourceMajor causesRFIThis alarm is issued if a high RF currentflows through the discharge tube whenthe oscillator is operating in ...

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    6.TROUBLESHOOTING B-70255EN/01- 86 -If there exists any anomaly in the results of the above investigations,replace the anomalous component.6.4.6 Electromagnetic Contactor of Exhau...

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    B-70255EN/01 6.TROUBLESHOOTING- 87 -6.4.8 Excessive Laser Gas ConsumptionPossible causes are listed below. Take appropriate action.Cause of troubleSolution1 Gas leakage betweengas...

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    6.TROUBLESHOOTING B-70255EN/01- 88 -Causes of inverter alarms (Model : SJH300)MessageContentsCausepower (supply voltage increase)E16Protection against instantaneous powerfailureMo...

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    B-70255EN/01 6.TROUBLESHOOTING- 89 -Display methodd081(Function/FUNC keys)(1)E01.3(Up/Down keys)(2)1000(Up/Down keys)(3)28.0(Up/Down keys)(4)280(Up/Down keys)(5)15(Up/Down keys)(6...

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    6.TROUBLESHOOTING B-70255EN/01- 90 -6.5 OBSERVING VOLTAGE OF POWER LINE6.5.1 Measurement of VoltageAscertain the followings, (1) line voltage: 200/220VAC, +10%, -15% (2) frequency...

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    B-70255EN/01 6.TROUBLESHOOTING- 91 -(2) Fuse used on the IF PCBFU3 : A60L-0001-0175#3.2 For +5V(3.2A)(3) Stabilized power supply unitFig. 6.5.3 (b) shows the external appearance ...

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    6.TROUBLESHOOTING B-70255EN/01- 92 -6.5.4 Checking the IF PCB SignalsBy using the IF PCB pins, check that each signal of the IF PCB isnormal. Fig. 6.5.3(a) show the pin locations....

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    B-70255EN/01 6.TROUBLESHOOTING- 93 -6.6 INDICATION OF STATE BY MEANS OF SELF DIAGNOSTICFUNCTIONWhen the machine breaks down, it is necessary to know if the troubleis in the CNC, P...

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    6.TROUBLESHOOTING B-70255EN/01- 94 -CNC®®®®PMC status display#7#6#5#4#3#2#1#0F220MWRMSHTONL SHTOFLMWRMLaser power alarm signalSHTONLShutter on state signalSHTOFLShutter off st...

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    B-70255EN/01 6.TROUBLESHOOTING- 95 -904GAS PRES. CONTROLDisplays a value specified in a pressure command for the pressurecontroller that controls pressure inside the discharge tub...

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    6.TROUBLESHOOTING B-70255EN/01- 96 -921RF VOLTAGE 7922RF CURRENT 7923RF VOLTAGE 8924RF CURRENT 8Voltage (V) and current (mA) of discharge tubes 1 to 8 (strictlyspeaking, power sup...

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    B-70255EN/01 6.TROUBLESHOOTING- 97 -910DCW 5910DCW 6910DCW 7910DCW 8Injection power of power supplies 1 to 8 (valid when bit 5 ofparameter No. 15008 is 1).Unit : W#7#6#5#4#3#2#1#0...

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    6.TROUBLESHOOTING B-70255EN/01- 98 -*RALExhaust pump alarm0 : Abnormal1 : NormalSONOpen shutter sensorThe shutter is open when this bit is set to 1.SOFClosed shutter sensorThe shu...

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    B-70255EN/01 6.TROUBLESHOOTING- 99 -*TC2Turbo current sensor 20 : Abnormal1 : Normal*OH2Abnormal turbo temperature 20 : Abnormal1 : Normal#7#6#5#4#3#2#1#0964*OH3*TC3*RV3*VB3*AR3*I...

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    6.TROUBLESHOOTING B-70255EN/01- 100 -SP2Pressure/power select signalHSCHigh-speed A/D conversion start#7#6#5#4#3#2#1#0970PS08PS07PS06PS05PS04PS02PS02PS01PS01 to PS08Power select s...

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    B-70255EN/01 6.TROUBLESHOOTING- 101 -IBSemiconductor laser-on command0 : OFF1 : ONFWInverter start signal0 : Stopped1 : StartedPCSGas pressure PWM command0 : OFF1 : ONLSCLow speed...

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    7.OSCILLATOR CONNECTIONS B-70255EN/01- 102 -7 OSCILLATOR CONNECTIONS

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    B-70255EN/01 7.OSCILLATOR CONNECTIONS- 103 -7.1 ELECTRICAL CONNECTIONSAn electrical connection diagram for the C1000iA is given below.Fig.7.1 Electrical connection diagram for C1000iA (1/2)

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    7.OSCILLATOR CONNECTIONS B-70255EN/01- 104 -Fig.7.1 Electrical connection diagram for C1000iA (2/2)

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    B-70255EN/01 7.OSCILLATOR CONNECTIONS- 105 -7.2 COOLING WATER PIPINGA cooling water flow diagram for the C1000iA is given below.Fig.7.2 (a) Water flow diagram for C1000iA

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    7.OSCILLATOR CONNECTIONS B-70255EN/01- 106 -7.3 VACUUM GAS CONNECTIONA vacuum system diagram for the C1000iA is given below.Fig. 7.3 Vacuum system diagram for C1000iA

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    B-70255EN/01 8.OSCILLATOR CONNECTIONS- 107 -8 OSCILLATOR CONNECTIONS

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    8.OSCILLATOR CONNECTIONS B-70255EN/01- 108 -8.1 UNIT CONFIGURATIONThe input unit consists of a power magnetics cabinet, interface PCB,and stabilized power supply.Fig. 8.1(a) shows the power magnetic...

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    B-70255EN/01 8.OSCILLATOR CONNECTIONS- 109 -Fig.8.1(b) Input unit 1 (C1000iA, Japan, U.S.A.)Fig.8.1(c) Input unit 2 (C1000iA, Japan)

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    8.OSCILLATOR CONNECTIONS B-70255EN/01- 110 -Fig.8.1(d) Input unit 2 (C1000iA, U.S.A.)

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    B-70255EN/01 8.OSCILLATOR CONNECTIONS- 111 -8.2 RELAY PCB BRelay PCB B is used to group signals sent from the shutter sectionand to output the grouped signals to the interface PCB. CN59 is anoutput ...

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    8.OSCILLATOR CONNECTIONS B-70255EN/01- 112 -8.3 GAS CONTROLLERThe gas controller consists of components such as a suction unit,exhaust unit, and pressure sensor. Fig.8.3(a) shows installation, andFi...

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    B-70255EN/01 8.OSCILLATOR CONNECTIONS- 113 -(8) Pressure control valveThis valve is provided to maintain a specified laser gas pressurein the oscillator. The valve is consistently and precisely open...

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    8.OSCILLATOR CONNECTIONS B-70255EN/01- 114 -Fig.8.3(b) Block diagram of gas controller

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 115 -9 SETTING AND ADJUSTMENT

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    9.SETTING AND ADJUSTMENT B-70255EN/01- 116 -9.1 LASER POWER SUPPLY UNITThis unit is precisely adjusted at the factory and should not requireany further adjustment. If the power supply unit, matchi...

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 117 -9.1.2 Base Discharge Adjustment9.1.2.1 Rewriting the parameterRewrite the parameters according to the table below. (Uponcompletion of adjustment, return...

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    9.SETTING AND ADJUSTMENT B-70255EN/01- 118 -turning off HV, turn on HV and check that stable discharge ismaintained for 5 minutes. Until this stable discharge state isconfirmed, repeat this step.(...

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 119 -(5) After output of the maximum command value, wait 3 minutes.Record the DCV, DCI, RFV, and RFI values of each powersupply. Then, check that the value o...

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    9.SETTING AND ADJUSTMENT B-70255EN/01- 120 -9.1.7 Checking of Electric Shutter Operation(1) Insert heat-sensitive paper into the laser optical path afterpassing through the shutter mirror.(2) outp...

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 121 -9.2 TURBO PCBThese PCBs are precisely adjusted at the factory and should notrequire any further adjustment. If the turbo blower or turbo PCB isreplaced,...

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    9.SETTING AND ADJUSTMENT B-70255EN/01- 122 -(7) In the alarm state, adjust trimmer VR1 so that VC (voltage acrossVA1 and 0V) matches the following value:VC=VSO´0.778(8) Press the reset key of the...

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 123 -9.3 HIGH-FREQUENCY INVERTERConnectionThe following cables are connected to the inverter:R, S, T : Main power inputU, V, W Inverter outputG : Grounding1 ...

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    9.SETTING AND ADJUSTMENT B-70255EN/01- 124 -(1) Names and descriptions of the components of the digitaloperator's panelNameDescriptionMonitorDisplays settings such frequency and output currentvalu...

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 125 -(2) Method of operation(a) Method of displaying the monitor mode, basic setting mode,and extended function modeMonitor (4-digit LED display)<1> Di...

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    9.SETTING AND ADJUSTMENT B-70255EN/01- 126 -(b) Function setting methodChange the operation command destination(operator ® control terminal).<1> The extended function mode is displayed.(A--...

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 127 -(c) Function code setting method(A029 is displayed.)Press the key.The code No. of the monitor mode, basic setting mode, or extended function monitor ca...

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    9.SETTING AND ADJUSTMENT B-70255EN/01- 128 -Parameter settingsCodeName of functionInitialvalueSettingvalueRemarksd001Output frequency monitor--Hzd002Output current monitor--Ad003Rotation d...

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    B-70255EN/01 9.SETTING AND ADJUSTMENT- 129 -CodeName of functionInitialvalueSettingvalueRemarksMultistagespeedselectionA039Jogging selection000000: Free run at JG stop time (disabled during operat...

  • Page 137

    9.SETTING AND ADJUSTMENT B-70255EN/01- 130 -CodeName of functionInitialvalueSettingvalueRemarksA101 01 start0.00Hz0.00HzA102 01 end0.00Hz0.00Hz0.00 to 1500A103 01 start ratio20%20%A104 01 end rati...

  • Page 138

    B-70255EN/01 9.SETTING AND ADJUSTMENT- 131 -CodeName of functionInitialvalueSettingvalueRemarksC001Intelligent input terminal 1 selection1818C002Intelligent input terminal 2 selection1615C003Intel...

  • Page 139

    9.SETTING AND ADJUSTMENT B-70255EN/01- 132 -CodeName of functionInitialvalueSettingvalueRemarksb034 Run time/power ON time level0hr0hr0. to 9999.(0 to 99990hr)/1000 to 6553(100000 to 655300)hrb035...

  • Page 140

    B-70255EN/01 9.SETTING AND ADJUSTMENT- 133 -9.4 GAS CONTROLLERThis unit is precisely adjusted at the factory and should not requireany further adjustment. If the intake unit, exhaust unit, or atmo...

  • Page 141

    9.SETTING AND ADJUSTMENT B-70255EN/01- 134 -(3) Remove the orange gas tube by loosening the hexagon cap nutssecuring the tube. This causes the atmospheric pressure sensor todetect the atmospheric ...

  • Page 142

    B-70255EN/01 9.SETTING AND ADJUSTMENT- 135 -9.4.3 Adjusting the Exhaust Unit (Adjusting the Laser GasConsumption)(1) Remove the piping from the filter of the gas controller, thenattach a gas meter...

  • Page 143

    9.SETTING AND ADJUSTMENT B-70255EN/01- 136 -Fig. 9.4 Details of C1000iA gas controller sensor and flow rate adjustment valve

  • Page 144

    B-70255EN/01 9.SETTING AND ADJUSTMENT- 137 -9.5 SETTING THE GAS SUPPLY PRESSURE SENSOR ANDATMOSPHERIC PRESSURE SENSORThe sensors operate in one of four modes. In the measurement mode,a pressure va...

  • Page 145

    9.SETTING AND ADJUSTMENT B-70255EN/01- 138 --UP () and DOWN () buttons:Used to change the mode and settings.-SET button:Used to change the mode and set a value finally.NOTEThe indicator section of...

  • Page 146

    B-70255EN/01 9.SETTING AND ADJUSTMENT- 139 -9.5.2 Setting ProcedureWhen setting in each mode, follow the procedure described below.Setting in the initial setting modePerform basic setting for the ...

  • Page 147

    9.SETTING AND ADJUSTMENT B-70255EN/01- 140 -Setting in the pressure setting modePerform operating pressure setting for the sensor. Note that differentvalues are set for the gas supply pressure sen...

  • Page 148

    B-70255EN/01 9.SETTING AND ADJUSTMENT- 141 -Zero clearClear the initial offset value of the sensor. This setting can be made inthe measurement mode. Set the atmospheric pressure sensor only.Check ...

  • Page 149

    9.SETTING AND ADJUSTMENT B-70255EN/01- 142 -9.6 SETTING THE POWER INPUT COMPENSATIONCOEFFICIENTThis coefficient is precisely adjusted at the factory and should notrequire any further adjustment.If...

  • Page 150

    B-70255EN/01 9.SETTING AND ADJUSTMENT- 143 -9.7 WATER FLOW SENSORThis sensor is precisely adjusted at the factory and should not requireany further adjustment. If the water distribution unit or wa...

  • Page 151

    9.SETTING AND ADJUSTMENT B-70255EN/01- 144 -(7) Reinstall the removed packing and reconnect the detached cablesto the terminal block.- Supplement -If a flowmeter is unavailable, a temporary settin...

  • Page 152

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 145 -10 REPLACEMENT PROCEDURES

  • Page 153

    10.REPLACEMENT PROCEDURES B-70255EN/01- 146 -10.1 INPUT UNIT10.1.1 Replacing the Stabilized Power SupplyReplace the stabilized power supply as follows:(1) Turn off the power to the CNC, then turn off the p...

  • Page 154

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 147 -10.1.3 Replacing the IF PCB on the Oscillator SideReplace the IF PCB on the oscillator side as follows:(1) Turn off the power to the CNC, then turn off the powe...

  • Page 155

    10.REPLACEMENT PROCEDURES B-70255EN/01- 148 -10.2 REPLACING THE LASER POWER SUPPLYFigs. 10.2 (a) to (c) show the laser power supply. Replace the laserpower supply as described below.Fig. 10.2(a)

  • Page 156

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 149 -Fig. 10.2(b)

  • Page 157

    10.REPLACEMENT PROCEDURES B-70255EN/01- 150 -Fig. 10.2(c)

  • Page 158

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 151 -(1) Replacing the power supply1)Turn off the power to the laser oscillator, then drain thecooling water.2)Remove the following water joints, power cables, andsi...

  • Page 159

    10.REPLACEMENT PROCEDURES B-70255EN/01- 152 -1)To check whether an FET module PCB is damaged,measure the resistance between check pins D and Sshown in the figure.A resistance of less than 10 kW indicates t...

  • Page 160

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 153 -10.3 REPLACING THE MATCHING BOXReplace the matching box as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In additio...

  • Page 161

    10.REPLACEMENT PROCEDURES B-70255EN/01- 154 -10.4 REPLACING THE TURBO BLOWERWhen the turbo blower is replaced, the gas circulating system is opento the atmosphere for a long time. Pay particular attention ...

  • Page 162

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 155 -CAUTIONUsually, all oil is drained from a turbo blower prior toshipping. Even so, however, the turbo blower mustnot be inclined because trace amounts of oil wil...

  • Page 163

    10.REPLACEMENT PROCEDURES B-70255EN/01- 156 -10.5 REPLACING THE TURBO PCBReplace the turbo PCB as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, ope...

  • Page 164

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 157 -10.6 REPLACING RELAY PCB BReplace relay PCB B as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open th...

  • Page 165

    10.REPLACEMENT PROCEDURES B-70255EN/01- 158 -10.7 REPLACING THE EXHAUST PUMPWhen the exhaust pump is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention ...

  • Page 166

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 159 -(3) Disconnect the tubes from the pump outlet and inlet. Then,disconnect the heavy-duty power cables from the terminal blockon the side of the pump.(4) Remove t...

  • Page 167

    10.REPLACEMENT PROCEDURES B-70255EN/01- 160 -10.8 REPLACING THE PRESSURE CONTROL UNITWhen the pressure control unit is replaced, the gas circulating systemis open to the atmosphere for a long time. Pay par...

  • Page 168

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 161 -10.9 REPLACING THE EXHAUST UNITWhen the exhaust unit is replaced, the gas circulating system is opento the atmosphere for a long time. Pay particular attention ...

  • Page 169

    10.REPLACEMENT PROCEDURES B-70255EN/01- 162 -10.10 REPLACING A DISCHARGE TUBEWhen a discharge tube is replaced, the gas circulating system is opento the atmosphere for a long time. Pay particular attention...

  • Page 170

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 163 -(9) If no gas leakage is detected, perform discharge aging.If the discharge area of the new discharge tube greatly differsfrom those of the other discharge tube...

  • Page 171

    10.REPLACEMENT PROCEDURES B-70255EN/01- 164 -10.11 REPLACING A FAN UNITThe laser oscillator contains many fan units, which are classified intothe following two types:(1) Fan unitConsists of several fans an...

  • Page 172

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 165 -10.11.2 Attaching and Detaching a Cable To and From the TerminalBlock(1) As shown below, a cable is secured by a fitting. By pressing thefitting from the top wi...

  • Page 173

    10.REPLACEMENT PROCEDURES B-70255EN/01- 166 -10.11.3 Replacing a Fan-assisted RadiatorReplace a fan-assisted radiator as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscil...

  • Page 174

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 167 -10.12 REPLACING THE POWER SENSOR UNITThe power sensor is a very delicate component. Be careful not totouch or apply force to the black, light-sensitive surface....

  • Page 175

    10.REPLACEMENT PROCEDURES B-70255EN/01- 168 -10.13 REPLACING THE SHUTTER SECTIONFig.10.13(a) External view of shutter section for C1000iAFig.10.13(b) Details of shutter unit for C1000iAReplace the shutter ...

  • Page 176

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 169 -10.13.1 Replacing the Shutter Unit(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open the main circuit breaker ...

  • Page 177

    10.REPLACEMENT PROCEDURES B-70255EN/01- 170 -CAUTIONTo prevent stress caused by shutter open/closeoperation from being imposed on the cable, thecable must be run with a sufficient allowance asshown in Fig....

  • Page 178

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 171 -10.13.4 REPLACING THE BEAM ABSORBERReplace the beam absorber as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In ad...

  • Page 179

    10.REPLACEMENT PROCEDURES B-70255EN/01- 172 -(5) Repeat step 3), then check the position of the absorber. If themark is still not aligned with the center of the absorber, adjustthe absorber again.(6) In st...

  • Page 180

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 173 -10.14 REPLACING THE HIGH-FREQUENCY INVERTERFig. 10.14 Inverter replacement diagramReplace the high-frequency inverter as follows:(1) Turn off the power to the C...

  • Page 181

    10.REPLACEMENT PROCEDURES B-70255EN/01- 174 -NOTEWrong cable connections to these terminals candamage the inverter, and can contaminate theoscillator and damage the discharge tubes by turningthe turbo blow...

  • Page 182

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 175 -10.15 REPLACING THE WATER DISTRIBUTION UNITFig. 10.16 Detail of water distribution unit for C1000iA(Refer to water flow diagram.)Replace the water distribut...

  • Page 183

    10.REPLACEMENT PROCEDURES B-70255EN/01- 176 -(5) Mount a new distribution unit by reversing steps (3) and (4).Connect the water pipes correctly, noting the alignment marks.(6) Operate the chiller unit manu...

  • Page 184

    B-70255EN/01 10.REPLACEMENT PROCEDURES- 177 -10.16 REPLACING THE CONDENSATION SENSORReplace the condensation sensor as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscilla...

  • Page 185

    10.REPLACEMENT PROCEDURES B-70255EN/01- 178 -10.17 REPLACING THE GUIDE LASERReplace the guide laser as follows:(1) Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition...

  • Page 186

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 179 -11 LASER OPTICAL SYSTEMTable 11 lists the optical parts and their features. Use this table todetermine the feature of each optical part. When mountin...

  • Page 187

    11.LASER OPTICAL SYSTEM B-70255EN/01- 180 -11.1 CLEANING AND REPLACING THE OPTICAL PARTSThe optical parts in the laser oscillator, including the output mirror,rear mirror, folding mirrors, and...

  • Page 188

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 181 -11.1.1 Cleaning and Replacing the Output MirrorFig.11.1(h) Structure of diagram output mirror and rear mirrorFig. 11.1.1(b) Attaching the holder of t...

  • Page 189

    11.LASER OPTICAL SYSTEM B-70255EN/01- 182 -Procedure(1) Turn off the power to the CNC, then open the main circuitbreaker or turn off the power supply of the laser oscillator.(2) Hold the entir...

  • Page 190

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 183 -NOTESince the lens cleaner has a high surface tension, itmay be difficult to move the cleaning paper. As thepaper is slowly moved to and fro across t...

  • Page 191

    11.LASER OPTICAL SYSTEM B-70255EN/01- 184 -11.1.2 Cleaning and Replacing the Rear MirrorTo clean the rear mirror, follow the procedure given below. Since it isnecessary to touch optical parts ...

  • Page 192

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 185 -(6) Place the mirror with its reflecting side (the side facing thedischarge tubes) facing up. Gently blow clean air (using, forexample, a camera blow...

  • Page 193

    11.LASER OPTICAL SYSTEM B-70255EN/01- 186 -(17) This completes cleaning and replacement.(18) Perform discharge aging.(19) Then, perform alignment.CAUTIONDo not make any adjustments other than ...

  • Page 194

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 187 -11.1.3 Cleaning and Replacing the Folding MirrorsFig.11.1.1(a) Structure diagram of folding mirror unit: C1000iATo clean the folding mirrors, follow ...

  • Page 195

    11.LASER OPTICAL SYSTEM B-70255EN/01- 188 -Procedure(1) Turn off the power to the CNC, then open the main circuitbreaker or turn off the power supply of the laser oscillator.(2) Loosen the mir...

  • Page 196

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 189 -(11) When replacing a mirror, remove the mirror from its holder.Grease is applied to the back of the mirror. So, insert the tip of astandard screwdri...

  • Page 197

    11.LASER OPTICAL SYSTEM B-70255EN/01- 190 -11.2 ALIGNMENT OF THE RESONATORFig. 11.2 Alignment adjustment points of C1000iAThe internal surfaces of the output mirror and rear mirror are concave...

  • Page 198

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 191 --Subsection 11.2.1 describes the procedure for adjusting allmirrors of an oscillator not adjusted with this method, to obtainthe maximum output state...

  • Page 199

    11.LASER OPTICAL SYSTEM B-70255EN/01- 192 -11.2.2 Alignment Procedure during Installation after Transportation(1) Record the adjustment screw readings of the output mirror(O.C.), rear mirror (...

  • Page 200

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 193 -11.2.4 Obtaining a Maximum Power(1) Minimize the output power of internal discharge. If a largeoutput is used, the mode present when a maximum power ...

  • Page 201

    11.LASER OPTICAL SYSTEM B-70255EN/01- 194 -11.2.5 Burn pattern Collection and Beam Mode Evaluation(1) For information about burn pattern collection, see Section 4.3(8).(2) In the automatic ope...

  • Page 202

    B-70255EN/01 11.LASER OPTICAL SYSTEM- 195 -(4)(5)(3)(2)In 3, the power is decreased,indicating that the direction is wrong.So, in 5, the adjustment screw isreturned to the original position.(1...

  • Page 203

    11.LASER OPTICAL SYSTEM B-70255EN/01- 196 -11.3 ALIGNMENT OF THE GUIDE LASERFig.11.3Make an adjustment so that the center of the CO2 laser beam isaligned with the center of the laser diode bea...

  • Page 204

    APPENDIX

  • Page 205

    B-70255EN/01 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR- 199 -A EXTERNAL VIEW OF LASEROSCILLATORFig. A EXTERNAL VIEW OF LASER OSCILLATOR

  • Page 206

    B.SPECIFICATIONS APPENDIX B-70255EN/01- 200 -B SPECIFICATIONSItemContentsTypeFANUC LASER MODEL-C1000iAMethodHigh-speed axial carbon dioxide gas laser by high-frequency dischargeexcitationStruct...

  • Page 207

    B-70255EN/01 APPENDIX C.ERROR CODE LIST- 201 -C ERROR CODE LISTNumberContentsAlarm level4061A/D CONVERTER-1ALARM 14062A/D CONVERTER-2ALARM 14063RF POWER SUPPLYALARM 24065SHUTTER ACTIONALARM 24066D...

  • Page 208

    C.ERROR CODE LIST APPENDIX B-70255EN/01- 202 -PURGE : Completion stateLRDY : Discharge ready stateLSTR : Discharge ready /TREATALARMMONITOR1ALARMMONITOR2ALARM?RUN ONHV ONALARM?RESETRES...

  • Page 209

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 203 -D PARAMETER LISTThis appendix describes the parameters for the Series 16i-L.Many parameters depend on the laser oscillator model and unit.Check the...

  • Page 210

    D.PARAMTER LIST APPENDIX B-70255EN/01- 204 -D.1 PARAMETERS FOR ENABLING/DISABLING VARIOUSFUNCTIONS#7#6#5#4#3#2#1#015000FLTCLBBMOAGALGCLPCData type:BitLPCPower control function0:Invalid (stand...

  • Page 211

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 205 -LHC0: Does not control the oscillator with external signals (standard).1: Controls the oscillator with external signals.In the automatic operation ...

  • Page 212

    D.PARAMTER LIST APPENDIX B-70255EN/01- 206 -SPB0:Outputs a beam in skip operation.1:Outputs no beam in skip operation.EDG0:Turns the beam off when switching the assist gas during edgemachinin...

  • Page 213

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 207 -TRM0:Enables the zero-point, start-point and end-point soft keys for thetrace setting screen.1:Disables the zero-point, start-point and end-point s...

  • Page 214

    D.PARAMTER LIST APPENDIX B-70255EN/01- 208 -#7#6#5#4#3#2#1#015008RMPEGEDCWSOCTALGPCMSTData type:BitMST0:When a reference displacement amount is specified with a plussign (+) in the trace comm...

  • Page 215

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 209 -#7#6#5#4#3#2#1#015009TEMBCGBEMAFZBS2BS1AS2AS1Data type:BitAS1,AS2,BS1,BS2Parameters for the laser gas mixing function.This function stores and moni...

  • Page 216

    D.PARAMTER LIST APPENDIX B-70255EN/01- 210 -#7#6#5#4#3#2#1#015011OPVCSCLVEEDSData type:BitEDS0:Uses the conventional conditions as the cutting conditions duringexecution of edge machining or ...

  • Page 217

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 211 -D.2 PARAMETERS FOR DISCHARGE TUBE SELECTION#7#6#5#4#3#2#1#015025PS8PS7PS6PS5PS4PS3PS2PS115026PS16PS15PS14PS13PS12PS11PS10PS9Data type:BitPS1 to PS1...

  • Page 218

    D.PARAMTER LIST APPENDIX B-70255EN/01- 212 -D.3 PARAMETERS FOR CONTOURING CONDITIONS15040Power output settingData type:WordUnit of data:WRange of data:0 to 700015041Pulse frequency settingDat...

  • Page 219

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 213 -D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS15050Edge detection angleData type:WordUnit of data:degRange of data:0 to 180A corner is assumed to be ...

  • Page 220

    D.PARAMTER LIST APPENDIX B-70255EN/01- 214 -15056Type of piercing assist gasData type:WordUnit of data:Range of data:0 to 7Set a type of assist gas to be used for piercing.15057Return distanc...

  • Page 221

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 215 -D.5 PARAMETERS FOR PIERCING CONDITIONS15080Piercing powerData type:WordUnit of data:WRange of data:0 to 7000Set the piercing power.15081Initial pie...

  • Page 222

    D.PARAMTER LIST APPENDIX B-70255EN/01- 216 -15086Number of piercing stepsData type:WordUnit of data:Range of data:0 to 32767Set the number of piercing steps15087Piercing end timeData type:Two...

  • Page 223

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 217 -D.6 PARAMETERS FOR POWER CONTROL#7#6#5#4#3#2#1#015089LP8LP7LP6LP5LP4LPZLPYLPXData type:BitLP*0:Does not use the *-axis for speed calculation for th...

  • Page 224

    D.PARAMTER LIST APPENDIX B-70255EN/01- 218 -15095Allowable variation in power control speedData type:ByteUnit of data:mm/min (specified increment for B8F1-08 or earlier) or %Range of data:0 t...

  • Page 225

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 219 -15098Parameter for calculating the displacement of the frequency(frequency at a speed of F = 0)Data type:WordUnit of data:HzRange of data:5 to 2000...

  • Page 226

    D.PARAMTER LIST APPENDIX B-70255EN/01- 220 -D.7 PARAMETERS FOR ASSIST GAS PRESSURE AND TIMESETTING15100Selection of assist gasData type:WordUnit of data:Range of data:0 to 7Select a type of a...

  • Page 227

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 221 -15114Pre-flow pressure 115115Pre-flow pressure 215116Pre-flow pressure 3Data type:WordUnit of data:0.01Mpa or 0.1 kg/cm2Range of data:0 to 255Set t...

  • Page 228

    D.PARAMTER LIST APPENDIX B-70255EN/01- 222 -15136Assist gas pressureData type:WordUnit of data:0.01Mpa or 0.1 kg/cm2Range of data:0 to 255Set a desired assist gas pressure.15137Assist gas pre...

  • Page 229

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 223 -D.8 PARAMETERS FOR LASER MAINTENANCE TIMINGINDICATION FUNCTIONS15150Laser RUN ON timeData type:Two-wordUnit of data:0.1hourRange of data:0 to 99999...

  • Page 230

    D.PARAMTER LIST APPENDIX B-70255EN/01- 224 -#7#6#5#4#3#2#1#015160MDSMNTData type:BitMNT0:Does not display the laser maintenance screen.1:Displays the laser maintenance screen.When the value i...

  • Page 231

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 225 -D.9 PARAMETERS FOR THE OSCILLATOR15200Power used for power compensation factor determination when half of thedischarge tubes are usedData type:Word...

  • Page 232

    D.PARAMTER LIST APPENDIX B-70255EN/01- 226 -15206Time constant for the power sensor input filterData type:WordUnit of data:msecRange of data:8 to 32767This time constant is used when the lase...

  • Page 233

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 227 -15212Maximum specifiable power when the duty ratio is not clampedData type:WordUnit of data:WRange of data:0 to 32767If PRM No. 15213 does not clam...

  • Page 234

    D.PARAMTER LIST APPENDIX B-70255EN/01- 228 -15217Beam stop delay timeData type:WordUnit of data:msecRange of data:0 to 32767Set the time between the in-position check and stop of the beam.152...

  • Page 235

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 229 -D.10 PARAMETERS FOR DISCHARGE15220Maximum bias command at discharge startData type:WordUnit of data:mVRange of data:0 to 32767Set the maximum bias ...

  • Page 236

    D.PARAMTER LIST APPENDIX B-70255EN/01- 230 -D.11 PARAMETERS FOR GAS CONTROL (1)15240Negative pressure in exhaust completionData type:WordUnit of data:(1=13Pa)Range This pressure is used for e...

  • Page 237

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 231 -15246Pressure control integration gainData type:WordUnit of data:Range of data:0 to 32767This is feedback integration gain for gas pressure control...

  • Page 238

    D.PARAMTER LIST APPENDIX B-70255EN/01- 232 -15257Number of abnormal vibrations detectedData type:WordUnit of data:Range of data:0 to 32767If the number of abnormal vibrations detected exceeds...

  • Page 239

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 233 -D.12 PARAMETERS FOR HIGHLY REFLECTIVE MATERIALALARMS15265Maximum allowable power increaseData type:WordUnit of data:WRange of data:0 to 32767If the...

  • Page 240

    D.PARAMTER LIST APPENDIX B-70255EN/01- 234 -D.13 PARAMETERS FOR LASER POWER/VOLTAGE DROP15270Discharge tube voltage in normal operationData type:WordUnit of data:VRange of data:0 to 32767Set ...

  • Page 241

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 235 -D.14 PARAMETERS FOR POWER TABLE SETTING15280Table interval when half of the discharge tubes are used15281Table interval when all discharge tubes ar...

  • Page 242

    D.PARAMTER LIST APPENDIX B-70255EN/01- 236 -15300Power command 0 when all discharge tubes are used15301Power command 1 when all discharge tubes are used15302Power command 2 when all discharge...

  • Page 243

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 237 -D.15 AUTOMATIC AGING FUNCTION15320Command power for power compensation coefficient calculationData type:WordUnit of data:WRange of data:0 to 7000...

  • Page 244

    D.PARAMTER LIST APPENDIX B-70255EN/01- 238 -15328Pulse duty cycle command for agingData type:WordUnit of data:%Range of data:0 to 10015329Power command time for agingData type:WordUnit of dat...

  • Page 245

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 239 -15336Time data 2 when the HV is turned off after LSTRData type:Two-wordUnit of data:MonthRange of data:1 to 12 (0 to 99999999) (Automatically set b...

  • Page 246

    D.PARAMTER LIST APPENDIX B-70255EN/01- 240 -D.16 POWER CONTROL (2)15450Allowable variation in power control speedData type:WordUnit of data:mm/minRange of data:0 to 32767Standard setting:4Set...

  • Page 247

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 241 -D.17 LASER GAS MIXER FUNCTION15710Wait time for checking the remaining amount in the gas cylinderData type:WordUnit of data:secRange of data:0 to 3...

  • Page 248

    D.PARAMTER LIST APPENDIX B-70255EN/01- 242 -15715Vacuum criteria gas pressureData type:WordUnit of data:(1=13Pa)Range of data:0 to 32767Standard setting:This value is used for determining the...

  • Page 249

    B-70255EN/01 APPENDIX D.PARAMTER LIST- 243 -D.18 PARAMETERS FOR GAS PRESSURE CONTROL (2)#7#6#5#4#3#2#1#015800TPCData type:BitTPCThe control function of driving the turbo blower with a constan...

  • Page 250

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01- 244 -E CONTROL SEQUENCES IN LASEROSCILLATOR

  • Page 251

    B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 245 -E.1 OUTLINE OF LASER OSCILLATION SEQUENCESSEQ 0PURGE = 0LRDY = 0PTLP = 0LSTR = 0SEQ 10PURGE = 1LRDY = 0PTLP = 0LSTR = 0SEQ 20PURGE = 0LRDY = 1PTLP = 0LSTR = 0SEQ 30PURGE = 0LRDY = 0PTLP = 1LSTR ...

  • Page 252

    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01- 246 -Usually when this signal is on, purge completion lamp on operationalboard is lit.[SQ20] READY OF DISCHARGING stateWhen oscillator start switch is turned on, evacuation is carried on andthen gas ...

  • Page 253

    B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 247 -E.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCESIntra-tube gas pressure control is performed in the following steps asshown in the figure.PRM15205PRM15256SQ18SQ20SQ26SQ27SQ28SQ30 SQ23 SQ20SQ12SQ16S...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01- 248 -[SQ16, 17, 18]Setting the laser start switch to ON starts evacuation, which continuesuntil the pressure designated by PRM No. 15240 is reached. Afterevacuation up to the value set in PRM No. 152...

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    B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 249 -E.3 TUBE VOLTAGE CONTROL SEQUENCESThe control of tube voltage is done simultaneously with that of gaspressure as shown in Fig. E.3 in the following sequences.H.V.ONLSTR(No compensation)LSTR(In c...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01- 250 -[SQ291]When HV is turned on, high voltage is applied to discharge tubes andvoltage control begins. Here command is increased in ramp mode upto the value of PRM 15220 (maximum bias command at dis...

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    B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 251 -E.4 OSCILLATION SEQUENCES FLOW CHARTPOWER ON SEQUENCEPURGE = ONOF1 = OFFRUN = ONAlarm 1Monitor treatmentstartPCR = OFFOF1 =ONPURGE = OFFWAIT = ONCLON = ONWait for 3 secondsRPA = ONControl valve ...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01- 252 -VEN = ONPCL = OFFWait for 5 secondsGRDY = ONGRDY = OFFControl valve full closeIntra-tube pressure<PRM.15204Timer >PRM.15259ALM.4080VEN = OFFRBA = ONGRDY = ONTimer count12NoYesYesNoOFI = ON...

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    B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 253 -Gas pressure control200VAC to Laserpower supply unitPRM.15240 ®PRM.15241Wait for 120 secondsPRM.15241+20>Intra-tube pressure>PRM.15241-20WAIT = OFFLRDY = ONHV = ONLRDY = OFFPSS1 to 8 = Se...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01- 254 -HV = ON :When HV is turned on, you proceed to the sequence below.LRDY = OFF :When HV is turned on, LRDY is turned off.PSS1-8 = SET :This is to select power units and usually is sent to the units...

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    B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR- 255 -When discharge starts, the tube voltage decreases, and a certainvoltage is maintained.The BIAS COMMAND after reaching peak is retained for the timedesignated by PRM15222 (discharge start waiting...

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    E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01- 256 -calibration, laser enters immediately oscillation preparationcompletion (LSTR) state.Check command :When compensation is to be performed, the value set in PRM 15200or PRM 15201 (output at compen...

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    B-70255EN/01 APPENDIX F.REFIXING AND REPLACING GAS TUBE- 257 -F REFIXING AND REPLACING GAS TUBEReplacing both of polyethylene and copper tubes is the same. Takecare only for the combination between tube materials and ferrulematerials.Polyeth...

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    F.REFIXING AND REPLACING GAS TUBE APPENDIX B-70255EN/01- 258 -REPLACING TUBE(1) Cut the end face of the tube at right angles, and install a nut,back ferrule, and front ferrule as shown in Fig. F. Pay attentionto the orientation of the back ...

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    B-70255EN/01 APPENDIX G.REFIXING AND REPLACING WATER TUBE- 259 -G REFIXING AND REPLACING WATERTUBETwo types of joints for water piping are available for use in theoscillator: one is made of brass, and the other is made of stainlesssteel. However, t...

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    G.REFIXING AND REPLACING WATER TUBE APPENDIX B-70255EN/01- 260 -REPLACING TUBE(1) Cut the end face of the tube at right angles, and install a nut andsleeve as shown in Fig. G. Pay attention to the orientation of thesleeve.(2) Install the tube by in...

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    B-70255EN/01 APPENDIX H.GLOSSARY- 261 -H GLOSSARYNameMeaning<A>Access panelThat protective component of a housing or enclosure which, when removed or shifted,can cause expos...

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    H.GLOSSARY APPENDIX B-70255EN/01- 262 -NameMeaningMaximum outputMaximum radiation power or maximum radiation energy per pulse that a laser productoutputs in all directions where t...

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    B-70255EN/01 INDEXi - 1INDEXAAAAA/D CONVETER-3 ........................................... 79AD converter 1 is not normal...............

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    INDEX B-70255EN/01i - 2BLOWER OIL SHORTAGE............................. 82Burn pattern Collection and Beam ModeEvaluation ......................

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    B-70255EN/01 INDEXi - 3Laser Gas .......................................................... 46LASER GAS MIXER FUNCTION ................. 241L...

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    INDEX B-70255EN/01i - 4PERIODIC MAINTENANCE .......................... 50Phase Relation .................................................. 90...

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    B-70255EN/01 INDEXi - 5Too much incident laser beam back to theresonator........................................................ 66TRACE AXIS...

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    Revision RecordFANUC LASER-MODEL C1000iA MAINTENANCE MANUAL (B-70255EN)01Dec., 2000EditionDateContentsEditionDateContents

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    · No part of this manual may bereproduced in any form.· All specifications and designsare subject to change withoutnotice.

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